162 results about "Channel pattern" patented technology

A multi-bridge-channel MOSFET (MBCFET) may be formed by forming a stacked structure on a substrate that includes channel layers and interchannel layers interposed between the channel layers. Trenches are formed by selectively etching the stacked structure. The trenches run across the stacked structure parallel to each other and separate a first stacked portion including channel patterns and interchannel patterns from second stacked portions including channel and interchannel layers remaining on both sides of the first stacked portion. First source and drain regions are grown using selective epitaxial growth. The first source and drain regions fill the trenches and connect to second source and drain regions defined by the second stacked portions. Marginal sections of the interchannel patterns of the first stacked portion are selectively exposed. Through tunnels are formed by selectively removing the interchannel patterns of the first stacked portion beginning with the exposed marginal sections. The through tunnels are surrounded by the first source and drain regions and the channel patterns. A gate is formed along with a gate dielectric layer, the gate filling the through tunnels and extending onto the first stacked portion.

Provided are a multi-channel semiconductor device and a method for manufacturing the semiconductor device through a simplified process. A sacrificial layer and a channel layer are alternately stacked on a semiconductor substrate. Thereafter, the sacrificial layer and the channel layer are etched to form a separated active pattern, and a device isolation layer is formed to cover sidewalls of the active pattern. Dopant ions are implanted into the entire semiconductor substrate, thereby forming a channel separation region under the active pattern. A portion of the active pattern is etched to separate the active pattern from a pair of facing sidewalls of the device separation layer, thereby forming a channel pattern having a pair of first exposed sidewalls. Source / drain semiconductor layers are formed on the first sidewalls of the channel pattern, and a part of the device isolation layer is removed to expose a pair of second sidewalls of the channel pattern contacting with the device separation layer. Thereafter, the sacrificial layer included in the channel pattern is remove, and a conductive layer for a gate electrode is formed to cover the channel layer exposed by the removing of the sacrificial layer.

A MOS transistor includes a gate structure extending forrom a semiconductor substrate in a vertical direction is disclosed. The gate structure includes a gate electrode extending from the substrate in a vertical direction, and a gate insulation layer enclosing the gate electrode. A channel pattern encloses the gate insulation layer, and a first conductive pattern extends from a lower portion of the channel pattern in a first direction verticalperpendicular to the channel pattern and in parallel with the substrate. A second conductive pattern extends from an upper portion of the channel pattern in a second direction verticalperpendicular to the channel pattern and in parallel with the substrate. Accordingly, the channel length of the MOS transistor is determined by a distance between the first and second conductive patterns, and a channel width of the MOS transistor is determined by a diameter of the gate structure. Short channel and narrow width effects are sufficiently prevented in a MOS transistor.

A semiconductor device having a field effect transistor and a method of fabricating the same. In-situ doped epitaxial patterns are respectively formed at both sidewalls of a protruded channel pattern from a substrate by performing an in-situ doped epitaxial growth process. The in-situ doped epitaxial pattern has a conformal impurity concentration throughout. Accordingly, source / drain regions with a conformal impurity concentration are connected throughout a channel width of a channel region including both sidewalls of a protruded channel pattern. As a result, it is possible to maximize a driving current of the filed effect transistor, and an on-off characteristic can be highly stabilized.

In a method of manufacturing a semiconductor device, an active channel pattern is formed on a substrate. The active channel pattern includes preliminary gate patterns and single crystalline silicon patterns that are alternately stacked with each other. A source / drain layer is formed on a sidewall of the active channel pattern. Mask pattern structures including a gate trench are formed on the active channel pattern and the source / drain layer. The patterns are selectively etched to form tunnels. The gate trench is then filled with a gate electrode. The gate electrode surrounds the active channel pattern. The gate electrode is protruded from the active channel pattern. The mask pattern structures are then removed. Impurities are implanted into the source / drain regions to form source / drain regions. A silicidation process is carried out on the source / drain regions to form a metal silicide layer, thereby completing a semiconductor device having a MOS transistor.

