The invention relates to a method for epitaxial growth of a gallium nitride (GaN) thin film on a Si substrate, the crack growth of GaN epitaxial thin films is limited, the surface topography is uniform, the process is relatively easy, and the method is easy to realize. According to the technical scheme, the method includes the steps that a metal-organic chemical vapor deposition (MOCVD) system isadopted for epitaxial growth and the epitaxial growth of the GaN thin film is conducted on the Si substrate. The method is characterized in that the epitaxial structure of the GaN thin film sequentially comprises the Si substrate, a pre-buried aluminum layer, a low temperature aluminum nitride (AlN) buffer layer, a high temperature aluminum nitride (AlN) buffer layer, a gallium nitride aluminum (AlxGal-xN) layer and the GaN thin film layer, wherein the low temperature AlN buffer layer is a low temperature AlN three-dimensional nucleating layer, the high temperature AlN buffer layer is a high temperature AlN three-dimensional nucleating layer, the AlxGal-xN layer is an AlxGal-xN stress relief layer, and the GaN thin film layer is a final growth layer.