153 results about "Nanopillar" patented technology

The invention discloses a shape memory polymer micro-nano column array preparation method based on femtosecond laser processing, and belongs to the technical field of bionic adhesive materials. According to the method, an epoxy resin type shape memory polymer serves as a matrix, an anodic aluminum oxide template and a femtosecond laser micromachining technology are combined, a nano-column array is formed through AAO template copying, then a micron-column array is formed on the surface of the template through femtosecond laser machining, and finally the micron-nano composite column array with the gecko foot imitating structure is obtained. The method has the advantages of being high in machining precision, high in structural controllability, simple in process, capable of achieving large-area preparation and the like, and is suitable for material preparation in the fields of bionic adhesion, micro-nano sensing, intelligent surfaces and the like.

The invention discloses a preparation method of a shape memory polymer nanorod array, and belongs to the technical field of bionic adhesive materials. According to the method, on the basis of an anodic aluminum oxide template, hydrophilic or hydrophobic chemical modification is carried out on the surface of the anodic aluminum oxide template, the surface wettability of a template pore channel is adjusted, and then the permeation behavior of an epoxy resin precursor in the pore channel is controlled. The preparation method comprises the following specific steps: modifying an AAO template, preparing and defoaming an epoxy resin mixture, filling the template, curing, removing an aluminum substrate, dissolving an aluminum oxide layer, and finally obtaining the shape memory polymer nanorod array with high Young modulus (1-20 GPa). According to the method, a template method is combined with chemical modification, the process steps are clear, the conditions are mild, the method is particularly suitable for preparing a hard micro-nano composite structure matched with the mechanical property of a gecko script characteristic material, and an effective technical support is provided for research of a high-performance dry adhesive material.

The invention discloses a dielectric computer-generated holographic optical element based on electrochemical nanoimprint and a preparation method thereof, and the method comprises the steps: carrying out the optimization design of the parameters of a unit structure of the dielectric computer-generated holographic optical element through numerical simulation, and obtaining an optimal parameter combination; obtaining a target hologram and a phase distribution diagram corresponding to the target hologram, determining an optimal parameter corresponding to the phase distribution diagram, and obtaining an arrangement diagram of a unit structure of the corresponding dielectric computer-generated holographic optical element; preparing a metalized template; providing a dielectric material substrate; based on a metalized template and a dielectric material substrate, a nano cavity structure complementary with the structure of a nano column in the metalized template is generated in the dielectric material substrate by adopting an electrochemical nano imprinting technology, and a three-dimensional micro-nano structure with a periodic unit structure array is formed. And obtaining the dielectric computer-generated holographic optical element corresponding to the target hologram. According to the invention, high-fidelity copying of the three-dimensional nanostructure can be realized.

The invention discloses a spectrum polarization detection method based on a quasi-continuous domain bound state metasurface, and belongs to the application field of micro-nano optics and spectrum polarization detection. The implementation method comprises the following steps: adopting a symmetrical broken elliptical amorphous silicon nano-column arrangement mode to obtain a metasurface structure unit with a narrow-band formant, a high-quality factor and linear polarization dependence; the method comprises the following steps: analyzing a change rule of resonance wavelength along with geometric parameters of a structural unit and a change rule of resonance intensity along with a polarization state of incident light through numerical simulation to obtain a series of metasurface structures with different resonance wavelengths and different polarization responses, reasonably arranging the metasurface structures, processing a metasurface sample, and testing a reflection spectrum of the metasurface sample, and the spectrum and polarization response characteristics are calibrated. A spectrum polarization detection system composed of a detection target, a metasurface and a CMOS detector is built, and the spectrum and polarization information of the target is detected based on the spatial position arrangement of the metasurface structure and the Stokes relation by using gray information shot by the CMOS detector.

The application discloses a kind of light field regulation detection method and device based on computing spectral reconstruction, belong to spectral analysis technical field.The method is by introducing medium-metal composite nanostructure, integrates metal nanoisland array and silicon nitride nanocolumn array on quartz substrate, realizes electric field enhancement using the local surface plasmon resonance effect excited by metal nanoisland array, simultaneously realizes wide spectral range phase coding by medium nanocolumn array;Super surface chip is integrated with single point detector, combines pre-calibrated super surface sensing matrix A and enhancement factor matrix E, and reconstructs spectrum using compressed sensing or Tikhonov regularization algorithm.The application keeps the advantages of miniaturization and no moving parts, realizes directional high sensitivity detection to weak signal, and signal-to-noise ratio is improved.

