141 results about "Fano resonance" patented technology

The invention provides an asymmetric Au particle array and FP cavity coupled refractive index sensor which comprises an insulation substrate, a metal film reflection layer, a transparent medium layer and a two-dimensional metal unit array, wherein at least one surface of the insulation substrate is polished; the metal film reflection layer is deposited on a polishing surface of the substrate; the transparent medium layer is deposited on the metal film reflection layer; the two-dimensional metal unit array is formed on the transparent medium layer, each metal unit in the two-dimensional metal unit array is an asymmetric unit, and is composed of two metal nano columns arranged along the surface of the substrate, and an F-P cavity loop is formed between the two metal nano columns of each metal unit and the metal film reflection layer just below the two metal nano columns. According to the asymmetric Au particle array and FP cavity coupled refractive index sensor, by combining an asymmetric Fano resonance effect and coupling an LSP mode and an FP cavity mode, the full width at half maximum of a resonance valley of the sensor can be reduced, and thus the performance of a local area surface plasma sensor is improved.

The invention relates to a sensor based on Fano resonance characteristics of a dielectric nanostructure. The sensor consists of a transparent substrate to light waves of a working wavelength range and asymmetrical dielectric nano bar pair arrays which are uniformly arranged on the transparent substrate. According to the low loss characteristics of dielectric materials and Fano resonance characteristics of the asymmetrical nano bar pair arrays, high Q-value resonance is generated. Meanwhile, an opening is introduced into a dielectric resonance unit, so that interaction between an electromagnetic field in a Fano resonance mode and ambient environment medium is effectively enhanced, and the sensitivity and quality factor of the sensor are improved. According to the sensor designed by the invention, the quality factor far exceeds that of a similar sensor based on the Fano resonance characteristics of a metal nanostructure, and the sensor disclosed by the invention has significant application prospects in the aspects of chemical and biological sensing, hazardous gas and pollutant monitoring.

The invention relates to a high-sensitivity micro-nano fiber compound type microcavity biochemical sensor. The biochemical sensor consists of a knot type micro-ring resonant cavity and a compound type microcavity, wherein the knot type micro-ring resonant cavity is made of micro-nano fibers, and the compound type microcavity consists of F-P microcavities formed in a manner that a femtosecond laser acts on two sides of the micro-ring resonant cavity. The manufacture method of the biochemical sensor comprises the following steps of: fusing a normal single mode fiber to prepare the micro-nano fiber, manufacturing two reflection mirrors in the micro-nano fiber by the femtosecond laser, and knotting between the two reflection mirrors, thus finally preparing a micro-nano fiber compound type microcavity formed by a micro-nano fiber F-P cavity and a knot type micro-nano fiber ring cavity. The micro-nano fiber compound type microcavity related to the invention has a huge change slope at a central wavelength position due to a Fano resonance spectral line, the tiny environmental parametric variation can be transformed into detectable intensity variation by a steep slope, and the sensitivity of the biochemical sensor can be greatly improved, so that the fast response speed and high-sensitivity micro-nano order biochemical measurement can be realized.

The invention provides a kind of multilayer symmetrical metamaterial capable of generating a Fano resonance enhancing phenomenon and a frequency tunable phenomenon. Through the fact that rectangular crystal lattice arrangement is used in a resonance cell array of the multilayer symmetrical metamaterial (namely, on the surface of the metamaterial, the cycle length of a resonance cell in the horizontal direction is not equal to the cycle length of the resonance cell in the perpendicular direction), electric dipole resonance of the multilayer symmetrical metamaterial is enhanced, the electric dipole resonance interacts with strong magnetic dipole resonance of the metamaterial, the Fano resonance phenomenon in the transmission spectrum of the metamaterial is enhanced, a steep asymmetrical harmonic peak is achieved, and therefore the technical problem that shift and intervals of resonant wave length must be far larger than the resonant cavity bandwidth is solved, and wavelength resolution of the multilayer symmetrical metamaterial and sensitivity of exploration conducted on refractive index change of living beings by the multilayer symmetrical metamaterial are improved. The Fano resonance quality factor of the structure increases along with the increase of the cycle length of the resonance cell in the horizontal direction or along with the increase of the cycle length of the resonance cell in the perpendicular direction. Meanwhile, the Fano resonance wavelength of the structure reduces along with the increase of the cycle length of the resonance cell in the horizontal direction or along with the increasing of the cycle length of the resonance cell in the perpendicular direction (blue shift), and therefore tuning of the Fano resonance can be achieved.

