1924 results about "Vacuum coating" patented technology

The invention relates to an intelligent vacuum coating quality monitoring method based on artificial intelligence, which comprises the following steps: collecting process parameters in real time through a coating equipment sensor, dynamically monitoring vacuum degree change, deposition rate deviation and temperature gradient, and standardizing data flow to obtain a quantitative trend curve of process parameter fluctuation; combining the defect microcosmic feature description set with gas flow fluctuation and power supply voltage jitter to obtain a correlation analysis result of process parameters and defect forms, and calibrating defect types according to a defect feature library to obtain an updated defect classification basis; and inputting real-time new surface image data through the updated defect classification basis, performing defect detection for illumination reflection differences and stripe deflection angles, obtaining a preliminary defect classification result, and adjusting classification weight parameters.

The invention relates to the technical field of vacuum extraction control, and discloses a multi-stage vacuum extraction control system which comprises a central processing unit, a multi-stage vacuum pump set control module, a vacuum degree dynamic monitoring module and the like. The multi-stage vacuum pump set control module coordinates all stages of pumps to work according to a preset vacuum degree target value, and the vacuum degree dynamic monitoring module collects pressure data in real time and judges abnormity. The pressure gradient adjusting module adjusts the extraction rate of the adjacent pump to maintain the vacuum gradient stable when the pressure is abnormal, and the abnormity response module controls starting and stopping or rate correction of the pump according to the abnormity level. In addition, the system further has the functions of vacuum pump efficiency evaluation, pressure feedback compensation, leakage detection, redundancy switching, historical data backtracking, collaborative optimization and the like. The system can accurately control the vacuum degree, efficiently deal with abnormities and realize equipment state monitoring and optimization, and is widely applied to the fields with high requirements on the vacuum degree, such as semiconductor manufacturing and vacuum coating.

The invention discloses a component real-time control method and system for vacuum glow coating, and relates to the technical field of vacuum coating, firstly, in a holographic component collection stage, a sensor and monitoring equipment are used for collecting multi-dimensional data in a coating process in real time, and secondly, in a self-adaptive component adjustment stage, a chromium-nitrogen component prediction value in a vacuum cavity is calculated to obtain a chromium-nitrogen component prediction value; the concentration is compared with the target concentration to judge whether component adjustment is needed or not, then in the real-time strategy adjustment stage, when the components deviate from the target value, the nitrogen flow, bias voltage and target current are automatically adjusted through the equipment management platform to ensure the stability of the coating process, and finally, in the real-time film quality correction stage, the film quality is corrected. The film layer quality is quantified through an innovative calculation formula, the stability and consistency of chromium-nitrogen film coating are improved through closed-loop control, and the film coating process can be dynamically optimized so as to ensure that the final film layer quality meets the design requirement.

The invention relates to the technical field of intelligent suspension conveying systems, in particular to a PVD vacuum coating intelligent suspension conveying system which comprises a mounting frame and a driving mechanism mounted at the bottom of the mounting frame, and a suspension mechanism and a limiting mechanism are mounted on a fixing mechanism; a limiting mechanism is installed in the fixing block, and the fixing block is in sliding connection with the sliding plate, so that the distance between the side plate and the stand column can be adjusted, hanging of a large workpiece is facilitated, the side plate is prevented from blocking a film coating piece, a larger space is vacated, different film coating pieces can be hung and conveyed, and after the external expansion range of the sliding plate is adjusted, the sliding plate needs to be fixed; due to the fact that the top of the bottom column abuts against the sliding column in the fixing block, when the shell shrinks to drive the supporting plate to ascend, the stand column can push the sliding column in the fixing block to ascend, toothed plates on the sliding column are further meshed with inner teeth at the bottom of the sliding plate, the sliding plate is fixed while the stand column is fixed, and the external expansion range of the sliding plate is convenient to adjust.

