164 results about "Vacuum coating" patented technology

The application discloses a preparation method of a multi-layer composite film system, a conductive thin film and a semiconductor device. The preparation method of the multi-layer composite film system comprises the following steps: preparing a first layer of metal film on a substrate by a vacuum coating method; performing surface roughening treatment on the first layer of metal film; and preparing a second layer of metal film on the first layer of metal film after the surface roughening treatment by the vacuum coating method. The preparation method of the multi-layer composite film system can enhance the adhesion between the film layers by performing the surface roughening treatment on the first layer of metal film, so that the mechanical combination mode is adopted between the film layers, the adhesion between the film layers is improved, some film layers which cannot be combined under vacuum can be effectively connected in the mechanical combination mode, the equipment investment cost is reduced, the multi-layer film system of various types is prepared by a single device, the substrate rework is effectively reduced or prevented, and the production cost is greatly reduced.

This utility model discloses a planar magnetron sputtering device belonging to the technical field of vacuum coating equipment. The device includes a motor, a main body, a target material, a cooling backplate, and a base. The core of this application lies in the fact that the cooling backplate is composed of a cooling substrate and a cover plate. The cooling substrate has a specially shaped receiving groove, which includes a first groove segment and a second groove segment connected to each other along its depth direction. The cover plate is embedded in the first groove segment to seal the lower second groove segment, thereby forming a completely closed cooling channel. This utility model, through this permanent sealing structure of embedding the cover plate in the receiving groove, replaces the traditional removable mechanical seal that relies on sealing gaskets, fundamentally solving the technical problem of leakage easily occurring in large-size cooling backplates under high water pressure.

This utility model relates to a vacuum coating fixture for batch reflectors, comprising a base plate. Two symmetrically arranged L-shaped plates are movably connected to the upper surface of the base plate. Each L-shaped plate includes vertical and horizontal plates connected perpendicularly to each other. Multiple sliding grooves are formed on opposite sides of the two vertical plates, and clamping structures are movably connected inside the sliding grooves. Protective covers are fixedly connected to the back-to-back sides of the two vertical plates. A driving device is provided between the front and back sides inside the protective covers. The driving device includes a connecting shaft, and a gear is fixedly connected to the surface of the connecting shaft at a position corresponding to the clamping structure. The gear drives the clamping structure to move laterally. This utility model can simultaneously clamp or release workpieces, with multiple clamping structures working in parallel, allowing for the simultaneous fixing of multiple reflectors, significantly improving batch coating efficiency and making it very convenient to use.

The utility model relates to vacuum coating equipment technical field, concretely relates to a kind of alignment adjusting device for alignment of vacuum coating equipment to sensor, and the observation window seat of fixed position setting is equipped with mounting seat on the back of observation window seat, transmitter is fixedly arranged on one of mounting seat, receiver is fixedly arranged on another mounting seat, adjusting screw is respectively equipped in four corners on mounting seat, elastic member is connected between mounting seat and observation window seat, for increasing a reverse pre-tightening force between mounting seat and observation window seat, so that mounting seat remains stable, when actually using, rotating adjusting screw in four corners is used to adjust the distance between four corners of mounting seat and observation window seat, in the adjustment process, transmitter will follow the process of loosening and tightening of adjusting screw, and the position moving process of the light spot projected on the side of receiver is observed by operator through the window body at transmitter side, until receiver detects light source, that is, alignment is completed, and it is convenient to operate.

This utility model relates to the field of wood ear mushroom packaging technology and discloses a wood ear mushroom packaging vacuum coating machine, including a worktable, a vacuum chamber hinged to the top of the worktable, a connecting pipe connecting the worktable and the vacuum chamber, multiple material feeders rotatably arranged at the bottom of the vacuum chamber, and a spreading component movably arranged inside the worktable. The spreading component includes a placement platform, a moving shaft, and a lifting column. The lifting column is fixedly arranged at the bottom of the placement platform, and the moving shaft is rotatably arranged inside the worktable. The lifting column is sleeved on the moving shaft. The placement platform clamps the wood ear mushroom product through the four-sided abutment plates. The disc eccentrically arranged on the moving shaft pushes the lifting column, and the lifting column pushes the placement platform. The placement platform, through the up and down vibration of the vibration spring, drives the packaging to vibrate and spread the wood ear mushroom evenly, so that the wood ear mushroom particles are evenly distributed in the packaging, avoiding the particles from breaking the packaging and solving the problems of poor sealing and easy moisture oxidation caused by the gaps between particles.

