362 results about "Mems microphone" patented technology

The invention provides a gas concentration detection device and method, and relates to the technical field of acoustic spectrum gas detection. The device comprises an MEMS infrared radiation light source, an eccentric photoacoustic cell, a digital MEMS microphone and data acquisition and processing equipment, the eccentric photoacoustic cell comprises a cylindrical air chamber, a first spherical reflector, a second spherical reflector and a shell, and an eccentric hole is formed in the position, deviating from the axis, of the first spherical reflector; infrared light emitted by the MEMS infrared radiation light source enters the cylindrical gas chamber, passes through a preset optical path and is absorbed by gas to be detected in the cylindrical gas chamber to generate a photoacoustic signal; converting the photoacoustic signal into a digital signal; determining the concentration of the to-be-detected gas based on the digital signal; wherein the preset optical path is determined based on the distance of the eccentric hole deviating from the axis and the curvature radius of the first spherical reflector and the curvature radius of the second spherical reflector. According to the gas concentration detection device and method provided by the invention, the detection precision of the concentration of the gas to be detected can be improved.

The invention relates to a hidden ultrasonic sensing system suitable for advanced driver assistance. Exemplary sensor controllers, sensors, sensing systems, and sensing methods that can enable cost-effective implementation of ADAS (Advanced Driver Assistance System) features with hidden sensors. As one example, an exemplary sensing method includes emitting a train of acoustic pulses through a surface on an ultrasonic transducer; receiving the acoustic signal with a MEMS (Micro Electro Mechanical System) microphone, the MEMS microphone representing the acoustic signal as an electrically received signal; and processing the electrical receive signal to detect reflections of the acoustic pulse train.

The invention relates to the technical field of transformers, and discloses a transformer voiceprint anomaly detection method, which comprises the following steps of: acquiring voiceprint signals during operation of a transformer by adopting a plurality of high-sensitivity voiceprint sensors; the collected voiceprint signals are preprocessed; extracting a time domain feature, a frequency spectrum feature and a deep feature of the voiceprint signal; fusing the time domain feature, the frequency domain feature and the deep learning feature to form a comprehensive feature vector; an anomaly detection model is established by adopting a support vector machine, and an attention mechanism is introduced into the model. According to the transformer voiceprint anomaly detection method, high resolution and high signal-to-noise ratio of voiceprint signals are ensured through the multi-sensor layout and the high-sensitivity MEMS microphone, and the multi-sensor layout can cover different positions of the transformer, so that the running state of the transformer is more comprehensively captured, and the detection accuracy is improved. The extraction of time domain features and frequency spectrum features describes the characteristics of voiceprint signals from different angles.

Disclosed in the present invention is a high-dynamic capacitive digital microphone system based on electrostatic force feedback. The system comprises an MEMS microphone and an interface circuit chip thereof, wherein the interface circuit chip comprises a charge pump, an analog front end, an analog-to-digital conversion circuit, an amplitude detection module, an amplitude adjustment control module and a pulse density modulation module. In the present invention, the characteristic of the sensitivity being able to be adjusted by means of changing a bias voltage by a capacitive sensor is used, and a charge pump with an adjustable output voltage is used to provide electrostatic force feedback, thereby further expanding the adjustable range of a front-end gain, and also reducing requirements for the noise performance of a readout circuit. Therefore, the system in the present application has the characteristics of high dynamic range and high-precision quantization.

The invention discloses an MEMS microphone and a manufacturing method thereof. The MEMS microphone comprises a first microphone structure and a second microphone structure. The first microphone structure comprises a first vibrating diaphragm, a first back plate and a second vibrating diaphragm which are arranged at intervals from bottom to top, a first cavity is formed between the first vibrating diaphragm and the second vibrating diaphragm, and the first back plate is parallel to the first vibrating diaphragm and the second vibrating diaphragm and penetrates through the first cavity; the second microphone structure comprises a third vibrating diaphragm, a second backboard and a fourth vibrating diaphragm which are arranged at intervals from top to bottom, a second cavity is formed between the third vibrating diaphragm and the fourth vibrating diaphragm, and the second backboard is parallel to the third vibrating diaphragm and the fourth vibrating diaphragm and penetrates through the second cavity; and the common vibrating diaphragm is formed by directly bonding a second vibrating diaphragm and a fourth vibrating diaphragm. According to the MEMS microphone and the manufacturing method thereof provided by the invention, a microphone structure with three vibrating diaphragms and double backboards is formed by forming the common vibrating diaphragm, so that the performance of the MEMS microphone is improved, and the process difficulty of manufacturing the MEMS microphone is reduced.

