239 results about "Mems microphone" patented technology

Disclosed in the present invention is a high-dynamic capacitive digital microphone system based on electrostatic force feedback. The system comprises an MEMS microphone and an interface circuit chip thereof, wherein the interface circuit chip comprises a charge pump, an analog front end, an analog-to-digital conversion circuit, an amplitude detection module, an amplitude adjustment control module and a pulse density modulation module. In the present invention, the characteristic of the sensitivity being able to be adjusted by means of changing a bias voltage by a capacitive sensor is used, and a charge pump with an adjustable output voltage is used to provide electrostatic force feedback, thereby further expanding the adjustable range of a front-end gain, and also reducing requirements for the noise performance of a readout circuit. Therefore, the system in the present application has the characteristics of high dynamic range and high-precision quantization.

The invention relates to the technical field of power battery safety monitoring, in particular to a power battery thermal runaway voiceprint early warning method and system, and the method comprises the steps: collecting voiceprint signals in a battery pack cooling pipeline through an MEMS microphone array, and especially paying attention to the acoustic characteristics of a 23-28kHz frequency band; constructing a multi-scale convolutional recurrent neural network voiceprint recognition model which comprises a cascade residual feature extraction network, a three-path parallel multi-scale convolutional layer, an adaptive attention mechanism, a feature fusion layer and a long-short term memory network layer; calculating a voiceprint signal entropy value and comparing the voiceprint signal entropy value with a preset threshold value; meanwhile, the deformation of the battery cell is monitored through a band-shaped Bragg grating sensor; when the voiceprint entropy value exceeds 2.8 times of the historical average value and lasts for 20 seconds, and meanwhile, the deformation of the battery cell reaches 0.15%, thermal runaway early warning is triggered, a multi-stage early warning mechanism is arranged, early warning can be given out 10-30 minutes before thermal runaway occurs, and sufficient time is provided for taking safety measures.

The invention discloses a highly dustproof MEMS microphone packaging substrate and a processing method thereof. The highly dustproof MEMS microphone packaging substrate is characterized in that a capacitor-embedded resistor-embedded substrate is provided with a sound hole processing area; the two outermost layers of the capacitor-embedded resistor-embedded substrate are respectively covered with an ultrathin copper layer, and a window is manufactured on one ultrathin copper layer at a position corresponding to a sound hole processing area through a pattern manufacturing process. And after the position, corresponding to the sound hole machining area, on the other ultrathin copper layer is thickened, a copper net pattern formed by connecting a plurality of copper wires in a crossed mode is manufactured. Based on the window, at least part of the sound hole machining area is hollowed out through a laser groove burning technology, and a sound hole communicated with the copper net pattern is manufactured; cleaning the sound hole and the copper mesh pattern; and plating a protective layer on the copper net pattern. The processing method is novel and reasonable, the obtained MEMS microphone packaging substrate has the advantages of being small in size, thin in structure, excellent in ventilation and dustproof performance, high in sound transmission quality, high in reliability, high in anti-interference performance and the like, and market requirements are met.

The invention discloses a self-service terminal large model task processing system and method, and the system comprises a multi-mode perception fusion unit which is integrated with an infrared multi-point touch screen, an MEMS microphone array, and an industrial grade code scanning module. A medical diagnosis knowledge graph and a financial transaction ontology industry exclusive graph are built in the multi-field intention classification model; the dynamic demand matching engine is used for analyzing a cross-domain task link by adopting a Transform-XL long sequence modeling technology; a Petri net simulator and a conflict detection algorithm are built in the task arrangement middleware, and the task arrangement middleware is used for guaranteeing the consistency of execution time sequences of multiple sub-tasks; the self-adaptive response generation module is used for supporting automatic conversion from a natural language instruction to a PLC control code; according to the method, the task identification accuracy can be improved based on multi-modal fusion; the dynamic demand matching engine supports processing of a large number of concurrent requests per second, and response delay is low.

