851results about "Force measurement using piezo-resistive materials" patented technology

The invention relates to the field of pressure sensors, in particular to a pressure sensor and a processing method, and a chip comprises a silicon substrate, a silicon dioxide dielectric layer, a device layer, a metal electrode and packaging glass. The device layer comprises a silicon carbide single crystal device layer and a silicon device layer; the silicon carbide single crystal device layer is arranged on the silicon device layer; the silicon device layer, the silicon dioxide dielectric layer and the silicon substrate are connected in sequence; the device layer is etched to form a sensitive resistor device layer, an annular sealing region and a micro-channel; the sensitive resistance device layer is isolated from the annular sealing area through the micro-channel; the device layer, the silicon dioxide dielectric layer and the silicon substrate are etched to form a cross beam etching area; the silicon substrate is etched to form a silicon pressure cavity and a beam film; the metal electrode is arranged on the top of the device layer; and the packaging glass anode is bonded at the top of the device layer or the bottom of the silicon substrate so as to solve the problems of low high temperature resistance and low sensitivity of the MEMS pressure sensor.

The invention discloses an ultrasonic enhanced tactile sensor system, a sensor and a sensing method. The tactile sensor system comprises a multi-mode sensing unit and a processing unit. The multi-mode sensing unit integrates an ultrasonic module and a visual tactile sensing module, ultrasonic acoustic impedance matching and optical imaging transmission are achieved through an acousto-optic matching structure, and ultrasonic echo signals and tactile deformation images can be synchronously collected. In the processing unit, an event triggering module detects a contact event based on a tactile image and generates a switching signal, and a self-adaptive processing module dynamically controls an ultrasonic mode, distance measurement during non-contact, and switching to object internal imaging or material property identification during contact according to the switching signal. And the three-level fusion processing module outputs a multi-modal sensing result through signal-level synchronous acquisition, feature-level cross-modal fusion and decision-level task switching. According to the system, multi-dimensional perception of proximity sense, surface texture and deep information is realized, and the pre-judgment and accurate operation capability of the robot in a complex scene is improved.

The invention belongs to the technical field of flexible sensing, and discloses a flexible piezoresistive sensing array based on a triangular truss grid structure weft knitting spacer fabric, which is of a five-layer composite structure integrally woven and formed through a weft knitting process. The first packaging layer, the first electrode layer, the spacer fabric spacer layer, the second electrode layer and the second packaging layer are sequentially arranged from top to bottom; the first packaging layer and the second packaging layer are formed by weaving insulating yarns and are respectively an upper surface layer and a lower surface layer of the spacer fabric; the spacer fabric spacer layer is of a three-dimensional elastic supporting structure and comprises a plurality of first spacer layer transverse rows and a plurality of second spacer layer transverse rows which are formed by alternately weaving the upper face layer and the lower face layer of the spacer fabric through tucking. The first spacing layer transverse rows and the second spacing layer transverse rows are arranged in the spacing fabric in a staggered mode and are sequentially connected end to end to form a transverse row crossing cross-linked type triangular truss grid structure. The flexible piezoresistive sensing array provided by the invention has high structural integrity and long-term stability.

The invention discloses a PDMS / MWCNTs flexible resistive pressure sensor with a double-layer corrugated structure and a preparation method of the PDMS / MWCNTs flexible resistive pressure sensor, and belongs to the technical field of flexible piezoresistive sensors. The PDMS / MWCNTs flexible resistive pressure sensor with the double-layer corrugated structure sequentially comprises a silica gel packaging layer, a copper foil, a PDMS / MWCNTs conductive thin film with a high-amplitude corrugated structure, a PDMS / MWCNTs conductive thin film with a low-amplitude corrugated structure, a copper foil and a silica gel packaging layer from top to bottom, the cross section of the PDMS / MWCNTs conductive thin film with the high-amplitude corrugated structure and the cross section of the PDMS / MWCNTs conductive thin film with the low-amplitude corrugated structure are both in a wave shape, and the wave length of the wave shape of the PDMS / MWCNTs conductive thin film with the high-amplitude corrugated structure is the same as that of the wave shape of the PDMS / MWCNTs conductive thin film with the low-amplitude corrugated structure. And the wave height of the wave shape of the PDMS / MWCNTs conductive thin film with the high-amplitude corrugated structure is higher than that of the wave shape of the PDMS / MWCNTs conductive thin film with the low-amplitude corrugated structure. The flexible resistance type pressure sensor realizes high linearity and good sensitivity in a wide pressure range, has excellent mechanical stability, rapid responsiveness and good durability, and has great potential in the fields of human wearable health monitoring, motion detection and the like.

