The invention discloses an on-
line radiation monitoring and power-off protection
MEMS pressure sensor and a preparation method thereof. The sensor can synchronously realize
pressure measurement,
radiation monitoring and power-off protection functions on a
single chip. On the basis of realizing high-precision
pressure measurement, the sensor is provided with a
platinum film
resistor in a specific area and is coated with an electromagnetic wave absorbing material to form a
radiation sensing unit, so that the on-line monitoring on the
electromagnetic radiation intensity of the environment is realized. The protection circuit closely integrated with the sensor continuously analyzes
radiation dose signals, and once it is judged that the
dose exceeds a preset safety threshold value, a
control signal is generated, a power supply access of the
pressure measurement unit is actively
cut off, the pressure measurement unit is made to enter a dormant state, and therefore irreversible performance degradation or permanent damage is avoided. According to the invention, the conversion from passive bearing to
active protection during the working of the sensor is realized, and the reliability of long-term working in an extreme
electromagnetic environment is obviously improved.