267 results about "Nanopillar" patented technology

The invention provides a patterned photonic crystal laser and a preparation method thereof, the laser comprises a substrate, and a first mask layer, a photonic crystal layer and a second mask layer which are sequentially deposited on the substrate, a light emitting area is etched in the central area of the second mask layer, and transparent conductive layers are deposited on the surface of the second mask layer and the light emitting area; a p-annular electrode is arranged on the surface of the transparent conductive layer on the second mask layer, and an n-annular electrode is arranged below the substrate; the photonic crystal layer is composed of a nanorod array and a polymer filled in gaps of nanorods; holes distributed in a patterned array are etched in the surface of the first mask layer, and nanorods are epitaxially grown in hole areas; the nanorod is formed by sequentially depositing a substrate contact layer, a first waveguide layer, a multi-quantum well layer, a second waveguide layer, a coating layer and a component gradient layer. According to the invention, through collaborative design optimization of all the layers, emission of laser with specific wavelength and preparation of a laser emitting laser with single longitudinal mode, narrow linewidth and stable wavelength are realized.

The invention provides a spectrometer system comprising a spectrometer chip comprising a camera and a metasurface located on a detection surface of the camera; the metasurface comprises a plurality of nano-pore or nano-column arrays, and selective absorption of light with different wavelengths is realized through surface plasmons generated by different nano-pores or nano-columns; the camera detects the intensity change of light to be detected after the light passes through different nano-pores or nano-column arrays of the metasurface, and then spectral information is obtained through calculation. According to the spectrograph system, selective absorption of light with different wavelengths is achieved through the metasurface, and then spectral information is obtained through calculation, so that the structure of the spectrograph system is compact, and the overall size is very small; and the plasmon generated by the nanopore or nanopillar array has high tolerance to the structure size, so that the processing precision is lower, and large-area and large-batch preparation can be realized.

The invention discloses a nano-pillar array NaKSb photoelectric cathode for enhancing light absorption, which is characterized in that through the design of a double-layer TiOtwo-dimensional nano grating and a nano-pillar array structured NaKSb photoelectric cathode layer, the optical path of light with the wave band of 450-900 nm in the photoelectric cathode is increased under the condition that the thickness of the NaKSb photoelectric cathode is not increased, the reflectivity of the wave band of 400-600 nm is reduced, and the light absorption of the NaKSb photoelectric cathode is enhanced. The absorption rate at 400-1000 nm is improved by 32.28% compared with that of a traditional planar film type photoelectric cathode, the absorption rate at 800-1000 nm near-infrared band is improved by 40.27% compared with that of the traditional planar film type photoelectric cathode, the problem that the absorption of the traditional planar film type photoelectric cathode near-infrared band is insufficient is solved, and the photoelectric cathode is suitable for high-performance low-light night vision imaging devices.

The invention discloses a single-layer metasurface near-far field asymmetric image display device and method, and relates to the technical field of metasurface optics. The metasurface is formed by periodically arranging diatomic super units composed of direction-insensitive atomic nano-columns and direction-sensitive atomic nano-columns, and asymmetric image display of a near field and a far field is achieved by decoupling polarization and phases of forward and reverse incident light. When the same linearly polarized light enters from the forward direction and the reverse direction respectively, the metasurface can generate different or the same holographic image in a far field and generate a binary image or no image in a near field, and three-channel image display (two holograms and one binary image or two binary images and one hologram) can be realized by controlling the incident light direction and the super-unit structure parameters. The method does not need a multi-layer structure, simplifies the design, expands an image display channel, and can be applied to the fields of optical anti-counterfeiting, information encryption and the like.

The invention discloses a shape memory polymer micro-nano column array preparation method based on femtosecond laser processing, and belongs to the technical field of bionic adhesive materials. According to the method, an epoxy resin type shape memory polymer serves as a matrix, an anodic aluminum oxide template and a femtosecond laser micromachining technology are combined, a nano-column array is formed through AAO template copying, then a micron-column array is formed on the surface of the template through femtosecond laser machining, and finally the micron-nano composite column array with the gecko foot imitating structure is obtained. The method has the advantages of being high in machining precision, high in structural controllability, simple in process, capable of achieving large-area preparation and the like, and is suitable for material preparation in the fields of bionic adhesion, micro-nano sensing, intelligent surfaces and the like.

