1029 results about "Vacuum coating" patented technology

The invention discloses a partitioned multifunctional metal double-cavity vacuum coating process and system, and belongs to the technical field of material surface treatment. The process comprises the steps of base material pretreatment, double-cavity preparation, vacuum inspection, first cavity bottom layer deposition, vacuum transfer, second cavity functional layer deposition and cooling, the double cavities are provided with corresponding target materials respectively, and parallel operation and vacuum seamless transfer are supported; the system comprises double coating cavities, a vacuum transmission channel, a vacuum acquisition and control module, a coating deposition module, a workpiece bearing module and a process parameter regulation and control module, and each of the double cavities is provided with a multi-target mounting rack and carries a real-time monitoring unit and an intelligent control system. Integrated preparation of the composite film layer and synchronous production of multifunctional workpieces are achieved, operation gaps are eliminated, the compactness and adhesive force of the film layer are improved, parameter deviation and the reject ratio are reduced, and batch production requirements are met.

The invention discloses an automobile part aluminum plating tool with overturning and clamping functions, and relates to the technical field of film plating tools, the automobile part aluminum plating tool comprises a driving assembly, a fixed outer frame and a plurality of overturning and clamping assemblies, and each overturning and clamping assembly comprises a deflection connecting rod, a telescopic rod, a workpiece chuck and a guide sleeve rod; when the driving assembly ascends and descends, the deflection connecting rod is driven by the first hinge shaft to deflect, the telescopic rod is forced to slide in the radial direction of the guide sleeve rod, and the workpiece chuck generates clamping / releasing displacement. An inner transmission ring is arranged on an inner ring of the fixed outer frame, a transmission wheel is installed at the lower end of the guide sleeve rod, and when the driving disc rotates, a planetary gear train enabling the overturning clamping assembly to rotate is formed through transmission of the inner transmission ring and the transmission wheel. A multi-drive structure is replaced with mechanical layout, modular layered layout improves efficiency, structural innovation guarantees stability, integration of self-adaptive clamping, composite motion and batch processing is achieved in the field of vacuum coating, and the bottleneck that a traditional tool is insufficient in flexibility and poor in uniformity is broken through.

The invention discloses a vacuum cavity pressure maintaining test and leak rate rapid estimation method and system, and the method comprises the steps: achieving the test preparation of multiple sections through a public metering manifold and a multi-way isolation valve, and building a section volume database; the pressure and temperature data are synchronously collected in a fixed sampling period by exhausting air to preset pressure and isolating a pump end; obtaining an equivalent pressure change rate through temperature normalization and deflation baseline deduction in combination with filtering and regression algorithms, and performing conversion to obtain a standardized leak rate; step-by-step detection is carried out on each functional section of the cavity through a segmented bipartite isolation strategy and volume correction, and rapid positioning of a suspicious leakage section is realized; through double-threshold determination of an early warning threshold and an unqualified threshold, a detection report is automatically generated and written into a historical database, and a detection-determination-maintenance closed loop is formed. The method can improve the precision of leak rate detection, and is suitable for vacuum coating equipment, semiconductor process equipment and industrial vacuum treatment devices.

The utility model discloses a liquid nitrogen type cooling sample table for vacuum coating, which comprises a rotating table, a first lifting table mounted on the rotating table, a hollow interlayer pipe mounted on the first lifting table, a hollow shaft arranged on the rotating table and driven by the rotating table to rotate, and a second lifting table arranged on the outer side of the hollow shaft and connected with the rotating table. A wafer bracket is arranged at the end, away from the rotating table, of the hollow shaft. According to the utility model, the structure is simple, through the arrangement of the liquid nitrogen chamber, after a sample is subjected to high-temperature treatment, the liquid nitrogen chamber can be utilized to quickly cool the sample to a liquid nitrogen low temperature, and then under the action of the first lifting platform, the first lifting platform drives the liquid nitrogen chamber and the heating disc to perform synchronous height lifting adjustment, so that the distance between the heating disc and the wafer holder is adjusted; when the liquid nitrogen chamber and the heating disc are spaced from the wafer support by a certain distance, a worker can more conveniently put a sample into the wafer support for treatment, and then the sample on the wafer support can be subjected to high-temperature treatment or cooling treatment by adjusting the height of the liquid nitrogen chamber and the height of the heating disc respectively.