The invention discloses a rigid-flex circuit board slotting process based on a laser depth control technology. The rigid-flex circuit board slotting process comprises the steps that the surface of a rigid layer of a rigid-flex circuit board is pretreated, and a laser sensitive layer is sprayed; cNC depth-controlled milling is adopted to form a grooved rough blank structure on the surface of the pretreated rigid layer; positioning laser is used for scanning, a three-dimensional model is established through collected reflected signals, then layered depth-controlled ablation is conducted, second-power laser is sequentially adopted for fine cutting, third-power laser is sequentially adopted for depth calibration, and a groove body structure is formed; cleaning an interface, scanning a groove bottom area and synchronously introducing low-temperature gas; performing morphology repairing treatment, and generating a periodic micro-nano structure on the groove wall by adopting short pulse laser to form a stress concentration resistant surface; depositing an insulating medium layer, and forming a continuous packaging protection layer on the groove wall and the bottom through a vacuum coating process; the high-precision depth-controlled slotting of the rigid-flex circuit board is realized, and meanwhile, the ultra-low thermal damage and anti-fatigue structure and long-acting environmental stability are realized.

The invention relates to the field of metal surface treatment, and discloses a multi-layer vacuum coating method for enhancing the surface of a high-precision metal part, which comprises the following steps: S1, surface treatment: removing surface pollutants and oxide layers through plasma cleaning, and coarsening the surface of a base material through laser etching; s2, coating deposition is conducted, specifically, a metal transition layer and a multi-layer nano hard coating are deposited in an enhanced mode through plasma; s3, depositing a self-lubricating coating: depositing the self-lubricating coating by pulse laser; s4, post-treatment: carrying out ion beam assisted post-treatment; s5, heat treatment: performing low-temperature heat treatment to eliminate stress. Through the plasma enhanced PVD and pulse laser deposition technology, the multi-layer nano coating is deposited under the low-temperature condition, the problem of thermal deformation of a heat-sensitive metal base material caused by a traditional high-temperature process is solved, and it is ensured that the multi-layer coating with high hardness and high compactness can still be formed on the premise that the size precision of the base material is not affected; and therefore, the method can be widely applied to surface treatment of high-precision parts.

The invention belongs to the technical field of vacuum coating, and particularly relates to a vacuum coating machine electron gun control method and system.The control method comprises the steps that in the coating process, key real-time parameters reflecting the working state of an electron gun and the evaporation process are continuously collected and fused, and the current coating state is evaluated in real time based on the key real-time parameters; and in combination with preset coating process requirements, an electron beam control target instruction set of a next control period is dynamically generated through a built-in decision mechanism and is sent to a power controller, a focusing coil controller and a scanning coil controller of the electron gun, and the electron gun is driven to adjust the power output, the focusing state and the scanning motion of the electron gun in real time. Through accurate and stable control of the evaporation rate, material characteristic changes are effectively coped with through a strong closed loop of power and the evaporation rate; the dynamically planned scanning path can actively compensate the non-uniformity of the thermal field of the crucible, and beam spot energy distribution is optimized in combination with focusing adjustment, so that the uniformity of the thermal field is remarkably improved.

The invention relates to the field of vacuum coating, in particular to a crystal hot-fix rhinestone vacuum coating device and a crystal hot-fix rhinestone vacuum coating process. The invention aims to solve the technical problem that the coating quality is reduced in the next coating process due to the fact that original coating materials are easy to accumulate and remain on the surface and in the heating container in the long-term high-temperature state and coating process of the heating container. In order to solve the technical problem, the vacuum coating device for the crystal ironed diamonds comprises a main box body, vacuum equipment is arranged at one end in the main box body, the vacuum equipment comprises a tank body, a plating material evaporation device is arranged in the tank body, the plating material evaporation device comprises a fixing column, the bottom of the fixing column is fixedly connected with the tank body, and the bottom of the fixing column is fixedly connected with the tank body. Threads are arranged outside the lower ends of the fixing columns. The evaporation disc can be replaced through the coating material evaporation device, and the replaced evaporation disc is cleaned, so that the phenomenon that the previous coating raw materials are easy to remain and accumulate around the evaporation disc in the long-term coating process is avoided.