The invention belongs to the technical field of electronic packaging and printed circuit boards, and particularly relates to a method for improving the bending resistance of a flexible circuit board, which comprises the following steps: after plasma pretreatment is carried out on the surface of a polyimide substrate, a three-dimensional nano-column array structure is constructed by depositing gold nanoparticles as a mask and combining reactive ion etching; then removing the mask to obtain a clean polyimide nano structure; and depositing a titanium / copper seed crystal layer through magnetron sputtering, and realizing conformal filling and coating of the copper conductive layer on the nano structure by adopting pulse reverse electroplating to form an adhesive-free mechanical interlocking interface. An adhesive-free three-dimensional mechanical interlocking structure is used for replacing an adhesive layer which is weak in physical performance and prone to fatigue failure, and the structural weak link that a traditional flexible circuit board is layered and cracked first under dynamic bending stress is thoroughly removed.

The invention provides a nitride epitaxial wafer, a preparation method of the nitride epitaxial wafer and a Micro-LED. The nitride epitaxial wafer comprises a heterogeneous substrate, a composite column structure, a nitride buffer layer, an n-type nitride layer, a light-emitting layer and a p-type nitride layer. The composite column structures are distributed on the surface of one side of the heterogeneous substrate at intervals, and each composite column structure comprises a plurality of composite Si nano columns and a composite nano layer wrapping the surfaces of the composite Si nano columns; the composite Si nano column comprises a first composite Si nano column and a second composite Si nano column; the height of the first composite Si nanorod is different from that of the second composite Si nanorod; the nitride buffer layer covers the composite column structure, and the surface of one side, far away from the substrate, of the nitride buffer layer is a horizontal plane; the light-emitting layer comprises at least one light-emitting unit, and each light-emitting unit comprises an In-containing quantum well layer and a nitride quantum barrier layer which are arranged in a stacked mode. According to the invention, the brightness, electric leakage and ESD antistatic release performance of the nitride epitaxial wafer can be improved.

The invention discloses a controllable nanorod array SERS (Surface Enhanced Raman Scattering) chip-based digital detection device for a serous ovarian cancer exosome phenotype as well as a detection method and application thereof, and relates to the technical field of biological detection. The device comprises a controllable nanorod array module, a high-sensitivity SERS probe module, an integrated microfluidic platform module and a digital analysis module. The controllable nanorod array module is used for accurately capturing a single exosome; the SERS probe module realizes specific recognition of multiple biomarkers on the surface of the exosome by conjugating a specific antibody and a Raman reporter molecule; the micro-fluidic platform module integrates filtering, reaction and imaging functions, so that high-throughput and automatic detection is realized; and the digital analysis module completes qualitative and quantitative analysis of exosome phenotypes. The problems that a traditional detection technology cannot analyze the phenotype difference of single exosomes, the sensitivity is low and the flux is insufficient are solved, early accurate diagnosis of the serous ovarian cancer can be achieved, and the kit has wide clinical application prospects.

The polarization diffraction spectrometer comprises a substrate and a plurality of rectangular nano-columns arranged on the substrate, the rectangular nano-columns are periodically stacked or arranged in the height direction to form a periodic superlattice unit, and the substrate layer is made of a nanoscale transparent medium material; according to a grating equation, the optimal diffraction series, the period length and the incident light wavelength of the super grating are selected through experimental simulation, and optimal structural parameters are determined by combining an electromagnetic simulation tool and an optimization algorithm; the heights, the widths and the intervals of the rectangular nanocolumns serve as parameters of a particle swarm optimization algorithm, a fitness function with target diffraction order energy concentration ratio and target order overall diffraction efficiency optimization serving as core indexes is constructed, full-wave optical simulation software is combined, and geometric distribution in periodic units of the rectangular nanocolumns is optimized and adjusted. According to the invention, under the incident condition of 45-degree linearly polarized light, the S polarization component and the P polarization component are respectively concentrated at the preset target diffraction order, and an efficient diffraction light splitting effect is achieved.

