6 results about "Stiction" patented technology

A micro-electromechanical-system (MEMS) device may be formed to include an anti-stiction polysilicon layer on one or more moveable MEMS structures of a device wafer of the MEMS device to reduce, minimize, and / or eliminate stiction between the moveable MEMS structures and other components or structures of the MEMS device. The anti-stiction polysilicon layer may be formed such that a surface roughness of the anti-stiction polysilicon layer is greater than the surface roughness of a bonding polysilicon layer on the surfaces of the device wafer that are to be bonded to a circuitry wafer of the MEMS device. The higher surface roughness of the anti-stiction polysilicon layer may reduce the surface area of the bottom of the moveable MEMS structures, which may reduce the likelihood that the one or more moveable MEMS structures will become stuck to the other components or structures.

The utility model relates to a tool for detecting dragging torque and outer contour, which comprises a tool bottom plate, a tool seat, a dragging torque detection unit, an outer contour dimension measurement unit and a data processing and control system, and is characterized in that the tool bottom plate and the tool seat are positioned through a positioning pin and are in threaded connection and fixation; the tool bottom plate is positioned through the diagonal positioning pins and the trimming pins and installed on a workbench. According to the utility model, dragging torque and outer contour detection modes are integrated, the requirements of workpiece carrying and repositioning are reduced, the detection efficiency is greatly improved, the production takt is shortened, and the efficiency and the yield of the whole assembly line are improved. The integrated structural design is adopted, the two parts work cooperatively, detection errors caused by assembly deviation of traditional split type detection equipment are avoided, and the detection precision is remarkably improved.

Systems and methods to reduce stiction in MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate; a via supported by the substrate, the via comprising a first metal layer comprising a material; an arm extending away from and supported by the via, the arm comprising the material; and a second metal layer within the via on the first metal layer, wherein the second metal layer comprises nitrogen.

A low-cost, conventional release using low concentrations of HF to overcome the stiction of MEMS structure.

An actuator assembly (1) comprising first and second parts (10, 20) that are movable relative to each other, the first part comprising a first friction surface (lOf) and the second part comprising a second friction surface (20f); at least two SMA elements (49) configured, on actuation, to cause actuation forces in opposite directions to be applied to the second part for moving the second part in opposite directions relative to the first part; a biasing arrangement (30) configured to apply a normal force biasing the first and second friction surfaces against each other, thereby giving rise to at least part of a static frictional force that is capable of constraining relative movement of the first and second parts when the at least two SMA elements are not actuated; wherein the at least two SMA elements are configured, on actuation, to cause reduction of the normal force between the first and second friction surfaces, thereby reducing the static frictional force; and further comprising at least one additional actuator (45) configured, on actuation, to modulate the static frictional force.

Stiction analysis of a conventional or legacy valve operation in a fluid process plant is described. The method includes receiving a series of setpoint signals, SP, generating, by the controller, a series of controller output signals, OP, driving the valve operation by applying the OP, to the valve, measuring a series of process variable signals, PV, downstream of the valve, receiving the series of process variable signals at the controller, performing inverse modelling on the PV, to estimate a manipulated variable, , receiving and analyzing by a system processor, the SP, the OP, and the , and outputting the estimated stick values, S, the estimated jump values, J, an average of the estimated stick values, an average of the estimated jump values, a confidence interval for the average of the stick values, and a confidence interval for the average of the jump values.