The invention discloses a partitioned multifunctional metal double-cavity vacuum coating process and system, and belongs to the technical field of material surface treatment. The process comprises the steps of base material pretreatment, double-cavity preparation, vacuum inspection, first cavity bottom layer deposition, vacuum transfer, second cavity functional layer deposition and cooling, the double cavities are provided with corresponding target materials respectively, and parallel operation and vacuum seamless transfer are supported; the system comprises double coating cavities, a vacuum transmission channel, a vacuum acquisition and control module, a coating deposition module, a workpiece bearing module and a process parameter regulation and control module, and each of the double cavities is provided with a multi-target mounting rack and carries a real-time monitoring unit and an intelligent control system. Integrated preparation of the composite film layer and synchronous production of multifunctional workpieces are achieved, operation gaps are eliminated, the compactness and adhesive force of the film layer are improved, parameter deviation and the reject ratio are reduced, and batch production requirements are met.

The invention relates to the technical field of vacuum coating, and particularly discloses a control system for a vacuum coating machine, which comprises a vacuum stable state analysis module, a gas flow matching analysis module, a coating environment control analysis module and a coating parameter control analysis module. Pressure intensity values of monitoring time points in all control time periods are accurately collected through a capacitive pressure sensor, the average value of the pressure intensity is calculated, the overall level of the vacuum pressure intensity in the time period can be visually reflected, and basic data are provided for judging whether the vacuum degree is in a proper range or not; an active monitoring and prevention mechanism is adopted for the vacuum coating machine, so that the continuity and the stability of coating production are guaranteed, a scientific basis is provided for preventive maintenance of the equipment, the service life of the equipment is prolonged, the probability of sudden failure of the equipment is reduced, the reliability, the high efficiency and the intelligent level of the whole vacuum coating production system are improved, and the production cost is reduced. And the competitiveness of enterprises in the field of coating processing is improved, the production cost is reduced, and the product quality is improved.

The utility model relates to the technical field of PVD (Physical Vapor Deposition) coating, in particular to a PVD coating vacuum system, which comprises a feeding table, a sheet inlet / outlet chamber, a first buffer chamber, a process chamber, a second buffer chamber and an isolating valve, and the sheet inlet / outlet chamber, the first buffer chamber, the process chamber and the second buffer chamber are sequentially arranged behind the feeding table. Isolation valves are arranged between the feeding table and the sheet inlet and outlet chamber, between the sheet inlet and outlet chamber and the first buffer chamber, between the first buffer chamber and the process chamber, and between the process chamber and the second buffer chamber; and when the isolation valves are closed, all the chambers form closed chambers. According to the PVD coating vacuum system disclosed by the utility model, the isolating valves are arranged among the vacuum chambers, so that the vacuum degree of each vacuum chamber can be well controlled; the vacuum coating system is simple in structure, high in reliability, low in cost and capable of being used for research and development of PVD coating products, continuous production can be achieved, cost is saved to a great extent, and working efficiency is improved.

The invention provides a transparent conductive film with a double-layer grid structure and a preparation method thereof, and relates to the field of transparent conductive films, and the preparation method of the transparent conductive film comprises the following steps: preparing a layer of copper film on the surface of a transparent flexible substrate by using a vacuum coating technology; then preparing a layer of self-cracking film on the surface of the copper film by adopting a self-cracking agent, wherein the self-cracking film naturally cracks to form a net-shaped cracking template; then preparing a layer of BaSnO3 thin film on the net-shaped cracking template by utilizing a magnetron sputtering technology, and removing the self-cracking film on the copper film to obtain a BaSnO3 grid; and finally, spraying an etching solution on the surface of the BaSnO3 grid to etch the copper film into a copper grid, thereby obtaining the transparent conductive film with the double-layer grid structure. The high conductivity of the copper grid and the high permeability of the BaSnO3 grid are combined, the transparent conductive film with high performance is prepared, the overall preparation cost is low, and the product has good application in the fields of transparent conductive components, flexible transparent heaters, flexible display, functional inorganic coatings and the like.

