The invention discloses a
Langmuir multi-probe
control circuit used for
plasma diagnosis and belongs to the technical field of
plasma diagnosis. The
control circuit is located outside a
plasma device and comprises three
Langmuir single-probes, an alternating-current
sawtooth wave supply
voltage generation device, a direct-current supply
voltage generation device, a double-pole-double-throw switch, a reversing switch, a first double-pole-three-throw switch, a second double-pole-three-throw switch, a first single-pole-single-throw switch, a second single-pole-single-throw switch and a transform
resistor. Selection of the
Langmuir single-probes, a double-probe, and a three-probe in different diagnosis circuits is carried out through switching-over of the switches in control circuits, and a cleaning circuit is provided for cleaning of the probes. According to the Langmuir multi-probe
control circuit used for the plasma diagnosis, similarities of three probe
diagnosis methods on an experimental instrument are used, experimental cost can be saved, different methods can be used by switching-over of the control circuits due to the fact that difference of the three probe
diagnosis methods are combined, convenience and high efficiency are achieved, experimental period is greatly shortened, and experimental results are enabled to be accurate due to the fact that the probes can be cleaned during experiment.