A multi-bridge-channel MOSFET (MBCFET) may be formed by forming a stacked structure on a substrate that includes channel layers and interchannel layers interposed between the channel layers. Trenches are formed by selectively etching the stacked structure. The trenches run across the stacked structure parallel to each other and separate a first stacked portion including channel patterns and interchannel patterns from second stacked portions including channel and interchannel layers remaining on both sides of the first stacked portion. First source and drain regions are grown using selective epitaxial growth. The first source and drain regions fill the trenches and connect to second source and drain regions defined by the second stacked portions. Marginal sections of the interchannel patterns of the first stacked portion are selectively exposed. Through tunnels are formed by selectively removing the interchannel patterns of the first stacked portion beginning with the exposed marginal sections. The through tunnels are surrounded by the first source and drain regions and the channel patterns. A gate is formed along with a gate dielectric layer, the gate filling the through tunnels and extending onto the first stacked portion.

An intensified solid-state imaging sensor includes a photo cathode for converting light from an image into electrons, an electron multiplying device for receiving electrons from the photo cathode, and a solid-state image sensor including a plurality of pixels for receiving the electrons from the electron multiplying device through a plurality of channels of the electron multiplying device. The solid-state image sensor generates an intensified image signal from the electrons received from the electron multiplying device. The plurality of channels are arranged in a plurality of channel patterns, and the plurality of pixels are arranged in a plurality of pixel patterns. Each of the plurality of channel patterns is mapped to a respective one of the plurality of pixel patterns such that electron signals from each of the plurality of channel patterns is substantially received by the single respective one of the plurality of pixel patterns.

A thin film transistor, including a transparent channel pattern, a transparent gate insulating layer in contact with the channel pattern, a passivation film pattern disposed on the channel pattern, a source / drain coupled to the channel pattern through a via hole in the passivation film pattern, and a gate facing the channel pattern, the gate insulating layer interposed between the gate and the channel pattern, wherein the passivation film pattern includes at least one of polyimide, photoacryl, and spin on glass (SOG).

The present invention is directed generally to an electrochemical apparatus for oxidation or consumption of a fuel, and the generation of electricity, such as, a solid electrolyte fuel cell. The electrochemical apparatus (1) comprises at least one cell (2), wherein the cell (2) has a solid electrolyte (10) disposed between a unitary oxygen electrode (12) and a unitary fuel electrode (8), and at least one separator (6) contacting the surface of one of the electrodes (13) opposite of the electrolyte (10). At least one electrode (13) of the cell (2) defines a micro-channel pattern (26), wherein the micro-channel cross-section is preferably varied, such that reactant gas flowing through the micro channels achieves tailored local flow, pressure, and velocity distributions.

A method for forming a medium having a substrate is formed have a patterned surface with a channel pattern and a transponder having a memory is provided in the channel pattern. A conductive material is deposited in the channel pattern with the conductive material operatively associated with the transponder.

A method of manufacturing a semiconductor device includes forming an active pattern protruding from a semiconductor substrate, forming a dummy gate pattern crossing over the active pattern, forming gate spacers on opposite first and second sidewalls of the dummy gate pattern, removing the dummy gate pattern to form a gate region exposing an upper surface and sidewalls of the active pattern between the gate spacers, recessing the upper surface of the active pattern exposed by the gate region to form a channel recess region, forming a channel pattern in the channel recess region by a selective epitaxial growth (SEG) process, and sequentially forming a gate dielectric layer and a gate electrode covering an upper surface and sidewalls of the channel pattern in the gate region. The channel pattern has a lattice constant different from that of the semiconductor substrate.

Devices and methods for creating a series of percutaneous myocardial revascularization (PMR) channels in the heart. One method includes forming a pattern of channels in the myocardium leading from healthy tissue to hibernating tissue. Suitable channel patterns include lines and arrays. One method includes anchoring a radiopaque marker to a position in the ventricle wall, then using fluoroscopy repeatedly to guide positioning of a cutting tip in the formation of multiple channels. Another method uses radiopaque material injected into each channel formed, as a marker. Yet another method utilizes an anchorable, rotatable cutting probe for channel formation about an anchor member, where the cutting probe can vary in radial distance from the anchor. Still another method utilizes a multiple wire radio frequency burning probe, for formation of multiple channels simultaneously. Still another method utilizes liquid nitrogen to cause localized tissue death.

Memory devices include a stack of interleaved conductive patterns and insulating patterns disposed on a substrate. A semiconductor pattern passes through the stack of conductive patterns and insulating patterns to contact the substrate, the semiconductor pattern having a graded grain size distribution wherein a mean grain size in a first portion of the semiconductor pattern proximate the substrate is less than a mean grain size in a second portion of the semiconductor pattern further removed from the substrate. The graded grain size distribution may be achieved, for example, by partial laser annealing.

