155 results about "Mems microphone" patented technology

A method for manufacturing a microelectromechanical systems (MEMS) microphone comprises depositing a membrane on a first sacrificial layer, wherein the first sacrificial layer is deposited on a substrate, etching the substrate to define a cavity, releasing the membrane by removing at least the first sacrificial layer, and forming at least one anchor at the edge of the membrane.

The present application relates to the technical field of health monitoring, in particular to a kind of infant asphyxia risk autonomous monitoring method and system based on laryngeal respiratory sound, comprising: utilize high sensitivity MEMS microphone to collect the airflow and respiratory sound signal of infant larynx, and utilize micro accelerometer to monitor the thoracic movement data of infant synchronously;The airflow and respiratory sound signal are denoising, and the denoising respiratory sound signal is obtained;The denoising respiratory sound signal is separated according to respiratory event Signal, and is enhanced and combined into respiratory sound data set;Respiratory sound feature is extracted in respiratory sound data set, and asphyxia anomaly classification model is constructed based on respiratory sound feature by machine learning model, and dynamic baseline model that adapts individual respiratory difference is established according to respiratory sound feature.The present application utilizes the hardware device of high sensitivity MEMS microphone and micro accelerometer and artificial intelligence model to combine, realizes the use of laryngeal respiratory sound signal in home environment and autonomously completes infant asphyxia risk identification and early warning.

The invention relates to the technical field of health monitoring, in particular to an infant suffocation risk autonomous monitoring method and system based on laryngeal breathing sound, and the method comprises the steps: collecting airflow and breathing sound signals of the throat of an infant through a high-sensitivity MEMS microphone, and synchronously monitoring thoracic motion data of the infant through a miniature accelerometer; performing noise reduction processing on the airflow and the breathing sound signal to obtain a denoised breathing sound signal; performing signal separation on the denoised breathing sound signals according to a breathing event, and enhancing and combining the denoised breathing sound signals into a breathing sound data set; extracting breath sound features from the breath sound data set, constructing a suffocation anomaly classification model based on the breath sound features through a machine learning model, and establishing a dynamic baseline model adapted to individual breath differences according to the breath sound features; hardware devices of a high-sensitivity MEMS microphone and a micro accelerometer are combined with an artificial intelligence model, and infant asphyxia risk identification and early warning are autonomously completed in a home environment by using laryngeal respiration sound signals.

An MEMS microphone includes a substrate with a back cavity and a capacitor system arranged on the substrate. The capacitor system includes a back plate and a diaphragm opposite to and spaced apart from the back plate. Surface of the back plate facing diaphragm or surface of diaphragm facing the back plate being provided with an anti-adhesion member. When the diaphragm moves until the anti-adhesion member is in contact with the diaphragm and the back plate at the same time, the anti-adhesion member is elastically deformable along a vibrating direction of the diaphragm. The anti-adhesion member of the present disclosure is elastic and may provide cushioning for movement of the diaphragm, which prevents rapid concentration of stress at a position of the diaphragm in contact with the anti-adhesion member, thereby preventing formation of pits in the diaphragm and preventing breakage of the diaphragm under repeated impact of the anti-adhesion member.

A MEMS microphone according to the present embodiment comprises: a first substrate; a second substrate disposed on the first substrate; an adhesive layer disposed between the first and second substrates; a MEMS structure disposed on the second substrate; a signal processing device disposed on the second substrate and spaced apart from the MEMS structure; and a capacitor disposed to be spaced apart from the MEMS structure and the signal processing device, wherein the capacitor comprises a first external electrode and a second external electrode disposed at opposite ends thereof, and a plurality of internal electrodes and dielectric layers disposed between the first external electrode and the second external electrode, and the first substrate, the second substrate, and the MEMS structure are stacked in a first direction, while the plurality of internal electrodes are stacked in a second direction perpendicular to the first direction.

