438 results about "Microelectromechanical systems" patented technology

The invention discloses a micro-cantilever geometric structure parameter inversion system, method and device, and belongs to the technical field of micro-electro-mechanical systems. According to the system, a dynamic model containing geometry, material and electromechanical coupling nonlinearity is constructed, a PINNs network fused with physical constraints is designed, a staged training optimization strategy is adopted, and efficient inversion of micro-cantilever geometric parameters is achieved. The core of the method is that a nonlinear kinetic equation is used as a constraint to be embedded into a neural network for training, experimental data and physical residual errors are combined to construct a composite loss function, and the problems that a traditional method neglects a nonlinear effect, depends on finite element simulation and is low in inversion precision are solved. The average relative error of inversion of the system is lower than 1%, which is obviously superior to that of a traditional method, and the method can be widely applied to MEMS device design, online detection and closed-loop control scenes.

The technology described herein is directed towards a metasurface arranged with unit cells for narrowband sound absorption, in which the unit cells are based on Helmholtz resonators that can have their resonant frequencies adjusted via MEMS actuators. A sound absorbing unit-cell is designed and constructed based on a general resonance frequency, and includes a neck portion and air chamber dimensioned to resonate close to the desired resonance frequency and thereby inverse phase cancel corresponding narrowband frequencies of incoming sound waves. A bimorph MEMS actuator and / or moveable part in the resonators, controlled by a controller, facilitates changing of the airflow the unit cells to adjust the resonant frequencies thereof, to cancel acoustic waves of different frequencies corresponding to noise, which can change over time. The unit cells can be distributed as part of a metasurface, which can be positioned proximate to a noise source to phase cancel the noise.

The invention discloses an electroplating process method for preparing a deep-etching thick metal mask, and belongs to the technical field of micro electro mechanical system electroplating processes. Comprising the following steps: firstly, carrying out photoetching and patterning on the surface of a wafer by using positive photoresist; then, carrying out seed layer sputtering on the wafer subjected to pattern photoetching, and forming a to-be-electroplated region with a preset pattern through a stripping process; then, photoetching is carried out on the to-be-electroplated area through negative photoresist, and a thick photoresist layer with the thickness larger than that of a preset metal coating is formed; and finally, the electroplating area is electroplated, and the metal coating with the preset thickness is obtained. According to the method, the negative photoresist process is adopted, so that the transverse growth of the metal coating is effectively inhibited, the perpendicularity of the side wall of the metal coating is improved, and meanwhile, the damage to the surface of the wafer when the seed layer in the non-electroplating area is removed is avoided. The problems that mushroom-shaped protrusions are easily formed on the edge of a plating layer, crystal grains are coarsened and the like in the electroplating process of an existing electroplating method are solved.

The invention relates to the technical field of manufacturing of micro electro mechanical systems, in particular to a metallization method of a micro-hemispherical harmonic oscillator for trimming after assembly, which comprises the following steps of: establishing a micro-hemispherical harmonic oscillator structure model, simulating and calculating modal parameters of the harmonic oscillator; calculating an influence rule of the trimming width and the trimming depth on frequency splitting of the micro-hemispherical harmonic oscillator model by adopting finite element software to obtain a relation curve of trimming quality and frequency splitting change; measuring the resonant frequency f and the frequency cracking f of the working mode of the harmonic oscillator to be processed, estimating the removal mass required by the corresponding frequency cracking according to the calculated relation curve, carrying out mass trimming to obtain a relation curve of the actual removal mass and the frequency cracking, and confirming the minimum width wmin required by the actual trimming; and removing the film layer with the ring width of wmin by adopting laser. According to the invention, quality trimming is carried out on the premise of not influencing the capacitance value of the harmonic oscillator, and driving and detection gain errors caused by quality trimming are reduced.

The technology described herein is directed towards a metasurface arranged with unit cells for narrowband sound absorption, in which the unit cells are based on Helmholtz resonators that can have their resonant frequencies adjusted via MEMS actuators. A sound absorbing unit-cell is designed and constructed based on a general resonance frequency, and includes a neck portion and air chamber dimensioned to resonate close to the desired resonance frequency and thereby inverse phase cancel corresponding narrowband frequencies of incoming sound waves. A moveable partition in the resonators, controlled by MEMS actuators, facilitates changing of the resonators' air cavity dimensions, to adjust the resonant frequencies to cancel acoustic waves of different frequencies corresponding to noise, which can change over time. The unit cells can be distributed as part of a metasurface, which can be positioned proximate to a noise source to phase cancel the noise.

