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227 results about "Metal insulator" patented technology

Insulators typically become metallic by a reduction in the spacing between atoms in the material. Hemley and Naumov demonstrated that for a metal to become an insulator, these reduced-spacing overlaps must be organized in a specific kind of asymmetry that was not previously recognized.

AlN/GaN enhancement type metal-insulator-semiconductor field effect transistor and method of producing the same

The invention discloses an AIN/GaN reinforced metal-insulator-semiconductor field effect transistor, mainly solving the problem that high-threshold voltage and large output current can not be realized at the same time in the existing device. The AIN/GaN reinforced metal-insulator-semiconductor field effect transistor is mainly characterized in that an AIN barrier layer is adopted to increase the concentration of channel two-dimensional electron gas and increase the output current at the time of high-threshold voltage. The manufacturing process comprises the following steps: growing an AIN nucleating layer on a substrate; growing an AI0.07GaN epitaxial layer on the AIN nucleating layer; growing a GaN layer on the AI0.07GaN epitaxial layer; growing an AIN barrier layer with a thickness of 3-6nm on the GaN layer; after the completion of material growing, photo-etching and vaporizing source-drain metals on the AIN barrier layer; photo-etching and etching a grooved gate between the source and the drain; after the grooved gate is etched, depositing SiN gate dielectric layers on the surfaces of the grooved gate and the AIN barrier layer; and photo-etching and vaporizing gate metals on the SiN gate dielectric layers and interconnecting the metals. The invention is applicable to the production of switch devices with high-threshold voltage and small transmission resistance.
Owner:XIDIAN UNIV

Metal-insulator-semiconductor (MIS) grid enhanced high electron mobility transistor (HEMT) device based on gallium nitride (GaN) and manufacture method of MIS grid enhanced HEMT device

The invention discloses a metal-insulator-semiconductor (MIS) grid enhanced high electron mobility transistor (HEMT) device based on gallium nitride (GaN) and a manufacture method of the MIS grid enhanced HEMT device and mainly solves the problems that the current density and the reliability of the existing GaN base enhanced device are low. The device is structurally characterized in that a transition layer (2) and a GaN main buffer layer (3) are sequentially arranged on a substrate (1), the middle of the GaN main buffer layer (3) is provided with a groove (11), an AlGaN main barrier layer (4) is arranged above the GaN main buffer layer arranged at two sides of the groove, a GaN sub buffer layer (5) and an AlGaN sub barrier layer (6) are sequentially arranged on the surface of the AlGaN main barrier layer (4) arranged above the groove inner wall and the two sides of the groove, the two sides of the top end of the AlGaN sub barrier layer (6) are respectively a source electrode (8) and a drain electrode (9), a medium layer (7) is arranged outside the source electrode and the drain electrode, a grid electrode (10) is arranged on the medium layer (7) and covers the whole groove region, and the mature flow process is adopted for the whole device manufacture. The MIS grid enhanced HEMT device has the advantages that the enhanced type characteristics are good, the current density is high, the breakdown voltage is high, and the device reliability is high. The MIS grid enhanced HEMT device can be used in high-temperature high-frequency high-power devices, high-power switches and digital circuits.
Owner:云南凝慧电子科技有限公司
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