The invention discloses a control system of a controllable anti-recording device, and relates to the technical field of information safety protection, a multi-dimensional audio detection module adopts a quaternary cross array MEMS microphone array and can identify characteristic signals of recording equipment in a frequency band of 20 Hz to 20 kHz, an interference generation module generates a self-adaptive comb-shaped interference spectrum based on a DDS technology, dynamically avoids communication and voice frequency bands, and provides a multi-dimensional anti-recording device based on the self-adaptive comb-shaped interference spectrum. The heterogeneous computing master control module integrates a CPU and a DSP, a multi-level decision tree algorithm is built in, the composite energy management module fuses piezoelectric and electromagnetic dual-mode energy collection, and the anti-interference communication module adopts a UWB and Bluetooth 5.3 mixed link and supports dynamic frequency hopping and LDPC coding. Through combination of the multi-dimensional microphone array and an intelligent algorithm, high-precision recording equipment detection and positioning are realized, the system integration degree is high, the system can be rapidly deployed in a conference room, a confidential place and the like, and comprehensive protection is provided for information security.

A method for manufacturing a microelectromechanical systems (MEMS) microphone comprises depositing a membrane on a first sacrificial layer, wherein the first sacrificial layer is deposited on a substrate, etching the substrate to define a cavity, releasing the membrane by removing at least the first sacrificial layer, and forming at least one anchor at the edge of the membrane.

The present application relates to the technical field of health monitoring, in particular to a kind of infant asphyxia risk autonomous monitoring method and system based on laryngeal respiratory sound, comprising: utilize high sensitivity MEMS microphone to collect the airflow and respiratory sound signal of infant larynx, and utilize micro accelerometer to monitor the thoracic movement data of infant synchronously;The airflow and respiratory sound signal are denoising, and the denoising respiratory sound signal is obtained;The denoising respiratory sound signal is separated according to respiratory event Signal, and is enhanced and combined into respiratory sound data set;Respiratory sound feature is extracted in respiratory sound data set, and asphyxia anomaly classification model is constructed based on respiratory sound feature by machine learning model, and dynamic baseline model that adapts individual respiratory difference is established according to respiratory sound feature.The present application utilizes the hardware device of high sensitivity MEMS microphone and micro accelerometer and artificial intelligence model to combine, realizes the use of laryngeal respiratory sound signal in home environment and autonomously completes infant asphyxia risk identification and early warning.

The invention provides an MEMS microphone and a manufacturing method thereof.The MEMS microphone comprises a substrate with a cavity, a vibrating diaphragm supported on the substrate and a back plate spaced from the vibrating diaphragm, the vibrating diaphragm comprises a fixing part fixedly connected with the substrate and a vibrating part suspended above the cavity, and the fixing part is fixedly connected with the substrate. The vibration part comprises a plane part, a plurality of concave diaphragm parts arranged on the plane part at intervals and a connecting part for connecting the plane part and the concave diaphragm parts, each concave diaphragm part comprises a first silicon nitride layer, a silicon oxide layer and a second silicon nitride layer which are sequentially stacked along the vibration direction of the diaphragm, and the first silicon nitride layer is closer to the substrate than the second silicon nitride layer. According to the MEMS microphone, the composite material is adopted to manufacture the vibrating diaphragm with the corrugated shape, the vibrating diaphragm can generate large displacement under sound pressure, so that high sensitivity is obtained, the corrugated vibrating diaphragm made of the composite material can decompose stress, the strength of the vibrating diaphragm is enhanced, and the reliability of the MEMS microphone is improved.

The invention relates to the technical field of biological recognition, in particular to a multi-scene-oriented dynamic voiceprint recognition updating method, which comprises the following steps: synchronously acquiring voice signals through a 16-channel MEMS microphone array and a throat three-axis acceleration sensor, and constructing a three-dimensional data set containing acoustic scene fingerprints, semantic contexts and emotional characteristics; extracting features by adopting a scene adaptive dual-mode processing architecture, and extracting semantic features and emotional state coding vectors to form a multi-dimensional feature set; based on the multi-dimensional feature set, calculating a matching degree by using a Gaussian mixture model, monitoring a scene mutation index, and triggering an online clustering reconstruction mechanism to optimize a feature weight; deploying a three-level pipeline architecture for real-time processing; and generating a scene adaptation factor according to the MFCC-PLP mixed feature matrix and the environmental parameters to perform multi-feature joint matching. According to the invention, the adaptability of voiceprint recognition in a complex scene can be improved.