The invention provides a warp-knitted interval sensing fabric and a preparation method and application thereof, a pressure sensor, a pressure sensing foot pad and a plantar pressure value acquisition system, and belongs to the technical field of flexible sensors. The warp-knitted interval sensing fabric comprises an electrode layer, a monofilament interval layer and a sensing layer which are sequentially laminated; the warp-knitted interval sensing fabric is of an integrally formed structure; the electrode layer is provided with a full-penetrating double-comb structure and comprises a plurality of conductive strips which are arranged in parallel, and an insulating strip is arranged between every two adjacent conductive strips; the monofilament spacing layer is formed by mutually connecting fiber coils, and the electrode layer and the sensing layer are connected through the fiber coils; the sensing layer has a full-penetration double-comb weave and is obtained by weaving sensing yarns. According to the warp-knitted spacer sensing fabric pressure sensor, the electrode layer, the monofilament spacer layer and the sensing layer are integrally formed, the process is simple, the cost is low, and large-scale production and practical application are facilitated.

The present application belongs to the technical field of flexible sensing, and discloses a flexible piezoresistive sensing array based on a triangular truss grid structure weft-knitted spacer fabric, which is a five-layer composite structure integrally formed through a weft-knitting process, and sequentially comprises a first encapsulation layer, a first electrode layer, a spacer fabric spacing layer, a second electrode layer and a second encapsulation layer from top to bottom; the first encapsulation layer and the second encapsulation layer are knitted from insulating yarns and serve as upper and lower layers of the spacer fabric respectively; the spacer fabric spacing layer is a three-dimensional elastic support structure, and comprises a plurality of first spacer layer courses and a plurality of second spacer layer courses alternately knitted through tuck stitches on the upper and lower layers of the spacer fabric; the first spacer layer courses and the second spacer layer courses are staggered with each other in the spacer fabric and are sequentially connected at the head and tail to form a triangular truss grid structure in a cross-course crosslinking mode. The flexible piezoresistive sensing array of the present application has high structural integrity and long-term stability.

A pressure distribution monitoring flexible planar mat system with a wide pressure measuring range. The flexible planar mat includes a first electrode layer and a first composite piezoelectric-dielectric layer with a second composite piezoelectric-dielectric layer facing the first layer and a second electrode layer. Each of the first and second composite piezoelectric-dielectric layers includes an elastomeric matrix with conductive and dielectric particles embedded therein. The relative size of the conductive particles and the dielectric particles creates a micro-rough interface between these layers and the electrode layers resulting in a range of contact areas, permitting detection between 0 and 3000 kPa. The flexible planar mat system further includes a data collector that collects a pressure signal from the mat. A pressure distribution data processor receives and calculates data from the data collector and creates a two-dimensional pressure map from the flexible planar mat.

The invention provides a data error compensation method for a biological net port flowmeter, and belongs to the technical field of ocean detection. A multi-dimensional sensor is arranged at a biological net port to collect fluid parameters, a deep learning model is used for recognizing multi-phase flow characteristics, and a corresponding compensation strategy is selected; based on a correlation analysis algorithm, compensation processing frequency is dynamically adjusted to achieve self-adaptive balance of precision and efficiency, the flow state change degree is monitored through the Euclidean distance, compensation parameters are hierarchically adjusted to ensure system stability, a parallel processing architecture is adopted to execute coarse compensation and fine compensation algorithms at the same time, and results are fused according to weights. Finally, dynamic and accurate compensation of the measurement error of the biological net port flowmeter in the complex multiphase flow environment is achieved, and the technical problem that in the prior art, the biological net port flowmeter cannot achieve dynamic and accurate error compensation in the complex multiphase flow environment is solved.