The invention discloses a nano-meta-material full-color-gamut palette and a preparation method thereof. Electron beam photo-etching and reactive ion etching technologies are adopted; a transverse undercutting effect is utilized for obtaining a sub-wavelength periodic-structure array, which suspends above a dielectric layer, on a substrate; a metal film is deposited in the direction perpendicular to the substrate; and forming a metal nanostructured array-metal complementation nanostructured array film coupled structure. The sub-wavelength meta-material shows a mixed surface plasma resonance mode in a visible light spectrum and generates specific optical responses such as multiple resonance peaks, FANO resonance, angle-dependent spectrum adjustability and hundreds of thousands of times field enhancement, so that continuous and adjustable colors can be obtained in a structural unit. The nano-meta-material palette can generate full-color-gamut colors in a CIE chromaticity diagram, and the color pixel can be reduced to one hundred to hundreds of nanometers. The technology provided by the invention has an important application prospect in the fields such as product production, high-definition displaying, artistic creation, orientation sensing, photon codes and information storage.

The invention provides a sensor based on gold nanorod dimer array Fano resonance characteristics. The sensor comprises a transparent substrate. The sensor is characterized in that two or more gold nanorod dimmers are arranged uniformly on the transparent substrate, and each gold nanorod dimer is formed by arranging two same gold nanorods in parallel. According to the sensor based on a gold nanorod dimer array structure of the invention, the Fano resonance characteristics of the array are utilized, and the sensing quality factor and the sensitivity are improved.

The invention provides a Fano resonance sensing apparatus based on an axisymmetric optical micro-cavity. The Fano resonance sensing apparatus comprises an axisymmetric optical micro-cavity and a coupled waveguide, wherein the axisymmetric optical micro-cavity has a columnar shape and comprises a straight cylinder type solid cylinder micro-cavity, a straight cylinder type hollow cylinder micro-cavity, a microbubble-like solid cylindrical micro-cavity, a microbubble-like hollow cylindrical micro-cavity, a micro ring cavity, a metal-coated cylindrical micro-cavity and the like, the material of the micro-cavity is silicon dioxide, a macromolecule polymer, an optic crystal, a semiconductor material and the like, and the coupled waveguide is optical fibers with a diameter of 0.5-1.5 [mu]m, a coupled prism having high refractive index, an on-chip integrated waveguide and the like. According to the present invention, the discrete high-order echo wall mode in the micro-cavity and the continuous background light are subjected to offset interference, such that the dynamically-changing Fano resonance spectrum can be stably and effectively produced.

The invention discloses a full-medium metasurface refractive index sensor based on polarization insensitive Fano resonance. The full-medium metasurface refractive index sensor is sequentially composedof a medium substrate and a medium metasurface microstructure unit array from bottom to top; the medium metasurface microstructure unit array is composed of a plurality of medium metasurface microstructure units; and each medium metasurface microstructure unit is composed of three V-shaped medium antennas, wherein the three V-shaped medium antennas are in mirror symmetry with respect to a plane (x=0) and have 120-degree rotational symmetry. The full-medium metasurface refractive index sensor is insensitive to the polarization state of any normal accident light, can generate Fano resonance, and has high-quality factors and high sensitivity, and the measurement needs in practical application are met.