A visualization system for dynamically visualizing an eye includes a laser module operable for outputting a primary laser beam along a beam axis, a beam splitter positioned in the beam axis and configured to direct a first beam portion along the beam axis and a second beam portion along a detection axis that is orthogonal to the beam axis. A microelectromechanical system (MEMS) scanner is arranged on the beam axis and configured, in response to the first beam portion, to output a scanning laser along a visualization path. An avalanche photodiode (APD) detector receives the second beam portion. A 4F correlator optical system has a spatial filter arranged along the visualization path. An optional optical flat may be disposed between the eye and the 4F correlator optical system to achieve stereo parallax.

In accordance with an embodiment, a microelectromechanical system (MEMS) switch device includes: a substrate; a switching membrane disposed above the substrate; a pull-in electrode disposed above the switching membrane; a metal contact disposed on the switching membrane; and a pull-back electrode disposed below the switching membrane, wherein the switching membrane is movable between an open position and a closed position, and wherein in the closed position, the metal contact electrically connects two RF signal lines.

MEMS device (10) with a movable displacement element (12) and a drive device (14) for driving the movable displacement element (12), wherein the drive device (14) has at least one drive electrode (16), characterized in that the drive electrode (16) is segmented and at least one functional electrode (18) is provided for measuring the deflection of the displacement element (12).

Disclosed herein are a microelectromechanical system (MEMS) devices comprising a first electrode layer, an aluminum nitride based piezoelectric layer, and a second electrode layer. The aluminum nitride based piezoelectric layer comprises a piezoelectric material of formula AlxScyYbzN, wherein x+y+z=1. Also disclosed are acoustic components comprising the piezoelectric material.

A device for switching a differential signal includes an input port, a first output port, a second output port, a first micro electromechanical system (MEMS) switch, and a second MEMS switch. The first and second MEMS switches selectively couple the input port to either the first output port or the second output port. The differential input port is separated into two single-ended paths. One single-ended path is switched through the first MEMS switch, and the other single-ended path is switched through the second MEMS switch. The single-ended paths are spatially matched with respect to length and orientation, and are at least partially distributed through at least two layers of electrical conductors, with adjacent layers of electrical conductors separated by electrically insulating layers.

In a microelectromechanical system (MEMS) sensor, movement of a component such as a proof mass due to a force of interest is sensed capacitively. A capacitance-to-voltage (C2V) converter receives a capacitance signal from the sensor and outputs a signal that includes an offset in addition to a signal of interest. The output signal is analyzed to identify the offset portion of the output signal and to modify values one or more variable capacitors coupled to the C2V input reduce the offset portion of the output signal.

In some embodiments, a semiconductor structure includes a semiconductor layer, a micro-electromechanical systems structure defined in the semiconductor layer, and a metallization structure bonded to the semiconductor layer. The metallization structure includes a sensing pad, a first barrier layer comprising a first material under the sensing pad, a conductive pad, and a second barrier layer under the conductive pad. The second barrier layer includes a first layer comprising the first material and a second layer comprising a second material different than the first material over the first layer. The second barrier layer is compressively stressed, and hillocks are defined in the conductive pad.

Encapsulated MEMS devices and methods of fabrication with wafer-level fabrication processes are described which address small molecule diffusion into hermetically sealed cavities. In some configurations a small molecule barrier layer, or hydrogen barrier layer, is formed during a back-end-of-the-line (BEOL) processing over a cap wafer including a planarized surface formed during a via reveal griding operation. In some configurations a small molecule barrier layer is not formed over the planarized surface during BEOL processing in order to allow an escape path for small molecules. In some configurations a small molecule barrier layer, or hydrogen barrier layer, is formed on a bottom side of a cap wafer prior to bonding the cap wafer to a device wafer during wafer-level fabrication.

The present disclosure relates to ultra-high density, low profile edge card connectors. The present disclosure increases interconnect density by using a different technology approach than currently used in the industry (stamping and molding). By using a microelectromechanical system (MEMS) technology approach, better geometry and impedance control is achieved to reduce impedance discontinuities and feature sizes. In addition, the present disclosure also includes low connector insertion force, no contact wiping, and precise alignment mechanisms between the connector contacts and the connector contacts on the mating substrate.