Disclosed are a micro-electromechanical system (MEMS) structure and an MEMS microphone comprising same. The MEMS structure comprises a back plate; and a diaphragm located on one side of the back plate, wherein the diaphragm and the back plate forms a variable capacitor, the diaphragm comprises multiple first through holes and air release structures respectively corresponding to the first through holes, and the diaphragm further comprises one or more second through holes penetrating through the diaphragm.

A MEMS microphone includes a substrate, a base, a capacitance system, and at least one cantilever structure. The substrate includes a back cavity, the base is disposed on one side of the substrate, and the capacitance system is disposed on the base. The capacitance system includes at least one back plate assembly, at least one first vibration diaphragm, and at least one second vibration diaphragm. The at least one first vibration diaphragm includes a first sub-vibration diaphragm, and the at least one second vibration diaphragm includes a second sub-vibration diaphragm. The sub-vibration diaphragm and the second sub-vibration diaphragm form a cantilever beam structure on the base, which increase compliance of the at least one first vibration diaphragm and the at least one second vibration diaphragm and reduce tension of the at least one first vibration diaphragm and the at least one second vibration diaphragm, thereby improving sensitivity of the microphones.

A microphone assembly including an outer housing, an inner housing, a printed circuit board (PCB) and a cord. The outer housing includes an outer surface, an inner surface opposite the outer surface and defining an opening there through, and a plurality of attachment structures protruding from the inner surface thereof. The inner housing includes an outer surface, an opening, and a plurality of attachment structures protruding from the outer surface thereof. The PCB includes at least one micro-electromechanical systems (MEMS) microphone including an acoustic port. The PCB is coupled to the inner housing such that the acoustic port of the at least one MEMS microphone is positioned within the opening. The cord interconnects the attachment structures of the outer and inner housings, respectively, together.

A MEMS microphone includes substrate, housing, MEMS chip and ASIC chip. The substrate is provided with sound inlet channel communicating the receiving space with the outside. The MEMS chip includes diaphragm located on sound inlet path of sound inlet channel. The sound inlet channel includes buffering cavity, first sound inlet hole, and second sound inlet hole provided in the substrate and communicating the buffering cavity with the back cavity. The second sound inlet hole includes at least two sub-holes spaced apart from each other. When external air pressure enters the sound inlet channel, the air pressure entering from the first sound inlet hole may not directly act on the diaphragm through the second sound inlet hole, and the sub-holes can further block the airflow, which can effectively buffer the impact of the air pressure on the diaphragm, reduce diaphragm rupture, and improve reliability and performance of the MEMS microphone.

The invention relates to the technical field of high-voltage switch fault diagnosis systems, and discloses a high-voltage switch fault diagnosis system based on an artificial intelligence audio recognition technology, and the system comprises at least one audio collection device which is used for collecting audio signals generated in the operation process of a high-voltage switch; the data preprocessing module is used for preprocessing the audio signals, and the feature extraction module is used for extracting feature vectors from the preprocessed audio signals. According to the high-voltage switch fault diagnosis system based on the artificial intelligence audio recognition technology, by using the high-sensitivity MEMS microphone and the advanced audio processing technology, weak abnormal sound in the operation process of a high-voltage switch can be accurately captured, the fault diagnosis precision is improved, various sensor data such as a temperature sensor and a vibration sensor are combined, and the fault diagnosis accuracy is improved. The accuracy and reliability of fault diagnosis are improved, the system can automatically adjust the sensitivity parameters of the model according to the environmental noise level, and false alarms are reduced.

Embodiments relate to systems and methods for compensating nonlinear distortions. The system receives a signal corresponding to an input sound pressure which is detected by a capacitive MEMS microphone. The capacitive MEMS microphone includes an active capacitance and a parasitic capacitance. The system determines a nonlinear relationship between the signal and the input sound pressure; and determines, based on the signal, an input parameter associated with the active capacitance and the parasitic capacitance. The system further determines an output signal based on the input parameter and the output signal and the input sound pressure have a linear relationship. The system compensates the signal based on the determined output signal and outputs the compensated signal as an output so that the output has the linear relationship with the input sound pressure.

