The invention provides a super junction
semiconductor device and a manufacturing method thereof. The super junction
semiconductor device comprises a first conductive type substrate and a first conductive type epitaxial layer; a first groove is formed in the first conductive type epitaxial layer; a second conductive type epitaxial layer is arranged on the inner wall of the first groove; a first
dielectric layer is arranged in the first groove; a part of the second conductive type epitaxial layer on the same side of the top of each first groove is removed to form a second groove; forming a gate trench at the upper part in the second trench; a section of first
dielectric layer is reserved below the gate trench; a
gate oxide layer is arranged on the side wall of the gate trench; grid
polycrystalline silicon is arranged in the grid groove; second conductive type well regions are arranged at the tops of the first conductive type epitaxial
layers on the two sides of the first groove; a heavily doped first conductive type injection region is formed at the top in the second conductive type well region, close to the same side of the gate trench, of each first trench; the device provided by the invention can bear higher withstand
voltage, and the working frequency is improved.