The invention relates to the technical field of driving control of symmetrical vacuum pressure control valves, in particular to a zero-point-free zero returning method of a double-position synchronous motor for a symmetrical vacuum pressure control valve, which is suitable for scenes needing high-precision pressure control, such as semiconductor manufacturing, vacuum coating, precision vacuum detection and the like. The problems that in the prior art, the vacuum sealing performance is damaged by depending on a special sensor, cost is high, abrasion of a sealing ring is aggravated due to zero point fixation, and double-shaft synchronization precision and load distribution are disjointed are solved. According to the method, the position where the sealing ring reaches the sealing pre-tightening force serves as a dynamic non-fixed zero point, an additional zero point sensor or a collision sensor or a horizontal sensor is not needed, the current-torque coupling characteristic of a motor is utilized, and full-process automatic control is achieved through a high-precision Hall current sensor and an incremental encoder. The method comprises the following specific steps: initializing motor parameters, establishing a T = K * I mapping relation, calibrating a current overload threshold value, calibrating a current detection module, synchronously starting and operating double motor shafts, identifying a collision state based on current detection, locking and verifying a zero returning position, and judging zero point uniqueness based on torque uniformity. The double-shaft zero returning repetition precision is high, zero point uniqueness judgment fits the actual working condition, uneven abrasion of the sealing ring can be reduced, the service life of the sealing ring and the maintenance period of the valve are prolonged, meanwhile, the equipment manufacturing cost and the maintenance difficulty are reduced, and the vacuum sealing stability and the pressure control precision of the symmetric vacuum pressure control valve are effectively improved.

The invention belongs to the technical field of vacuum coating, and relates to an electron gun and ion source collaborative evaporation coating method, a control method and a control system. The electronic gun and ion source collaborative evaporation coating control method comprises the steps that key parameters in the coating process are continuously collected, and an electronic gun beam initial value and an ion source gas flow initial value are dynamically generated according to state diagnosis results of all the parameters; the beam current value of the electron gun and the gas flow value of the ion source are corrected in real time to inhibit the disturbance of the ion source to the beam current of the electron gun, and the electron gun and the ion source are cooperatively regulated and controlled to ensure the precise control of the coating uniformity; the invention further discloses an electron gun and ion source collaborative evaporation coating method, local hot spot compensation and global uniformity compensation are carried out by adopting a film thickness compensation mechanism so as to accurately control the film thickness. According to the invention, the cooperative control of the electron gun evaporation and ion bombardment process is realized, the film adhesion is enhanced, the evaporation coating rate is improved, and the film thickness uniformity is improved.

The invention relates to the field of touchpad film materials, and discloses a preparation process of a touchpad mylar and a product. The preparation process of the touch panel mylar comprises the following steps: S1, transferring a texture layer on one side surface of a base material layer by using UV transfer printing glue; s2, carrying out three times of silk-screen printing on the other side surface of the base material layer to sequentially form a first metal ink layer, a second metal ink layer and an insulating ink layer; s3, performing vacuum coating on the texture layer to form a wear-resistant anti-fingerprint layer; and S4, adhering an adhesive layer with a release film to the insulating ink layer, and performing die cutting to obtain the touch panel mylar. The prepared touchpad mylar has good metal texture, wear resistance, smoothness and insulativity, the ink layer and the base material layer are stably attached, the ink layer is not prone to falling off and layering under the use conditions of long-term environment temperature and frequent screen touching of the touchpad mylar, and the touch sensitivity is good.

The utility model discloses an automatic vacuum degree regulating system for high-vacuum coating equipment, which comprises a vacuum cavity, an automatic vacuum regulating valve, a high-vacuum gate valve and a high-vacuum molecular pump, the high-vacuum molecular pump is fixed with the high-vacuum gate valve, the high-vacuum gate valve is fixed with the automatic vacuum regulating valve through a vacuum flange, and the high-vacuum molecular pump is fixed with the automatic vacuum regulating valve through a vacuum flange. The vacuum automatic regulating valve is connected with the vacuum cavity; and the flow fine adjustment assembly is composed of a plurality of sets of flow components and a driving component, and the multiple sets of flow components are symmetrically arranged on the vacuum automatic adjusting valve. According to the high-vacuum molecular pump, through the design of the automatic vacuum regulating valve, the opening and closing angle of the regulating baffle inside the regulating valve body is regulated, so that the pumping speed of the high-vacuum molecular pump is reduced, the vacuum degree is accurately controlled, and meanwhile, through the design of the flow fine-tuning assembly, the automatic vacuum regulating valve can be assisted; and the precise control of the vacuum degree is further improved.

