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664results about How to "Reduce electric field strength" patented technology

Process of manufacturing Trench gate semiconductor device having gate oxide layer with multiple thicknesses

The a trench semiconductor device such as a power MOSFET the high electric field at the corner of the trench is diminished by increasing the thickness of the gate oxide layer at the bottom of the trench. Several processes for manufacturing such devices are described. In one group of processes a directional deposition of silicon oxide is performed after the trench has been etched, yielding a thick oxide layer at the bottom of the trench. Any oxide which deposits on the walls of the trench is removed before a thin gate oxide layer is grown on the walls. The trench is then filled with polysilicon in or more stages. In a variation of the process a small amount of photoresist is deposited on the oxide at the bottom of the trench before the walls of the trench are etched. Alternatively, polysilicon can be deposited in the trench and etched back until only a portion remains at the bottom of the trench. The polysilicon is then oxidized and the trench is refilled with polysilicon. The processes can be combined, with a directional deposition of oxide being followed by a filling and oxidation of polysilicon. A process of forming a "keyhole" shaped gate electrode includes depositing polysilicon at the bottom of the trench, oxidizing the top surface of the polysilicon, etching the oxidized polysilicon, and filling the trench with polysilicon.
Owner:ADVANCED ANALOGIC TECHNOLOGIES INCORPORATED

Trench semiconductor device having gate oxide layer with multiple thicknesses and processes of fabricating the same

The a trench semiconductor device such as a power MOSFET the high electric field at the corner of the trench is diminished by increasing the thickness of the gate oxide layer at the bottom of the trench. Several processes for manufacturing such devices are described. In one group of processes a directional deposition of silicon oxide is performed after the trench has been etched, yielding a thick oxide layer at the bottom of the trench. Any oxide which deposits on the walls of the trench is removed before a thin gate oxide layer is grown on the walls. The trench is then filled with polysilicon in or more stages. In a variation of the process a small amount of photoresist is deposited on the oxide at the bottom of the trench before the walls of the trench are etched. Alternatively, polysilicon can be deposited in the trench and etched back until only a portion remains at the bottom of the trench. The polysilicon is then oxidized and the trench is refilled with polysilicon. The processes can be combined, with a directional deposition of oxide being followed by a filling and oxidation of polysilicon. A process of forming a “keyhole” shaped gate electrode includes depositing polysilicon at the bottom of the trench, oxidizing the top surface of the polysilicon, etching the oxidized polysilicon, and filling the trench with polysilicon.
Owner:ADVANCED ANALOGIC TECHNOLOGIES INCORPORATED

Method and device for integrally desulfurizing, denitrating and dust-removing by plasma

The invention discloses an integrated treatment method capable of desulfurizing, denitrating and dust-removing at the same time, and provides a device which adopts the treatment method. Smoke formed after the combustion in a boiler contains the main ingredients of SO2, NOX and dust, and passes through a plasma generation electrode; generated plasmas contain a large amount of high-energy electronics and act on O2 and H2O to generate a large quantity of active particles, such as H, O, OH and O3. The SO2 and the NOX can perform chemical reaction to generate high-valence state sulfur oxides and nitrogen oxides under the effect of the active particles, and then the sulfur oxides and the nitrogen oxides are combined with introduced ammonia gas to generate ammonium salts; the ammonium salts are recovered and serve as secondary products; and therefore, the desulfurizing and the denitrating are realized. In the process, charged particles in the plasmas can electrify dust particles, so that the charged particles can move directionally under the effect of an additional direct-current bias electric field; and therefore, the function of removing the dust is realized. According to the method and the device, the static electricity dust removal and the plasma desulfurizing and denitrating are integrated, so that the number of power supplies is reduced, the efficiency of a discharge power supply is improved, the energy consumption can be reduced, the investment is saved, the occupied area is reduced, and the cost is reduced.
Owner:BEIJING RUIYUDA TECH
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