The application provides a data processing method and system for optimizing vacuum coating process parameters, comprising: based on the constraint range and parameter dimension of the process parameters, obtaining the actual test process parameters through space filling design, and corresponding quality parameters and actual state data, constructing an initial training sample set and a preliminary proxy model; based on the target quality parameter of the process parameter optimization, driving the proxy model to iteratively explore the process parameter space for global optimization through a global optimization algorithm, obtaining candidate process parameters and performing physical testing, in the case that the difference between the actual quality parameter and the target quality parameter is greater than a preset threshold, re-updating the proxy model and performing global optimization again until the iteration termination condition is met, and taking the candidate process parameters as the optimization result. Thus, the problems of low efficiency, low accuracy and poor optimization effect in the related art of vacuum coating process parameter optimization are solved.

The utility model discloses vacuum plating structure and vacuum plating equipment, vacuum plating structure includes: two transition chambers, be located between two transition chambers's plating chamber and be used for conveying transmission mechanism of carrier plate, transmission mechanism is located in the transition chamber, and transmission mechanism of one transition chamber conveys carrier plate to transmission mechanism of another transition chamber, so that the area of carrier plate in plating chamber is completely suspended. Transmission mechanism contains a plurality of transmission wheel groups that are arranged at intervals along the carrier plate conveying direction, and the transmission wheel group is composed of a pair of transmission wheels arranged oppositely, and the carrier plate comprises a plate body and two transmission edge frames respectively arranged on both sides of the plate body, the inner top surface of the transmission edge frame is a transmission surface, the transmission surface is placed on the transmission wheel, and the bottom of the transmission edge frame is an open mouth that is downwardly open. The utility model can reduce the film layer deposition of transmission wheel, reduce the probability of dust generated due to transmission transportation, and effectively improve the uniformity of substrate plating.

This utility model discloses a stator core for a frameless torque motor and an automated device thereof. The stator core includes a stator yoke and stator teeth. The stator yoke is annular, and the stator teeth include an annular ring and multiple tooth units extending radially outward from the annular ring. The stator teeth are fitted inside the stator yoke, and the stator yoke and stator teeth are coaxially arranged. The multiple tooth units are evenly distributed. The surfaces of the stator yoke and stator teeth are coated with a high-temperature resistant insulating film using polymer vacuum coating technology. Stator coils are arranged outside the tooth units. By using a high-temperature resistant insulating film to replace the insulating support in the stator core, the motor achieves significant improvements in cost, size, performance, and reliability.

The utility model relates to vacuum coating equipment technical field discloses a kind of coating mask plate and coating equipment. Coating mask plate includes lower plate, adjusting part and upper plate. Wherein, lower plate is equipped with limit slot, one side of lower plate is curve, limit slot is adjacent to the curve side of lower plate. Adjusting part is at least partially clamped in limit slot, and adjusting part can move relative to limit slot. Upper plate cover is arranged on adjusting part, and is fixedly connected with lower plate, and upper plate and lower plate are located at the two sides of adjusting part respectively. The coating mask plate and coating equipment provided by the utility model can adjust the position of adjusting part in limit slot according to the distribution of sputtering particles on the substrate during coating process, thereby adjusting the shape profile of coating mask plate. It is not necessary to make a new coating mask plate, thereby improving the efficiency of making coating mask plate, and can also save the resources of making coating mask plate.

The utility model discloses an automatic voltage boosting device of magnetron sputtering vacuum coating machine, including the bottom plate, the bottom plate top is fixed with the backplate, the bottom plate top is fixed with the mounting seat, and the mounting seat top is installed with the voltage boosting sensor, and the voltage boosting sensor top is installed with the circuit board, and the backplate inboard wall is provided with the protective cover, and the protective cover outboard wall four corners all are set up with the round hole, and the backplate outboard wall four corners all are provided with the fixed mechanism for fixing the protective cover, and the protective cover top is provided with the connection box. The utility model discloses through the combination use of blowing mechanism and cooling mechanism, can effectively reduce the temperature of voltage boosting sensor and circuit board, ensures the equipment to keep good heat dissipation effect when working, prevents overheating, and in the process of heat dissipation, cooperation filtering mechanism can effectively remove the dust and moisture in air, avoids these impurities to cause the influence to internal element, thereby guarantees the normal operation of equipment, prolongs the life.