The present disclosure relates to a method for manufacturing a layered structure for a MEMS apparatus, a layered structure which is a layered structure produced by the method, and a MEMS apparatus 200 which comprises such a layered structure. For the layered structure or the MEMS apparatus 200, an exemplary starting substrate is used in the manufacturing process, which forms the mechanically effective functional layer 10, wherein the mechanically effective functional layer 10 comprises a ferroelectric and / or piezoelectric material.

A method is disclosed of fabricating a MEMS device that includes one or more wafers configured as pump or valve. The pump or valve includes an inlet port to receive fluid and an outlet port to release the fluid within the pump or valve. The method comprises growing silicon dioxide on a silicon layer of the one or more wafers to form a silicon dioxide layer on the silicon layer, depositing silicon nitride on the silicon dioxide layer of the one or more wafers to form a silicon nitride layer on the silicon dioxide layer, spinning a front side to create a pattern thereon defining an area for the pump or valve, dry etching the one or more wafers at the area for the pump or valve to remove the silicon dioxide and silicon nitride layers to define an opening for the pump or valve.

The invention discloses a V-Ti-Ni shape memory alloy with high elasticity modulus and high hardness and a preparation method of the V-Ti-Ni shape memory alloy. The preparation method comprises the steps of raw material proportioning, V-Ni pre-alloy smelting, vacuum induction smelting and argon protection pouring, multi-pass hot forging and hot rolling and fine cold drawing, and particularly, 7-9 at% of vanadium element is introduced, so that the diameter phi of the prepared V-Ti-Ni shape memory alloy wire is 0.10-0.50 mm. According to the V-Ti-Ni shape memory alloy prepared through the method, the elasticity modulus at the room temperature reaches 100-110 GPa, the microhardness is 320-360 HV, the phase transition temperature regulation and control range of the NiTi-based shape memory alloy is widened, and the structural rigidity, abrasive resistance, plasticity and cycle stability of the V-Ti-Ni shape memory alloy material are remarkably improved. The V-Ti-Ni shape memory alloy prepared through the method is mature in process route, can be produced in batches and is suitable for precise elastic components in medical instruments, micro electro mechanical systems, thermal actuators and spaceflight structures.

This application provides an earphone and a terminal device. The earphone includes a housing with a cavity structure inside, and a sound outlet communicating with the cavity structure. A first sound unit, a second sound unit, and a third sound unit are disposed within the cavity structure, and the third sound unit is a microelectromechanical system (MEMS) unit. The sound frequency of the second sound unit is greater than but less than the sound frequency of the first sound unit. The third sound unit, being a MEMS unit, is located between the first sound unit and the sound outlet. By incorporating the first sound unit, the second sound unit, and the MEMS unit within the earphone, the output bandwidth of the earphone can be fully guaranteed, achieving better full-frequency coverage and superior sound quality.

This invention discloses an apparatus, system, and method for optimizing the geometry of a beam array in a multi-beam detection tool. In some embodiments, a microelectromechanical system (MEMS) may include a first column of apertures; a second column of apertures positioned below the first column of apertures; a third column of apertures positioned below the second column of apertures; and a fourth column of apertures positioned below the third column of apertures; wherein the first, second, third, and fourth columns are parallel to each other in a first direction; the first and third columns are offset from the second and fourth columns in a second direction perpendicular to the first direction; the first and third columns have a first length; the second and fourth columns have a second length; and the first length is greater than the second length in the second direction.

The invention discloses temperature-sensitive fluorescent coating ink based on quantum dots as well as a preparation method and application of the temperature-sensitive fluorescent coating ink. The ink is prepared from quantum dots, a polymer substrate material and a solvent, a temperature-sensitive fluorescent coating is formed on the surfaces of electronic components including an electronic chip, a micro-fluidic chip, an energy storage battery, a sensor and a micro-electro-mechanical system through a dispensing method, a spin-coating method, a blade coating method or a spraying method, and a uniform fluorescent film is prepared on the surface of the chip; exciting the fluorescent film by using laser; and according to a pre-calibrated temperature-spectrum relation curve, reconstructing a micro-scale two-dimensional or three-dimensional temperature distribution diagram of the chip in a working state. According to the invention, non-contact and high-resolution real-time temperature imaging of a chip working state microcell is realized, and a key technology is provided for temperature anomaly detection, thermal management optimization and failure analysis of a miniature electronic component.