The invention relates to a silicon oxide filled GST phase change shallow trench pixel-level electronic control metasurface structure and a processing method thereof. The metasurface structure comprises a silicon substrate, a silicon oxide layer and a top ITO electrode from bottom to top. A shallow trench is arranged in the silicon oxide layer, and a bottom layer ITO electrode and a GST nano column are deposited in the shallow trench from bottom to top; the GST nanorod is made of a GST phase change material and is connected with the bottom layer ITO electrode and the top layer ITO electrode; the bottom layer ITO electrode and the top layer ITO electrode are arranged in an orthogonal mode. According to the method, the problem of phase change structure damage caused in high-temperature deposition and plasma etching processes is solved, meanwhile, the process complexity and the process stability are optimized, and the metasurface machining cost is reduced.

The invention discloses a cascade metasurface-based dual-function tunable optical device and a design method, and relates to the technical field of tunable metasurfaces. According to the optical device, high-refractive-index medium nano-columns with different sizes are arranged on an upper low-refractive-index medium substrate and a lower low-refractive-index medium substrate according to a specific mode to form a cascade metasurface structure, an upper metasurface and a lower metasurface included in the cascade metasurface have independent 2pi phase regulation and control capabilities under two kinds of orthogonal polarized light, and the two layers of metasurfaces have independent 2pi phase regulation and control capabilities under two kinds of orthogonal polarized light. Two wavefront regulation and control functions of polarization multiplexing can be realized; furthermore, the cascaded metasurface device adopts a mechanical tuning mode, and dynamic tuning of a double-wavefront regulation and control function can be realized by controlling relative horizontal displacement between the upper and lower layers of metasurfaces. Wherein the total phase of the cascaded metasurface is represented as a dynamic functional phase 1 under the polarization state 1, and is represented as a dynamic functional phase 2 under the polarization state 2. According to the invention, the double-layer structure design of the cascade metasurface is adopted, the total phase of the cascade metasurface is a dynamic deflection phase under X polarization by taking the functions of light beam dynamic scanning and a zoom lens as examples, and the displacement-related light beam deflection can be realized under different relative displacement conditions; and under Y polarization, a dynamic focusing phase is presented, and focal length adjustment along with relative displacement change can be realized. That is, the cascaded metasurface is an optical device which realizes dual-function dynamic tuning through horizontal displacement.

The invention relates to an optomechanical system for monitoring the mechanics of a sample, comprising: a photonic crystal (1, 2) with a substrate (1) and an array of transversally extending nanopillars (2) defining at least one row (3); a nanopillar cavity (4) for confining light and acting as a sensor for the sample; and a mirror region (5) formed in the array of nanopillars (2), the cavity (4) and the mirror region (5) being configured to prevent the propagation of light with Transverse-Magnetic (TM) polarization; the nanopillars (2) being spatially arranged to create a gradient of effective refractive index along the cavity (4), the maximum value of the effective refractive index inside the cavity (4) being lower than the effective refractive index of the mirror region (5).

Disclosed herein are approaches for forming nanopillars of an image sensor. One method of forming an image sensor may include forming an etch stop layer atop a spacer layer, wherein the spacer layer is formed over a color filter, and forming a first optical material layer over the etch stop layer. The method may further include forming a plurality of pillars from the optical material layer, forming an opening through a first pillar of the plurality of pillars, the opening exposing the etch stop layer, and removing the etch stop layer by performing a wet etch through the opening, wherein the wet etch forms a cavity beneath the plurality of pillars. The method may further include forming a second optical material layer within the cavity.

The invention discloses a preparation method of a shape memory polymer nanorod array, and belongs to the technical field of bionic adhesive materials. According to the method, on the basis of an anodic aluminum oxide template, hydrophilic or hydrophobic chemical modification is carried out on the surface of the anodic aluminum oxide template, the surface wettability of a template pore channel is adjusted, and then the permeation behavior of an epoxy resin precursor in the pore channel is controlled. The preparation method comprises the following specific steps: modifying an AAO template, preparing and defoaming an epoxy resin mixture, filling the template, curing, removing an aluminum substrate, dissolving an aluminum oxide layer, and finally obtaining the shape memory polymer nanorod array with high Young modulus (1-20 GPa). According to the method, a template method is combined with chemical modification, the process steps are clear, the conditions are mild, the method is particularly suitable for preparing a hard micro-nano composite structure matched with the mechanical property of a gecko script characteristic material, and an effective technical support is provided for research of a high-performance dry adhesive material.

