A self-healing Si / 4H-SiC
heterojunction tunneling field-effect
transistor and its fabrication method, namely, using hot-wall
chemical vapor deposition technology, in n + n-type 4H-SiC substrates are grown sequentially ‑ Type 4H-SiC drift region, p + A p-type 4H-SiC shielding layer and an n-type 4H-SiC carrier extension layer 1 are constructed; an n-type Si carrier extension layer 2 is grown using low-pressure
chemical vapor deposition to construct a Si / 4H-SiC
heterojunction; and a p-type Si bulk region and an n-type Si carrier extension layer 2 are formed using
ion implantation. + Type Si source layer and n ‑ The device employs a Si channel layer; edge trenches are etched, and then a planar main gate and two auxiliary gates are fabricated using low-pressure
chemical vapor deposition (LPCVD); electrodes are then deposited. In this invention, an accumulation layer channel is formed at the bottom of the main
gate oxide layer, and an inversion layer channel is formed inside the auxiliary
gate oxide layer, allowing electrons to transport in parallel. The auxiliary
gate voltage regulates the Si / 4H-SiC
heterojunction barrier to achieve tunneling, reducing specific on-resistance. During
reverse recovery, this heterojunction isolates the transport paths of
tail-state electrons and holes in the drift region, preventing recombination, reducing
reverse recovery loss, and improving static and dynamic performance.