The invention discloses a preparation method of a proton exchange membrane water electrolysis hydrogen production membrane electrode, and belongs to the technical field of proton exchange membranes, a catalyst carrier is prepared, S101, a polyimide membrane is inversely fixed in a magnetron sputtering vacuum coating chamber, a cavity cover of the magnetron sputtering vacuum coating chamber is closed, vacuumizing is performed, and a substrate is heated; and S102, argon is introduced into a cavity of the magnetron sputtering vacuum coating chamber, coating is started, the power of the bismuth metal target is set to be 0.2-0.5 kW, and the deposition time is 60-1800 s. In the invention, the physical vapor deposition method is utilized to load the catalyst on the surface of the metal oxide carrier with high specific surface area and ordered nanostructure, so that the exposure of active sites of the catalyst is increased, the dosage of the noble metal catalyst is reduced, and the bonding strength between the catalyst and the carrier is enhanced; the catalyst is not easy to separate from the surface of the carrier, and large-scale slurry agglomeration is avoided.

The invention relates to a nickel-ruthenium composite coating plating method for a molybdenum alloy substrate, which is applied to the field of processing and manufacturing of metal-based molybdenum alloy substrates and comprises the following steps: carrying out surface pretreatment on a molybdenum sheet raw material to obtain a net molybdenum sheet; putting the pure molybdenum sheet into vacuum coating equipment, and starting the vacuum coating equipment to vacuumize to form a vacuum system; and vacuum coating equipment is started for heating, a high-temperature system is formed, the surface of the net molybdenum sheet is coated with a physical vapor deposition method, and the molybdenum sheet with nickel plated on the two faces and ruthenium plated on the single face is obtained. The method has the technical effects that a good coating film is formed on the surface of the molybdenum sheet through a vacuum coating method, the method is green and environmentally friendly, harmful substances are reduced, the adhesive force between the coating layer and the molybdenum sheet is high, the film layer is high in purity and good in quality, and the production quality of the molybdenum alloy substrate is improved. Grease, oxides, residual solvents, impurities and the like on the surface of the molybdenum sheet are cleaned through the surface pretreatment step, the surface quality and binding force of the molybdenum sheet are improved, and the connection firmness of the nickel-ruthenium composite coating on the surface of the molybdenum sheet is improved.

The invention discloses an automobile part aluminum plating tool with overturning and clamping functions, and relates to the technical field of film plating tools, the automobile part aluminum plating tool comprises a driving assembly, a fixed outer frame and a plurality of overturning and clamping assemblies, and each overturning and clamping assembly comprises a deflection connecting rod, a telescopic rod, a workpiece chuck and a guide sleeve rod; when the driving assembly ascends and descends, the deflection connecting rod is driven by the first hinge shaft to deflect, the telescopic rod is forced to slide in the radial direction of the guide sleeve rod, and the workpiece chuck generates clamping / releasing displacement. An inner transmission ring is arranged on an inner ring of the fixed outer frame, a transmission wheel is installed at the lower end of the guide sleeve rod, and when the driving disc rotates, a planetary gear train enabling the overturning clamping assembly to rotate is formed through transmission of the inner transmission ring and the transmission wheel. A multi-drive structure is replaced with mechanical layout, modular layered layout improves efficiency, structural innovation guarantees stability, integration of self-adaptive clamping, composite motion and batch processing is achieved in the field of vacuum coating, and the bottleneck that a traditional tool is insufficient in flexibility and poor in uniformity is broken through.