A composite structure for a pressure sensor, a pressure sensor, a method of pressure sensing using the pressure sensor, and a method of fabricating a composite structure for a pressure sensor. The method of fabricating a composite structure for a pressure sensor comprises the steps of forming an array of microstructures made from an elastomeric material; and forming a flexible conductive coating on the array of microstructures such that a surface morphology of microstructures is substantially maintained for the coated array of the microstructures; wherein the conductive coating exhibits a Young's modulus that is higher than that of the elastomeric material.

The invention discloses a sensitivity-amplified strain gauge and a sensor elastomer stress detection method, and belongs to the technical field of sensors, the sensitivity-amplified strain gauge comprises a sensitive part, and the outer side of the sensitive part is connected with a rigid support; the sensitive part comprises a substrate, a piezoresistor and an electrode assembly which are sequentially arranged from bottom to top, the piezoresistor comprises four sensitive grids, the two ends of each sensitive grid are connected with pins, each pin is shared by two adjacent sensitive grids, and the four sensitive grids have the same resistance value and are symmetrically arranged. Sensitivity can be further improved, miniaturization is facilitated, and measurement of local small strain is achieved.

The invention relates to the technical field of sensors, and provides a flexible pressure sensor and a pressure-sensitive fabric, the flexible pressure sensor comprises the pressure-sensitive fabric, the pressure-sensitive fabric is provided with a pressure detection position for detecting a pressure signal, and the pressure-sensitive fabric is formed by weaving a composite conductive filament and a first non-conductive filament, the composite conductive wire is obtained by doubling a conductive wire and a second non-conductive wire, and the conductive wire is prepared from a conductive material and a base material; the processor is connected with the pressure detection positions and used for processing the pressure signals of the pressure detection positions and outputting pressure distribution information on the pressure-sensitive fabric according to the pressure signals corresponding to the pressure detection positions. According to the pressure sensor provided by the embodiment of the invention, the pressure-sensitive fabric has the characteristics of bending resistance, impact resistance and electric conductivity which is not easily influenced by the environment, and the consistency of the pressure-sensitive fabric is improved, so that the precision of the pressure sensor in various environments is improved.

The invention discloses a preparation method of flexible hydrogel and application of the flexible hydrogel in a pressure sensor, and belongs to the field of flexible sensors. According to the hydrogel disclosed by the invention, polyvinyl alcohol and regenerated cellulose are used as a hydrogel skeleton, and carboxylated carbon black is doped as a conducting medium. The preparation method comprises the following steps: carrying out carbonization treatment on microcrystalline cellulose in a tubular furnace at high temperature to obtain high-conductivity carbon black; then, functional groups are introduced into the carbon black through modification treatment; the method comprises the following steps: dissolving paper pulp in N-methylmorpholine-N-oxide (NMMO), and carrying out cooling, solidification, dialysis and other process treatments to obtain regenerated cellulose; the flexible conductive hydrogel is obtained by adding conductive carbon black and regenerated cellulose into a PVA solution with a certain concentration and introducing sodium tetraborate at the same time. The regenerated cellulose in the hydrogel is rich in a large number of hydrogen bonds, and the flexibility and the self-healing performance of the hydrogel are remarkably improved through the interaction among the hydrogen bonds. The method disclosed by the invention is simple to operate, the prepared hydrogel has better elasticity, self-healing property and conductivity, and the practical application of the hydrogel in the field of flexible sensors is widened.