This invention discloses a metasurface structure and a refractive index detector. The metasurface structure is simple, consisting only of a substrate and an array of nanopillars disposed on the first surface of the substrate. By defining the orientation angle of each nanopillar in the array, the metasurface structure can obtain spatial refractive index information by reading the focal position information on the focal plane, which is then used for refractive index detection. The metasurface structure of this invention has a size of only tens of micrometers, a flexible detection range, and its results can be clearly presented on the focal plane without requiring complex spectral analysis and calculation modules. This invention has significant implications for the miniaturization of refractive index detectors.

The invention relates to a three-dimensional optical control method based on a metasurface, and the method comprises the steps: scanning a nano-column unit structure to construct a phase library, selecting high-efficiency half-wave plate nano-columns with phase coverage from-pi to pi from the phase library for the construction of the metasurface, cooperatively introducing a geometric phase and transmission phase regulation and control mechanism, and combining spatial multiplexing arrangement to construct a metasurface. Independent regulation and control of different circular polarization light fields under different wavelengths are realized, so that four switchable optical control focuses are generated in a three-dimensional space; by switching the polarization state or the working wavelength of the incident light, stable capture and controllable transfer of the particles are realized in the space. Compared with the prior art, the method has the advantages that three-dimensional optical control over particles is achieved in an on-chip structure, the control freedom degree is high, and the control adjusting mode is simple and efficient.

This invention discloses a tunable nanoantenna and its fabrication method, belonging to the field of nanoantenna technology. The tunable nanoantenna comprises, from top to bottom: an ordered metal mesh nanoelectrode layer, Fe... 3 O 4 The invention comprises a magnetic nanosphere layer, a silicon nanopillar micro / nanostructure layer, a substrate layer, and a lower electrode layer. This invention proposes a tunable nanoantenna and its fabrication method. Specifically, this invention combines silicon nanopillars with Fe... 3 O 4 By combining magnetic nanospheres and utilizing their synergistic effect, a composite nanoantenna with magnetic response and optical resonance characteristics can be constructed. This not only breaks through the limitations of single-material control, but also enables more flexible performance control through the dual effects of magnetic and optical fields.

The invention relates to an optical metasurface process detection method and system and a test structure. The method comprises the following steps: acquiring material characteristic parameters of a wafer growth material and a wafer coating material of a target test structure; simulating the metasurface nanorod structure in the to-be-detected area according to the material characteristic parameters to obtain a reference corresponding relation between the color information and the structure characteristic parameters; acquiring color information of each to-be-tested area on the target test structure based on spectral information acquisition equipment, and obtaining an actual corresponding relationship between the color information and structural characteristic parameters by combining the structural characteristic parameters of the unit structures of the super-surface nano-column structure; and under the condition that the error between the reference corresponding relation and the actual corresponding relation is smaller than or equal to a preset error threshold value, determining that the process processing result of the target test structure meets the requirement. According to the process detection method provided by the embodiment of the invention, scanning of SEM equipment is not needed, the equipment cost of process detection can be effectively reduced, and the process detection efficiency is improved.

The invention belongs to the technical field of micro-nano machining, and particularly relates to a hollow metal nano array and a preparation method and application thereof. According to the invention, a regular polymer nano array is prepared based on an ultraviolet light curing nano imprinting technology and a plasma etching technology; then metal evaporation is carried out in combination with an electron beam evaporation dip angle evaporation process, so that the surface of the polymer nano array is partially coated with metal, and a polymer / metal composite nano array with a notch is obtained; and dissolving by using a solvent to remove the water-soluble polymer nano-columns in the polymer / metal nano-array with the notches, so as to prepare the large-area hollow metal nano-array of which the morphology, the size and the period can be flexibly designed. Sulfydryl benzaldehyde molecules are fixed on the surface of the hollow metal nano array to form an SERS (Surface Enhanced Raman Scattering) substrate which is used for detecting hydrazine hydrate. The SERS substrate prepared on the basis of the hollow metal nano array shows high sensitivity, specificity, repeatability and stability.