The invention relates to the technical field of metal material sample preparation, in particular to a preparation method for extracting carbon replica of steel for a high-carbon wire rod. The method specifically comprises the following steps: S1, preparing a sample; s2, immersing the sample into a nitric acid alcohol solution; s3, placing the sample in a sample chamber of a high-vacuum coating instrument, evaporating a carbon film with the thickness of 10-20 nm on the surface of the sample, and taking out the sample after vacuum is relieved; s4, performing electrolytic film removal by adopting an electrolytic polishing corrosion instrument; s5, after the carbon film falls off, the nitric acid alcohol on the carbon film is cleaned until the absolute ethyl alcohol in the weighing bottle is colorless; s6, the carbon film is transferred into deionized water, after the carbon film is fully unfolded, the carbon film is fished up through a transmission electron microscope and a copper net and placed on filter paper, and the carbon film is tightly attached to the copper net; and S7, baking the carbon film sample adhered to the copper mesh for 30-60 seconds, and placing the dried sample under an electron microscope for observation to complete the preparation of the steel extraction carbon replica sample for the high-carbon wire rod. The method has the advantages of high demolding speed, complete and firm carbon film form, simple configuration and low cost.

The invention discloses a vacuum sealing method for high-temperature forming of a composite autoclave. The technical problem that a vacuum bag is prone to deformation at high temperature in the prior art is solved. The vacuum sealing method for high-temperature forming of the composite autoclave mainly comprises the steps of assembling of a forming mold, laying of prepreg, vacuum coating of the mold, curing of the autoclave and demolding. The vacuum bag used for wrapping the mold is made of aluminum foil or glass fiber reinforced aluminum foil. The plastic film has good ductility, electrical conductivity, thermal conductivity and shading performance, and can effectively block oxygen, moisture and peculiar smell. The problem of vacuum leakage in the curing process of polyimide and other high-temperature-resistant materials is effectively solved, and a reliable vacuum auxiliary material is provided for molding of products with high temperature resistance level and certain functionality. The method not only improves the forming quality of the composite material, but also reduces the production cost, and has remarkable economic benefits and social benefits.

The invention discloses a vacuum cavity pressure maintaining test and leak rate rapid estimation method and system, and the method comprises the steps: achieving the test preparation of multiple sections through a public metering manifold and a multi-way isolation valve, and building a section volume database; the pressure and temperature data are synchronously collected in a fixed sampling period by exhausting air to preset pressure and isolating a pump end; obtaining an equivalent pressure change rate through temperature normalization and deflation baseline deduction in combination with filtering and regression algorithms, and performing conversion to obtain a standardized leak rate; step-by-step detection is carried out on each functional section of the cavity through a segmented bipartite isolation strategy and volume correction, and rapid positioning of a suspicious leakage section is realized; through double-threshold determination of an early warning threshold and an unqualified threshold, a detection report is automatically generated and written into a historical database, and a detection-determination-maintenance closed loop is formed. The method can improve the precision of leak rate detection, and is suitable for vacuum coating equipment, semiconductor process equipment and industrial vacuum treatment devices.

The invention discloses a workpiece carrying frame for a vacuum coating machine and the vacuum coating machine, the workpiece carrying frame comprises a revolution shaft and a revolution frame rotatably mounted on the revolution shaft, a plurality of rotation shafts used for connecting and mounting workpieces are mounted on the revolution frame, and the rotation shafts are mounted on the revolution frame in a swinging manner through a swinging mechanism; linkage assemblies for driving the rotation shafts to rotate synchronously when the revolution frame rotates are arranged between the respective rotation shafts and the revolution shaft; and the workpiece carrying frame for the vacuum coating machine further comprises a swing adjusting assembly for adjusting the swing angles of the rotation shafts. The vacuum coating machine is provided with the workpiece carrier. The multiple rotation shafts are divided into multiple shaft sets arranged around the revolution shaft at intervals, and each shaft set comprises the multiple rotation shafts sequentially arranged in the axial direction of the revolution frame at intervals. According to the invention, the coating uniformity and quality of complex workpieces can be improved, the requirements of diversified advanced processes are met, and the use flexibility and compatibility are good.