The invention relates to the technical field of health monitoring, in particular to an infant suffocation risk autonomous monitoring method and system based on laryngeal breathing sound, and the method comprises the steps: collecting airflow and breathing sound signals of the throat of an infant through a high-sensitivity MEMS microphone, and synchronously monitoring thoracic motion data of the infant through a miniature accelerometer; performing noise reduction processing on the airflow and the breathing sound signal to obtain a denoised breathing sound signal; performing signal separation on the denoised breathing sound signals according to a breathing event, and enhancing and combining the denoised breathing sound signals into a breathing sound data set; extracting breath sound features from the breath sound data set, constructing a suffocation anomaly classification model based on the breath sound features through a machine learning model, and establishing a dynamic baseline model adapted to individual breath differences according to the breath sound features; hardware devices of a high-sensitivity MEMS microphone and a micro accelerometer are combined with an artificial intelligence model, and infant asphyxia risk identification and early warning are autonomously completed in a home environment by using laryngeal respiration sound signals.

Microphone assembly (1) comprising at least one microphone capsule (2), preferably a MEMS microphone capsule, wherein the microphone assembly (1) comprises at least one electrical contacting means (3) for supplying voltage and / or for providing microphone signals, wherein the microphone assembly (1) comprises a first printed circuit board (4), on the upper side (5) of which the microphone capsule (2) is arranged, preferably fastened, wherein the first printed circuit board (4) comprises through-openings (6, 6a), characterized in that a bottom side (7) of the first circuit board (4) is connected to a second circuit board (9) comprising through-openings (8, 8a) in such a way that through-openings (6, 6a) of the first circuit board (4) and through-openings (8, 8a) of the second circuit board (9) form channels (10, 10a) designed for the passage of sound waves, and Channels (10, 10a) are formed which are spatially separated from one another by a web (11) arranged in the first circuit board (4) and a web (12) arranged in the second circuit board (9).

An MEMS microphone includes a substrate with a back cavity and a capacitor system arranged on the substrate. The capacitor system includes a back plate and a diaphragm opposite to and spaced apart from the back plate. Surface of the back plate facing diaphragm or surface of diaphragm facing the back plate being provided with an anti-adhesion member. When the diaphragm moves until the anti-adhesion member is in contact with the diaphragm and the back plate at the same time, the anti-adhesion member is elastically deformable along a vibrating direction of the diaphragm. The anti-adhesion member of the present disclosure is elastic and may provide cushioning for movement of the diaphragm, which prevents rapid concentration of stress at a position of the diaphragm in contact with the anti-adhesion member, thereby preventing formation of pits in the diaphragm and preventing breakage of the diaphragm under repeated impact of the anti-adhesion member.

The utility model discloses an MEMS microphone with a high electromagnetic shielding effect, relates to the technical field of MEMS microphones, and aims to solve the problems that an existing MEMS microphone is lack of an electromagnetic shielding structure inside, is insufficient in anti-electromagnetic interference and needs to be improved in overall practicability. A first aluminum foil is pasted on the inner wall of the shell, a rear cover plate is installed at a port of the shell in a buckled mode, a second aluminum foil is pasted on the inner wall of the rear cover plate, a mounting hole is formed in the middle of the outer surface of one side of the shell, and a metal net is installed in the mounting hole in a buckled mode. A metal net is arranged in the shell, a connecting ring is installed on the inner end face of the shell in a buckled mode, the connecting ring is located on one side of the metal net, the connecting ring and the round metal net share the same central axis, a metal vibration film is arranged in the connecting ring, and a circuit board is installed in the shell in a buckled mode. Effective electromagnetic shielding can be achieved, and the overall anti-electromagnetic interference effect is high.

