The invention discloses a
trench MOSFET with reverse
fast recovery and a preparation method thereof. Relates to the technical field of semiconductors. According to the
trench MOSFET disclosed by the invention, the source trench and the matched structure are additionally arranged between the adjacent gate trenches, so that a new current path is constructed. During reverse follow current, all current of a traditional
trench MOSFET needs to flow through a body
diode, however, in the structure, a source
electrode oxide layer in a source
electrode trench is thin, and a source
electrode and a source region are short-circuited to form a built-in MOS channel. When the device is in a reverse working state, part of follow current can flow through the built-in MOS channel and does not depend on a body
diode completely, if the thickness of the source electrode
oxide layer is reduced properly, even all follow current can flow through the MOS channel and does not depend on the body
diode completely, and therefore the flow path and the distribution condition of the current are changed. The
current channel is optimized, so that the storage and recombination time of current carriers can be effectively reduced, and the
reverse recovery performance is further improved.