The invention relates to the technical field of power battery safety monitoring, in particular to a power battery thermal runaway voiceprint early warning method and system, and the method comprises the steps: collecting voiceprint signals in a battery pack cooling pipeline through an MEMS microphone array, and especially paying attention to the acoustic characteristics of a 23-28kHz frequency band; constructing a multi-scale convolutional recurrent neural network voiceprint recognition model which comprises a cascade residual feature extraction network, a three-path parallel multi-scale convolutional layer, an adaptive attention mechanism, a feature fusion layer and a long-short term memory network layer; calculating a voiceprint signal entropy value and comparing the voiceprint signal entropy value with a preset threshold value; meanwhile, the deformation of the battery cell is monitored through a band-shaped Bragg grating sensor; when the voiceprint entropy value exceeds 2.8 times of the historical average value and lasts for 20 seconds, and meanwhile, the deformation of the battery cell reaches 0.15%, thermal runaway early warning is triggered, a multi-stage early warning mechanism is arranged, early warning can be given out 10-30 minutes before thermal runaway occurs, and sufficient time is provided for taking safety measures.

The invention discloses an MEMS microphone and an electronic device. The MEMS microphone comprises a substrate structure, a diaphragm structure, a support structure and a back electrode structure. The vibrating diaphragm structure is stacked on one side of the substrate structure, the vibrating diaphragm structure comprises a first functional area located in the center and a plurality of second functional areas connected to the peripheral side of the first functional area and arranged in pairs, and each pair of second functional areas are located on the two opposite sides of the first functional area respectively; the supporting structure is stacked on one side of the substrate structure and surrounds the outer side of the vibrating diaphragm structure, and the supporting structure comprises a supporting part and a plurality of functional parts corresponding to the plurality of second functional areas; the back electrode structure is stacked on the side, away from the substrate structure, of the supporting structure and can form a parallel plate capacitor with the first functional area, and when the voltage between the vibrating diaphragm structure and the back electrode structure is larger than a set value, the first functional area can be attracted to the back electrode structure, so that the second functional area can form an interdigital capacitor with the corresponding functional part.

Embodiments relate to systems and methods for compensating nonlinear distortions. The system receives a signal corresponding to an input sound pressure which is detected by a capacitive MEMS microphone. The capacitive MEMS microphone includes an active capacitance and a parasitic capacitance. The system determines a nonlinear relationship between the signal and the input sound pressure; and determines, based on the signal, an input parameter associated with the active capacitance and the parasitic capacitance. The system further determines an output signal based on the input parameter and the output signal and the input sound pressure have a linear relationship. The system compensates the signal based on the determined output signal and outputs the compensated signal as an output so that the output has the linear relationship with the input sound pressure.

The invention discloses a highly dustproof MEMS microphone packaging substrate and a processing method thereof. The highly dustproof MEMS microphone packaging substrate is characterized in that a capacitor-embedded resistor-embedded substrate is provided with a sound hole processing area; the two outermost layers of the capacitor-embedded resistor-embedded substrate are respectively covered with an ultrathin copper layer, and a window is manufactured on one ultrathin copper layer at a position corresponding to a sound hole processing area through a pattern manufacturing process. And after the position, corresponding to the sound hole machining area, on the other ultrathin copper layer is thickened, a copper net pattern formed by connecting a plurality of copper wires in a crossed mode is manufactured. Based on the window, at least part of the sound hole machining area is hollowed out through a laser groove burning technology, and a sound hole communicated with the copper net pattern is manufactured; cleaning the sound hole and the copper mesh pattern; and plating a protective layer on the copper net pattern. The processing method is novel and reasonable, the obtained MEMS microphone packaging substrate has the advantages of being small in size, thin in structure, excellent in ventilation and dustproof performance, high in sound transmission quality, high in reliability, high in anti-interference performance and the like, and market requirements are met.

The invention discloses a self-service terminal large model task processing system and method, and the system comprises a multi-mode perception fusion unit which is integrated with an infrared multi-point touch screen, an MEMS microphone array, and an industrial grade code scanning module. A medical diagnosis knowledge graph and a financial transaction ontology industry exclusive graph are built in the multi-field intention classification model; the dynamic demand matching engine is used for analyzing a cross-domain task link by adopting a Transform-XL long sequence modeling technology; a Petri net simulator and a conflict detection algorithm are built in the task arrangement middleware, and the task arrangement middleware is used for guaranteeing the consistency of execution time sequences of multiple sub-tasks; the self-adaptive response generation module is used for supporting automatic conversion from a natural language instruction to a PLC control code; according to the method, the task identification accuracy can be improved based on multi-modal fusion; the dynamic demand matching engine supports processing of a large number of concurrent requests per second, and response delay is low.

