The invention relates to an asymmetric fin heat conduction enhanced GaN HEMT device and a manufacturing method thereof, and belongs to the technical field of
semiconductor devices, the asymmetric fin heat conduction enhanced GaN HEMT device comprises a substrate, a buffer layer, a channel layer, a
barrier layer, a grid
electrode, a source
electrode and a drain
electrode, a composite
passivation layer is formed by embedding
high heat conduction heat dissipation fins in a drain electrode side
passivation layer, a heat conduction side wall is introduced, and a
high heat conduction material and a
composite structure are utilized to form a
high heat conduction enhanced GaN HEMT device. The heat conduction
bottleneck of a surface medium is effectively broken, the
surface heat dissipation area is increased, a multi-dimensional heat dissipation path is constructed, the peak temperature in the device is remarkably reduced, parameter degradation and
hot carrier injection damage under electrothermal
coupling cooperation are relieved from the source, and therefore the overall
electrical performance and reliability of the device are improved.