The invention relates to the technical field of vacuum coating, in particular to double-sided optical coating equipment capable of automatically loading and unloading umbrellas, which comprises a machine body, and a vacuum coating mechanism, a loading and unloading mechanism and a revolution module which are arranged on the machine body, the vacuum coating mechanism is used for carrying out vacuum coating on products in the umbrellas on the revolution module; the loading and unloading mechanism is used for loading and unloading the umbrellas on the revolution module; the feeding and discharging mechanism comprises a feeding and discharging lifting module, a feeding and discharging transverse moving module and an umbrella taking and placing module, the feeding and discharging lifting module is used for driving the umbrella taking and placing module to ascend and descend, the feeding and discharging transverse moving module is used for driving the umbrella taking and placing module to transversely move, and the umbrella taking and placing module is used for picking up umbrellas and adjusting the included angles between the umbrellas and the horizontal plane. Therefore, the umbrella adapts to the mounting station of the revolution module.

This utility model discloses a vacuum coating equipment for uniform coating, including a vacuum coating machine body. An evaporation source is fixedly installed on the bottom inner wall of the vacuum coating machine body. An electric telescopic rod is fixedly installed on the top of the vacuum coating machine body. A mounting frame is fixedly installed on the output shaft of the electric telescopic rod. A mounting plate is fixedly installed on the bottom of the mounting frame. A round rod is rotatably installed on the bottom of the mounting plate, and a rotating motor is fixedly installed on the top of the mounting plate. A reciprocating gear and a connecting plate are fixedly sleeved on the round rod. Rotating boxes are fixedly installed on both sides of the bottom of the connecting plate. This utility model has a simple structure and is easy to use. The aforementioned vacuum coating equipment for uniform coating facilitates the positioning of circular lenses and then performs automatic uniform coating, and it is also convenient to coat both sides of the circular lenses, increasing the production rate.

The invention discloses vacuum coating equipment for coating an anti-fingerprint film and a coating method. The coating method comprises the following steps: performing plasma activation treatment on the surface of a glass substrate to form an activated substrate; a gradient transition layer is deposited on the surface of an activated substrate, a Cr-Si composite transition layer with continuously changing components is formed by alternately adjusting sputtering power of a metal target and a non-metal target, a fluorocarbon polymer main film layer is deposited on the transition layer substrate, and C4F8 gas is controlled by adopting a pulse magnetron sputtering process to generate an anti-fingerprint functional layer substrate with uniform thickness; stepwise in-situ annealing treatment is carried out, and a densified composite film layer structure is formed through segmented heating and heat preservation; performing plasma surface modification on the surface to form a low-surface-energy chemical group, and finishing functional treatment; through combination of a composite coating process and an intelligent control technology, cooperative regulation and control of anti-fingerprint film interface strengthening, function construction and structure optimization are realized in a single vacuum environment.

The invention discloses an optical thin film thickness monitoring device and an optical thin film coating system, and belongs to the technical field of vacuum coating. A workpiece disc of the optical film thickness monitoring device is provided with a monitoring hole group, the monitoring hole group comprises a first through hole, a second through hole and an interval shielding area, and a film coating monitoring piece is arranged in the first through hole; the irradiation light source is used for emitting light signals to the monitoring hole group; the receiving assembly comprises a light converging element and at least two grating monochromators. The actual physical or optical thickness of the thin film can be calculated by monitoring the transmission or reflectivity of multiple wavelengths and combining the dispersion of the material, and the precision is higher than the precision of monitoring the thickness of the single-wavelength thin film. A plurality of grating monochromaters respectively and correspondingly monitor one wavelength, each grating monochromator can freely select the wavelength, the wavelength selection range is wide, and the problems that the monitoring wavelength is changed and the positioning precision deviation is large in the same grating monochromator are solved. According to the invention, the optical film thickness measurement precision in the online monitoring film coating process can be improved, and the film coating success rate is improved.

