The invention discloses a high-integration-level
matrix type magnetic sensing chip structure and circuit and a manufacturing method thereof, and belongs to the technical field of
semiconductor devices, the
chip structure comprises a plurality of matrix elements, a
switch matrix and a rear-end interface circuit, and each
matrix element comprises a cross-shaped horizontal
Hall element and a switch device; the
switch matrix is composed of switch devices in matrix elements; the cross-shaped horizontal
Hall element matrix is an N * M Hall
matrix element formed by an integrated 1 * M
Hall element matrix in each row; according to the invention, the structure and the circuit of the
matrix type magnetic sensing chip which can be used for statically and dynamically measuring multi-dimensional
magnetic field distribution in real time in severe environments such as high temperature,
high pressure and
high radiation are innovated and manufactured; dynamic and static measurement in a multi-dimensional
magnetic field space can be achieved, error compensation is carried out through a circuit, it is ensured that the chip can stably work in the high-temperature, high-pressure and high-
radiation environment, and it can be ensured that the chip has high
linearity, sensitivity and accuracy.