The application belongs to the technical field of vacuum equipment maintenance, and specifically discloses a molecular pump automatic purging pre-cleaning system and method. The system comprises a detection module, a control module and an execution module. The detection module collects flow, pressure, temperature and vibration parameters in real time through various sensors, obtains a pollution index PI through normalization and weighted operation, and accurately determines the pollution grade. The control module combines PID and fuzzy control algorithms and dynamically generates cleaning instructions in combination with an adaptive learning strategy. The execution module uses high-purity inert gas to complete the purging operation. The application solves the problems of low efficiency, unstable effect, easy damage to equipment and poor universality of traditional manual cleaning, can automatically adjust the cleaning cycle according to the load of the molecular pump, and has good hardware and software compatibility. The scheme has high automation degree and good cleaning effect, can reduce operation and maintenance cost and prolong the service life of the equipment, and is suitable for high-vacuum scenes such as semiconductor manufacturing, vacuum coating and particle accelerators.

The utility model discloses a kind of vacuum coating machine workpiece rotation positioning devices, including rotating lever and the disc of fixed in the outer wall of rotating lever, the upper surface of the disc is provided with several groups of base that can autorotate, the top of the base is provided with the expansion body that can be inserted into workpiece, the lower of the disc is provided with bottom plate, the lower of the bottom plate is provided with lifting structure that drives bottom plate lift, the top of the bottom plate is provided with expansion structure that can drive expansion body expansion, the outer wall of the rotating lever is provided with rotating structure that drives base rotation;The setting of the utility model expansion structure, so that only one lifting drive operation is needed, all jack can be driven to insert inside corresponding expansion body simultaneously, jack is synchronous to open all expansion body's arc plate in ascending process, to complete the internal expansion positioning of all workpiece on expansion body in one time. Compared with the conventional workpiece fixed mode one by one, can shorten clamping time.

The utility model relates to vacuum coating equipment technical field especially is concerned about a kind of device of high-frequency oscillation auxiliary magnetron sputtering preparation DLC film, including vacuum sputtering cavity, vacuum system and gas delivery system, the vacuum system and gas delivery system are communicated with the inner chamber of vacuum sputtering cavity respectively, the inside of vacuum sputtering cavity is equipped with magnetron sputtering assembly, high-frequency oscillation auxiliary assembly and substrate turret assembly, plasma channel is formed between the magnetron sputtering assembly and substrate turret assembly, the high-frequency oscillation auxiliary assembly includes oscillation coil and the high-frequency oscillation power supply of oscillation coil electrical connection, the oscillation coil is set to the region corresponding plasma channel in vacuum sputtering cavity inside, the utility model breaks through the ionization limit of traditional magnetic field by introducing high-frequency oscillation field to strengthen the collision excitation of electron and particle, provides feasible path for preparing high-performance DLC film, and its technical research and development and application have important significance to break through industry bottleneck.

The utility model relates to vacuum coating equipment technical field especially is concerned on a kind of equipment of magnetron sputtering deposition multilayer high-entropy alloy coating, including vacuum cavity and the workpiece rotating stand being set in the inside of vacuum cavity, the cylindrical target assembly extends to the inside central region of vacuum cavity along axial direction, the lateral target assembly includes lateral target material, backplate and the composite magnetic field generating unit of installation in the corresponding vacuum cavity inboard side of backplate, the composite magnetic field generating unit includes permanent magnet array and electromagnetic coil assembly, which is arranged around or stacked on the side or back of permanent magnet array, an independent power supply terminal is respectively provided on the cylindrical target assembly and each lateral target assembly, the vacuum cavity is also connected with air interface, the utility model realizes the millisecond level accurate switching of bias, gas ratio, deposition time and power supply power, supports the continuous preparation of multilayer high-entropy alloy coating with variable composition and excellent bonding force under single vacuum atmosphere.

The application discloses a rotating device, a vacuum coating equipment and a method using the same, and belongs to the technical field of vacuum coating. The rotating device is arranged in a cavity, a hanger assembly is arranged in the cavity, the hanger assembly is used for carrying a substrate, the rotating device comprises a rotating assembly, an output end of the rotating assembly is used for being connected with the hanger assembly, and the rotating assembly drives the hanger assembly to rotate, so that the hanger assembly rotates to be in a first state or a second state; when the substrate is mounted on the hanger assembly and is in the second state, the substrate surface can be coated. The rotating device, the vacuum coating equipment and the method using the same improve the flexibility of the substrate in the cavity, so that the production requirement is met.

The utility model discloses a quartz piece vacuum coating special equipment relates to vacuum coating device sealing technical field, including equipment support, the top fixed connection of equipment support has vacuum coating machine, and the fixed mounting of vacuum coating machine's export has sealing mechanism, and sealing mechanism includes partition and reinforcing plate, and the fixed mounting of first locating block has on the outer wall of vacuum coating machine, the top fixed mounting of partition has first link block, and first link block is rotatively connected with first locating block, the utility model discloses a sealing mechanism lifting device's airtightness is set up at the import and export of vacuum coating machine, when actual use, partition is pressed in the import and export of vacuum coating machine by reinforcing plate stably, when actual use, this structure can guarantee the sealing property of import and export, and this sealing mechanism is the board body structure of mutual buckling, compared with traditional sealing structure stability is stronger, and will not appear structural looseness because of external force effect.

