The utility model discloses an ultralow-temperature full-automatic photoelectric probe
station, which comprises a heat shielding cover, a
refrigeration platform, a sample table, a probe supporting structure and an
optical image acquisition
system, the sample table comprises a
refrigeration copper block and an objective table, the upper end of the
refrigeration copper block is fixed on the refrigeration platform, the objective table is inversely arranged below the refrigeration
copper block, and the probe supporting structure is fixed on the objective table. The probe supporting structure is arranged on the periphery of the sample table, the upper end of the probe supporting structure is fixed to the refrigeration platform, the lower end of the probe supporting structure is inversely provided with a probe through a shifter, a first
optical observation hole is formed in the lower wall of the heat shielding cover, and the whole probe table is of an inverted structure and extends inversely and downwards from the refrigeration platform. And the
optical image acquisition
system observes the sample in the heat shielding cover and the state of the probe upwards from the lower part through the first
optical observation hole. According to the utility model, high-efficiency and accurate testing can be carried out on a large batch of devices in an ultralow temperature environment; in one cycle cooling period, the test of a large batch of superconducting devices can be completed, and the test period is greatly shortened.