A MEMS microphone according to the present embodiment comprises: a first substrate; a second substrate disposed on the first substrate; an adhesive layer disposed between the first and second substrates; a MEMS structure disposed on the second substrate; a signal processing device disposed on the second substrate and spaced apart from the MEMS structure; and a capacitor disposed to be spaced apart from the MEMS structure and the signal processing device, wherein the capacitor comprises a first external electrode and a second external electrode disposed at opposite ends thereof, and a plurality of internal electrodes and dielectric layers disposed between the first external electrode and the second external electrode, and the first substrate, the second substrate, and the MEMS structure are stacked in a first direction, while the plurality of internal electrodes are stacked in a second direction perpendicular to the first direction.

Disclosed are a micro-electromechanical system (MEMS) structure and an MEMS microphone comprising same. The MEMS structure comprises a back plate; and a diaphragm located on one side of the back plate, wherein the diaphragm and the back plate forms a variable capacitor, the diaphragm comprises multiple first through holes and air release structures respectively corresponding to the first through holes, and the diaphragm further comprises one or more second through holes penetrating through the diaphragm.

The invention relates to operating point stabilization of VCO-ADC using switched capacitor frequency to current conversion. A circuit includes a micro-electro-mechanical system (MEMS) microphone configured to generate a voltage signal at an output terminal of the MEMS microphone in response to a sound signal; a voltage controlled oscillator (VCO) coupled to an output terminal of the MEMS microphone and configured to output a frequency modulated signal at an output terminal of the VCO, the frequency modulated signal having a frequency proportional to the voltage signal; a frequency-to-digital (FTD) converter coupled to an output terminal of the VCO and configured to convert the frequency modulated signal to a frequency proportional digital output signal; a frequency voltage (FTV) conversion circuit coupled to an output terminal of the VCO and configured to generate a bias voltage at the output terminal of the FTV conversion circuit according to a frequency modulation signal; and a resistor coupled between the output terminal of the MEMS microphone and the output terminal of the FTV conversion circuit.

The invention provides a vehicle-mounted front windshield dimming window glass system capable of realizing light transmittance adjustment through a voice command, which comprises front windshield dimming glass, a sandwich structure formed by compounding glass, a glue film and a dimming film, a dimming area and a non-dimming area, the dimming area is divided into a fixed dimming area and a gradually-changed dimming area from top to bottom, and the light transmittance of the front windshield dimming glass is adjusted through a voice command. The bright-state light transmittance of the dimming area is greater than or equal to 70%; the sound control module is integrated in a vehicle-mounted control system and comprises an MEMS microphone array, a noise reduction algorithm chip and a controller; wherein the sound control module receives data transmitted by the MEMS microphone, inputs an electric signal to the front windshield dimming glass according to a preset program, and adjusts the light transmittance of the front windshield dimming glass. According to the scheme, safe interaction in a driving scene can be realized, and driving danger caused by too strong / too dark light or frequent switching of the light transmittance of the front windshield dimming glass is avoided.

The application discloses a controllable recording prevention device control system, and relates to the technical field of information security protection.A four-element cross array MEMS microphone array is used in the multi-dimensional audio detection module, which can identify recording equipment characteristic signals in a 20Hz to 20kHz frequency band.A self-adaptive comb interference spectrum is generated by the interference generation module based on DDS technology, and the communication and voice frequency bands are dynamically avoided.The heterogeneous computing main control module integrates CPU and DSP, and is provided with a multi-level decision tree algorithm.A composite energy management module combines piezoelectric and electromagnetic dual-mode energy collection, and an anti-interference communication module uses a UWB and Bluetooth 5.3 hybrid link, supports dynamic frequency hopping and LDPC coding.The application combines a multi-dimensional microphone array with an intelligent algorithm to realize high-precision recording equipment detection and positioning, and the system has high integration degree and can be quickly deployed in conference rooms, secure locations and the like to provide all-round protection for information security.

Systems and methods for a MEMS microphone package are disclosed. The MEMS microphone package may include a first port to direct sound to a MEMS system, including a die substrate, an acoustic membrane, and one or more plates. The MEMS microphone package may include an ASIC to produce microphone output based on an electrical signal, a PCB, a lid, and a second port. The first port and the second port may define a front volume and a back volume respectively. The second port may increase the back volume to improve sensitivity and reduce the acoustic sensor's noise floor to improve signal-to-noise ratio.