The invention provides a terahertz metasurface biosensor based on Fano resonance, and a preparation method thereof. An ultrathin flexible polyimide film is used as a substrate of the sensor, and a periodically arranged metal asymmetric split ring structure is prepared on the upper surface of the sensor. When a line-bias terahertz wave of which the electric field vibration direction is parallel tothe structure opening direction is vertically incident, the Fano resonance effect can be excited, and a sharp asymmetric transmission spectrum line type is generated. Based on the metasurface design of Fano resonance, the ultrathin polyimide with low dielectric constant and low loss is used as the substrate, so that the detection sensitivity can be further improved, and the trace detection is realized. The terahertz metasurface biosensor has the advantages of low preparation cost, good ductility, small size, simple and convenient measurement and the like, and can be widely applied to terahertzwave spectrum biosensing.

The invention provides a multilayer symmetric metamaterial based on a phase-change material or a topological insulating material. A resonant unit array of the multilayer symmetric metamateiral is arranged in a rectangular lattice form (namely, on the surface of the metamaterial, the horizontal cycle length Lx and the vertical cycle length Ly of a resonant unit are not equal), so that steep asymmetric Fano harmonic peaks exist in the transmission spectrum of the multilayer symmetric metamaterial; and then, the phase-change material or the topological insulating material is introduced into the multilayer symmetric metamaterial, and the Fano resonant frequency is tunable, so that the technical problem that the Fano resonant frequency cannot be changed after determination of the metamaterial structure is solved. The characteristic that the dielectric coefficient of the phase-change material or the topological insulating material changes along with the change of an extra electric field or the temperature is used in the invention, so that the tunability function of the Fano resonant frequency in the multilayer symmetric metamaterial is realized, and the maximum adjusting amplitude can be up to 40 percent.

The invention discloses a refractive index sensor based on double-Fano resonance. The sensor comprises a metal-insulator-metal waveguide; a metal partition in the waveguide takes the waveguide as thecenter, and the two sides of the waveguide are respectively provided with a rectangular cavity A and a rectangular cavity B; the rectangular cavity A is parallel to the waveguide, and the rectangularcavity B is vertical to the waveguide; the width of the metal-insulator-metal waveguide is w; the thickness of the metal partition is dm; the width and height of the rectangular cavity A are respectively L1 and H1; the distance between the rectangular cavity A and the waveguide is G1; the width and height of the rectangular cavity B are respectively L2 and H2; and the distance between the rectangular cavity B and the waveguide is G2. Optical waves can be coupled into the rectangular cavities at the two sides when being transmitted in a waveguide core; when a resonance condition is met, the Fano resonance is formed, and a corresponding resonance peak appears on the transmission spectrum of the Fano resonance. The Fano resonance is a weak coupling effect and is particularly sensitive to changes of structural parameters; the refractive index of filling mediums in the rectangular cavities at the two sides is changed to enable the Fano resonance peak to be deviated, so that the sensing of the refractive index of the medium is realized.

The invention provides a multilayer asymmetrical metamaterial capable of realizing Fano resonance enhancement. By moving resonant cells of the multilayer metamaterial away from the center positions of the resonant cells, the resonance of the electric dipoles of the resonant cells is enhanced and interacts with the resonance of the strong magnetic dipole of the metamaterial, a single Fano resonance peak in the transmission spectrum of the metamaterial is split into two asymmetrical resonance peaks and the dispersion characteristic of one resonance peak is steeper, so that the Fano resonance enhancement is realized, the technical problem that the deviation and the interval of resonance wavelength must be far more than that of resonant cavity bandwidth is solved, and the wavelength resolution of the metamaterial and the sensitivity of the metamaterial to the detection of biological sample refractive index change are improved. At the same time, by adopting the structure, the quality factor of the Fano resonance is increased with the distance of deviation of the resonant units from the center positions of the resonant units.

The invention discloses an asymmetric metamaterial capable of enhancing absorption by a fanno resonance on a near-infrared band. A resonant element of the metamaterial is removed from the center position thereof and rotated at an angle; and the transmission property of the resonant element on an electromagnetic wave is changed, so that an original dipole is changed into a quadrupole; and the resonance is enhanced. A sharp fanno resonance with a high-quality factor is formed on the near-infrared band, so that absorption on a near-infrared light is enhanced. The asymmetric metamaterial can be applied to the fields of a photocell, a slow light, sensing, nonlinearity, a photoswitch and the like.

