The invention discloses a step-shaped groove
Schottky barrier diode and a manufacturing method, the
diode comprises a
cathode metal layer, a substrate, an epitaxial layer, a functional
metal layer and an
anode metal layer from bottom to top, a step-shaped groove is distributed in the epitaxial layer, the groove is composed of an upper cylindrical opening and a lower cylindrical opening, the upper cylindrical opening is small, the lower cylindrical opening is large, and the functional metal layer is a metal layer. Conductive
polycrystalline silicon is arranged in the groove, the
dielectric layer isolates the conductive
polycrystalline silicon from the epitaxial layer, the
Schottky barrier region and the
anode electrode region, and the epitaxial layer at the bottom of the groove further comprises an
ion implantation region. According to the trench and the upper cylindrical small opening, the conductive area during forward conduction is increased, the forward
conduction current density is reduced, the forward conduction
voltage drop is reduced, and the forward conduction performance is improved; the lower cylindrical opening is large, so that the point
discharge effect during
reverse bias of the device is avoided, the reverse blocking performance of the device is improved, and the reliability and the service life of the device are improved.