A piezoelectric microelectromechanical systems microphone is provided comprising a substrate including at least one wall defining a cavity, the at least one wall defining an anchor region around a perimeter, a piezoelectric film layer forming a membrane, the piezoelectric film layer being supported at the anchor region by a spring region, and an electrode disposed over the piezoelectric film layer. A method of manufacturing such a MEMS microphone is also provided.

The application discloses a landing gear scale model device for pneumatic noise wind tunnel test and a MEMS microphone array test method. A small wind tunnel is selected to build a pneumatic acoustic test platform. In the test platform, an end plate is installed on the side of the wind tunnel nozzle, the end plate is embedded with a rotating platform, and the scale landing gear model arranged in the wind tunnel is connected through the rotating platform. Meanwhile, an arc array is installed through the erection of a cross beam in the overhead and side direction of the landing gear, the posture of the arc array is adjusted, the plane of the side arc array is parallel to the horizontal plane, the plane of the overhead arc array is perpendicular to the axis of the cross beam, the center of the arc array is coplanar with the center of the scale landing gear model, and the MEMS microphone is installed on the arc needle array. Then, according to the standard test method, the scale landing gear model is subjected to pneumatic acoustic wind tunnel array measurement test. The application can meet the requirements of model installation in a small-size wind tunnel, a high-quality pneumatic acoustic field environment and high-density array movable collection points for realizing spatial directivity measurement.

The invention relates to the field of microphone anomaly detection, in particular to an array MEMS microphone health state in-situ quantitative evaluation method and device in a noise environment. The invention provides a noise environment-oriented in-situ quantitative evaluation method for the health state of an array microphone, and designs an embedded broadband ultrasonic frequency sweeper capable of outputting relatively flat sound wave power at the frequency band of 20k-80kHz. A dual-mode self-checking process design of rapid self-checking and full-channel cross self-checking is adopted, and the 20k-80kHz frequency response characteristic of the microphone can be rapidly detected in a conventional indoor / outdoor noise environment. A Welch method is used for estimating power spectral density, a health state quantitative index is constructed by using PSD correlation coefficients among channels, and screening, marking and removing of abnormal channels are realized by setting a multi-level threshold value, and visual presentation is realized in a graphic and text mode.

A circuit comprises: a microelectromechanical system (MEMS) microphone configured to generate a voltage signal at an output terminal of the MEMS microphone in response to an acoustic signal; a voltage-controlled oscillator (VCO) coupled to the output terminal of the MEMS microphone and configured to output a frequency-modulated signal having a frequency proportional to the voltage signal at an output terminal of the VCO; a frequency-to-digital (FTD) converter coupled to the output terminal of the VCO and configured to convert the frequency-modulated signal into a digital output signal proportional to the frequency;a frequency-to-voltage (FTV) converter circuit coupled to the output terminal of the VCO and configured to generate a bias voltage at an output terminal of the FTV converter circuit according to the frequency-modulated signal; and a resistor connected between the output terminal of the MEMS microphone and the output terminal of the FTV converter circuit.

The utility model relates to the technical field of acoustics, in particular to a bone conduction MEMS microphone structure. Comprising a first PCB, a second PCB and a third PCB, the upper end face of the second PCB is provided with an electro-acoustic conversion chip MEMS and an electric signal processing chip ASIC, the electro-acoustic conversion chip MEMS and the electric signal processing chip ASIC are connected through a gold wire, the lower end face of the second PCB is provided with a vibrating diaphragm assembly, and the first PCB, the second PCB and the third PCB are arranged in a stacked mode. Vibration is transmitted to the microphone through the skeleton, the vibrating diaphragm assembly starts to vibrate, so that the pressure in the cavity is changed, the changed pressure is transmitted to the vibrating diaphragm assembly, the vibrating diaphragm assembly vibrates, a vibration signal is converted into an electric signal through the electro-acoustic conversion chip MEMS, and the electric signal is amplified and processed by the electric signal processing chip ASIC and then output. According to the design, a mature packaging process is utilized, so that the production process of the bone conduction MEMS microphone is simpler, and the production efficiency is improved.

