The invention discloses a slow-start pneumatic switch valve device for
trichlorosilane feeding, and belongs to the technical field of material preparation process valves. Comprising a switch valve and a
pneumatic actuator,
linear motion of a
piston rod is converted into rotation fine adjustment through a swing arm rotation compensation mechanism, a
solid / microgroove sealing ring and a sliding
cavity wall are always kept on a theoretical
contact line, abrasion microgaps are automatically compensated, zero-clearance sliding in the whole life cycle is achieved, and manual clearance adjustment is avoided; the
solid sealing ring adopts surface-surface contact, so that the unit pressure is reduced by more than 50%, and the wear rate is obviously reduced; the
omega-shaped groove of the microgroove sealing ring converts
solid particles (10-50 microns Si) into groove edge elastic sealing, and the wear rate is reduced by 40% again; a sealing surface is provided with a uniform
oil film, the dynamic and
static friction coefficient difference is reduced,
crawling /
jumping in a 0-20% opening low-speed stage is eliminated, true slow starting is achieved, the
water hammer effect during
trichlorosilane feeding is avoided, the sealing surface is provided with the uniform
oil film, the dynamic and
static friction coefficient difference is reduced, and
crawling /
jumping in the 0-20% opening low-speed stage is eliminated.