The invention relates to the technical field of terahertz
metamaterial biosensors, in particular to a light and
dark mode coupled terahertz all-
dielectric biosensor and a preparation method thereof. The all-
dielectric metamaterial biosensor is obtained through
anodic bonding, photoetching patterning,
etching and
specific antibody modification, the sensor comprises a
dielectric layer and a substrate layer, the
dielectric layer is an array formed by alternating
split ring structures and rod-shaped structures of all-dielectric metamaterials, openings are symmetrically formed in the two ends of each
split ring structure, and the rod-shaped structures of all-dielectric metamaterials are arranged on the substrate layer. The distances between the rod-shaped structure and the
split ring structures on the left side and the right side are u and v respectively, and v-u is larger than or equal to 1
micrometer and smaller than or equal to 5 micrometers. In the
dielectric layer of the sensor, the rod-shaped structure is used as a bright mode, the split ring structure is used as a
dark mode, and the two arrays interact with each other, so that light and
dark mode coupling is realized, a
harmonic peak is split, a
Q factor and sensitivity are increased, and the sensor has the effects of high sensitivity and low
detection limit on low-concentration biological sample detection in a terahertz
wave band; and the method is stable and reliable.