Portable system for the detection of bruxism, including: • a passive, intraoral dental splint with a piezoelectric foil sensor, • an externally worn bracelet with MEMS microphone, • a neural evaluation unit for real-time analysis of acoustic signals, • a feedback module with vibration, sound and display, whereby the dental splint contains no electronic components and the system operates completely energy autonomously.

The invention discloses a directional MEMS microphone, a beam forming method and device and electronic equipment, and belongs to the technical field of directional microphones, and the beam forming method comprises the steps: obtaining PDM signals of two MEMS microphones, carrying out the delay processing of the two PDM signals, and obtaining two target delay PDM signals with a half target frequency; and performing staggered interpolation of addition or subtraction on the two target delay PDM signals by taking 1-bit as a unit to obtain a formed PDM signal of the target frequency. The directional MEMS microphone comprises a first MEMS microphone, a second MEMS microphone, a first ASIC chip, a second ASIC chip and a third ASIC chip, and is used for executing the beam forming method to realize beam forming. According to the invention, the delay phase of beam forming is added and shifted to the PDM signal domain, so that the beam forming with ultra-low power consumption and ultra-low cost can be realized.

The invention discloses a vibrating diaphragm for an MEMS microphone and the MEMS microphone. The vibrating diaphragm comprises a vibrating diaphragm main body; the pressure relief part is arranged on the vibrating diaphragm main body, the pressure relief part comprises a first pressure relief seam and a second pressure relief seam, the end part of the first pressure relief seam is provided with a first pressure relief port, the second pressure relief seam is arranged corresponding to the first pressure relief port, a second pressure relief port is formed in the end part of the second pressure relief seam, and the first pressure relief port is arranged corresponding to the second pressure relief port. The connecting line of the two second pressure relief ports intersects with the first pressure relief seam or the first pressure relief port. Compared with the prior art, the pressure relief part with the first pressure relief seam and the second pressure relief seam is arranged on the vibrating diaphragm, and the second pressure relief seam is located at the tail end of the first pressure relief seam, so that the maximum stress can be reduced, the compliance of the vibrating diaphragm can be maintained / improved, and meanwhile, the air pressure release effect can be improved.

The utility model relates to the technical field of acoustics, in particular to a bone conduction MEMS microphone. Comprising a first PCB, a second PCB and a third PCB, a vibration assembly is arranged on the lower end face of the first PCB, an electro-acoustic conversion chip MEMS and an electric signal processing chip ASIC are arranged on the lower end face of the second PCB, the electro-acoustic conversion chip MEMS and the electric signal processing chip ASIC are connected through a gold wire, the first PCB, the second PCB and the third PCB are arranged in a stacked mode, and when a wearer makes a sound, the vibration assembly is arranged on the lower end face of the first PCB, the electro-acoustic conversion chip MEMS and the electric signal processing chip ASIC are connected through a gold wire. Vibration is transmitted to the microphone through the skeleton, the vibrating diaphragm assembly starts to vibrate, so that the pressure in the cavity is changed, the changed pressure is transmitted into the vibrating diaphragm assembly, the vibrating diaphragm assembly vibrates, a vibration signal is converted into an electric signal through the electro-acoustic conversion chip MEMS, the electric signal is amplified and processed by the electric signal processing chip ASIC, and then the electric signal is output. According to the design, a mature packaging process is utilized, so that the production process of the bone conduction MEMS microphone is simpler, and the production efficiency is improved.

The invention discloses a micro-electro-mechanical microphone and a manufacturing method thereof. The MEMS microphone includes a substrate, a diaphragm, and a back plate. The substrate has a cavity. The diaphragm is disposed on the substrate and spans the cavity. The back plate is arranged above the vibrating diaphragm and is separated from the vibrating diaphragm through an air gap. The diaphragm has a corrugated structure. And the back plate is provided with a part which corresponds to the corrugated structure and is positioned right above the corrugated structure. The height difference of the part is smaller than or equal to 20% of the height difference of the corrugated structure.