The invention relates to the technical field of flexible sensors, in particular to a gradient hierarchical porous structure flexible piezoresistive sensor and a preparation method thereof. The sensor is of a laminated structure and comprises an upper flexible packaging protection layer, a lower flexible packaging protection layer, a conductive fabric electrode and a middle piezoresistive sensing layer, and a limiting frame is arranged on the periphery of the sensor. The sensing layer is prepared by adopting a 3D printing ink direct writing technology, and adopted printing slurry takes silicone rubber as a matrix and is uniformly mixed with expanded conductive microspheres and conductive filler. The printing wires are stacked in order to form a macroscopic gradient porous network structure; after the expanded microspheres are subjected to in-situ foaming, micro closed pores are formed in the material, and a rough microstructure is constructed on the surface of the wire material, so that hierarchical multi-scale regulation and control of a conductive network are realized cooperatively, contact sites are increased remarkably, and the sensitivity of the sensor is further improved effectively. The flexible piezoresistive sensor prepared by the invention has the advantages of high sensitivity, wide pressure detection range and high linearity, and has the commercial values of simple preparation process, high repeatability, lower cost and the like.

The invention discloses a piezoresistive pressure sensor chip and a preparation method thereof, and belongs to the technical field of micro-electromechanical systems. The piezoresistive pressure sensor chip comprises a substrate, the back of the substrate is etched with a cavity, the center of the cavity is provided with a cross-shaped mass block, and four hollow islands and four peninsula are arranged along the linear direction of the cross-shaped mass block; a plurality of groups of piezoresistor strips are arranged on the front surface of the substrate, each group of piezoresistor strips comprises a first piezoresistor strip component arranged close to the center and a second piezoresistor strip component arranged close to the side wall of the cavity, and the first piezoresistor strip component forms an internal Wheatstone bridge through a first metal lead group; the second piezoresistor strip component forms an external Wheatstone bridge through a second metal lead group; the glass is arranged on the substrate back. The piezoresistive pressure sensor chip can measure the pressure of a micro-pressure section, can bear high overload equivalent to a plurality of times of the full scale, and has the advantages of high sensitivity, good linearity, high precision, good dynamic performance and the like.

The invention discloses a cable wrapping machine with a wrapping tape gap adjustment function and a cable thereof.The cable wrapping machine comprises a wrapping machine body, a rotating disc is rotationally installed on one side of the wrapping machine body, a pay-off device and an adjusting mechanism are fixedly installed on one side of the rotating disc, and the adjusting mechanism comprises a supporting bottom plate arranged on one side of the rotating disc; a detection assembly and an abutting assembly are arranged on one side of the supporting bottom plate, the detection assembly can detect pressure on the two sides of the wrapping tape, and the abutting assembly can adjust the wrapping tape when the wrapping tape inclines. According to the technical scheme of the invention, through the arrangement of the adjusting mechanism, when a wrapping gap is generated between a wrapping tape and a cable, the detection assembly can rapidly detect the generation of the wrapping gap through the difference between the pressures applied to the two ends of the tension roller, thereby driving the abutting assembly to operate to adjust the gap of the wrapping tape. Therefore, the working efficiency of the wrapping machine and the wrapping effect of the cable are improved.

The invention discloses a monitoring alarm system and method based on multi-modal fusion and regional perception, and the system comprises a multi-source perception module which collects the related data of a patient through a plurality of sensors; the data processing center is used for judging whether an abnormal state occurs or not based on the related data acquired by the multi-source sensing module, and triggering an alarm when the abnormal state occurs; and the notification terminal receives the alarm related information and executes alarm linkage measures. Wherein the data processing center realizes multi-modal data binding of the same patient by using the positioning identification module, so that the position of the patient is accurately positioned; the layered configuration module is used for setting alarm rules according to different patients and different areas. Multiple sensors are adopted for monitoring, the identity and state of a patient are accurately recognized through cross validation of multi-modal data, and the false alarm rate is reduced; a regional division monitoring strategy is adopted, excessive monitoring is avoided on the premise that the monitoring effect is ensured, and resource waste is avoided.