Disclosed are a micro-electromechanical system (MEMS) structure and an MEMS microphone comprising same. The MEMS structure comprises a back plate; and a diaphragm located on one side of the back plate, wherein the diaphragm and the back plate forms a variable capacitor, the diaphragm comprises multiple first through holes and air release structures respectively corresponding to the first through holes, and the diaphragm further comprises one or more second through holes penetrating through the diaphragm.

A piezoelectric microelectromechanical systems microphone is provided comprising a substrate including at least one wall defining a cavity, the at least one wall defining an anchor region around a perimeter, a piezoelectric film layer forming a membrane, the piezoelectric film layer being supported at the anchor region by a spring region, and an electrode disposed over the piezoelectric film layer. A method of manufacturing such a MEMS microphone is also provided.

Portable system for the detection of bruxism, including: • a passive, intraoral dental splint with a piezoelectric foil sensor, • an externally worn bracelet with MEMS microphone, • a neural evaluation unit for real-time analysis of acoustic signals, • a feedback module with vibration, sound and display, whereby the dental splint contains no electronic components and the system operates completely energy autonomously.

The invention discloses a directional MEMS microphone, a beam forming method and device and electronic equipment, and belongs to the technical field of directional microphones, and the beam forming method comprises the steps: obtaining PDM signals of two MEMS microphones, carrying out the delay processing of the two PDM signals, and obtaining two target delay PDM signals with a half target frequency; and performing staggered interpolation of addition or subtraction on the two target delay PDM signals by taking 1-bit as a unit to obtain a formed PDM signal of the target frequency. The directional MEMS microphone comprises a first MEMS microphone, a second MEMS microphone, a first ASIC chip, a second ASIC chip and a third ASIC chip, and is used for executing the beam forming method to realize beam forming. According to the invention, the delay phase of beam forming is added and shifted to the PDM signal domain, so that the beam forming with ultra-low power consumption and ultra-low cost can be realized.

The invention discloses a vibrating diaphragm for an MEMS microphone and the MEMS microphone. The vibrating diaphragm comprises a vibrating diaphragm main body; the pressure relief part is arranged on the vibrating diaphragm main body, the pressure relief part comprises a first pressure relief seam and a second pressure relief seam, the end part of the first pressure relief seam is provided with a first pressure relief port, the second pressure relief seam is arranged corresponding to the first pressure relief port, a second pressure relief port is formed in the end part of the second pressure relief seam, and the first pressure relief port is arranged corresponding to the second pressure relief port. The connecting line of the two second pressure relief ports intersects with the first pressure relief seam or the first pressure relief port. Compared with the prior art, the pressure relief part with the first pressure relief seam and the second pressure relief seam is arranged on the vibrating diaphragm, and the second pressure relief seam is located at the tail end of the first pressure relief seam, so that the maximum stress can be reduced, the compliance of the vibrating diaphragm can be maintained / improved, and meanwhile, the air pressure release effect can be improved.

The invention discloses a micro-electro-mechanical microphone and a manufacturing method thereof. The MEMS microphone includes a substrate, a diaphragm, and a back plate. The substrate has a cavity. The diaphragm is disposed on the substrate and spans the cavity. The back plate is arranged above the vibrating diaphragm and is separated from the vibrating diaphragm through an air gap. The diaphragm has a corrugated structure. And the back plate is provided with a part which corresponds to the corrugated structure and is positioned right above the corrugated structure. The height difference of the part is smaller than or equal to 20% of the height difference of the corrugated structure.

Disclosed are techniques for acoustic limiters for micro-electrical-mechanical systems (MEMS) microphones and other devices. In an aspect, an acoustic limiter comprises a first housing and a second housing separated by a flexible membrane. The membrane has at least one opening to allow air to flow between the housings. The membrane flexes in response to acoustic pressure within the first housing. If the acoustic pressure is above a threshold value, the membrane flexes a distance into the second housing such that the rigid structure completely or partially blocks the one or more openings through the membrane, which limits airflow speed into the second housing, thus limiting the acoustic pressure within the second housing. In an aspect, the acoustic limiter protects a MEMS microphone element mounted to the second housing, the first housing being the microphone input.