A surface-enhanced Raman scattering substrate, including: a base layer; a nanopillar structure layer, which is formed on the base layer by means of nanoimprint lithography, and has a nanopillar array structure; and a thin film, which covers and is formed, by means of an oblique deposition evaporation process, on the top of the nanopillar array structure and at least one vertical side wall of the nanopillar array structure, wherein the thin film has a surface-enhanced Raman scattering effect and has an oblique angle.

The invention provides a large-area polycrystalline diamond GaN heterostructure with a slowly-changing Sc component transition layer and a preparation method of the large-area polycrystalline diamond GaN heterostructure. The preparation method comprises the steps that polycrystalline diamond is pretreated, and a polycrystalline diamond substrate is obtained; performing etching mask deposition and patterning on the polycrystalline diamond substrate, and forming a plurality of nano columnar structures in the upper region of the polycrystalline diamond substrate; carrying out magnetron sputtering on a first ScAlN transition layer with 35% of Sc component at the nano columnar structure; epitaxially growing a second ScAlN transition layer with 30% of Sc component on the first transition layer; epitaxially growing a third ScAlN transition layer with 20% of Sc component on the second transition layer; epitaxially growing a fourth ScAlN transition layer with 10% of Sc component on the third transition layer; and epitaxially growing a GaN epitaxial layer on the fourth transition layer. According to the method, the magnetron sputtering technology and the epitaxial ScAlN technology are combined, the respective advantages are exerted, the large-area and high-quality diamond-based GaN silbby batch is prepared, and good conductivity, high thermal stability and high reliability are achieved.

The invention discloses a titanium-steel composite plate structure for ocean engineering and a preparation method of the titanium-steel composite plate structure, and belongs to the technical field of ocean engineering materials.The composite plate comprises a titanium plate, a steel sheet and a gradient functional layer arranged between the titanium plate and the steel sheet, and the gradient functional layer is composed of a titanium side MOF enrichment layer, a component gradual change transition layer and a steel side enhancement layer; the surface of a titanium plate is subjected to nanoscale rough oxidation treatment, a nano-pillar array structure is constructed on the surface of a steel sheet, high-strength combination of a heterogeneous metal interface and collaborative improvement of marine corrosion resistance are achieved, and a gradient coating technology of electrostatic spraying, aerosol spraying and slit coating is adopted in the preparation process; and the titanium-steel composite plate for ocean engineering is prepared by matching vacuum hot-pressing bonding and cooling technologies.

The invention discloses a dielectric computer-generated holographic optical element based on electrochemical nanoimprint and a preparation method thereof, and the method comprises the steps: carrying out the optimization design of the parameters of a unit structure of the dielectric computer-generated holographic optical element through numerical simulation, and obtaining an optimal parameter combination; obtaining a target hologram and a phase distribution diagram corresponding to the target hologram, determining an optimal parameter corresponding to the phase distribution diagram, and obtaining an arrangement diagram of a unit structure of the corresponding dielectric computer-generated holographic optical element; preparing a metalized template; providing a dielectric material substrate; based on a metalized template and a dielectric material substrate, a nano cavity structure complementary with the structure of a nano column in the metalized template is generated in the dielectric material substrate by adopting an electrochemical nano imprinting technology, and a three-dimensional micro-nano structure with a periodic unit structure array is formed. And obtaining the dielectric computer-generated holographic optical element corresponding to the target hologram. According to the invention, high-fidelity copying of the three-dimensional nanostructure can be realized.

The invention discloses a long-afterglow self-luminous material based on multi-element rare earth synergistic sensitization and a preparation method thereof. SrAlO is used as a matrix, trap level distribution is optimized through ternary rare earth synergistic doping according to the molar ratio of Eu to Dy to Nd being 1: (0.4-0.6): (0.2-0.4), and a ZnO nanorod array is grown on the surface of a light-emitting core in an in-situ epitaxial mode to improve the light extraction efficiency; and a hydrophobic modified SiO core-shell coating layer with an ordered mesoporous channel is combined, and oxygen diffusion is promoted by utilizing a nanopore channel so as to accelerate trap regeneration and synchronously inhibit non-radiative recombination. The afterglow time of the material is not less than 8 hours, and the afterglow retention rate after aging at 60 DEG C is not less than 80%. A solid-phase synthesis process and red mud / fly ash industrial solid waste raw materials are adopted, and the carbon emission intensity is smaller than or equal to 6 kgCO / kg. The material can be widely applied to the fields of green traffic infrastructures such as expressways and tunnels.

