A kind of electronic grade
semiconductor stripping liquid purification method, comprising: providing electronic grade
semiconductor stripping liquid residual liquid, and carry out pH detection, when pH<7, drop NaOH solution to stop;The residual liquid after
neutralization is extracted into
distillation kettle, and the
aqueous solution of residual liquid is removed, and the water is collected into
storage tank from the top of kettle, and the bottom of kettle is waste liquid containing salt, and salt is removed by cooling,
crystallization,
centrifugation, and the
aqueous solution of electronic grade
semiconductor stripping liquid is recovered by redistillation;Water is extracted into
dehydration kettle, and water is separated, and the bottom of kettle is electronic grade semiconductor stripping liquid crude product;The crude product is refined using rectifying kettle, and electronic grade semiconductor stripping liquid pure product is collected from the top of kettle;Electronic grade semiconductor stripping liquid pure product is microfiltrated using
peristaltic pump, and electronic grade semiconductor stripping liquid fine product is prepared.The present application not only effectively improves the
utilization rate of stripping liquid, reduces environmental
pollution, provides convenient conditions for
waste treatment, but also improves safety factor, reduces
operating cost, and is worth popularizing and using in industry.