1483 results about "Vacuum coating" patented technology

The invention relates to an intelligent vacuum coating quality monitoring method based on artificial intelligence, which comprises the following steps: collecting process parameters in real time through a coating equipment sensor, dynamically monitoring vacuum degree change, deposition rate deviation and temperature gradient, and standardizing data flow to obtain a quantitative trend curve of process parameter fluctuation; combining the defect microcosmic feature description set with gas flow fluctuation and power supply voltage jitter to obtain a correlation analysis result of process parameters and defect forms, and calibrating defect types according to a defect feature library to obtain an updated defect classification basis; and inputting real-time new surface image data through the updated defect classification basis, performing defect detection for illumination reflection differences and stripe deflection angles, obtaining a preliminary defect classification result, and adjusting classification weight parameters.

The invention relates to the technical field of vacuum extraction control, and discloses a multi-stage vacuum extraction control system which comprises a central processing unit, a multi-stage vacuum pump set control module, a vacuum degree dynamic monitoring module and the like. The multi-stage vacuum pump set control module coordinates all stages of pumps to work according to a preset vacuum degree target value, and the vacuum degree dynamic monitoring module collects pressure data in real time and judges abnormity. The pressure gradient adjusting module adjusts the extraction rate of the adjacent pump to maintain the vacuum gradient stable when the pressure is abnormal, and the abnormity response module controls starting and stopping or rate correction of the pump according to the abnormity level. In addition, the system further has the functions of vacuum pump efficiency evaluation, pressure feedback compensation, leakage detection, redundancy switching, historical data backtracking, collaborative optimization and the like. The system can accurately control the vacuum degree, efficiently deal with abnormities and realize equipment state monitoring and optimization, and is widely applied to the fields with high requirements on the vacuum degree, such as semiconductor manufacturing and vacuum coating.

The invention relates to the technical field of intelligent suspension conveying systems, in particular to a PVD vacuum coating intelligent suspension conveying system which comprises a mounting frame and a driving mechanism mounted at the bottom of the mounting frame, and a suspension mechanism and a limiting mechanism are mounted on a fixing mechanism; a limiting mechanism is installed in the fixing block, and the fixing block is in sliding connection with the sliding plate, so that the distance between the side plate and the stand column can be adjusted, hanging of a large workpiece is facilitated, the side plate is prevented from blocking a film coating piece, a larger space is vacated, different film coating pieces can be hung and conveyed, and after the external expansion range of the sliding plate is adjusted, the sliding plate needs to be fixed; due to the fact that the top of the bottom column abuts against the sliding column in the fixing block, when the shell shrinks to drive the supporting plate to ascend, the stand column can push the sliding column in the fixing block to ascend, toothed plates on the sliding column are further meshed with inner teeth at the bottom of the sliding plate, the sliding plate is fixed while the stand column is fixed, and the external expansion range of the sliding plate is convenient to adjust.

The invention discloses a rigid-flex circuit board slotting process based on a laser depth control technology. The rigid-flex circuit board slotting process comprises the steps that the surface of a rigid layer of a rigid-flex circuit board is pretreated, and a laser sensitive layer is sprayed; cNC depth-controlled milling is adopted to form a grooved rough blank structure on the surface of the pretreated rigid layer; positioning laser is used for scanning, a three-dimensional model is established through collected reflected signals, then layered depth-controlled ablation is conducted, second-power laser is sequentially adopted for fine cutting, third-power laser is sequentially adopted for depth calibration, and a groove body structure is formed; cleaning an interface, scanning a groove bottom area and synchronously introducing low-temperature gas; performing morphology repairing treatment, and generating a periodic micro-nano structure on the groove wall by adopting short pulse laser to form a stress concentration resistant surface; depositing an insulating medium layer, and forming a continuous packaging protection layer on the groove wall and the bottom through a vacuum coating process; the high-precision depth-controlled slotting of the rigid-flex circuit board is realized, and meanwhile, the ultra-low thermal damage and anti-fatigue structure and long-acting environmental stability are realized.