This invention discloses a method for fabricating superlenses by electrochemical nanoimprinting on semiconductors. Based on a target phase distribution, structural design data for the superlens is generated. Using this design data, a metallized nanopillar array mold is fabricated. Then, in an electrolyte environment containing an oxidant, the mold is brought into contact with a semiconductor substrate and pressure is applied. The contact potential generated by the difference in work functions between the two substrates drives a localized electrochemical oxidation-dissolution reaction at the interface, thereby transferring the mold pattern to the surface of the semiconductor substrate with high fidelity, forming a superlens structure composed of a nanocavity array. This invention achieves short-process, reproducible structure transfer while meeting the requirements of superlens structural consistency and nanoscale processing accuracy, providing a feasible solution for the mass production of high-performance planar optical devices for imaging and communication applications.

The invention provides an optical mixer based on metasurface integration and a preparation method thereof, and belongs to the field of mixers. The mixer comprises a circularly polarized light beam splitter which comprises a first substrate, a liquid crystal structure, a second substrate and a nanorod array which are stacked in sequence; the nanorod array is used for separating the signal light and the local oscillation light into signal light left-handed rotation light, signal light right-handed rotation light, local oscillation light left-handed rotation light and local oscillation light right-handed rotation light; the liquid crystal structure is used for regulating and controlling the initial phases of the output left-handed light and right-handed light; the first multimode interference coupler is used for receiving and mixing the signal light left-rotation light output by the circularly polarized light beam splitter with the local oscillation light left-rotation light to obtain four paths of left-rotation polarized light components with different phases; and the second multimode interference coupler is used for receiving and mixing the right-handed light of the signal light output by the circularly polarized light beam splitter with the right-handed light of the local oscillation light to obtain four paths of right-handed polarized light components with different phases.

The invention discloses a full-polarization light-splitting type super-structure surface covering a mid-infrared broadband and a method of the full-polarization light-splitting type super-structure surface. The super-structure surface is formed by periodically arranging super-structure units, each super-structure unit comprises three groups of nano-structures used for regulating and controlling different cross-polarization, each group of nano-structures respectively control a pair of cross-polarization, each group of nano-structures comprises three anisotropic nano-columns, and the nano-columns of the three groups of nano-structures are arranged in a staggered manner. According to the invention, on the basis of the structural design of space polarization multiplexing, the independent regulation and control capability of the metasurface on the phase, amplitude and polarization state of a light field is fully utilized, the metasurface with polarization selective response is constructed, and the full Stokes polarization decomposition and focusing function of the mid-infrared broadband (3-5 [mu] m) is realized at the sub-wavelength scale; incident light in different polarization states can be respectively focused to different spatial positions, so that the polarization beam splitting efficiency and the imaging quality are remarkably improved, and the application of polarization information in complex light field detection and infrared imaging is promoted.

The application provides a nitride chip and a preparation method thereof and a semiconductor device, and relates to the field of integrated circuits. The nitride chip comprises a substrate, a first nitride buffer layer on the substrate, a plurality of composite nano microstructures distributed on the first nitride buffer layer at intervals, wherein the composite nano microstructure comprises a nano column structure and a top nano covering microstructure on the nano column structure, an isolation structure on the side edge of the top of the first nitride buffer layer, the isolation structure forms a gap towards the outside, a second nitride buffer layer covering the composite nano microstructure, the first nitride buffer layer and the isolation structure, a first semiconductor layer, a light-emitting layer and a second semiconductor layer on the second nitride buffer layer and stacked in the first direction in sequence. The composite nano microstructure can improve the radiation recombination of the light-emitting layer and improve the light-emitting effect. Meanwhile, the isolation structure with the gap can reduce defect light absorption and further improve the light-emitting effect.

The invention discloses a preparation process of a palladium nano-film hydrogen sensor, and belongs to the field of sensor preparation. The preparation process of the palladium nano-film hydrogen sensor comprises the following steps: step 1, pre-treating an aluminum sheet, and flattening to remove a surface oxide layer; 2, carrying out primary oxidation and secondary oxidation; thirdly, the aluminum oxide layer is subjected to chambering operation, and an aluminum-based negative mold is obtained; step 4, carrying out polymerization and demolding; 5, coating the PMMA nano-column array sample through electron beam evaporation equipment to form a palladium alloy nano-film; step 6, preparing and arranging a microelectrode; 7, completing electrical connection and packaging between the microelectrode and an external circuit; the response value and the response speed of the prepared palladium nano-film hydrogen sensor are remarkably improved, and the situation that the sensor is rapidly aged and breaks down due to embrittlement, cracking or stripping caused by substrate limitation and strong lattice stress is avoided.