The invention discloses an optical fiber surface plasmon probe for high-sensitivity hydrogen sensing, and relates to the technical field of optical fiber sensing, and the optical fiber surface plasmon probe comprises a spatial dislocation type double-layer structure which is integrated on the end face of an optical fiber and comprises a first nano-structure on the upper layer and a second nano-structure on the lower layer, the first nano structure and the second nano structure are arranged in a triangular lattice array; the optical cement is arranged at the top of the end face of the optical fiber, and a plurality of dielectric nano-columns arranged in an array are arranged at the top end of the optical cement and used for forming a staggered gap length between the first nano-structure and the second nano-structure; the equivalent dielectric cavity is arranged between the first nanostructure and the second nanostructure and consists of air among the dielectric nanocolumns; wherein the first nano-structure and the second nano-structure are both made of hydrogen-sensitive metal materials. The light weight characteristic of the optical fiber and the high sensitivity advantage of the micro-nano structure are combined, and the sensitivity bottleneck of an existing optical fiber hydrogen sensor is broken through.

The invention discloses a spectrum polarization detection method based on a quasi-continuous domain bound state metasurface, and belongs to the application field of micro-nano optics and spectrum polarization detection. The implementation method comprises the following steps: adopting a symmetrical broken elliptical amorphous silicon nano-column arrangement mode to obtain a metasurface structure unit with a narrow-band formant, a high-quality factor and linear polarization dependence; the method comprises the following steps: analyzing a change rule of resonance wavelength along with geometric parameters of a structural unit and a change rule of resonance intensity along with a polarization state of incident light through numerical simulation to obtain a series of metasurface structures with different resonance wavelengths and different polarization responses, reasonably arranging the metasurface structures, processing a metasurface sample, and testing a reflection spectrum of the metasurface sample, and the spectrum and polarization response characteristics are calibrated. A spectrum polarization detection system composed of a detection target, a metasurface and a CMOS detector is built, and the spectrum and polarization information of the target is detected based on the spatial position arrangement of the metasurface structure and the Stokes relation by using gray information shot by the CMOS detector.

The application discloses a kind of light field regulation detection method and device based on computing spectral reconstruction, belong to spectral analysis technical field.The method is by introducing medium-metal composite nanostructure, integrates metal nanoisland array and silicon nitride nanocolumn array on quartz substrate, realizes electric field enhancement using the local surface plasmon resonance effect excited by metal nanoisland array, simultaneously realizes wide spectral range phase coding by medium nanocolumn array;Super surface chip is integrated with single point detector, combines pre-calibrated super surface sensing matrix A and enhancement factor matrix E, and reconstructs spectrum using compressed sensing or Tikhonov regularization algorithm.The application keeps the advantages of miniaturization and no moving parts, realizes directional high sensitivity detection to weak signal, and signal-to-noise ratio is improved.

The present invention provides a detection system for enhancing D-dimer immunochemiluminescence signals, comprising a resonant metasurface, a reaction module, a photoelectric detection module, and a data processing module. The resonant metasurface comprises a plurality of periodically arranged metasurface units; the metasurface units comprise a plurality of nanopillars with elliptical cylindrical structures, arranged in a zigzag array; the nanopillars are made of a high-refractive-index material with a refractive index greater than 1.3; and the nanopillars have a subwavelength structure. This system, based on the BIC metasurface for enhancing D-dimer immunochemiluminescence signals, combines high sensitivity, high specificity, and portability, overcoming many limitations of existing D-dimer detection technologies and enabling rapid and accurate detection of D-dimer.

The invention belongs to the technical field of electronic packaging and printed circuit boards, and particularly relates to a method for improving the bending resistance of a flexible circuit board, which comprises the following steps: after plasma pretreatment is carried out on the surface of a polyimide substrate, a three-dimensional nano-column array structure is constructed by depositing gold nanoparticles as a mask and combining reactive ion etching; then removing the mask to obtain a clean polyimide nano structure; and depositing a titanium / copper seed crystal layer through magnetron sputtering, and realizing conformal filling and coating of the copper conductive layer on the nano structure by adopting pulse reverse electroplating to form an adhesive-free mechanical interlocking interface. An adhesive-free three-dimensional mechanical interlocking structure is used for replacing an adhesive layer which is weak in physical performance and prone to fatigue failure, and the structural weak link that a traditional flexible circuit board is layered and cracked first under dynamic bending stress is thoroughly removed.