The invention belongs to the technical field of vacuum coating, and particularly relates to a vacuum coating machine electron gun control method and system.The control method comprises the steps that in the coating process, key real-time parameters reflecting the working state of an electron gun and the evaporation process are continuously collected and fused, and the current coating state is evaluated in real time based on the key real-time parameters; and in combination with preset coating process requirements, an electron beam control target instruction set of a next control period is dynamically generated through a built-in decision mechanism and is sent to a power controller, a focusing coil controller and a scanning coil controller of the electron gun, and the electron gun is driven to adjust the power output, the focusing state and the scanning motion of the electron gun in real time. Through accurate and stable control of the evaporation rate, material characteristic changes are effectively coped with through a strong closed loop of power and the evaporation rate; the dynamically planned scanning path can actively compensate the non-uniformity of the thermal field of the crucible, and beam spot energy distribution is optimized in combination with focusing adjustment, so that the uniformity of the thermal field is remarkably improved.

The invention discloses a partitioned multifunctional metal double-cavity vacuum coating process and system, and belongs to the technical field of material surface treatment. The process comprises the steps of base material pretreatment, double-cavity preparation, vacuum inspection, first cavity bottom layer deposition, vacuum transfer, second cavity functional layer deposition and cooling, the double cavities are provided with corresponding target materials respectively, and parallel operation and vacuum seamless transfer are supported; the system comprises double coating cavities, a vacuum transmission channel, a vacuum acquisition and control module, a coating deposition module, a workpiece bearing module and a process parameter regulation and control module, and each of the double cavities is provided with a multi-target mounting rack and carries a real-time monitoring unit and an intelligent control system. Integrated preparation of the composite film layer and synchronous production of multifunctional workpieces are achieved, operation gaps are eliminated, the compactness and adhesive force of the film layer are improved, parameter deviation and the reject ratio are reduced, and batch production requirements are met.

The invention discloses a preparation method of a proton exchange membrane water electrolysis hydrogen production membrane electrode, and belongs to the technical field of proton exchange membranes, a catalyst carrier is prepared, S101, a polyimide membrane is inversely fixed in a magnetron sputtering vacuum coating chamber, a cavity cover of the magnetron sputtering vacuum coating chamber is closed, vacuumizing is performed, and a substrate is heated; and S102, argon is introduced into a cavity of the magnetron sputtering vacuum coating chamber, coating is started, the power of the bismuth metal target is set to be 0.2-0.5 kW, and the deposition time is 60-1800 s. In the invention, the physical vapor deposition method is utilized to load the catalyst on the surface of the metal oxide carrier with high specific surface area and ordered nanostructure, so that the exposure of active sites of the catalyst is increased, the dosage of the noble metal catalyst is reduced, and the bonding strength between the catalyst and the carrier is enhanced; the catalyst is not easy to separate from the surface of the carrier, and large-scale slurry agglomeration is avoided.

The invention discloses an automobile part aluminum plating tool with overturning and clamping functions, and relates to the technical field of film plating tools, the automobile part aluminum plating tool comprises a driving assembly, a fixed outer frame and a plurality of overturning and clamping assemblies, and each overturning and clamping assembly comprises a deflection connecting rod, a telescopic rod, a workpiece chuck and a guide sleeve rod; when the driving assembly ascends and descends, the deflection connecting rod is driven by the first hinge shaft to deflect, the telescopic rod is forced to slide in the radial direction of the guide sleeve rod, and the workpiece chuck generates clamping / releasing displacement. An inner transmission ring is arranged on an inner ring of the fixed outer frame, a transmission wheel is installed at the lower end of the guide sleeve rod, and when the driving disc rotates, a planetary gear train enabling the overturning clamping assembly to rotate is formed through transmission of the inner transmission ring and the transmission wheel. A multi-drive structure is replaced with mechanical layout, modular layered layout improves efficiency, structural innovation guarantees stability, integration of self-adaptive clamping, composite motion and batch processing is achieved in the field of vacuum coating, and the bottleneck that a traditional tool is insufficient in flexibility and poor in uniformity is broken through.

The invention relates to the technical field of metal material sample preparation, in particular to a preparation method for extracting carbon replica of steel for a high-carbon wire rod. The method specifically comprises the following steps: S1, preparing a sample; s2, immersing the sample into a nitric acid alcohol solution; s3, placing the sample in a sample chamber of a high-vacuum coating instrument, evaporating a carbon film with the thickness of 10-20 nm on the surface of the sample, and taking out the sample after vacuum is relieved; s4, performing electrolytic film removal by adopting an electrolytic polishing corrosion instrument; s5, after the carbon film falls off, the nitric acid alcohol on the carbon film is cleaned until the absolute ethyl alcohol in the weighing bottle is colorless; s6, the carbon film is transferred into deionized water, after the carbon film is fully unfolded, the carbon film is fished up through a transmission electron microscope and a copper net and placed on filter paper, and the carbon film is tightly attached to the copper net; and S7, baking the carbon film sample adhered to the copper mesh for 30-60 seconds, and placing the dried sample under an electron microscope for observation to complete the preparation of the steel extraction carbon replica sample for the high-carbon wire rod. The method has the advantages of high demolding speed, complete and firm carbon film form, simple configuration and low cost.