This invention relates to the field of vacuum coating equipment, and in particular to a fully-utilized optical rotation coating umbrella frame, comprising a central output shaft, multiple connecting ribs, and multiple base supports. Multiple umbrella-shaped sections are arranged in a circular array around the central output shaft, with their inner edges overlapping the central output shaft. Multiple connecting ribs are arranged in a circular array above the multiple umbrella-shaped sections, with one end connected to the central output shaft and the other end extending to the outer edge of the umbrella-shaped section. Multiple base supports are respectively connected to the ends of the multiple connecting ribs located at the outer edge of the umbrella-shaped sections, with each base support positioned between two adjacent umbrella-shaped sections and abutting against the outer edge of the umbrella-shaped section. This design eliminates physical obstruction of the edge areas of the umbrella-shaped sections, significantly improving the coating capacity per unit time, avoiding interference from the rotating flange on the lower edge of the umbrella-shaped sections, and ensuring that the particle beam emitted by the target material at the bottom of the vacuum chamber uniformly covers the entire area of ​​the umbrella-shaped sections, overcoming the structural limitations of traditional fixed-obstruction umbrella frames.

The application discloses a method for plating a magnesium fluoride film with nitrogen ion assistance, and relates to the field of vacuum plating, and comprises the following steps: preparing a vacuum cavity for plating; a substrate and magnesium fluoride material are arranged in the vacuum cavity; the temperature in the vacuum cavity is lower than 250 DEG C; preparing an ion source; the ion source is communicated with the vacuum cavity; nitrogen gas is filled into the ion source, and the nitrogen gas is ionized into nitrogen ions in the ion source; the nitrogen ions are introduced into the vacuum cavity, and the magnesium fluoride material is deposited on the surface of the substrate under the assistance of the nitrogen ions to form a magnesium fluoride film. The method for plating a magnesium fluoride film with nitrogen ion assistance provided in the specification can significantly reduce the lower limit of stress of the film layer and increase the adjustment window of the process.

This application relates to the field of contact terminal coating, and more specifically, to a vacuum deposition method for a gradient composite coating on contact terminals. The coating is prepared by the following steps: S1, cleaning and activation: The contact terminal blank is cleaned and activated with an activating cleaning agent to obtain blank A; S2, spray coating and pre-curing: A silane-oxygen-containing conductive liquid is sprayed onto the surface of the activated blank and pre-cured to obtain blank B; S3, PVD chromium plating: A chromium target is used to vacuum deposit a coating on the surface of blank B to form blank C; S4, shaping: Blank C is sintered to obtain a contact terminal containing a composite coating. By sequentially performing cleaning and activation, spray coating and pre-curing, PVD chromium plating, and shaping, a gradient composite layer is formed, giving the contact terminal excellent corrosion resistance and anti-detachment properties.

A web processing machine (10) for producing a multilayer web (12), in particular a multilayer packaging web (13), is presented. It comprises a first vacuum coating unit (28) for depositing a film of a first coating material on a web (16) to be processed. Furthermore, it is equipped with an extrusion coating unit (32) for pressing a film of an extrusion material on the web (16). The extrusion coating unit (32) is positioned behind the first vacuum coating unit (28) with respect to the processing direction (20). Furthermore, a method for producing a multilayer web (12) is set forth. Furthermore, a multilayer packaging web (13) is described.

The utility model belongs to vacuum coating technology field discloses a kind of film thickness monitoring mechanism and vacuum coating chamber.Film thickness monitoring mechanism includes rotating mechanism and monitoring mechanism, rotating mechanism is configured to be set in vacuum chamber, rotating mechanism includes driving assembly, revolution disc and planetary assembly, planetary assembly includes rotating frame, rotating frame is rotated and set in revolution disc, driving assembly is used to drive rotating frame revolution along the axis of revolution disc, and can drive rotating frame rotation;Rotating frame is equipped with hollow cavity;Rotating frame is equipped with loading portion;Monitoring mechanism includes light source, monitoring sheet and light detection component, light source and light detection component are configured to be set in vacuum chamber;Monitoring sheet is fixed at the rotation center of loading portion, light emitted by light source can pass monitoring sheet and hollow cavity in turn and enter light detection component.The utility model can more accurately monitor the thickness of film on workpiece, to realize the accurate control of film thickness, obtain the film of expected thickness, in addition, simple structure, monitoring is convenient.

