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476 results about "Capacitive microphone" patented technology

Condenser microphone chip

Disclosed is a condenser microphone chip, comprising: a substrate (21); a diaphragm (26) spaced from the substrate; a curved beam (27) connected with the diaphragm (26) to anchor the diaphragm (26) to the substrate (21); a curved beam connecting part (29) having a shape of a substantially circular plate. The curved beam (27) is arranged in the diaphragm (26). The curved beam (27) includes a plurality of sub beams, each of the plurality of sub beams including a first sub beam portion extending in a substantially radial direction from a circumference of the curved beam connecting part (29); a second sub beam portion extending in a substantially circumferential direction from an end of the first sub beam portion away from the circumference of the curved beam connecting part (29) and having a shape of a substantial arc; and a third sub beam portion extending in the radial direction from an end of the second sub beam portion away from the first sub beam portion and connected to the diaphragm (26). The condenser microphone chip according to the present invention is high in sensitivity, low in noise, wide in frequency band, simple in manufacturing process, and high in reliability. In addition, the condenser microphone chip can be easily manufactured in mass production.
Owner:GOERTEK MICROELECTRONICS CO LTD

MEMS process and device

A MEMS device, for example a capacitive microphone, comprises a flexible membrane 11 that is free to move in response to pressure differences generated by sound waves. A first electrode 13 is mechanically coupled to the flexible membrane 11, and together form a first capacitive plate of the capacitive microphone device. A second electrode 23 is mechanically coupled to a generally rigid structural layer or back-plate 14, which together form a second capacitive plate of the capacitive microphone device. The capacitive microphone is formed on a substrate 1, for example a silicon wafer. A back-volume 33 is provided below the membrane 11, and is formed using a “back-etch” through the substrate 1. A first cavity 9 is located directly below the membrane 11, and is formed using a first sacrificial layer during the fabrication process. Interposed between the first and second electrodes 13 and 23 is a second cavity 17, which is formed using a second sacrificial layer during the fabrication process. A plurality of bleed holes 15 connect the first cavity 9 and the second cavity 17. Acoustic holes 31 are arranged in the back-plate 14 so as to allow free movement of air molecules, such that the sound waves can enter the second cavity 17. The first and second cavities 9 and 17 in association with the back-volume 33 allow the membrane 11 to move in response to the sound waves entering via the acoustic holes 31 in the back-plate 14. The provision of first and second sacrificial layers has the advantage of protecting the membrane during manufacture, and disassociating the back etch process from the definition of the membrane. The bleed holes 15 aid with the removal of the first and second sacrificial layers. The bleed holes 15 also contribute to the operating characteristics of the microphone.
Owner:CIRRUS LOGIC INC

Capacitance type microphone with stress release membrane prepared at a low temperature and preparation method thereof

A capacitance type microphone with a stress release membrane prepared at a low temperature and a preparation method thereof. The capacitance type microphone includes a substrate having at least a resonant cavity; a septum, arranged on the top of the resonant cavity and connected with the substrate for implementing a mechanical vibration when being excitated by an acoustic pressure wave; a back board, arranged on the top of the septum and having a plurality of perforations; an air gap is provided the back board and the septum; a capacitor is composed of the septum, the air gap and the back board. The method includes steps: forming the resonant cavity on the substrate; forming the septum on the top of the resonant cavity, wherein the septum is connected with the substrate; setting the back board on the top of the septum, wherein the back board has a plurality of perforations; forming the air gap between the back board and the septum. The invention is a MEMS capacitance type microphone processed by a completely low-temperature technique. It is capable of being used as a post IC circuit processing technique being compatible thereof. The structure of the vibration diaphragm of the capacitance type microphone is a stress-releasing structure, and is capable of reducing a parasitic capacitance. Comparing with the traditional initial stress release membrane, the invention improves the sensitivity of the microphone more effectively.
Owner:王文 +1

Electronic cigarette chip and electronic cigarette

The invention relates to an electronic cigarette chip which is used for controlling the switching on and off of an electronic cigarette adopting a capacitive microphone according to capacitance change of the capacitive microphone. The electronic cigarette chip comprises a microphone capacitance detecting module and a heating wire driving circuit which are connected with each other, wherein the microphone capacitance detecting module is used for detecting the capacitance of the capacitive microphone, converting the capacitance of the capacitive microphone into a comparison signal, comparing the comparison signal with a smoking threshold value, and controlling the open and close of the heating wire driving circuit according to the comparing result. As the sensibility and reliability of the electronic cigarette chip are effectively improved, the electronic cigarette can generate smoke even under little sucking force, the phenomenon of smoking by false triggering is avoided, and the electronic cigarette chip solves a series of problems that the electronic cigarette is heated excessively, a plastic shell of the electronic cigarette is burnt, the service life of the electronic cigarette is shortened, the yield is low and the like caused by the long-time continuous false triggering smoking action of the conventional electronic cigarette chip.
Owner:胡朝群
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