The invention discloses a vacuum cavity pressure maintaining test and leak rate rapid estimation method and system, and the method comprises the steps: achieving the test preparation of multiple sections through a public metering manifold and a multi-way isolation valve, and building a section volume database; the pressure and temperature data are synchronously collected in a fixed sampling period by exhausting air to preset pressure and isolating a pump end; obtaining an equivalent pressure change rate through temperature normalization and deflation baseline deduction in combination with filtering and regression algorithms, and performing conversion to obtain a standardized leak rate; step-by-step detection is carried out on each functional section of the cavity through a segmented bipartite isolation strategy and volume correction, and rapid positioning of a suspicious leakage section is realized; through double-threshold determination of an early warning threshold and an unqualified threshold, a detection report is automatically generated and written into a historical database, and a detection-determination-maintenance closed loop is formed. The method can improve the precision of leak rate detection, and is suitable for vacuum coating equipment, semiconductor process equipment and industrial vacuum treatment devices.

The invention discloses a workpiece carrying frame for a vacuum coating machine and the vacuum coating machine, the workpiece carrying frame comprises a revolution shaft and a revolution frame rotatably mounted on the revolution shaft, a plurality of rotation shafts used for connecting and mounting workpieces are mounted on the revolution frame, and the rotation shafts are mounted on the revolution frame in a swinging manner through a swinging mechanism; linkage assemblies for driving the rotation shafts to rotate synchronously when the revolution frame rotates are arranged between the respective rotation shafts and the revolution shaft; and the workpiece carrying frame for the vacuum coating machine further comprises a swing adjusting assembly for adjusting the swing angles of the rotation shafts. The vacuum coating machine is provided with the workpiece carrier. The multiple rotation shafts are divided into multiple shaft sets arranged around the revolution shaft at intervals, and each shaft set comprises the multiple rotation shafts sequentially arranged in the axial direction of the revolution frame at intervals. According to the invention, the coating uniformity and quality of complex workpieces can be improved, the requirements of diversified advanced processes are met, and the use flexibility and compatibility are good.

The invention discloses vacuum coating equipment for coating an anti-fingerprint film and a coating method. The coating method comprises the following steps: performing plasma activation treatment on the surface of a glass substrate to form an activated substrate; a gradient transition layer is deposited on the surface of an activated substrate, a Cr-Si composite transition layer with continuously changing components is formed by alternately adjusting sputtering power of a metal target and a non-metal target, a fluorocarbon polymer main film layer is deposited on the transition layer substrate, and C4F8 gas is controlled by adopting a pulse magnetron sputtering process to generate an anti-fingerprint functional layer substrate with uniform thickness; stepwise in-situ annealing treatment is carried out, and a densified composite film layer structure is formed through segmented heating and heat preservation; performing plasma surface modification on the surface to form a low-surface-energy chemical group, and finishing functional treatment; through combination of a composite coating process and an intelligent control technology, cooperative regulation and control of anti-fingerprint film interface strengthening, function construction and structure optimization are realized in a single vacuum environment.

The invention discloses an optical thin film thickness monitoring device and an optical thin film coating system, and belongs to the technical field of vacuum coating. A workpiece disc of the optical film thickness monitoring device is provided with a monitoring hole group, the monitoring hole group comprises a first through hole, a second through hole and an interval shielding area, and a film coating monitoring piece is arranged in the first through hole; the irradiation light source is used for emitting light signals to the monitoring hole group; the receiving assembly comprises a light converging element and at least two grating monochromators. The actual physical or optical thickness of the thin film can be calculated by monitoring the transmission or reflectivity of multiple wavelengths and combining the dispersion of the material, and the precision is higher than the precision of monitoring the thickness of the single-wavelength thin film. A plurality of grating monochromaters respectively and correspondingly monitor one wavelength, each grating monochromator can freely select the wavelength, the wavelength selection range is wide, and the problems that the monitoring wavelength is changed and the positioning precision deviation is large in the same grating monochromator are solved. According to the invention, the optical film thickness measurement precision in the online monitoring film coating process can be improved, and the film coating success rate is improved.