The invention relates to the technical field of microelectronics, and provides an MEMS microphone and a preparation method thereof, and an electronic device, the microphone comprises a substrate, the substrate comprises a first wafer and a first sacrificial layer, the first wafer is provided with a sealed cavity diaphragm, the first sacrificial layer is used for separating the sealed cavity diaphragm from the first wafer, and the substrate comprises a sound transmission hole penetrating through the first wafer and the first sacrificial layer; a second wafer on which a back plate is prepared; wherein the first wafer and the second wafer are bonded in a low-pressure environment, so that the sealed cavity vibrating diaphragm and the back plate form a capacitor. According to the method, the signal-to-noise ratio of the microphone is improved, and the reliability of the MEMS microphone is enhanced.

The invention relates to the technical field of image recognition, in particular to a microphone defect detection method and system based on an image model. The method comprises the following steps: acquiring a multi-modal data set; performing data preprocessing on the multi-modal data set to generate a space-time alignment multi-modal data stream; performing multi-material coupling modeling on the time-space alignment multi-modal data flow by using a preset MEMS microphone structure, and performing physical-GAN enhancement optimization to generate a microphone defect coupling model; therefore, through combination of multi-modal data stream fusion, physical optimization and deep learning, the defects of a traditional microphone defect detection method in data processing, model accuracy and generalization ability are overcome, and the defect detection precision, efficiency and reliability are improved.

The invention discloses integrated intelligent monitoring equipment and method for dust, poison gas and noise. The equipment is characterized in that a mass flow controller, a flow pump and a flow limiting assembly are sequentially connected to a gas inlet pipeline in series; the first laser and the light trap are oppositely mounted inside the particle measurement chamber; the lens and the first laser are coaxially distributed, and the focus of the lens is located at the particle detection channel; the photoelectric sensing unit is mounted on the inner wall of the rear side of the particle measuring chamber; the filter and the sensing surface of the photoelectric sensing unit are coaxially distributed; the communicating pipeline is respectively connected with the particle detection outlet and the gas detection inlet; the filter membrane is connected in series to the communicating pipeline; the second laser and the multi-channel narrow-band detector are oppositely mounted inside the gas measuring chamber; the noise measuring unit comprises an MEMS microphone array; the method comprises the following steps: wearing a plurality of dust, poison gas and noise integrated intelligent monitoring devices on different individuals, and synchronously monitoring the levels of dust, poison gas and noise by using the dust, poison gas and noise integrated intelligent monitoring devices. The equipment and the method can be used for synchronously monitoring various pollutants.

The invention discloses a control system of a controllable anti-recording device, and relates to the technical field of information safety protection, a multi-dimensional audio detection module adopts a quaternary cross array MEMS microphone array and can identify characteristic signals of recording equipment in a frequency band of 20 Hz to 20 kHz, an interference generation module generates a self-adaptive comb-shaped interference spectrum based on a DDS technology, dynamically avoids communication and voice frequency bands, and provides a multi-dimensional anti-recording device based on the self-adaptive comb-shaped interference spectrum. The heterogeneous computing master control module integrates a CPU and a DSP, a multi-level decision tree algorithm is built in, the composite energy management module fuses piezoelectric and electromagnetic dual-mode energy collection, and the anti-interference communication module adopts a UWB and Bluetooth 5.3 mixed link and supports dynamic frequency hopping and LDPC coding. Through combination of the multi-dimensional microphone array and an intelligent algorithm, high-precision recording equipment detection and positioning are realized, the system integration degree is high, the system can be rapidly deployed in a conference room, a confidential place and the like, and comprehensive protection is provided for information security.

A method for manufacturing a microelectromechanical systems (MEMS) microphone comprises depositing a membrane on a first sacrificial layer, wherein the first sacrificial layer is deposited on a substrate, etching the substrate to define a cavity, releasing the membrane by removing at least the first sacrificial layer, and forming at least one anchor at the edge of the membrane.