The invention provides a nitride epitaxial wafer, a preparation method of the nitride epitaxial wafer and a Micro-LED. The nitride epitaxial wafer comprises a heterogeneous substrate, a composite column structure, a nitride buffer layer, an n-type nitride layer, a light-emitting layer and a p-type nitride layer. The composite column structures are distributed on the surface of one side of the heterogeneous substrate at intervals, and each composite column structure comprises a plurality of composite Si nano columns and a composite nano layer wrapping the surfaces of the composite Si nano columns; the composite Si nano column comprises a first composite Si nano column and a second composite Si nano column; the height of the first composite Si nanorod is different from that of the second composite Si nanorod; the nitride buffer layer covers the composite column structure, and the surface of one side, far away from the substrate, of the nitride buffer layer is a horizontal plane; the light-emitting layer comprises at least one light-emitting unit, and each light-emitting unit comprises an In-containing quantum well layer and a nitride quantum barrier layer which are arranged in a stacked mode. According to the invention, the brightness, electric leakage and ESD antistatic release performance of the nitride epitaxial wafer can be improved.

The invention discloses a controllable nanorod array SERS (Surface Enhanced Raman Scattering) chip-based digital detection device for a serous ovarian cancer exosome phenotype as well as a detection method and application thereof, and relates to the technical field of biological detection. The device comprises a controllable nanorod array module, a high-sensitivity SERS probe module, an integrated microfluidic platform module and a digital analysis module. The controllable nanorod array module is used for accurately capturing a single exosome; the SERS probe module realizes specific recognition of multiple biomarkers on the surface of the exosome by conjugating a specific antibody and a Raman reporter molecule; the micro-fluidic platform module integrates filtering, reaction and imaging functions, so that high-throughput and automatic detection is realized; and the digital analysis module completes qualitative and quantitative analysis of exosome phenotypes. The problems that a traditional detection technology cannot analyze the phenotype difference of single exosomes, the sensitivity is low and the flux is insufficient are solved, early accurate diagnosis of the serous ovarian cancer can be achieved, and the kit has wide clinical application prospects.

The polarization diffraction spectrometer comprises a substrate and a plurality of rectangular nano-columns arranged on the substrate, the rectangular nano-columns are periodically stacked or arranged in the height direction to form a periodic superlattice unit, and the substrate layer is made of a nanoscale transparent medium material; according to a grating equation, the optimal diffraction series, the period length and the incident light wavelength of the super grating are selected through experimental simulation, and optimal structural parameters are determined by combining an electromagnetic simulation tool and an optimization algorithm; the heights, the widths and the intervals of the rectangular nanocolumns serve as parameters of a particle swarm optimization algorithm, a fitness function with target diffraction order energy concentration ratio and target order overall diffraction efficiency optimization serving as core indexes is constructed, full-wave optical simulation software is combined, and geometric distribution in periodic units of the rectangular nanocolumns is optimized and adjusted. According to the invention, under the incident condition of 45-degree linearly polarized light, the S polarization component and the P polarization component are respectively concentrated at the preset target diffraction order, and an efficient diffraction light splitting effect is achieved.

This invention discloses a metasurface structure and a refractive index detector. The metasurface structure is simple, consisting only of a substrate and an array of nanopillars disposed on the first surface of the substrate. By defining the orientation angle of each nanopillar in the array, the metasurface structure can obtain spatial refractive index information by reading the focal position information on the focal plane, which is then used for refractive index detection. The metasurface structure of this invention has a size of only tens of micrometers, a flexible detection range, and its results can be clearly presented on the focal plane without requiring complex spectral analysis and calculation modules. This invention has significant implications for the miniaturization of refractive index detectors.

The invention relates to a nickel-molybdenum-based self-supporting hydrogen evolution electrode and a preparation method and application thereof.The preparation method comprises the following steps that a substrate is placed in a water bath reaction solution to be subjected to a water bath reaction, and a water bath reaction precursor is obtained after the water bath reaction is finished; and carrying out nitriding treatment on the water bath reaction precursor to obtain the nickel-molybdenum-based self-supporting hydrogen evolution electrode, the water bath reaction comprises at least two heating processes, and cooling is carried out between two adjacent heating processes. Through at least two times of heating in the water bath reaction process, a mutually cross-linked and supported nanorod structure is formed, the technological process is simplified, the preparation period of the electrode is shortened, and the electrode has good electrochemical activity and mechanical strength; the water bath reaction is matched with the nitriding treatment, so that the oxygen element in the precursor can be eliminated, the Ni-Mo electronic structure is regulated and controlled, and the catalytic activity and the stability of the self-supporting hydrogen evolution electrode are improved.