A micro-electromechanical system (MEMS) component, comprising a MEMS chip (11) and a magnet apparatus (12). The MEMS chip (11) comprises: a movable part (111), a fixed frame (112), a cantilever (113), and a sensor (114), the movable part (111) being connected to the fixed frame (112) by means of the cantilever (113). The magnet apparatus (12) is used for generating a magnetic field, and the movable part (111) is located in the magnetic field. The sensor (114) is disposed on the movable part (111), and the sensor (114) comprises a first connection end (a), a second connection end (b), a third connection end (c) and a fourth connection end (d), which are sequentially adjacent. The first connection end (a) is connected to a first feedback signal line (s1), the third connection end (c) is connected to a second feedback signal line (s2), the first feedback signal line (s1) and the second feedback signal line (s2) are used for transmitting a feedback signal of the sensor (114), and the feedback signal is a voltage signal indicating the angle or position of the MEMS component. The first feedback signal line (s1) and the second feedback signal line (s2) are arranged along a first direction of the movable part (111). The described MEMS device reduces feedback crosstalk, and improves precision. Also provided is a laser device.

The invention relates to an arrangement (100) for calibrating a microelectromechanical system (200) with a plurality of individually pivotable concave micromirrors (210) with a respective orientation sensor for determining the orientation of the micromirror (210), comprising at least one radiation source (110) for emitting radiation that can be reflected by the micromirrors (210) and at least one radiation detector (120) for detecting radiation emitted by the at least one radiation source (110), wherein the at least one radiation source (110) and the at least one radiation detector (120) are each arranged at the distance (210) of the effective radius of curvature of the concave micromirrors (210) in such a way that radiation from a radiation source (110) reflected by a micromirror (210) at a predefined orientation can be detected by a radiation detector (120), in that the radiation source (110) is mapped on the radiation detector (120). The invention also relates to a method for calibrating a microelectromechanical system (200) with a plurality of individually pivotable concave micromirrors (210), each comprising an orientation sensor with an arrangement (100) according to the invention and according to one of the preceding claims.

This invention provides a microbridge structure and its fabrication method, as well as an uncooled infrared microbolometer, belonging to the fields of microelectromechanical systems (MEMS) and infrared detection technology. The microbridge structure includes two diagonally arranged anchor posts, two supporting legs, a bridge deck, and an umbrella-shaped canopy. Each supporting leg consists of multiple alternating longitudinal segments and multiple transverse segments connected end-to-end. The longitudinal segments extend at an angle greater than 45 degrees relative to the horizontal plane, while the transverse segments extend parallel to the horizontal plane. One end of each supporting leg is connected to an anchor post, and the other end is connected to the end of the bridge deck, suspending the bridge deck. This design maintains the slender characteristics of the supporting legs to ensure low thermal conductivity and high thermal insulation performance, while significantly reducing the residual stress on the supporting legs by utilizing the high cross-sectional moment of inertia of the longitudinal segments. This improves the mechanical stability and deformation resistance of the microbridge structure, solving the problem of balancing stability and thermal performance in traditional horizontal supporting leg structures. This invention also provides a corresponding fabrication method.

The invention discloses an MEMS fan, a manufacturing method thereof, equipment and a medium. According to the MEMS fan scheme, the top layer of a cantilever beam structure is covered with an organic film to form a closed layer, an edge silicon cantilever beam is arranged on the edge of a cantilever beam, and an island-shaped silicon wafer is arranged in the center of the cantilever beam, so that the vibration amplitude of the organic film is increased, and the air outlet amount is increased.

Method for manufacturing a micro-electro-mechanical system, MEMS, integrating a first MEMS device and a second MEMS device. The first MEMS device is a capacitive pressure sensor and the second MEMS device is an inertial sensor. The steps of manufacturing the first and second MEMS devices are, at least partly, shared with each other, resulting in a high degree of integration on a single die, and allowing to implement a manufacturing process with high yield and controlled costs.

The invention relates to the technical field of micro electro mechanical system devices, in particular to a SON and silicon epitaxy process-based PMUT preparation method and a PMUT, and the method comprises the following steps: S1, forming a cavity on a silicon substrate by using an SON process; s2, annealing treatment is carried out, and the roughness of the silicon surface above the cavity is optimized; s3, forming a monocrystalline silicon epitaxial layer above the cavity by using a silicon epitaxial process; s4, carrying out planarization processing by using CMP, and optimizing the surface roughness of the monocrystalline silicon epitaxial layer; and S5, preparing the PMUT above the monocrystalline silicon epitaxial layer. According to the invention, the consistency and stability of device performance are improved; the process route is relatively simplified, the process steps and equipment investment are reduced, the production cost is reduced, and large-scale industrial production is facilitated; the monocrystalline silicon epitaxial layer has good crystal quality and mechanical property, and the influence of structural defects on the performance of the device is reduced; proper materials can be selected for the piezoelectric layer according to different application requirements, and the sensitivity and reliability of the PMUT are further improved.