There is provided a plate (10) on which a channel pattern (110) is formed, which channel pattern includes a first channel (116) into which a buffer agent is injected, and a second channel (117) having, in a portion thereof, a quantification part (117a) that has a portion common to the first channel and holds a predetermined amount of a biological sample, the biological sample being injected into the channel including the quantification part, and the plate (10) is rotated at a high speed by a filling unit (20) to fill the buffer agent in the first channel, and thereafter, the second channel is pressurized by a discrimination unit (30) to fill the biological sample in the second channel, and simultaneously, a predetermined amount of the biological sample is added into the buffer agent. Therefore, when performing discrimination of the biological sample, a discrimination result can be obtained accurately in a short time without the necessity of complicated preparation works.

In a method of manufacturing a semiconductor device, an active channel pattern is formed on a substrate. The active channel pattern includes preliminary gate patterns and single crystalline silicon patterns that are alternately stacked with each other. A source / drain layer is formed on a sidewall of the active channel pattern. Mask pattern structures including a gate trench are formed on the active channel pattern and the source / drain layer. The patterns are selectively etched to form tunnels. The gate trench is then filled with a gate electrode. The gate electrode surrounds the active channel pattern. The gate electrode is protruded from the active channel pattern. The mask pattern structures are then removed. Impurities are implanted into the source / drain regions to form source / drain regions. A silicidation process is carried out on the source / drain regions to form a metal silicide layer, thereby completing a semiconductor device having a MOS transistor.

A transmitter and transmission method for preventing a call failure using a system power value, caused by rapidly increasing transmit power against a large phase mismatch occurring before a phase mismatch correction cycle elapses in a smart-antenna communication system. In the transmitter and transmission method, if the system power value is higher than a power threshold, a radiation pattern similar to a common beam channel pattern is created.

The invention provides a method for preparing zero layer alignment marker, comprising the steps as follows: a semiconductor underlayer which is sequentially provided with an oxidation cushion layer, a corrosion blocking layer and a photoresist is provided; a zero layer alignment marking pattern and a shallow channel pattern are defined on the photoresist layer; the photoresist layer is taken as a mask to etch the corrosion blocking layer, the oxidation cushion layer and the semiconductor underlayer and form the zero layer alignment marking channel and the shallow channel; after the photoresist layer is removed, the oxidation lining layer is formed on the internal wall of the zero layer alignment marking channel and the shallow channel; the zero layer alignment marking channel and the shallow channel are filled with insulated medium layer, thus forming the zero layer alignment marker and the shallow channel separation structure; subsequently, the corrosion blocking layer is removed. The invention also provides a zero layer alignment marker which simplifies the process steps.

A fabrication method of a TFT includes successively forming four thin films containing a first conductive layer, an insulation layer, a semiconductor layer, and a second conductive layer on a substrate, performing a first PEP process to pattern the four thin films for forming a semiconductor island and a gate electrode with the semiconductor layer and the first conductive layer respectively. Then, a laser ablation process is performed to define a channel pattern in the four thin films and remove a portion of the second conductive layer so that unconnected source electrode and drain electrode are formed with the second conductive layer.

A fabrication method of a TFT includes successively forming four thin films containing a first conductive layer, an insulation layer, a semiconductor layer, and a second conductive layer on a substrate, performing a first PEP process to pattern the four thin films for forming a semiconductor island and a gate electrode with the semiconductor layer and the first conductive layer respectively. Then, a laser ablation process is performed to define a channel pattern in the four thin films and remove a portion of the second conductive layer so that unconnected source electrode and drain electrode are formed with the second conductive layer.

The invention discloses a method for preparing a plane hollow microneedle for transdermal administration, which comprises the following steps of: defining a microneedle flow channel pattern on one surface of a first metal substrate to form a trench, and defining a microneedle pattern on the other surface to form a cutting sign, wherein the central axis of the flow channel pattern is aligned with that of the microneedle pattern; bonding a second metal substrate with a trench surface of the first metal substrate; thinning a non-bonding surface of the second metal substrate, and allowing the cutting sign on the first metal substrate to align with and transfer to the non-bonding surface of the second metal substrate; and thinning a non-bonding surface of the first metal substrate, and cutting by aligning with the cutting sign on the second metal substrate to form the plane hollow microneedle. Based on the micromachining technology and by combining the conventional technology of machining and cutting at the same time, the method reduces the process difficulty, increases the using reliability of the microneedle, and is favorable for quantity production.

