The invention relates to a SiC junction barrier
Schottky diode and a manufacturing method of the SiC junction barrier
Schottky diode. The SiC junction barrier
Schottky diode comprises a substrate of a first conductive type, an epitaxial layer of the first conductive type, a Schottky
metal contact, a heavily doped region of a second conductive type, a light doped region of the second conductive type, a light doped trap of the second conductive type and an
ohmic contact, wherein the epitaxial layer of the first conductive type is formed on the substrate, the Schottky
metal contact is formed on the epitaxial layer, the heavily doped region of the second conductive type is formed below the Schottky
metal contact, the light doped region of the second conductive type is formed below the heavily doped region, the light doped trap of the second conductive type is formed below the light doped region, the width of the light doped trap is smaller than that of each light doped region, and the
ohmic contact is formed on the reverse side of the substrate. The SiC junction barrier Schottky
diode can obviously reduce the
electric field concentration effect in the corner of a PN junction, and further improves the reverse
breakdown voltage of a device and a quality factor (BFOM) value of Baliga.