The invention relates to the technical field of
semiconductor devices, and discloses a wide bandgap
power semiconductor device and a preparation method thereof. The method comprises: providing a substrate layer of a first
conductivity type; forming a first doped region which is deep into the substrate layer and comprises a plurality of doped
layers which are sequentially nested from outside to inside, wherein the
doping concentrations of the plurality of doped
layers are sequentially increased from outside to inside; forming a second doped region in the doped layer on the innermost side of the first doped region; forming an
isolation layer on the first surface; forming a control
electrode on the
isolation layer; forming a first
electrode on the first surface; a second
electrode is formed on the second surface of the substrate layer. According to the invention, the first doped region which is located between the substrate layer and the second doped region and has the
doping concentration gradually increased from outside to inside is formed through a mode of multiple times of
ion implantation, so that transverse
electric field constraint is constructed, transverse depletion of a channel region and a
short channel effect under the condition of large
voltage are inhibited, the
channel width is reduced, and the performance of the device is improved. And the device performance and reliability are improved.