The invention provides a red-light nitride epitaxial wafer, a preparation method thereof and a Micro-LED. The red-light nitride epitaxial wafer comprises a sapphire substrate, an insertion structure, an n-type nitride pattern structure layer, a light-emitting layer and a p-type metal nitride layer, the insertion structure penetrates through the n-type nitride pattern structure layer, the light-emitting layer and part of the p-type metal nitride layer and comprises a composite Si nano-column and a composite regulation and control layer, and the composite Si nano-column comprises a Si nano-column and a semi-ellipsoid structure; the composite regulation and control layer comprises a protection layer and a buffer layer, the protection layer is arranged on the outer wall of the Si nano-column, and the buffer layer is arranged on the area between the adjacent composite Si nano-columns; and an n-type nitride pattern structure layer, a light-emitting layer and a p-type metal nitride layer are laminated on the buffer layer between the adjacent composite Si nano columns. The In component merging and uniformity can be improved, the light-emitting efficiency and brightness of the Micro-LED are improved, the half-peak width of the light-emitting wavelength is reduced, and the color purity of display application is improved.

The invention discloses an MIL-68 metal organic framework / III-nitride nanorod array photo-anode as well as a preparation method and application of the MIL-68 metal organic framework / III-nitride nanorod array photo-anode. The photo-anode comprises a Si substrate, an InN or / and GaN nano-pillar array grown on the Si substrate, and an MIL-68 (In / Ga) metal organic framework layer grown on the surface of the nano-pillar array in situ, wherein the MIL-68 (In / Ga) metal organic framework layer is of a three-dimensional columnar structure. According to the invention, the MIL-68 (In / Ga) metal organic framework is introduced to the surface of the III-nitride nanopillar array, so that the self-driven assembly of an interface is realized, and the interface bonding strength and charge transfer efficiency of the photoelectrode are remarkably enhanced. The photoanode shows excellent stability and high efficiency in the photoelectrochemical water decomposition and organic pollutant degradation process, and has wide application prospects in new energy conversion and environmental governance.

Techniques and mechanisms for a micro-LED (“uLED”) structure to facilitate efficient communication of an optical signal. In an embodiment, a columnar “nanopost” uLED structure comprises contiguous bodies of respective semiconductor materials, including a first body of a doped semiconductor material. The first body forms a pyramidal structure, wherein one or more others of the contiguous bodies are arranged on the first body in a vertically stacked configuration. In another embodiment, a second body of an undoped semiconductor material is to provide a quantum well of the uLED structure, wherein the second body does not cover or otherwise extend along vertical sidewall structures of the first body.

The present application relates to the field of optics, in particular to a broadband achromatic superlens with a large field of view. The superlens is composed of a cylindrical base embedded with a non-equal-height circular hole array and a nano-pillar array with a multi-ring structure. The non-equal-height circular hole array serves as the light entrance surface, and the nano-pillar array serves as the light exit surface. The circular hole array on the base has different depths and radii, and the nano-pillar array unit structure layer is composed of multiple ring bands, each ring band corresponding to a wavelength to achieve broadband achromatism. The nano-pillars arranged in the unit structure layer have various structures, such as cylindrical, annular, cross-shaped, etc. Different nano-pillar structures are used from the center to the outside, thereby reducing the mutual interference between adjacent ring bands. The materials of the unit structure layer and the base are transparent or low-absorption materials, and appropriate materials are selected according to different wavelength ranges. The superlens proposed in the present application can focus light beams of any wavelength range under a large field of view and a large spectral bandwidth.

The application relates to a silicon nanowire manufacturing method and belongs to the technical field of MEMS. The steps comprise the following: S1, providing an SOI substrate; S2, forming a mask layer on the SOI substrate; S3, patterning the mask layer to form an etching window; S4, performing isotropic etching on the SOI substrate through the etching window to form a cavity and a silicon nanocolumn; S5, oxidizing the silicon nanocolumn to form an oxide layer and a silicon nanowire; and S6, removing the buried oxygen layer and the oxide layer to obtain a suspended silicon nanowire. The application solves the problems of the prior art, such as complex preparation method of the silicon nanowire, high requirement for equipment and poor batch consistency.

