The invention discloses a
gallium nitride device and a preparation method thereof, and relates to the technical field of
semiconductor devices. The
gallium nitride device comprises a
sapphire substrate, an AlN nucleating layer, an N-type AlGaN buffer layer, an intrinsic AlGaN
active layer, an
electron blocking layer and a P-type AlGaN layer which are sequentially stacked from bottom to top, a gradient
doping edge stop layer is arranged on the edge of the P-type AlGaN layer, and meanwhile a bottom
electrode in
ohmic contact with the N-type AlGaN buffer layer and a top
electrode in
ohmic contact with the P-type AlGaN layer are formed respectively. According to the invention, by optimizing the structural design of the substrate, the nucleating layer, the buffer layer, the
active layer, the
electron blocking layer, the edge termination layer and the
electrode, and combining with the seagull optimization
algorithm to accurately regulate and control the preparation process parameters, the comprehensive improvement of the light extraction efficiency, the carrier recombination efficiency, the
breakdown voltage and the long-term working stability is realized; and the photoelectric property and the reliability of the
gallium nitride device are obviously enhanced.