The utility model discloses a liquid nitrogen type cooling sample table for vacuum coating, which comprises a rotating table, a first lifting table mounted on the rotating table, a hollow interlayer pipe mounted on the first lifting table, a hollow shaft arranged on the rotating table and driven by the rotating table to rotate, and a second lifting table arranged on the outer side of the hollow shaft and connected with the rotating table. A wafer bracket is arranged at the end, away from the rotating table, of the hollow shaft. According to the utility model, the structure is simple, through the arrangement of the liquid nitrogen chamber, after a sample is subjected to high-temperature treatment, the liquid nitrogen chamber can be utilized to quickly cool the sample to a liquid nitrogen low temperature, and then under the action of the first lifting platform, the first lifting platform drives the liquid nitrogen chamber and the heating disc to perform synchronous height lifting adjustment, so that the distance between the heating disc and the wafer holder is adjusted; when the liquid nitrogen chamber and the heating disc are spaced from the wafer support by a certain distance, a worker can more conveniently put a sample into the wafer support for treatment, and then the sample on the wafer support can be subjected to high-temperature treatment or cooling treatment by adjusting the height of the liquid nitrogen chamber and the height of the heating disc respectively.

The invention relates to the technical field of driving control of symmetrical vacuum pressure control valves, in particular to a zero-point-free zero returning method of a double-position synchronous motor for a symmetrical vacuum pressure control valve, which is suitable for scenes needing high-precision pressure control, such as semiconductor manufacturing, vacuum coating, precision vacuum detection and the like. The problems that in the prior art, the vacuum sealing performance is damaged by depending on a special sensor, cost is high, abrasion of a sealing ring is aggravated due to zero point fixation, and double-shaft synchronization precision and load distribution are disjointed are solved. According to the method, the position where the sealing ring reaches the sealing pre-tightening force serves as a dynamic non-fixed zero point, an additional zero point sensor or a collision sensor or a horizontal sensor is not needed, the current-torque coupling characteristic of a motor is utilized, and full-process automatic control is achieved through a high-precision Hall current sensor and an incremental encoder. The method comprises the following specific steps: initializing motor parameters, establishing a T = K * I mapping relation, calibrating a current overload threshold value, calibrating a current detection module, synchronously starting and operating double motor shafts, identifying a collision state based on current detection, locking and verifying a zero returning position, and judging zero point uniqueness based on torque uniformity. The double-shaft zero returning repetition precision is high, zero point uniqueness judgment fits the actual working condition, uneven abrasion of the sealing ring can be reduced, the service life of the sealing ring and the maintenance period of the valve are prolonged, meanwhile, the equipment manufacturing cost and the maintenance difficulty are reduced, and the vacuum sealing stability and the pressure control precision of the symmetric vacuum pressure control valve are effectively improved.

The invention provides a vacuum coating on-line monitoring system. The vacuum coating on-line monitoring system comprises a data processing module, a light blocking module, and a laser light source module, a homogenizing and beam expanding light path and a light sensing module which are accommodated in the light blocking module, a light outlet and a light inlet are formed in the light blocking module; the laser light source module is used for emitting laser with at least two different wavelengths; the homogenizing and beam-expanding light path is used for receiving the laser emitted by the laser light source module and emitting the laser through a light outlet after homogenizing and beam-expanding the laser; wherein the emergent laser can irradiate a coated product, and reflected light formed by reflection of the coated product can enter the light blocking module through the light inlet; the light sensing module is used for receiving the reflected light and obtaining light sensing data of the coated surface of the coated product according to the reflected light; and the data processing module is used for obtaining real-time coating parameters of the coating surface of the coating product according to the photosensitive data. According to the invention, real-time accurate and more-dimensional monitoring of the coating condition of the coated product can be realized.