The invention relates to the technical field of underground energy storage, in particular to a gas storage cavern grouting confining pressure real-time monitoring system and method based on the piezoresistive effect, and the system comprises a grouting reinforcement module which is used for injecting grout into a target gas storage cavern and laying a lining to form a grouting reinforcement area; the resistance detection module is used for detecting resistivity distribution characteristics of the grouting reinforcement area in real time; the confining pressure monitoring module is used for analyzing the resistivity distribution characteristics based on a preset piezoresistive modified slurry resistivity-surrounding rock stress relation model to obtain the actual stress state of surrounding rock; and the early warning regulation and control module is used for triggering an early warning signal based on the actual stress state of the surrounding rock and releasing gas. According to the invention, continuous and non-contact measurement of the surrounding rock stress state of the gas storage cavern can be realized.

The invention relates to a piezoresistive sensor. In particular, the present disclosure relates to piezoresistive sensor elements and piezoresistive pressure sensors that detect mechanical stresses acting on a membrane. The piezoresistive sensor element (100) comprises a substrate which, in operation, is subjected to a mechanical stress in response to a measured variable to be measured, a first array of at least four sensitive varistors (114), where the sensitive varistors (114) are arranged on the substrate and connected to form a first Wheatstone bridge for generating a first bridge signal, and a second array of at least four sensitive varistors (114) arranged on the substrate and connected to form a second Wheatstone bridge for generating a second bridge signal. A second array of at least four insensitive varistors (122), where the insensitive varistors (122) are connected to form a second Wheatstone bridge for generating a second bridge signal, where the stress sensitivity of the sensitive varistors (114) is higher than the stress sensitivity of the insensitive varistors (122), and wherein an output signal of the piezoresistive sensor element (100) is generated based on a difference of the first bridge signal and the second bridge signal.

The present invention discloses a fully knitted three-dimensional spacer piezoresistive sensor and its knitting method. The sensor includes: a first conductive yarn layer and a second conductive yarn layer arranged at intervals; a third conductive yarn layer knitted between the first conductive yarn layer and the second conductive yarn layer; the first conductive yarn layer and the second conductive yarn layer are both in contact with the third conductive yarn layer and electrically conduct; the resistances of the first conductive yarn layer and the second conductive yarn layer are both smaller than the resistance of the third conductive yarn layer. In the natural state, the three conductive yarn layers are in series, and the resistance of the sensor is mainly based on the resistance of the third conductive yarn layer. When the spacing is reduced or partial direct contact occurs, the first conductive yarn layer and the second conductive yarn layer are in contact and electrically conduct, and the three conductive yarn layers are connected in a mixed series and parallel manner, and the resistance of the sensor will decrease. The smaller the spacing or the larger the contact area, the greater the decrease. The sensor of the present application has high sensitivity and a large detection range, and realizes the accurate measurement of the resistance of the sensor.

A force sensor comprising a contact arrangement for transmitting a contact force to a force sensor assembly. The force sensor assembly comprising a first sensor sensing, and producing an output from, a normal contact force component of the contact force; and a body moveable on transmission of the contact force to the force sensor assembly; and a second sensor for sensing, and producing an output from, a relative displacement of the body relative to the second sensor, the a tri-axis contact force being determined from the relative displacement.

The invention relates to the technical field of ice engineering measurement, and discloses an underwater special-shaped structure surface floating icebreaking load spatial and temporal distribution test system, which comprises a flexible high-density distributed pressure sensor array, a high-speed synchronous data acquisition module, an underwater data transmission system and a shore data processing platform, the flexible high-density distributed pressure sensor array is attached to the surface of an underwater target special-shaped structure; the high-speed synchronous data acquisition module is mounted in a sealed cabin in the special-shaped structure of the underwater target, is close to the flexible high-density distributed pressure sensor array and is used for digitalization; the underwater data transmission system is used for communication between the high-speed synchronous data acquisition module and the ashore data processing platform; and the ashore data processing platform is used for reconstructing and visually displaying the pressure field of the special-shaped structure of the underwater target. According to the method, more comprehensive and accurate ice-structure interaction load information can be obtained, and fine structure design is served.