The invention discloses a piece turning mechanism and vacuum coating equipment, the piece turning mechanism comprises a turning assembly, the turning assembly comprises a base and two clamping parts, the two clamping parts are arranged on the upper side and the lower side of the base respectively to define a substrate mounting space, and the base is rotationally arranged to switch any clamping part to be located on the upper side; the jacking assembly comprises a first jacking part, and the first jacking part is arranged below the overturning assembly in a lifting mode; and the first jacking part can move upwards to jack up the clamping part located on the upper side until the clamping part is separated from the base, so that the substrate mounting space is opened. The substrate overturning device can overturn substrates by 180 degrees, and is simple and reliable in structure, small in occupied area and low in maintenance cost.

The application provides a rotary vacuum coating machine, which comprises a base, a vacuum cavity arranged above the base, a plurality of main supports arranged around the vacuum cavity, lower ends of the plurality of main supports being arranged on a top surface of the base, an anti-rotation mechanism arranged below the vacuum cavity, a bottom surface of the anti-rotation mechanism being arranged on a middle part of the top surface of the base, a plurality of coating units arranged in a middle part of the vacuum cavity, lower ends of the plurality of coating units being arranged on a plurality of upper ends of the anti-rotation mechanism, a plurality of cover units being bolted on top and bottom surfaces of the vacuum cavity, and each of the plurality of cover units comprising an upper cover and a lower cover. The plurality of coating units rotate around one coating source, share the same coating source, improve the efficiency, do not increase the consumption of the coating source, greatly reduce the waste of materials, and thus reduce the production cost.

The invention discloses a vacuum coating process parameter adaptive adjustment method and system, the system comprises a data acquisition layer, a DRL intelligent agent and an execution layer, the DRL intelligent agent comprises a strategy network and an evaluation network, the DRL intelligent agent adopts a double-loop learning mechanism, and the DRL intelligent agent comprises an offline imitation learning module and an online reinforcement learning module. According to the technical scheme, through DRL decoupling multi-roller coupling, the tension fluctuation control precision is obviously improved compared with traditional PID control; factors such as roller diameter thermal deformation and environmental disturbance are automatically compensated through an online learning mechanism, the dynamic adaptability is enhanced, and manual adjustment is not needed; in addition, closed-loop control of visual defect detection is fused in the technical scheme, so that the film thickness uniformity is greatly improved, and the wrinkle defect rate is obviously reduced.

The invention discloses vacuum coating equipment which comprises a feeding chamber and a process chamber, a slit channel for a loading disc to pass through is arranged between the feeding chamber and the process chamber, and an anti-adhesion plate is arranged on the side wall of the slit channel and used for adsorbing dust. According to the invention, the slit channel is arranged between the feeding chamber and the process chamber, and the anti-adhesion plate is arranged on the side wall of the slit channel, so that a transition structure with isolation and purification functions is formed, and mutual pollution of the feeding chamber and the process chamber can be effectively prevented.

The embodiment of the invention provides an evaporation assembly, a temperature control method and device of the evaporation assembly and evaporation equipment, and belongs to the technical field of vacuum coating. The evaporation component comprises a crucible and a cover body, a cavity for placing an evaporation material is arranged in the crucible, and the cover body is used for covering an opening of the crucible; the nozzle is arranged on the cover body and is used for discharging the gasified evaporation material; the heating wire is arranged in the crucible and is used for heating the evaporation material; the temperature detection module is arranged in the crucible, located beside the heating wire and used for collecting the current temperature value in the crucible and sending the current temperature value to the temperature control module so that the temperature control module can control the power of the heating wire according to the current temperature value, the set rate and the current evaporation rate collected by the evaporation rate detection module. Therefore, the evaporation rate of the evaporation material is adjusted. According to the embodiment of the invention, the evaporation rate can be adjusted, and the sample production efficiency is improved.

The invention relates to the technical field of magnetron sputtering equipment maintenance, in particular to an air pipe dedusting and cleaning device in a magnetron sputtering vacuum coating chamber, which is used for dedusting and cleaning a vacuum chamber and comprises an industrial dust collector, a cleaning air pipe is slidably arranged at the bottom of the interior of the vacuum chamber, and a plurality of air suction holes are formed in the cleaning air pipe. The driving mechanism is arranged in the vacuum chamber, and the cleaning air pipe is driven by the driving mechanism to reciprocate on the bottom of the vacuum chamber, so that the air suction holes in the cleaning air pipe can cover the whole or main area of the bottom of the vacuum chamber, and online dust removal of deposited particulate matter is achieved. On the premise that the coating process is not interrupted, online, automatic and intelligent directional cleaning is carried out on the vacuum chamber, the film quality problem caused by particulate matter floating is fundamentally solved, and meanwhile the production efficiency and the process stability are remarkably improved.