The embodiment of the invention relates to the technical field of semiconductor devices, and discloses an MEMS microphone and a preparation method thereof, and the MEMS microphone comprises the components of a substrate which defines a cavity; the anchoring part is arranged above the base; the vibrating membrane is provided with a beam structure, the beam structure is fixed above the anchoring part, so that the vibrating membrane covers the cavity, and the vibrating membrane and the base are arranged at an interval; the inner edge of one side, close to the vibrating diaphragm, of the substrate is provided with a chamfer. The inner edge of the side, close to the vibrating membrane, of the substrate is arranged to be the chamfer, when the vibrating membrane bends towards one side of the substrate due to vibration, the vibrating membrane can be prevented from impacting the substrate through the chamfer, or when the vibrating membrane impacts the substrate, the contact area between the vibrating membrane and the substrate is increased, stress concentration is avoided, and therefore the risk that the vibrating membrane is damaged is reduced. Therefore, the probability of failure of the MEMS microphone due to damage of the vibrating diaphragm can be reduced, and the robustness of the MEMS microphone is enhanced.

The present application relates to the technical field of health monitoring, in particular to a kind of infant asphyxia risk autonomous monitoring method and system based on laryngeal respiratory sound, comprising: utilize high sensitivity MEMS microphone to collect the airflow and respiratory sound signal of infant larynx, and utilize micro accelerometer to monitor the thoracic movement data of infant synchronously;The airflow and respiratory sound signal are denoising, and the denoising respiratory sound signal is obtained;The denoising respiratory sound signal is separated according to respiratory event Signal, and is enhanced and combined into respiratory sound data set;Respiratory sound feature is extracted in respiratory sound data set, and asphyxia anomaly classification model is constructed based on respiratory sound feature by machine learning model, and dynamic baseline model that adapts individual respiratory difference is established according to respiratory sound feature.The present application utilizes the hardware device of high sensitivity MEMS microphone and micro accelerometer and artificial intelligence model to combine, realizes the use of laryngeal respiratory sound signal in home environment and autonomously completes infant asphyxia risk identification and early warning.

The invention provides an MEMS microphone and a manufacturing method thereof.The MEMS microphone comprises a substrate with a cavity, a vibrating diaphragm supported on the substrate and a back plate spaced from the vibrating diaphragm, the vibrating diaphragm comprises a fixing part fixedly connected with the substrate and a vibrating part suspended above the cavity, and the fixing part is fixedly connected with the substrate. The vibration part comprises a plane part, a plurality of concave diaphragm parts arranged on the plane part at intervals and a connecting part for connecting the plane part and the concave diaphragm parts, each concave diaphragm part comprises a first silicon nitride layer, a silicon oxide layer and a second silicon nitride layer which are sequentially stacked along the vibration direction of the diaphragm, and the first silicon nitride layer is closer to the substrate than the second silicon nitride layer. According to the MEMS microphone, the composite material is adopted to manufacture the vibrating diaphragm with the corrugated shape, the vibrating diaphragm can generate large displacement under sound pressure, so that high sensitivity is obtained, the corrugated vibrating diaphragm made of the composite material can decompose stress, the strength of the vibrating diaphragm is enhanced, and the reliability of the MEMS microphone is improved.

The invention provides an air source heat pump with an active noise reduction function, and belongs to the technical field of air source heat pumps, the air source heat pump can carry an active noise reduction module, the active noise reduction module is used for reducing low-frequency noise generated in the operation process of the air source heat pump, and hardware of the active noise reduction module is composed of an MCU, a DSP and other peripheral circuits. The MCU is responsible for reading the frequency of a fan and a compressor of a heat pump through a Modbus protocol and obtaining the fundamental frequency of noise, the MEMS noise microphone is used for collecting original noise, and the MEMS error microphone is used for collecting residual noise; the audio codec is used for converting analog signals collected by the MEMS microphone into digital signals and then sending the digital signals to the DSP, the DSP processes the collected signals through an FxLMS algorithm, noise reduction signals are obtained through integration and calculation, the audio codec and the power amplifier drive the secondary loudspeaker to output noise reduction sound waves with the phase opposite to that of noise, and the noise reduction sound waves are sent to the power amplifier. Noise reduction is realized through superposition of the noise reduction sound waves and the noise sound waves.