The invention relates to a three-dimensional optical control method based on a metasurface, and the method comprises the steps: scanning a nano-column unit structure to construct a phase library, selecting high-efficiency half-wave plate nano-columns with phase coverage from-pi to pi from the phase library for the construction of the metasurface, cooperatively introducing a geometric phase and transmission phase regulation and control mechanism, and combining spatial multiplexing arrangement to construct a metasurface. Independent regulation and control of different circular polarization light fields under different wavelengths are realized, so that four switchable optical control focuses are generated in a three-dimensional space; by switching the polarization state or the working wavelength of the incident light, stable capture and controllable transfer of the particles are realized in the space. Compared with the prior art, the method has the advantages that three-dimensional optical control over particles is achieved in an on-chip structure, the control freedom degree is high, and the control adjusting mode is simple and efficient.

This invention discloses a tunable nanoantenna and its fabrication method, belonging to the field of nanoantenna technology. The tunable nanoantenna comprises, from top to bottom: an ordered metal mesh nanoelectrode layer, Fe... 3 O 4 The invention comprises a magnetic nanosphere layer, a silicon nanopillar micro / nanostructure layer, a substrate layer, and a lower electrode layer. This invention proposes a tunable nanoantenna and its fabrication method. Specifically, this invention combines silicon nanopillars with Fe... 3 O 4 By combining magnetic nanospheres and utilizing their synergistic effect, a composite nanoantenna with magnetic response and optical resonance characteristics can be constructed. This not only breaks through the limitations of single-material control, but also enables more flexible performance control through the dual effects of magnetic and optical fields.

The invention relates to an optical metasurface process detection method and system and a test structure. The method comprises the following steps: acquiring material characteristic parameters of a wafer growth material and a wafer coating material of a target test structure; simulating the metasurface nanorod structure in the to-be-detected area according to the material characteristic parameters to obtain a reference corresponding relation between the color information and the structure characteristic parameters; acquiring color information of each to-be-tested area on the target test structure based on spectral information acquisition equipment, and obtaining an actual corresponding relationship between the color information and structural characteristic parameters by combining the structural characteristic parameters of the unit structures of the super-surface nano-column structure; and under the condition that the error between the reference corresponding relation and the actual corresponding relation is smaller than or equal to a preset error threshold value, determining that the process processing result of the target test structure meets the requirement. According to the process detection method provided by the embodiment of the invention, scanning of SEM equipment is not needed, the equipment cost of process detection can be effectively reduced, and the process detection efficiency is improved.

[Problem] The problem is to provide better optical characteristics. [Solution] Provided is an optical element having a multi-level structure in which a second metasurface layer is directly stacked on a first metasurface layer, the first metasurface layer including a first nanopillar structure in a first film, the first nanopillar structure having a structure formed by planar arrangement of a plurality of first microstructures, the second metasurface layer includes a second nanopillar structure in a second film, the second nanopillar structure having a structure formed by arranging a plurality of second microstructures in a planar manner. The present technology can be applied to, for example, an image sensor including a metasurface element.

The invention belongs to the technical field of micro-nano machining, and particularly relates to a hollow metal nano array and a preparation method and application thereof. According to the invention, a regular polymer nano array is prepared based on an ultraviolet light curing nano imprinting technology and a plasma etching technology; then metal evaporation is carried out in combination with an electron beam evaporation dip angle evaporation process, so that the surface of the polymer nano array is partially coated with metal, and a polymer / metal composite nano array with a notch is obtained; and dissolving by using a solvent to remove the water-soluble polymer nano-columns in the polymer / metal nano-array with the notches, so as to prepare the large-area hollow metal nano-array of which the morphology, the size and the period can be flexibly designed. Sulfydryl benzaldehyde molecules are fixed on the surface of the hollow metal nano array to form an SERS (Surface Enhanced Raman Scattering) substrate which is used for detecting hydrazine hydrate. The SERS substrate prepared on the basis of the hollow metal nano array shows high sensitivity, specificity, repeatability and stability.