This invention provides a display device and its manufacturing method, as well as a display apparatus, relating to the field of display technology, and is used to solve the problem of decreased luminous efficiency in miniaturized display devices. The display device includes: a substrate and a pixel structure disposed on the substrate. The pixel structure includes a plurality of nanopillar light-emitting units, each nanopillar light-emitting unit having a groove around its periphery. The display device also includes a lens structure located on the side of the plurality of nanopillar light-emitting units facing away from the substrate. The lens structure includes a plurality of lens units, the orthographic projection of each lens unit onto the substrate covering the orthographic projection of the corresponding nanopillar light-emitting unit onto the substrate, and at least a portion of each lens unit being located within the groove around the corresponding nanopillar light-emitting unit.

The application relates to a flexible solar blind ultraviolet detector based on a TiO2 / Ga2O3 nano-phase junction and a preparation method thereof. The detector comprises an Ag upper electrode, a flexible titanium sheet lower electrode, a TiO2 / alpha / beta-Ga2O3 phase junction nanorod array and a graphene / Ag nanowire composite electrode located between the Ag upper electrode and the flexible titanium sheet lower electrode. The flexible titanium sheet serves as a flexible titanium sheet substrate. The TiO2 / alpha / beta-Ga2O3 phase junction nanorod array comprises a TiO2 layer on the flexible titanium sheet substrate, an alpha / beta-Ga2O3 phase junction nanorod array on the TiO2 layer, and the alpha / beta-Ga2O3 phase junction nanorod array comprises a plurality of interval arranged alpha / beta-Ga2O3 phase junction nanorods. The graphene / Ag nanowire composite electrode is located at one end of the alpha / beta-Ga2O3 phase junction nanorod array away from the TiO2 layer, and the Ag upper electrode partially covers the graphene / Ag nanowire composite electrode. The multi-heterojunction structure solar blind ultraviolet detector has stable solar blind characteristics, excellent chemical and thermal stability, and is expected to be widely applied in the field of wearable and portable ultraviolet detectors.

An image sensor includes: a first photodetector (PD) in a substrate, the first PD absorbing visible light; a spacer layer on the substrate; a nano prism on the spacer layer; and a second PD structure on the nano prism, the second PD structure absorbing the infrared light. The nano prism splits incident light into a plurality of light beams by color, and the spacer layer concentrates each of the plurality of light beams into the first PD. The nanoprism includes a first low refractive layer and a first nanopillar pattern extending through the first low refractive layer.

A metalens with a hybrid surface topology that includes a collection of nanopillars and a collection of nanogratings.

The present disclosure provides a display device and a manufacturing method therefor, and a display apparatus. The display device comprises: a substrate and a plurality of light-emitting elements arranged on the substrate, wherein the light-emitting elements each comprise at least two stacked nanopillar light-emitting units, each of the nanopillar light-emitting units comprises a quantum well film layer made of the same material, diameters of quantum well film layers in the at least two nanopillar light-emitting units sequentially decrease in a direction away from the substrate, and the at least two nanopillar light-emitting units have different light emission colors.

The invention relates to a vortex beam generator and a vortex beam generation method. The vortex beam generator comprises a nano column, a substrate, a mobile platform, a laser emission system and a console, the nanorods are phase change materials and form a matrix on the substrate; the base is arranged on the mobile platform; the console is electrically connected with the mobile platform and the laser emission system, receives a vortex beam generation instruction, determines a target topological charge l of a vortex beam to be generated, determines a to-be-irradiated area in each nano-column matrix and a crystallinity state corresponding to each nano-column, and further determines a pulse number of a laser beam emitted by the laser emission system; and controlling the laser emission system to emit laser, so that each nano-column in the to-be-irradiated area sequentially moves to the laser irradiation position and is irradiated by the laser for a preset time length, and the target crystallinity states of all the nano-columns jointly form spiral phase distribution phi = l theta corresponding to the target topological charge l.