The present invention provides a super-junction
power MOSFET structure with optimized linear output and a preparation method thereof, which are used to solve the technical problem that the output
signal of the traditional SJMOS device structure is distorted or generates unnecessary
harmonics, resulting in the inability of the
power management system to output stably. The present invention provides multiple pillar regions within the
silicon drift region, and is provided with a
guard ring and a surface
guard ring on the outside thereof; the width and
doping concentration of the pillar regions and the guard rings are both distributed in a gradient decreasing from top to bottom; the upper surfaces of the multiple pillar regions are sequentially provided with a shield region and a base region from bottom to top, and the shield region is wider than the base region;
JFET regions are provided on both sides of the shield region and the base region, and the
doping concentration of the shield region and the
JFET region is distributed in an inverse gradient, and the corresponding depth of the
doping peak concentration is located at the bottom of the base region; the doping concentration of the shield region is higher than that of the base region, and the doping concentration of the
JFET region is higher than that of the
silicon drift region; the base region is provided with a source region and a source
electrode contact region, and the source
electrode is conductively connected to the source
electrode contact region.