The invention discloses an all-optical switch based on a sulfur phase-change material and a preparation method thereof, and belongs to the field of optical communication. The all-optical switch comprises a coverage layer film, a sulfur phase-change material film, an isolation layer film, a silicon photonic crystal and a substrate which are sequentially stacked. The silicon photonic crystal comprises a nanometer porous structure, and the silicon photonic crystal has the fano resonance effect. When the all-optical switch is in use, the state of the sulfur phase-change material film is controlledthrough laser, the resonance state of the silicon photonic crystal is regulated, the signal light transmissivity is modulated, the modulation range is the communication wave band being 1,500 nanometers to 1,600 nanometers, and the optical switch is obtained. The all-optical switch has the advantages of being high in contrast ratio and speed and low in power consumption. The structure is simple, the production cost can be lowered, and the switch is suitable for CMOS integrated, capable of being easily matched with a modern semiconductor technology production line, and applicable to industrialproduction and productization.

The invention discloses an ultrahigh-precision wavelength resolver based on Fano resonance. A waveguide beam splitter is connected with an input end of a plurality of Fano filters; output ends of the Fano filters are connected to a signal processing module through the respective Fano filters; light to be detected is split into a plurality of bundles of light through the waveguide beam splitter; the plurality of bundles of light enter the Fano filters respectively, and are filtered, and then signals are output to a Ge-Si photoelectric detector; each Fano filter is internally provided with a TiN thermal electrode; and a Fano filtering spectral line is generated by adjusting the output of the Fano filters through heating the TiN thermal electrodes, so that an X-shaped frequency spectrum is formed. The ultrahigh-precision wavelength resolver based on the Fano resonance can realize ultrahigh-precision wavelength detection in an X frequency spectrum range; and the device is made of a common SIO silicon sheet, and has good CMOS (Complementary Metal Oxide Semiconductor) technical compatibility and can be integrated in a large scale.

The invention discloses a multiple nano-rod dimer array structure, a manufacture method thereof, a method for exciting the Fano resonance of the multiple nano-rod dimer array structure, and an optical sensor comprising the multiple nano-rod dimer array structure. In the structure, appropriate refractive index, transverse gaps, longitudinal gaps and lengths are selected, such that the structure has good Fano resonance characteristics. Under the vertical effect of incident light with an electric field polarization direction parallel to a nano-rod long axis direction, the Fano resonance of the structure is strongly excited. With the structure, the sensitivity of the optical sensor can be greatly improved. Therefore, the invention has important influence on the improvement of the performance of optical sensors.

The invention discloses a micro-nano optical switch based on surface plasmon fano resonance. The micro-nano optical switch based on the surface plasmon fano resonance comprises a transparent substrate and is characterized in that a metal film layer, a nematic phase liquid crystal orientation conversion layer and a polarizer are superposed on the transparent substrate in sequence. The polarizer gives an initial direction of polarization to transmitting light, and the nematic phase liquid crystal orientation conversion layer is used for receiving the transmitting light having the initial direction of polarization and controlling a direction of polarization of the light transmitted through the nematic phase liquid crystal orientation conversion layer. A separate metal hole tetramer unit configuration or an array topological configuration formed by performing square arrangement or hexagonal arrangement on metal hole tetramer units is etched on the metal film layer, and four holes in the metal hole tetramer unit configuration are symmetrical in a D2h cluster mode and have orthogonal short axes and long axes. When the direction of polarization of the light transmitted through the nematic phase liquid crystal orientation conversion layer is parallel to the short axes, an optical path is opened, otherwise, the surface plasmon fano resonance is excited, and the optical path is closed. The micro-nano optical switch based on the surface plasmon fano resonance has all the advantages of liquid crystal optical switches and a wavelength selection function, while the traditional liquid crystal optical switches do not have the wavelength selection function.