The invention belongs to the technical field of vacuum coating, and relates to an electron gun and ion source collaborative evaporation coating method, a control method and a control system. The electronic gun and ion source collaborative evaporation coating control method comprises the steps that key parameters in the coating process are continuously collected, and an electronic gun beam initial value and an ion source gas flow initial value are dynamically generated according to state diagnosis results of all the parameters; the beam current value of the electron gun and the gas flow value of the ion source are corrected in real time to inhibit the disturbance of the ion source to the beam current of the electron gun, and the electron gun and the ion source are cooperatively regulated and controlled to ensure the precise control of the coating uniformity; the invention further discloses an electron gun and ion source collaborative evaporation coating method, local hot spot compensation and global uniformity compensation are carried out by adopting a film thickness compensation mechanism so as to accurately control the film thickness. According to the invention, the cooperative control of the electron gun evaporation and ion bombardment process is realized, the film adhesion is enhanced, the evaporation coating rate is improved, and the film thickness uniformity is improved.

The invention relates to the field of touchpad film materials, and discloses a preparation process of a touchpad mylar and a product. The preparation process of the touch panel mylar comprises the following steps: S1, transferring a texture layer on one side surface of a base material layer by using UV transfer printing glue; s2, carrying out three times of silk-screen printing on the other side surface of the base material layer to sequentially form a first metal ink layer, a second metal ink layer and an insulating ink layer; s3, performing vacuum coating on the texture layer to form a wear-resistant anti-fingerprint layer; and S4, adhering an adhesive layer with a release film to the insulating ink layer, and performing die cutting to obtain the touch panel mylar. The prepared touchpad mylar has good metal texture, wear resistance, smoothness and insulativity, the ink layer and the base material layer are stably attached, the ink layer is not prone to falling off and layering under the use conditions of long-term environment temperature and frequent screen touching of the touchpad mylar, and the touch sensitivity is good.

The utility model discloses an automatic vacuum degree regulating system for high-vacuum coating equipment, which comprises a vacuum cavity, an automatic vacuum regulating valve, a high-vacuum gate valve and a high-vacuum molecular pump, the high-vacuum molecular pump is fixed with the high-vacuum gate valve, the high-vacuum gate valve is fixed with the automatic vacuum regulating valve through a vacuum flange, and the high-vacuum molecular pump is fixed with the automatic vacuum regulating valve through a vacuum flange. The vacuum automatic regulating valve is connected with the vacuum cavity; and the flow fine adjustment assembly is composed of a plurality of sets of flow components and a driving component, and the multiple sets of flow components are symmetrically arranged on the vacuum automatic adjusting valve. According to the high-vacuum molecular pump, through the design of the automatic vacuum regulating valve, the opening and closing angle of the regulating baffle inside the regulating valve body is regulated, so that the pumping speed of the high-vacuum molecular pump is reduced, the vacuum degree is accurately controlled, and meanwhile, through the design of the flow fine-tuning assembly, the automatic vacuum regulating valve can be assisted; and the precise control of the vacuum degree is further improved.

The invention discloses a piece turning mechanism and vacuum coating equipment, the piece turning mechanism comprises a turning assembly, the turning assembly comprises a base and two clamping parts, the two clamping parts are arranged on the upper side and the lower side of the base respectively to define a substrate mounting space, and the base is rotationally arranged to switch any clamping part to be located on the upper side; the jacking assembly comprises a first jacking part, and the first jacking part is arranged below the overturning assembly in a lifting mode; and the first jacking part can move upwards to jack up the clamping part located on the upper side until the clamping part is separated from the base, so that the substrate mounting space is opened. The substrate overturning device can overturn substrates by 180 degrees, and is simple and reliable in structure, small in occupied area and low in maintenance cost.

The invention belongs to the technical field of vacuum coating machines, and particularly relates to a full-automatic vacuum coating machine for optical lenses and a control system of the full-automatic vacuum coating machine, the full-automatic vacuum coating machine comprises a machine body, a vacuum unit, a coating unit, an electrical control unit, a heating unit and a cooling unit; the coating unit comprises a substrate frame, and the substrate frame is rotationally connected into the machine body; the motor drives the substrate plate to rotate through the driving shaft, the substrate plate drives the lens to rotate in the substrate frame, and when the substrate frame is in contact with the pressure sensor after being turned over, the pressure sensor triggers and controls the motor to stop rotating and keep fixed, so that turning over of the lens in the coating process is achieved, and a coating machine is prevented from being started in the coating process; the vacuum coating machine has the advantages that the internal environment of the coating machine is affected, the lens expands with heat and contracts with cold due to the influence of the temperature and humidity environment, and the film structure is damaged, so that the lens coating effect is improved, and the use convenience of the vacuum coating machine is improved.