The invention relates to a low-noise high-precision pressure measuring circuit which comprises a bridge type sensor, an alternating-current excitation signal source, a phase-sensitive detector, a low-pass filter, a reference signal source and a signal conditioning amplifier. The alternating current excitation signal source modulates a differential voltage signal generated by the bridge type sensor to a high-frequency alternating current excitation signal generated by the alternating current excitation signal source to obtain a high-frequency pressure signal; the high-frequency pressure signal is amplified by the signal conditioning amplifier to form a modulated signal; the phase-sensitive detector performs frequency mixing on the modulated signal and a reference signal generated by a reference signal source to obtain a frequency mixing signal; the frequency mixing signal is filtered by a low-pass filter to form a direct-current voltage signal for pressure measurement; the reference signal generated by the reference signal source and the high-frequency AC excitation signal generated by the AC excitation signal source have the same frequency. According to the circuit, signals are modulated to a high-frequency area with low noise energy to be processed by adopting alternating-current excitation and coherent detection technologies, the signals and noise are effectively separated, and extremely high measurement resolution and precision are achieved.

The invention relates to a multi-mode cooperative flexible tactile buffer sensor for drone inhabitation, and belongs to the technical field of tactile sensors, the sensor comprises a support, a Hall sensor, an elastic layer, a first magnetic layer, a piezoelectric layer and a protective cover, the top end of the first magnetic layer is bonded to the bottom end of the elastic layer, when an inhabiting drone inhabits and bears force, the piezoelectric layer is attached to the bottom end of the elastic layer, and the piezoelectric layer is attached to the bottom end of the first magnetic layer; the shape of the elastic layer is rapidly changed, the distance between the Hall sensor and the first magnetic layer is adjusted, correspondingly, the intensity of the magnetic field sensed by the Hall sensor also changes, and the inhabiting stress of the inhabiting unmanned aerial vehicle can be calculated according to the change of the magnetic field intensity; then the top end of the piezoelectric layer is bonded to the bottom end of the first magnetic layer, when the inhabiting unmanned aerial vehicle is stressed in motion, the piezoelectric layer generates elastic deformation and generates current, and the motion stress of the inhabiting unmanned aerial vehicle is calculated, so that various states of inhabiting, landing, collision, sliding, falling, shaking and the like of the inhabiting unmanned aerial vehicle are detected at the same time; and closed-loop feedback is provided for self-adaptive inhabitation of the inhabiting unmanned aerial vehicle.

The invention discloses a high-temperature strain film sensor for detecting thermal stress of a small square billet crystallizer, and relates to the technical field of sensors, the high-temperature strain film sensor comprises a composite system formed by fiber structures, the fiber structures are interwoven and interspersed, and the composite system sequentially comprises a substrate layer, a high-temperature insulating layer, a piezoelectric film layer and a multifunctional composite layer from bottom to top; a channel is arranged in the piezoelectric film layer, the channel penetrates to the high-temperature insulating layer and the multifunctional composite layer, and the channel is connected with external equipment through a lead electrode. The multifunctional composite layer comprises a thermocouple array and a sensitive grid unit which are distributed in parallel and interwoven, and the thermocouple array is used for superposing the thermoelectric effect and increasing the output situation; the sensitive grid unit is used for converting strain of the crystallizer steel pipe into electric signals through sensitive grid deformation and outputting the electric signals, and real-time measurement of stress and strain on the surface or in the crystallizer is achieved. The sensor designed by the invention is good in high temperature resistance, good in structural stability, long in service life and high in measurement precision.