The invention provides an LSPR (localized surface plasma resonance) sensing device. The LSPR sensing device comprises a substrate, wherein the substrate is provided with a metal layer, the metal layer is in an XI shape, and the size of XI is of a nano grade. The LSPR sensing device prepared through the method establishes an asymmetric XI nano gold structure, a specific peak in the LSPR phenomenon can be produced independently by the X and I structure; after the XI structure is formed by combining the X structure and I structure, the spectrum of the two structures can be collectively heterozygozed, and a multipeak phenomenon occurs; the XI structure can have a coupling effect, so that the heterozygosis peak is deviated; the DNA detection precision and sensitivity can be greatly improved; the noise caused by the nonuniform structure caused by a traditional method can be avoided, the situation that the peak is widened due to the disorder structure can be avoided, the heterozygosis of the specific spectrums of the two structures is resonated with Fano produced by the asymmetric structure, so that the LSPR sensor is more accurate in detection.

The invention discloses a double-layer coupling type Fano resonance sensor based on graphene and belongs to sensing devices in the technical field of infrared, and the surface plasma characteristics of the graphene are utilized; the sensing device is in a three-dimensional periodic structure and structurally comprises a silicon substrate layer, a silicon dioxide substrate layer, a graphene disk middle layer, a silicon dioxide isolation layer and a graphene disk top layer; the transmittance spectrum of the double-layer coupling type Fano resonance sensor based on the graphene in the middle-infrared band is computed and simulated with a finite element method, the sensor structure is optimized, high-performance Fano resonance can be stimulated in the middle-infrared band, the resonance curveis sensitive to the change of substance refractive indexes, and the detection functions on gas and liquid in the middle-infrared band are provided. The double-layer coupling type Fano resonance sensorbased on the graphene is simple, compact and reasonable in structure and convenient to process.

The invention belongs to the technical field of micro-nano photoelectric device electromagnetic wave regulation and sensing detection, and particularly relates to a far-infrared domain polarization-insensitive all-dielectric super-surface structure and a manufacturing method thereof. The super-surface comprises a substrate and a concentric double-closed dielectric resonance loop unit located on the surface of the substrate and distributed in the two-dimensional periodicity; used base materials of the substrate and concentric double-closed dielectric resonance loop unit are all-dielectric materials. The super-surface is insensitive to the polarization of excitation electromagnetic waves due to the high symmetry of the structure; the Fano resonance line font with high modulation depth and high Q values in a far-infrared domain can be obtained through the modulation of geometric parameters; because the preferred base materials for constructing the super-surface are all-dielectric Si and SiO2 materials, the process is mature, simple and easy to operate, and the manufacturing cost is low.

The invention discloses a device and a method for measuring the detection limit of a Fano resonance sensor. The device comprises a laser, a collimating objective lens, a polarizer, a sensor, a polarization detector, a focusing objective lens and a spectrometer. The sensor comprises a coupling prism, an Au film, a Cytop film, a TiO2 film, and a sensing medium. Compared with other polarization measuring devices, the device adopts the coupling of a surface plasma polariton mode and a planar waveguide mode formed in a multilayer medium to generate the Fano resonance, so that the detection limit ofthe plasma sensor is further improved; the structure is simpler by replacing original two polarizers with one polarizer; more importantly, the polarization effect of a reflected light is analyzed byadopting the method for measuring the Fano resonance sensor, and the traditional reflected light intensity detection is replaced with a polarization function, so that the detection limit of the Fano resonance sensor is remarkably improved.

