Provided are a multi-channel
semiconductor device and a method for manufacturing the
semiconductor device through a simplified process. A sacrificial layer and a channel layer are alternately stacked on a
semiconductor substrate. Thereafter, the sacrificial layer and the channel layer are etched to form a separated active pattern, and a device
isolation layer is formed to cover sidewalls of the active pattern.
Dopant ions are implanted into the entire semiconductor substrate, thereby forming a channel separation region under the active pattern. A portion of the active pattern is etched to separate the active pattern from a pair of facing sidewalls of the device separation layer, thereby forming a
channel pattern having a pair of first exposed sidewalls. Source / drain semiconductor
layers are formed on the first sidewalls of the
channel pattern, and a part of the device
isolation layer is removed to
expose a pair of second sidewalls of the
channel pattern contacting with the device separation layer. Thereafter, the sacrificial layer included in the channel pattern is remove, and a conductive layer for a gate
electrode is formed to cover the channel layer exposed by the removing of the sacrificial layer.