The present invention discloses a gradient multi-layer flexible piezoresistive sensor and a preparation method thereof, which includes coplanar metal electrodes and a composite material sensitive layer disposed thereon. The composite material sensitive layer includes multiple layers of composite material films stacked sequentially from top to bottom. The material of the composite material film is carbon nanotube polydimethylsiloxane, and the proportion of carbon nanotubes in each composite material film decreases sequentially from top to bottom. Each of the composite material films between the coplanar metal electrodes and the uppermost composite material film includes two spaced composite material sheets to form an arch structure. Two electrodes are formed on the coplanar metal electrodes, and the two composite material sheets of the lowermost composite material film are respectively located on the two electrodes of the coplanar metal electrodes. The multi-layer composite material film has a specific gravity gradient, and simultaneously realizes gradient changes in resistance, modulus and roughness. The piezoresistive sensor not only has high sensitivity, a wide response range and good linearity, but also has the characteristics of simple structure and easy preparation.

A two-dimensional (2D) pressure sensor includes a substrate, a pressure deformation layer on the substrate and configured to deform due to external pressure applied by a workpiece, a magnetic bump on the pressure deformation layer and configured to move due to the external pressure applied by the workpiece, a proximity sensor in the pressure deformation layer and configured to detect at least one of movement of the workpiece and movement the magnetic bump, and a tactile sensor in the pressure deformation layer and configured to detect deformation of the pressure deformation layer.

A piezoresistive sensor element is provided that detects mechanical stress acting on a membrane. The piezoresistive sensor element includes a substrate, which in operation is subjected to mechanical stress in response to a measurand to be measured, a first array of at least four sensitive piezoresistors, wherein the sensitive piezoresistors are arranged on the substrate and are connected to form a first Wheatstone bridge for generating a first bridge signal, a second array of at least four insensitive piezoresistors, wherein the insensitive piezoresistors are connected to form a second Wheatstone bridge for generating a second bridge signal, wherein the sensitive piezoresistors have a stress sensitivity which is higher than the stress sensitivity of the insensitive piezoresistors, and wherein an output signal of the piezoresistive sensor element is generated based on a difference of the first and second bridge signals.

A sensor chip is provided. The sensor chip includes a first base substrate; a piezoresistor and a resistor lead on the first base substrate; a second base substrate on a side of the piezoresistor and the resistor lead away from the first base substrate; a metal wire bond extending through the second base substrate and connected to the resistor lead; a redistribution layer on a side of the second base substrate away from the first base substrate; and a pressure reference chamber between the first base substrate and the second base substrate. The first base substrate and the second base substrate encapsulate at least a portion of the piezoresistor inside the pressure reference chamber. The metal wire bond is connected to the resistor lead, and is connected to the redistribution layer. The resistor lead is connected to the piezoresistor.

The present invention discloses a flexible sensor based on an oxide wrinkle structure and a preparation method thereof, comprising: using a solid-phase method to prepare a Sr3Al2O6 target material and a La-BaTiO3 target material respectively; using a pulsed laser deposition technique to prepare a "La-BaTiO3 / Sr3Al2O6 / SrTiO3" heterostructure using the Sr3Al2O6 target material and the BaTiO3 target material on a SrTiO3 single crystal substrate; using a water-soluble method to electrostatically adsorb a polydimethylsiloxane (PDMS) film on the "La-BaTiO3 / Sr3Al2O6 / SrTiO3" heterostructure. The La-BaTiO3 film was then peeled off from the structure to create a "La-BaTiO3 / PDMS" heterostructure. A gold (Au) electrode was grown on the "La-BaTiO3 / PDMS" heterostructure using magnetron sputtering to create an "Au / PDMS / La-BaTiO3" heterostructure. Another PDMS film was attached to the Au electrode surface of the "Au / PDMS / La-BaTiO3" heterostructure by electrostatic adsorption for encapsulation, resulting in a piezoresistive sensor with the "PDMS / Au / La-BaTiO3 / PDMS" heterostructure. This preparation method offers high process controllability, and the resulting flexible piezoresistive sensor exhibits high precision, high sensitivity, and high reliability. The flexible piezoresistive sensor can adapt to changes in various surfaces and shapes and has a wide range of applications.