A MEMS microphone, comprising a base (1), a housing (2) defining an accommodating space with the base (1), a MEMS chip (3) defining a back cavity with the base (1), and an ASIC chip (4) fixed to the base (1). The base (1) is provided with a sound inlet channel (10) communicating the accommodating space with the outside; the MEMS chip (3) is provided with a diaphragm (31) located on a sound inlet path of the sound inlet channel (10); the sound inlet channel (10) comprises a buffer cavity (101) located in the base (1), a first sound inlet hole (102) formed in the base (1) and communicating the buffer cavity (101) with the outside, and a second sound inlet hole (103) formed in the base (1) and communicating the buffer cavity (101) with the back cavity; the second sound inlet hole (103) faces the diaphragm (31); and the second sound inlet hole (103) comprises at least two sub-holes (1031) spaced apart from each other. When external air pressure enters the sound inlet channel (10) from the first sound inlet hole (102), the air pressure will not directly pass through the second sound inlet hole (103) to act on the diaphragm (31), and the sub-holes (1031) can further block airflow, so that the impact of the air pressure on the diaphragm (31) can be effectively buffered, thereby reducing rupture of the diaphragm, and improving the reliability and performance of the MEMS microphone.

The invention provides a photoacoustic spectrometry gas detection method, device and equipment and a storage medium. According to the method, a T-shaped photoacoustic cell is utilized, and components such as a gas valve, a transparent window, an MEMS microphone and an optical fiber collimator are arranged. After to-be-detected gas is filled through the gas valve, noise with flat frequency response is introduced, and the MEMS microphone is used for collecting resonant frequency. The control circuit sets the modulation frequency of the distributed feedback laser to be half of the resonant frequency, then the air valve is closed, and the laser outputs modulated light to excite photoacoustic signals. The MEMS microphone obtains signals and converts the signals into electric signals, the electric signals are converted into digital signals through the control circuit, and the digital signals are transmitted to the computing device to be processed to obtain gas concentration values. According to the method, the resonance frequency is determined by utilizing the resonance amplification effect, and the laser modulation frequency is set, so that the influence of external environment change on the stability of a detection system is effectively reduced, and the stability of photoacoustic spectrometry gas detection is improved.

The invention relates to the technical field of biological recognition, in particular to a multi-scene-oriented dynamic voiceprint recognition updating method, which comprises the following steps: synchronously acquiring voice signals through a 16-channel MEMS microphone array and a throat three-axis acceleration sensor, and constructing a three-dimensional data set containing acoustic scene fingerprints, semantic contexts and emotional characteristics; extracting features by adopting a scene adaptive dual-mode processing architecture, and extracting semantic features and emotional state coding vectors to form a multi-dimensional feature set; based on the multi-dimensional feature set, calculating a matching degree by using a Gaussian mixture model, monitoring a scene mutation index, and triggering an online clustering reconstruction mechanism to optimize a feature weight; deploying a three-level pipeline architecture for real-time processing; and generating a scene adaptation factor according to the MFCC-PLP mixed feature matrix and the environmental parameters to perform multi-feature joint matching. According to the invention, the adaptability of voiceprint recognition in a complex scene can be improved.

The invention discloses a microphone and an electronic device, and relates to the technical field of MEMS microphones, the microphone comprises a substrate, a housing and a chip assembly, the housing covers the substrate, and the housing and the substrate define an accommodating cavity; the chip assembly is located in the containing cavity and comprises a pickup module and a signal processing module which are in communication connection, and the pickup module is arranged on the substrate; a sound hole is formed in the side, facing the shell, of the substrate and faces the pickup module, and the size of the sound hole is increased in the direction perpendicular to the substrate and the direction close to the containing cavity. Under the condition that the air flow is certain, the flow speed of the air flow in the sound hole is gradually reduced, so that the occurrence probability of diaphragm breakage caused by too high flow speed of the air flow is effectively reduced, and the reliability of the microphone is improved; similarly, the size of the sound hole is increased along the direction perpendicular to the substrate towards the direction close to the accommodating cavity, so that the signal-to-noise ratio of the microphone is effectively improved, and the acoustic performance of the microphone is further improved.

A MEMS microphone, an electronic device, and a preparation method for the MEMS microphone. The MEMS microphone comprises a substrate, a first diaphragm, a back electrode and a second diaphragm, wherein a sound cavity is formed in the substrate; the back electrode is arranged on the substrate; a first support structure is provided on the side of the back electrode that faces the first diaphragm; a second support structure is provided on the side of the back electrode that is away from the first diaphragm; the second diaphragm is arranged on the back electrode; a second gap is formed between the second diaphragm and the back electrode; and the first diaphragm and / or the second diaphragm are / is a graphene diaphragm.