The invention relates to the technical field of PVD coating, in particular to a PVD vacuum coating machine which comprises a vacuum machine pump set, the top end of the vacuum machine pump set is fixedly connected with a fixing table, and the top end of the fixing table is fixedly connected with a vacuum coating tank; and the workpiece placing and rotating mechanism comprises a motor fixedly connected to the inner top wall of the vacuum machine pump set, the output end of the motor is fixedly connected with a rotating plate, and a supporting frame is detachably arranged at the top end of the rotating plate. In the detection assembly, when gas containing plating materials passes through a detection box, light rays emitted by a lamp panel can be shielded and absorbed, a photoresistor board detects the light ray intensity change, converts the light ray intensity change into electric signals and transmits the electric signals to a PLC, the PLC controls the power of an evaporation source, a motor and a vacuum arc ion source according to the signals, and therefore self-adaptive adjustment of parameters is achieved. And parameters are adaptively adjusted according to actual conditions, so that plating material supply is accurately matched with actual requirements.

The invention discloses a high-efficiency and energy-saving vacuum coating unit and method. The vacuum coating unit comprises a vacuum coating machine, and a coil feeding device and a coil discharging device which are positioned at the inlet and outlet ends of the vacuum coating machine, the vacuum coating machine is provided with an inlet crop shear, a welding machine, a strip steel preheating chamber, a strip steel surface cleaning and activating chamber, a strip steel coating chamber, an after-plating cooling chamber and an outlet shear; the number of the coiling devices is two, the coiling devices are arranged at an inlet of the vacuum coating machine in parallel, the two coiling devices are respectively arranged in a vacuum cavity, the two vacuum cavities are respectively communicated with the vacuum coating machine through an inlet conveying pipeline, and the two inlet conveying pipelines are respectively provided with an inlet isolating valve; the number of the coil unloading devices is two, the two coil unloading devices are arranged at an outlet of the vacuum coating machine in parallel, the two coil unloading devices are respectively arranged in a vacuum cavity, the two vacuum cavities are respectively communicated with the vacuum coating machine through outlet conveying pipelines, and outlet isolating valves are respectively arranged on the two outlet conveying pipelines. According to the invention, the continuous coating of the strip steel can be realized on the premise of not breaking vacuum.

The utility model discloses a transmission device for a vacuum coating machine, which belongs to the field of magnetron sputtering coating equipment, and comprises a transmission carrier plate, two parallel support plates arranged in a vacuum cavity, a plurality of parallel driven transmission shafts erected between the two support plates, a groove transmission wheel sleeved at one end of each driven transmission shaft, and a plurality of driven transmission shafts sleeved at the other end of each driven transmission shaft. The auxiliary transmission shafts are sequentially connected through chain transmission components, the auxiliary transmission shaft at one end is connected to the driving motor through the main transmission shaft, the transmission carrier plate is arranged on the groove transmission wheel and the plane transmission wheel, and a protruding strip is arranged at the bottom of one side of the transmission carrier plate and matched with a groove of the groove transmission wheel. Two-side friction transmission is adopted, one side is plane friction transmission, the other side is friction transmission through cooperation of the grooves and the protruding strips, the grooves can conduct linear transmission limiting during transmission of the transmission carrier plate, the plane friction transmission can adapt to thermal expansion and lengthening of the transmission carrier plate in the high-temperature environment, and the transmission clamping stagnation problem is prevented.

The invention relates to the technical field of glass coating, and discloses a glass coating device and a coating process thereof.The glass coating device comprises a vacuum coating chamber, a rotating cathode plate, a sputtering source, a substrate placing table, a shielding cover plate and the like; and at least two different target materials can be borne, and synchronous deposition of multiple layers of films is achieved by accurately controlling the rotating angle of the rotating negative plate. According to the device, a magnetron sputtering source is adopted to generate high-energy particles to bombard a target material to form a uniform thin film, and a six-degree-of-freedom platform is used for driving a substrate to translate, rotate and swing, so that the edge effect is compensated, and the uniformity of a film layer is improved. The coating process comprises the following steps: mounting a target material on a rotating cathode plate, calibrating the position of a substrate, maintaining a vacuum state, generating high-energy particles to sputter the target material, controlling the rotating cathode plate to rotate so as to realize target material switching and synchronous sputtering, adjusting the switching time of the target material and the movement track of the substrate, and finally preparing a multilayer film with specific performance.