The invention relates to an MEMS microphone and a layout manufacturing method of a sound hole photolithography mask thereof. The method comprises the following steps: acquiring the number of turns of sound holes of a back plate, the size of a specific circle and a center distance design value of adjacent sound holes; obtaining the size of each circle according to the number of circles of the sound holes, the size of the specific circle and the center distance design value of the adjacent sound holes; according to the size of each circle and the center distance design value of the adjacent sound holes, the number of the sound holes of each circle is obtained; according to the number of the sound holes in each circle and the size of each circle, center coordinates of each sound hole are obtained; the sizes of the sound holes are obtained, and graphs of the sound holes are generated by combining the center coordinates of the sound holes; wherein each sound hole is a circular hole or an annular hole. According to the method, the layout design of the approximately equidistant graphs distributed in concentric circles can be quickly and accurately realized. The backboard prepared by using the layout of the sound hole photoetching plate accords with the Fresnel lens principle and meets the requirement of sharing the same mass center, and the capability of collecting sound waves can be greatly improved. And the number of the sound holes in each circle is not limited to a specific value.

Provided is a MEMS microphone including: a substrate having a cavity penetrating thereon; a diaphragm supported by the substrate and covering the cavity; a back plate provided above the diaphragm, wherein a first preset gap is formed between the back plate and the diaphragm; and a first support member received in the cavity includes a support portion, a connection portion, and a convex portion. The connection portion extends from the support portion towards the substrate until being fixed to the substrate. The convex portion extends from an end of the support portion approaching the diaphragm towards the diaphragm until supporting the diaphragm. The diaphragm and the connection portion form a second preset gap along a vibration direction of the diaphragm. The diaphragm of the MEMS microphone has higher robustness and higher anti-dropping capability.

Embodiments of the present invention relate to the technical field of semiconductor devices and disclose a MEMS microphone and a method for preparing the same. In the disclosure, the substrate is provided with at least one chamfer at an inner edge of a side of the substrate close to the diaphragm, so that when the diaphragm is bent towards the substrate due to vibration, providing the chamfer can prevent the diaphragm from hitting the substrate, or increase the contact area between the diaphragm and the substrate when the diaphragm hits the substrate, avoiding the concentration of stress and thus reducing the risk of the diaphragm breaking. In this way, the probability of failure of the MEMS microphone due to breakage of the diaphragm can be reduced, and the robustness of the MEMS microphone can be enhanced.

The present invention provides a microphone, including a protection structure with a containment space, and an ASIC chip and a MEMS microphone chip accommodated in the containment space. The microphone also includes a low pass filter circuit. The low pass filter circuit is connected between the ASIC chip and the MEMS microphone chip, or the low pass filter circuit is integrated in the ASIC chip. The high frequency cutoff frequency of the low pass filter circuit is greater than 20 khz, so that by setting the low pass filter circuit, the interference of the ultrasonic frequency band can be filtered, the noise can be reduced, and the audio quality can be improved.

A MEMS microphone according to one embodiment of the present invention comprises: a substrate; a MEMS structure disposed on the substrate; a signal processing element, which is disposed on the substrate and processes signals of the MEMS structure; and a first passive element unit pattered on the substrate and electrically connected to a power input terminal of the signal processing element.

The application provides a MEMS microphone, comprising a substrate and a MEMS chip, an ASIC chip, a pressure sensing module and a pressure data tuning processing module arranged on the substrate; wherein the pressure sensing module is arranged at the bottom of the MEMS chip. The pressure sensing module is used for sensing the pressure at the bottom of the MEMS chip and outputting a first pressure signal; the ASIC chip is used for converting the pressure signal output by the MEMS chip into a second pressure signal and outputting the second pressure signal to the pressure data tuning processing module; and the pressure data tuning processing module is used for compensating the second pressure signal according to the first pressure signal and outputting the compensated second pressure signal as a target pressure signal. The MEMS microphone can sense the pressure of different use interfaces through the pressure sensing module, compensate the output of the MEMS chip, and thus keep the pressure sensitivity of the MEMS microphone consistent in different use scenarios.