The packing method for plastic chip for micro flow control includes copying the micro channel pattern via micro-copying process to plastic substrate, mixing dimethyl siloxane pre-polymer and curing agent in certain ratio, vacuum deairing, casting and curing to form polydimethyl siloxane set on the plastic substrate; painting ultraviolet cured adhesive around the substrate, adhering one layer of plastic sheet to constitute three-layer structure with raised packing strength; and irradiating with ultraviolet ray to complete the package of plastic chip. The present invention has simple technological process, less micro channel deformation, no jamming and very high packing strength.

A flat panel display and fabrication method thereof. The present invention uses four etching processes to define a second conducting layer, a doped semiconductor layer and a semiconductor layer. The first etching process is a wet etching using a first resist layer to etch the second conducting layer. The second etching process is executed with an etchant comprising oxygen to etch the doped semiconductor layer and the semiconductor layer, and the first resist layer undergoes ashing during etching so as to become a second resist layer with a channel pattern. The third etching process is another wet etching, and the second conducting layer is etched again using the second resist layer as the etching mask. The fourth etching process is executed to dry etch the doped semiconductor layer using the second resist layer as the etching mask.

There is provided a reformer for a fuel cell system, the reformer comprising: a reforming unit having a reaction substrate in which a catalyst layer is formed in a plurality of flow channels for allowing fuel to flow and for generating hydrogen through a reformation reaction of the fuel using thermal energy. When viewing a cross-section perpendicular to the flow direction of the flow channels, the reaction substrate defines each flow channel by a bottom portion and a pair of wall portions extending from the sides of the bottom portion, and a joint between the bottom portion and the wall portion is formed in a rounded shape. There is also provided a method of manufacturing a reaction substrate used for a reformer for a fuel cell system, the method comprising: (a) preparing a substrate; (b) anisotropically etching the upper surface of the substrate and forming a channel pattern of which a bottom portion and a wall portion are perpendicular to each other; (c) isotropically etching the channel pattern and forming a flow channel of which the joints between the bottom portion and the wall portions are rounded; (d) forming a support layer on the surface of the flow channel; and (e) forming a catalyst layer on the support layer.

A modular approach to a pattern illumination system for selective excitation of microparticles is used. A dual-channel pattern module having two single-channel pattern modules are oriented at a non-zero offset angle to each other. In this arrangement, a galvo-scanner based phase-shifting module is shared between the two channels. A set of tilt mirrors are used to direct the beams from the pattern modules onto the target plane. Additional layers of pattern modules can be added to accommodate any desirable number of additional channels. The additional layer(s) may be rotationally off-set from the other layer(s) by an angular amount to simplify the layout of optical components. A remote light source module may be connected to the pattern modules through optical fiber.

The method forms a layered-open-network polishing pad useful for polishing at least one of magnetic, semiconductor and optical substrates. Exposing a first and second polymer sheet or film of a curable polymer to an energy source creates an exposure pattern in the first and second polymer sheet, the exposure pattern having elongated sections exposed to the energy source. Then removing polymer from the exposed first and second polymer sheets to forms elongated channels through the first and second polymer sheets in a channel pattern that corresponds to the exposure pattern. Attaching the first and second polymer sheets forms a polishing pad, the patterns of the first and second polymer sheets cross wherein the first polymer sheet supports the second polymer sheet and the elongated channels from the first and second polymer sheets connect and to form the layered-open-network polishing pad.

A flat panel display and fabrication method thereof. The present invention uses four etching processes to define a second conducting layer, a doped semiconductor layer and a semiconductor layer. The first etching process is a wet etching using a first resist layer to etch the second conducting layer. The second etching process is executed with an etchant comprising oxygen to etch the doped semiconductor layer and the semiconductor layer, and the first resist layer undergoes ashing during etching so as to become a second resist layer with a channel pattern. The third etching process is another wet etching, and the second conducting layer is etched again using the second resist layer as the etching mask. The fourth etching process is executed to dry etch the doped semiconductor layer using the second resist layer as the etching mask.