This application provides a detection device, a control method and control unit for the detection device, a lidar system, and a terminal. The detection device includes at least one laser, at least one area array detector, at least one lens assembly, at least one photodetector, and at least one microelectromechanical system (MEMS) micromirror. The lens assembly focuses the reflected light from at least one first laser beam onto the area array detector, with the reflected light from the at least one first laser beam located within the detection range of the lens assembly. The MEMS micromirror reflects the reflected light from at least one second laser beam onto the photodetector, with the reflected light from the at least one second laser beam located within the detection range of the MEMS micromirror. Specifically, the at least one first laser beam and the at least one second laser beam are emitted by at least one laser. The MEMS micromirror and lens assembly in the detection device receive the reflected light from lasers in different areas, achieving long-distance ranging through this dual-range mode.

This invention discloses a wireless, passive, and visualized cerebrospinal fluid drainage tube flow monitoring sensor, system, and fabrication method, belonging to the field of biomedical sensing and microelectromechanical systems (MEMS) technology. It includes a flexible substrate, an interdigital capacitor-open resonant ring structure disposed on the substrate surface, and a microchannel pressure conversion structure bonded to it; the microchannel corresponds vertically to the position of the interdigital capacitor. The pressure generated by the cerebrospinal fluid flow drives the displacement of the liquid metal, modulating the equivalent dielectric constant of the interdigital capacitor and causing a resonant frequency shift. The frequency drift is wirelessly read by an external device, and the flow rate is calculated using an algorithm, achieving passive wireless continuous monitoring. This invention, employing the aforementioned sensor, system, and fabrication method, solves the problems of high infection risk, low accuracy, and inability to continuously monitor existing drainage monitoring methods that rely on manual observation or wired sensors. It has the advantages of high sensitivity, flexible integration, and good safety.

This invention relates to the fields of microelectromechanical systems (MEMS) and new energy technologies, and discloses a piezoelectric energy harvester based on a nonlinear gradient negative Poisson's ratio structure. Its elastic matrix has a fixed end and a free end, with a negative Poisson's ratio structural segment on it. The piezoelectric transducer element is bonded to the surface of the negative Poisson's ratio structural segment via an epoxy resin adhesive layer. The core innovation lies in the nonlinear monotonically decreasing thickness of the elastic matrix from the fixed end to the free end along its length. This change profile is defined by a specific cubic polynomial function, which can accurately approximate the theoretical model of an isostress beam, making the stress distribution on the matrix surface tend to be uniform during vibration. Simultaneously, the lateral expansion characteristics of the negative Poisson's ratio structural segment and the longitudinal stress enhancement effect of the nonlinear thickness synergistically amplify the charge output of the piezoelectric element. This invention significantly improves the utilization efficiency of piezoelectric materials and the power density of the energy harvester, and has the advantages of compact structure, high energy conversion efficiency, and mass production via 3D printing.

The invention provides a radio frequency MEMS switch and a preparation method thereof, and relates to the technical field of radio frequency MEMS switches. A substrate of the radio frequency MEMS switch comprises a first surface and a second surface which are opposite to each other, a Peltier refrigeration module is embedded in the substrate, the Peltier refrigeration module comprises a refrigeration end and a heat dissipation end, and the refrigeration end is closer to the first surface compared with the heat dissipation end. The driving electrode is arranged on the first surface, and the first electrode and the second electrode are also arranged on the first surface. The cantilever beam is electrically connected with the first electrode, the cantilever beam is arranged on the side, away from the substrate, of the driving electrode, and the cantilever beam is configured to be electrically connected with the second electrode under driving of the driving electrode. The orthographic projection of the joint of the cantilever beam and the first electrode on the substrate is overlapped with the area where the Peltier refrigeration module is located, and / or the orthographic projection of the joint of the cantilever beam and the second electrode on the substrate is overlapped with the area where the Peltier refrigeration module is located, in-situ active cooling can be carried out, and thermal creep aggravation is restrained.