The invention relates to an optical fiber guidance unmanned aerial vehicle sound source localization method and system based on multi-mode voiceprint feature fusion. The method comprises the following steps that multi-channel sound source signals are collected through an MEMS microphone array; performing dual-channel filtering on the acquired multi-channel sound source signal, performing time-frequency feature extraction through a mechanical vibration channel, and performing frequency-domain feature extraction through an aerodynamic noise channel; calculating a direction-of-arrival matrix based on the multi-channel sound source signals to obtain spatial domain features; constructing a time-frequency-space three-dimensional feature tensor based on the extracted time-frequency features, frequency-domain features and space-domain features, performing identification through a deep residual network, and judging whether a sound source signal is emitted by the unmanned aerial vehicle; and if yes, obtaining the three-dimensional coordinates of the unmanned aerial vehicle through a positioning algorithm. The sound source is recognized based on multi-mode fusion voiceprint feature fusion, and high-precision recognition and positioning of the optical fiber guidance unmanned aerial vehicle are achieved.

Embodiments of the present invention relate to the technical field of microphones. Disclosed are a diaphragm and an MEMS microphone. The diaphragm comprises a vibration portion and a connecting portion arranged around the vibration portion. The vibration portion comprises a first flat portion located at a central position, a corrugated portion arranged around the first flat portion, and a second flat portion arranged around the corrugated portion. The corrugated portion extends in a direction from the center to the edge of the first flat portion. The bending stiffness of the corrugated portion is greater than the bending stiffness of the first flat portion and the second flat portion, and the corrugated portion is made of a material at least comprising silicon nitride. The diaphragm and the MEMS microphone provided in the embodiments of the present invention can increase the structural strength of the diaphragm.

A piezoelectric microelectromechanical systems (MEMS) microphone is provided comprising a substrate including walls defining a cavity and at least one of the walls defining an anchor region, a piezoelectric film layer supported by the substrate at the anchor region such that the piezoelectric film layer is cantilevered, the piezoelectric film layer being formed to introduce differential stress between a front surface of the piezoelectric film layer oriented away from the cavity and a back surface of the piezoelectric film layer oriented towards the cavity such that the piezoelectric film layer is bent into the cavity, and an electrode disposed over the piezoelectric film layer and adjacent the anchor region. A method of manufacturing such a MEMS microphone is also provided.

A MEMS microphone according to the present embodiment comprises: a first substrate; a second substrate disposed on the first substrate; a MEMS structure disposed on the second substrate; and a signal processing device disposed on the second substrate and spaced apart from the MEMS structure, wherein the first substrate comprises a plurality of first front-surface pads provided on one surface thereof, each of the plurality of first front-surface pads has a via formed therein, and the signal processing device is wire-connected to the vias.

The present invention relates to the technical field of transformers. Disclosed is a method for detecting acoustic anomalies of a transformer, the method comprising: collecting acoustic signals during operation of a transformer by using a plurality of high-sensitivity acoustic sensors; preprocessing the collected acoustic signals; extracting time-domain features, spectral features and deep features of the acoustic signals; performing fusion on the time-domain features, frequency-domain features and deep-learning features to form a composite feature vector; and constructing an anomaly detection model by using a support vector mechanism, and introducing an attention mechanism into the model. The method for detecting acoustic anomalies of a transformer ensures the high resolution and high signal-to-noise ratio of acoustic signals by means of a multi-sensor layout and a high-sensitivity MEMS microphone. The multi-sensor arrangement can cover different positions of the transformer, thereby more comprehensively capturing the operating state of the transformer. The extracted time-domain features and spectral features describe characteristics of the acoustic signals from different perspectives.

The embodiment of the present application discloses a kind of MEMS microphone and microphone processing technology, MEMS microphone includes substrate and is installed on the first diaphragm, second diaphragm and back plate of the substrate, support column is arranged between the first diaphragm and second diaphragm, the back plate is equipped with through-hole, the support column passes through the through-hole, the support column includes the first support column connected to the first diaphragm connection, the second support column connected to the second diaphragm, the first support column and / or the second support column are made of plastic material.The technical effect of one embodiment of the present application is that by making the first support column and / or the second support column from plastic material, the stress concentration effect is significantly reduced while providing sufficient support to the diaphragm, thereby improving the structural reliability of the MEMS microphone.