An MIM type nanorod dimer capable of realizing triple Fano resonance adopts a metal-insulator-metal (MIM) type nanorod dimer structure, and realizes triple Fano resonance through exciting magnetic surface plasmons (MSPs) to obtain triple Fano resonance; and two MIM type nanorods with completely same dimensions are arranged in a side-to-side manner in the xy plane, the material of two metal layers is gold (Au), the thicknesses of the two metal layers are same, and a dielectric layer between the two metal layers is silica (SiO2). The MIM type nanorod dimer structure is simple, is easy to prepare, can realizes triple Fano resonance, and can be used to design and produce multi-wavelength optoelectronic devices; and when the MIM type nanorod dimer structure is used in biochemical sensing, the low loss characteristic of Fano resonance and the common sensing using multiple wavelengths with different sensitivities make the sensing sensitivity and the sensing accuracy be improved.

The invention provides a micro-nano optical detection device and a micro-nano optical detection system and relates to the technical field of optical detection. The micro-nano optical detection device comprises a first cover plate, a second cover plate and a conduction assembly, wherein the conduction assembly is arranged between the first cover plate and the second cover plate; the first cover plate and the second cover plate are used for preventing electromagnetic waves conducted through the conduction assembly from being leaked; the conduction assembly comprises a first waveguide, a second waveguide and a resonant cavity; the first waveguide and the second waveguide are arranged at two opposite sides of the resonant cavity; the first waveguide, the resonant cavity and the second waveguide are used for conducting light with specific wavelengths. According to the micro-nano optical detection device provided by the embodiment of the invention, the light is coupled into the resonant cavity to generate Fano resonance or Lorentz resonance; light to be detected at a specific waveband is transmitted in a manner of coupling the light from one end of the first waveguide to one end of the second waveguide through the resonant cavity; whether the light with the specific wavelengths passes through the micro-nano optical detection device or not can be detected, so that a transmission condition of the specific wavelengths is detected.

The invention discloses a multi-wavelength adjustable nanosensor capable of realizing Fano resonance. The multi-wavelength adjustable nanosensor comprises a substrate and a nanostructure arranged on the substrate, wherein the nanostructure comprises a cavity, an input waveguide, an output waveguide, double nanorings located in the cavity and a nanostrip located in the center of the double nanorings, wherein the input waveguide and the output waveguide are located on two sides of the cavity and oppositely arranged; the double nanorings comprise an outer nanoring and an inner nanoring which are distributed concentrically, and each of the outer nanoring and an inner nanoring comprises at least two symmetrically distributed split ports; the angle of a longitudinal direction, relative to an electromagnetic wave signal input / output direction, of any edge of the nanostrip is adjustable, so that the sensor realizing different transmissivity is obtained. The multi-wavelength adjustable nanosensor capable of realizing Fano resonance is designed on the basis of the principle of a metal surface plasmon effect, is simple in structure, convenient to manufacture, high in sensitivity and wide in adjusting range and is applicable to detection and monitoring in the fields of chemistry, medical treatment, environment and the like.

The invention provides an adjustable Fano resonance integrated device. The device comprises a substrate, and further comprises a micro-ring waveguide and a coupling straight waveguide which are integrated on the substrate, wherein grating reflectors which are arranged on a top surface of a coupling straight waveguide and are positioned at two ends of a coupling region, and a micro heater which isarranged above the micro-ring waveguide. The invention further provides a manufacturing method of the device, a grating is etched on a top surface of the coupling waveguide to form the partial reflectors, a Fabry-Perot resonant cavity is formed between the two partial reflectors and acts with the micro-ring resonant cavity, namely, the micro-ring resonant mode is coupled with the Fabry-Perot resonant mode, and a Fabry-Perot resonant spectral line is formed at an output end. The resonance wavelength of the micro-ring is thermally adjusted by externally applying a voltage to the micro heater, sothe resonance wavelength and slope of the Fano resonant spectral line can be flexibly adjusted. The device can stably generate high-sharpness fano resonance spectral lines, can be used for large-scale tape-out production of a general semiconductor micromachining platform, and has a high application prospect.

The invention is a method of Fano resonance microwave spectroscopy of high absorption matter. The method comprises: embedding a magnetic-dipolar-mode (MDM) ferrite disk in the microwave cavity, loading a sample of the high absorption matter in the microwave cavity, using a bias magnetic field to tune the MDM resonance frequency of the ferrite disk to the resonance frequency of the cavity; and observing the symmetric Lorentz-like lineshape of the resonance peaks that are obtained.

