The invention relates to the technical field of photoelectric detectors and integrated optoelectronic chips, and discloses a high-sensitivity integrated full-Stokes polarization
detector and a preparation method thereof. The high-sensitivity integrated full-Stokes polarization
detector sequentially comprises a
titanium oxide metasurface polarization selection layer, an ITO transparent
electrode layer, an upper
electrode layer, a
silicon-based NPN bipolar phototransistor detection unit, a filling layer, a
silicon substrate layer and a lower
electrode layer from top to bottom. The
titanium oxide metasurface polarization selection layer comprises a plurality of metasurface units constructed by all-
dielectric high-refractive-index
titanium oxide; the
titanium oxide metasurface polarization selection layer and the
silicon-based NPN bipolar photoelectric
transistor detection unit are integrated in a monolithic mode through the
CMOS compatible technology, and each metasurface pixel in the
titanium oxide metasurface polarization selection layer corresponds to each detection pixel in the silicon-based NPN bipolar photoelectric
transistor detection unit in a one-to-one mode on the plane. Through the
titanium oxide metasurface structure, the accuracy and sensitivity of Stokes parameter detection are improved.