This utility model discloses an ion generating device for a non-vacuum coating gun, including an ion generating gun. The ion generating gun comprises an ion gun head assembly, an ion gun body assembly, an ignition assembly, and an air inlet connector. The ignition assembly is connected to an external ignition power supply and is inserted into the ion gun body assembly, with a ventilation gap between them. The ignition assembly cooperates with the ion gun head assembly to generate ignition ionization. The air inlet connector is connected to the ion gun body assembly and is provided with an air inlet channel. The incoming air passes through the air inlet channel and the ventilation gap and is ionized into plasma gas at the ion gun head assembly. The ion generating device of this utility model has a reasonable structural design and compact size, making it easy to install and use. It has a better ionization effect, improves the contact reaction between the ionized plasma gas and the chemical solution, and further enhances the coating effect.

This utility model provides a vacuum coating machine for glass coating, relating to the field of coating machine technology. It includes a coating machine body and an inner liner mounting assembly. The inner liner mounting assembly includes a transmission disc slidably connected within the coating machine body, a transmission column slidably connected to the transmission disc, a rocker arm slidably connected to the transmission column, a sliding frame slidably connected to the rocker arm, a locking shaft slidably connected to the sliding frame, and a locking frame slidably connected to the locking shaft. In this utility model, simply lifting the sliding base rod drives the transmission column, rocker arm, and other components to move together, causing the locking shaft to automatically engage with the opening in the locking frame for initial fixation. Then, by moving the sliding rod, the transmission disc and sliding shaft are driven to clamp and fix the inner liner body. The entire installation process does not require special tools, overcoming the cumbersome disassembly problem caused by the complex connection structure in existing technologies. It simplifies the traditional operation requiring complex tools into a two-step mechanical operation of lifting and moving, reducing the difficulty of operation.

The application discloses a kind of corrosion-resistant stainless steel alloy materials and preparation method thereof, it is related to alloy material technical field.Step 1: 420W powder, binder is mixed, fused, injection molding is carried out;Then sequentially carry out debinding, multi-gradient temperature control sintering, shaping, heat treatment, obtain base stainless steel;Step 2: the base stainless steel is pretreated, carries out nitriding treatment, forms nitriding layer;Then sequentially carry out quenching treatment, cryogenic treatment, tempering treatment, obtain nitriding stainless steel;Step 3: the nitriding stainless steel is vacuum plated film treatment, forms TiN layer;Obtain corrosion-resistant stainless steel alloy material.In the application, by nitriding treatment before depositing TiN coating, and quenching, cryogenic treatment, tempering treatment process is set between nitriding treatment and depositing TiN coating, effectively inhibit nitriding defect, improve interface bonding force, improve the wear and corrosion resistance of stainless steel alloy material.

The utility model discloses a kind of ventilation hoods for vacuum coating pretreatment, including rectangular frame, top plate is equipped on the rectangular frame, rectangular frame is fixed at the top of top plate, two ventilation pipes are equipped on top plate, the left side of rectangular frame is equipped with two support rods one, the right side of rectangular frame is equipped with two support rods two, the utility model utilizes rectangular frame, support rod one, support rod two, side plate one, side plate two and top plate to form ventilation hood, when carrying out the pretreatment of alcohol wiping to plating piece, plating piece is placed in the lower side of ventilation hood to operate, the air under the ventilation hood is extracted by ventilation pipe, the alcohol volatilized when carrying out the pretreatment under the ventilation hood is extracted quickly with the air under the ventilation hood, the amount of volatilized alcohol escaping to the surrounding is reduced, to enhance the absorption efficiency of volatilized alcohol by ventilation system.

The utility model belongs to vacuum coating technology field especially relates to a vacuum pretreatment device for coating, including processing box and support leg, the inside of processing box is provided with pretreatment structure, the pretreatment structure includes clamping mechanism and pretreatment mechanism, the clamping mechanism includes mounting panel, motor, placement board, rotating rod, limit plate, the mounting panel top is connected with motor bottom each other, motor output and placement board bottom are connected with each other. This vacuum pretreatment device for coating has realized the clamping and fixing of the workpiece of different sizes quickly and conveniently, and can rotate the workpiece quickly and conveniently, and can filter the sprayed water, and can be recycled, solves the problem that the workpiece of different sizes cannot be clamped and fixed quickly and conveniently, and the workpiece cannot be rotated quickly and conveniently, improves the working efficiency of the vacuum pretreatment device.