The invention provides a sensor with a three-aperture structure. An asymmetric response spectrum line shape with steep is produced by using mutual effect of explicit mode resonance and implicit mode resonance of three dipole resonance units of the structure, thereby designing the sensor with the three-aperture structure possessing a Fano resonance phenomenon transmission spectrum. Under the same switch contrast, the wavelength shift or interval reuiqred by the asymmetric response spectrum line shape is less than the spectral width of the symmetric Lorenz-like line shape obtained by a single resonant cavity, and the wavelength resolution of a wave-division multiplexer and the sensitivity of the biosensor can be increased. The red shifts in different degrees of the Fano peak occur in the transmission spectrum by controlling geometric parameters of the structure, thereby realizing the tuning of the Fano resonance; the resonant frequency band change in the sensor can be realized by changing the scale of the structure parameters in equal proportion by adopting scaling theorem, namely, the working band is not limited to the THz band; the sensor can be used for the wave-division multiplexer, an optical switch, the biosensor and like fields.

The invention discloses a temperature sensor based on Fano resonance. The temperature sensor based on Fano resonance comprises a substrate layer and a metal layer which are sequentially overlapped from bottom to top, wherein a first resonant cavity and a second resonant cavity which do not communicate with each other are arranged in the metal layer; the first resonant cavity is a cavity which is formed by integrating a rectangular cavity and a cavity in a semicircular shape; the cavity in the semicircular shape is positioned at the middle portion of the rectangular cavity; the second resonant cavity is a resonant cavity in a T-shaped shape; and the first resonant cavity and the second resonant cavity are filled with temperature sensing media. The surface plasma sensor has the advantages of the small volume, the quick response, the simple preparation process and the low cost, and can improve the sensitivity and the Q value and can reduce the full width at half maximum of a Fano resonance spectral line, thereby achieving the nano-scale sensing in the field of biological and medical detection.

The invention relates to a device and a method for realizing electric regulation and control of Fano resonance based on asymmetric split-ring resonators. A variable capacitance diode is embedded in the middle of each of the two split-ring resonators, and meanwhile, feeding wires are added to the upper side and lower side of the two split-ring resonators respectively; the feeding wires are connected with an external power supply and adjust the voltage at the two ends of the variable capacitance diode; and inductors are added between the feeding wires and the split-ring resonators respectively to isolate the influence of the feeding wires on the electromagnetic response of the metamaterial structure. The working state of the variable capacitance diode is adjusted by using the feed voltage, and then the working frequencies of the two split-ring resonators are adjusted, so that dynamic modulation of the Fano resonance transmission spectral line is realized. The two split-ring resonators are different in size, the asymmetric structure is utilized to excite a magnetic four-level mode, and destructive interference occurs between the magnetic four-level mode and a magnetic dipole mode excited by an electric field, so that the transmission spectral line shows a Fano resonance line type.

A terahertz meta-structure device with strong Fano resonance is designed, and the intensity of the terahertz meta-structure device can be modulated by low-power continuous light. The device is simplein structure, a thin silicon substrate is obtained through the technology of etching high-resistance silicon and SOI(silicon on an insulating substrate) on the back side, the used substrate serves asa photoactive layer, extra photoactive materials are not needed, the overall preparation process is matched with an existing processing technology, and the device can be processed in a process mode, is not influenced by the technology of operators and is high in yield. Because carriers in the silicon substrate can be excited by photons with the forbidden bandwidth higher than that of the silicon substrate, the Fano resonance intensity can be modulated by low-power continuous light, an expensive femtosecond pulse source is not needed, 90% of modulation depth and 0.6-0.85 of modulation amplitudecan be easily obtained, the modulation amplitude is 2-3 times of that reported in the past, and the modulation efficiency is greatly improved. The terahertz meta-structure device opens up a new way for biochemical sensors with higher sensitivity pursuit.