The invention discloses a trench-type
silicon carbide MOSFET device and a preparation method thereof, and belongs to the field of semiconductors, the device introduces a P-type deep doped region and a Schottky trench, so that when the device is in a reverse
voltage withstanding state, the Schottky trench is formed in the P-type deep doped region, and the Schottky trench is formed in the Schottky trench; a P-type buried layer, an N-type first
silicon carbide epitaxial layer, a P-type deep doped region and an N-type second
silicon carbide epitaxial layer are used as
gate oxide protection structures, and the transverse and longitudinal
gate oxide protection structures are used up together to protect a
gate oxide layer and reduce the
electric field intensity at the corner of a gate; when
avalanche breakdown occurs in the device, avalanche current flows through a P-type deep
doping region and then flows into a source
electrode through source
electrode metal in a Schottky groove, and the avalanche current almost does not flow through a first P-type
body region, then enters an N + type source region and finally enters the source
electrode metal, so that the risk of starting a parasitic
triode is reduced; source electrode
metal at the bottom of the Schottky groove and the N-type second
silicon carbide epitaxial layer form Schottky contact, so that the device is integrated with a Schottky structure, and the
reverse recovery performance of the device is improved.