The invention discloses a bone conduction MEMS microphone intelligent detection sensor and a frequency response detection method, and relates to the technical field of intelligent detection sensors, the sensor comprises an infrared induction assembly, a signal collector, a laser ranging assembly and a detection processing chip; according to the frequency response detection method, a bone vibration generator is started by acquiring a first infrared signal, a vibration signal, a microphone audio signal and a measurement distance are acquired, when a second infrared signal is received, fast Fourier transform is triggered to convert the audio signal into an audio frequency spectrum, and a pure audio frequency spectrum is obtained through LSTM fusion wavelet transform denoising; according to the method, a professional anechoic room and discrete equipment are not needed, the integration degree is high, the method is adaptive to multiple scenes, and high-precision detection of the microphone frequency response is achieved.

A MEMS microphone, a microphone unit and an electronic device are disclosed by the present disclosure. The micro-electro-mechanical system microphone comprises: a substrate; a back electrode plate comprising a supporting structure; and a diaphragm located between the substrate and the back electrode plate, wherein the supporting structure comprises a supporting portion used for supporting a periphery of a diaphragm, and a supporting electrode being insulated from the supported diaphragm, and wherein the diaphragm is a stress-free film when being applied no bias, and when being applied a bias, the supporting electrode constrains the periphery of the diaphragm on the supporting portion through electrostatic interaction so as to support the diaphragm in a clamped manner.

Disclosed are a MEMS microphone and a manufacturing method thereof. The MEMS microphone comprises a substrate, a diaphragm and a backplate electrode located on a first surface of the substrate, the diaphragm and the backplate electrode being spaced apart from each other, a first surface of the diaphragm and a first surface of the backplate electrode being opposite to each other, and an acoustic cavity penetrating through the substrate to a second surface of the diaphragm, the second surface of the diaphragm and the first surface of the substrate being in point contact through a connecting part. The present application releases the stress of the diaphragm greatly by point contact between the diaphragm and the substrate, and improves the sensitivity of mechanical response of the diaphragm.

The application provides a directional microphone, which comprises a device substrate, a MEMS microphone sensor assembly, an intermediate plate, a top substrate and a MEMS comb mechanism; the MEMS microphone sensor assembly is fixed in the middle area of the top surface of the device substrate, the intermediate plate is covered on the device substrate and has an inner hole surrounding the MEMS microphone sensor assembly; the top substrate is covered on the intermediate plate and has a horizontal channel on the top surface and a lower end opening on the bottom surface, the horizontal channel is communicated with the inner hole through the lower end opening; the MEMS comb mechanism comprises a movable comb on the top surface of the device substrate and capable of controlled horizontal movement, the movable comb has an opening structure and a shielding structure; during the movement of the movable comb, the opening structure is communicated with the horizontal channel at different positions respectively. The directional microphone has good versatility based on the adjustable directional design of the microphone sensor assembly.

The invention is suitable for the technical field of electronic microphone audio signal processing, and provides an electronic microphone audio signal processing system and method, and the system comprises a server which is connected with a signal collection module, a digital signal processing module, a digital-to-analog conversion module, and an output module. The signal acquisition module comprises a sound sensor, an analog front end and an analog-to-digital converter; the sound sensor adopts an MEMS microphone array and converts sound wave pressure change into an analog electric signal; a pre-amplifier, a biasing circuit and an anti-aliasing filter are arranged in the analog front end; the pre-amplifier amplifies an electric signal output by the microphone; the anti-aliasing filter is used for filtering high-frequency components higher than the Nyquist frequency before analog-digital conversion, and aliasing distortion is prevented. According to the invention, digital audio signals can be accurately processed in real time, echoes are effectively eliminated, noise is suppressed, the volume is stabilized, the voice definition and the tone quality are improved, and the audio signal processing quality of the electronic microphone is greatly improved.