The application discloses a kind of
extinction formula ellipsometer, it is related to ellipsometric measurement technical field, including base,
wafer stage, mounting bracket;
Wafer stage is set on base, for adsorbing fixed sample to be measured, and can drive sample to be measured to carry out multidimensional movement;Mounting bracket is fixedly arranged on the base, and one side is uniformly provided with multiple inclined arrangement polarizing arm, and the other side is provided with multiple with the polarizing arm one-to-one corresponding polarizing arm;The polarizing arm and corresponding polarizing arm are used to measure the ellipsometric parameter of sample to be measured at different incident angles;
Autocollimator is arranged on the mounting bracket, and it is located above
wafer stage, for correcting the levelness of sample surface.The
extinction formula ellipsometer provided in the application adopts multiple symmetrically arranged polarizing arm and polarizing arm, can trace the source of three important angles of polarizing angle, polarizing angle and incident angle, improves
measurement precision and stability.