The invention provides an LED
chip preparation method and an LED
chip, and the method comprises the steps: carrying out the MSA
etching of a GaN epitaxial layer, specifically, the MSA
etching is divided into two times of
etching: firstly introducing Cl2 to etch the GaN epitaxial layer until a part of an N-type GaN layer is exposed, and then introducing SiCl4 gas to carry out the etching; the etched
wafer is put into a BOE solution to be soaked, and then cleaning is carried out; patterning the
photoresist of the cleaned
wafer through a yellow light process, and exposing an area, which needs to be evaporated with
metal, on the
wafer; placing the wafer after the yellow light process in an
oxygen plasma cleaning
machine, and removing residual glue on the surface of the wafer after development; according to the method, the wafer with the
adhesive residue removed is fully cleaned with deionized water, then a
metal electrode is evaporated on the area, where
metal needs to be evaporated, of the wafer, an N
electrode metal layer is obtained, and through the technology, the
contact resistance of the metal
electrode and the N-type GaN layer can be further reduced, and meanwhile the light emitting brightness of an LED
chip is improved.