The utility model discloses a liquid nitrogen type cooling sample table for vacuum coating, which comprises a rotating table, a first lifting table mounted on the rotating table, a hollow interlayer pipe mounted on the first lifting table, a hollow shaft arranged on the rotating table and driven by the rotating table to rotate, and a second lifting table arranged on the outer side of the hollow shaft and connected with the rotating table. A wafer bracket is arranged at the end, away from the rotating table, of the hollow shaft. According to the utility model, the structure is simple, through the arrangement of the liquid nitrogen chamber, after a sample is subjected to high-temperature treatment, the liquid nitrogen chamber can be utilized to quickly cool the sample to a liquid nitrogen low temperature, and then under the action of the first lifting platform, the first lifting platform drives the liquid nitrogen chamber and the heating disc to perform synchronous height lifting adjustment, so that the distance between the heating disc and the wafer holder is adjusted; when the liquid nitrogen chamber and the heating disc are spaced from the wafer support by a certain distance, a worker can more conveniently put a sample into the wafer support for treatment, and then the sample on the wafer support can be subjected to high-temperature treatment or cooling treatment by adjusting the height of the liquid nitrogen chamber and the height of the heating disc respectively.

The invention relates to the technical field of driving control of symmetrical vacuum pressure control valves, in particular to a zero-point-free zero returning method of a double-position synchronous motor for a symmetrical vacuum pressure control valve, which is suitable for scenes needing high-precision pressure control, such as semiconductor manufacturing, vacuum coating, precision vacuum detection and the like. The problems that in the prior art, the vacuum sealing performance is damaged by depending on a special sensor, cost is high, abrasion of a sealing ring is aggravated due to zero point fixation, and double-shaft synchronization precision and load distribution are disjointed are solved. According to the method, the position where the sealing ring reaches the sealing pre-tightening force serves as a dynamic non-fixed zero point, an additional zero point sensor or a collision sensor or a horizontal sensor is not needed, the current-torque coupling characteristic of a motor is utilized, and full-process automatic control is achieved through a high-precision Hall current sensor and an incremental encoder. The method comprises the following specific steps: initializing motor parameters, establishing a T = K * I mapping relation, calibrating a current overload threshold value, calibrating a current detection module, synchronously starting and operating double motor shafts, identifying a collision state based on current detection, locking and verifying a zero returning position, and judging zero point uniqueness based on torque uniformity. The double-shaft zero returning repetition precision is high, zero point uniqueness judgment fits the actual working condition, uneven abrasion of the sealing ring can be reduced, the service life of the sealing ring and the maintenance period of the valve are prolonged, meanwhile, the equipment manufacturing cost and the maintenance difficulty are reduced, and the vacuum sealing stability and the pressure control precision of the symmetric vacuum pressure control valve are effectively improved.

The preparation method of the negative optical filter comprises the following steps: S1, cleaning the surface of a product serving as a glass substrate of a lens; s2, the treated lens is put into a tool clamp, the assembled lens is hung into a cavity of a vacuum coating machine, and the temperature of the cavity is set to be 160 DEG C; s3, the vacuum coating machine is started to vacuumize, the vacuum degree reaches 1.0 * 10 <-3 > Pa, and a radio frequency ion source for auxiliary coating of the vacuum coating machine is turned on for cleaning; s4, plating an IR film system on the first surface of the lens; s5, after plating of the IR film system on the first surface of the lens is completed, the tool clamp and the product are taken out after the cavity is cooled to 60-70 DEG C or below; s6, repeating the steps S1 to S3; s7, plating an AR film system on the second surface of the lens; and S8, after plating of the AR film system on the second face of the lens is completed, the tool clamp and the product are taken out after the cavity is cooled to 60-70 DEG C or below.