The application provides a rotary vacuum coating machine, which comprises a base, a vacuum cavity arranged above the base, a plurality of main supports arranged around the vacuum cavity, lower ends of the plurality of main supports being arranged on a top surface of the base, an anti-rotation mechanism arranged below the vacuum cavity, a bottom surface of the anti-rotation mechanism being arranged on a middle part of the top surface of the base, a plurality of coating units arranged in a middle part of the vacuum cavity, lower ends of the plurality of coating units being arranged on a plurality of upper ends of the anti-rotation mechanism, a plurality of cover units being bolted on top and bottom surfaces of the vacuum cavity, and each of the plurality of cover units comprising an upper cover and a lower cover. The plurality of coating units rotate around one coating source, share the same coating source, improve the efficiency, do not increase the consumption of the coating source, greatly reduce the waste of materials, and thus reduce the production cost.

The utility model discloses a vacuum transfer box and vacuum coating equipment, a second transfer mechanism is connected to a first transfer mechanism in a sliding manner, a third transfer mechanism is connected to the second transfer mechanism in a sliding manner, and a rotary feeding mechanism is connected to the third transfer mechanism in a sliding manner; therefore, when the first transfer mechanism moves in the first direction, the rotary feeding mechanism can be driven to move, when the second transfer mechanism moves in the second direction, the rotary feeding mechanism can be driven to move, and when the third transfer mechanism moves in the third direction, the rotary feeding mechanism can be driven to move. The rotary feeding mechanism can rotate on the third transferring mechanism, and the rotating axis is parallel to the first direction, so that the cargo cages can be transferred from the previous working procedure to the next working procedure, the vacuum environment does not need to be damaged, the vacuumizing time during manual loading and unloading operation and the operation time required by loading and unloading are saved, and the working efficiency is improved. And the overall rhythm speed of the coating process is improved, so that the production efficiency is improved.

The invention discloses a vacuum coating process parameter adaptive adjustment method and system, the system comprises a data acquisition layer, a DRL intelligent agent and an execution layer, the DRL intelligent agent comprises a strategy network and an evaluation network, the DRL intelligent agent adopts a double-loop learning mechanism, and the DRL intelligent agent comprises an offline imitation learning module and an online reinforcement learning module. According to the technical scheme, through DRL decoupling multi-roller coupling, the tension fluctuation control precision is obviously improved compared with traditional PID control; factors such as roller diameter thermal deformation and environmental disturbance are automatically compensated through an online learning mechanism, the dynamic adaptability is enhanced, and manual adjustment is not needed; in addition, closed-loop control of visual defect detection is fused in the technical scheme, so that the film thickness uniformity is greatly improved, and the wrinkle defect rate is obviously reduced.

The invention discloses vacuum coating equipment which comprises a feeding chamber and a process chamber, a slit channel for a loading disc to pass through is arranged between the feeding chamber and the process chamber, and an anti-adhesion plate is arranged on the side wall of the slit channel and used for adsorbing dust. According to the invention, the slit channel is arranged between the feeding chamber and the process chamber, and the anti-adhesion plate is arranged on the side wall of the slit channel, so that a transition structure with isolation and purification functions is formed, and mutual pollution of the feeding chamber and the process chamber can be effectively prevented.

The invention relates to a carrier plate conveying method and a vacuum coating device, and in the conveying mode, a plurality of carrier plates are sequentially conveyed from a heating cavity, a first transition cavity, a second transition cavity and a coating cavity for coating. Wherein the first carrier plate is conveyed at a first speed, and when it is detected that the rear end of the first carrier plate leaves the first detection site, the second carrier plate is conveyed to the coating cavity at a second speed, and meanwhile, the third carrier plate is conveyed from the heating cavity to the first transition cavity at a third speed for waiting. The third speed is set to be smaller than the second speed, the time of the support plate in the heating cavity is prolonged, it is guaranteed that the support plate has enough air outlet efficiency before film coating, at the moment, the speed of the third support plate entering the first transition cavity from the heating cavity is relatively small, and falling and deviation of the third support plate can be reduced. The second speed is set to be larger than the first speed, namely the acceleration process is set in the second transition cavity, and falling and deviation caused when the carrier plate enters the first transition cavity from the heating cavity are reduced.