The invention provides a vacuum coating on-line monitoring system. The vacuum coating on-line monitoring system comprises a data processing module, a light blocking module, and a laser light source module, a homogenizing and beam expanding light path and a light sensing module which are accommodated in the light blocking module, a light outlet and a light inlet are formed in the light blocking module; the laser light source module is used for emitting laser with at least two different wavelengths; the homogenizing and beam-expanding light path is used for receiving the laser emitted by the laser light source module and emitting the laser through a light outlet after homogenizing and beam-expanding the laser; wherein the emergent laser can irradiate a coated product, and reflected light formed by reflection of the coated product can enter the light blocking module through the light inlet; the light sensing module is used for receiving the reflected light and obtaining light sensing data of the coated surface of the coated product according to the reflected light; and the data processing module is used for obtaining real-time coating parameters of the coating surface of the coating product according to the photosensitive data. According to the invention, real-time accurate and more-dimensional monitoring of the coating condition of the coated product can be realized.

The present application relates to the field of vacuum coating technology, and in particular to a multi-arc ion coating device. The multi-arc ion coating device includes a coating module, which includes a vacuum chamber, a coating arc source and an etching arc source. The coating arc source and the etching arc source are both connected to the vacuum chamber, and the interior of the vacuum chamber is used to introduce reaction gas. The multi-arc ion coating device uses an etching assembly composed of an etching arc source and an anode assembly to etch the surface of a workpiece, and then deposits a coating on the workpiece through the coating arc source, which can improve the bonding force between the outer surface of the workpiece and the film layer, so that the workpiece surface obtains a dense, high-hardness, high-wear-resistant high-performance functional film layer to cope with various complex working conditions and process requirements.

The utility model relates to the technical field of vacuum detection of coated products, and discloses a detection device with a protection function, which comprises a vacuum coating machine, a vacuum gauge is arranged on the surface of the vacuum coating machine, a protection assembly and a release assembly are arranged on the surface of the vacuum coating machine, and the protection assembly comprises a fixed plate, a movable plate and a movable plate, the detection device comprises a fixed plate and a protection assembly, the fixed plate is fixed to the surface of a vacuum coating machine, a first spring is fixed to the bottom of the fixed plate, a protection frame is arranged at the bottom of the first spring, and the protection frame is slidably connected to the surface of the vacuum coating machine. The side, away from the slope, of the clamping block abuts against the side, away from the slope, of the limiting block, the limiting block limits the clamping block, the protection frame is stabilized, the protection frame completely covers the vacuum gauge, the protection frame can protect the vacuum gauge, and it is avoided that the vacuum gauge is mistakenly touched to be damaged, and use is affected.

The utility model relates to a target material fixing device for a vacuum coating machine, relates to the technical field of vacuum coating, and aims at solving the problem that a traditional fixing device is poor in flexibility. The target material fixing device comprises a bottom frame, two fixing bases are arranged on the bottom frame and oppositely arranged on the bottom frame, and a target material fixing area is formed between the two fixing bases; a driving mechanism used for synchronously driving the two fixing seats is arranged on the bottom frame, the driving mechanism comprises a supporting plate, a bidirectional lead screw and a servo motor, the supporting plate is connected to the bottom frame, the bidirectional lead screw is rotationally connected to the supporting plate, the output end of the servo motor is connected to the end of the bidirectional lead screw, and the output end of the servo motor is connected to the end of the bidirectional lead screw. The two-way lead screw is provided with two threaded ends opposite in rotating direction, the two fixing seats are in threaded connection to the two threaded ends of the two-way lead screw respectively, each fixing seat is slidably connected to the supporting plate, and the bottom frame is further provided with a translation mechanism used for moving the position of a target material. The application has the effect of improving operation flexibility and adjustability.