The utility model relates to the technical field of automation equipment, in particular to a turnover mechanism and a vacuum coating production line. The turnover mechanism comprises a material clamping robot and a transfer frame, a placing position is arranged in the transfer frame, the material clamping robot comprises a material clamping mechanism and a first driving device used for driving the material clamping mechanism to do multi-degree-of-freedom space motion, and a material clamping position is arranged in the material clamping mechanism; the material clamping robot executes a discharging action or a turning-over action relative to the transfer frame, and the material clamping mechanism can perform multi-degree-of-freedom space movement relative to the transfer frame through a first driving device and drive the material clamping position to synchronously move relative to the placing position, so that materials are placed in the placing position in the first direction or move away from the placing position in the second direction; therefore, the discharging action or the turning-over action is completed. The first direction is perpendicular to the placing position, the second direction is opposite to the first direction, and the second direction extends in the direction away from the placing position. And a coated product is prevented from being damaged or polluted in the turn-over process, and the coating quality and the product percent of pass are improved.

The invention discloses an AlCrSiWN / CrMoN nano multilayer composite coating with high hardness and self-lubricating performance and a preparation process of the AlCrSiWN / CrMoN nano multilayer composite coating, and belongs to the technical field of coatings. The multi-layer composite coating is a modulation coating formed by AlCrSiWN high-hardness layers and CrMoN self-lubricating layers through alternate deposition, the total thickness of the multi-layer composite coating is 3-4 microns, and the periodic thickness of the multi-layer composite coating is 0.011-0.038 microns. The preparation process of the coating comprises the steps that an AlCrN transition layer of a columnar crystal structure is prepared firstly, then an AlCrSiW target and a CrMo target are started at the same time, the AlCrSiWN / CrMoN nano multilayer composite coating with the nanoscale modulation period and alternate hardness is prepared by regulating and controlling the rotating speed of a rotating frame in a vacuum coating cavity to be 0.6 r / min-1. 5 r / min, and the AlCrSiWN / CrMoN nano multilayer composite coating with the nanoscale modulation period can keep the high hardness of the coating through the soft and hard alternate multilayer structure, so that the hardness of the coating is greatly improved, and the coating has the good application prospect. The toughness and the self-lubricating performance of the coating are improved, and crack propagation is effectively inhibited.

The invention relates to the technical field of vacuum coating machines, and particularly discloses an optical thin film coating temperature control method and system fused with infrared temperature measurement. The method comprises the following steps: selecting a temperature monitoring strategy according to target film system process requirements and substrate geometrical characteristics, calling a substrate quality mapping model, and measuring an angle set and an angle-region mapping table; traversing the measurement angle set to collect temperature in the coating process to form a time sequence temperature sequence; calculating a strategic local state vector based on the current strategy, and obtaining a comprehensive quality index through a quality transfer model; and performing system health degree diagnosis based on the time sequence temperature sequence and the comprehensive quality index, switching a normal control mode or a fault-tolerant control mode according to a diagnosis result, and executing a corresponding control instruction. According to the invention, the spanning from single-point temperature measurement to global quality perception and from temperature tracking to quality optimization control is realized, and the film layer quality consistency and the production process robustness are effectively improved.

The invention relates to the technical field of functional film materials, and discloses a composite functional film and a preparation method and application thereof, and the composite functional film comprises a base material layer, a bonding layer, an optical functional layer, a superhard layer and an anti-fingerprint layer. The composite functional film can selectively filter ultraviolet light and blue light with the wavelength of 380-460 nm, the filtering efficiency reaches up to 99%, and the composite functional film has an efficient eye protection function; in addition, the coating also has the functions of scratch resistance, wear resistance and fingerprint resistance, and the nanoindentation hardness is greater than or equal to 14 GPa; the initial water drop angle is larger than 110 degrees, rubber friction resistance is achieved, the water drop angle is larger than or equal to 100 degrees through 10000 times of rubber cycle tests, the anti-reflection function is achieved, and the transmittance of 470-700 nm is larger than or equal to 92%. The film is directly integrated on a screen by adopting a vacuum coating process, and the film layer is high in reliability, not easy to fall off, wear-resistant and long in service life.

The invention discloses a linear evaporation source and a co-evaporation evaporation source, belongs to the technical field of vacuum coating equipment, and aims to solve the problems of uneven heating, serious heat radiation overflow, easiness in nozzle condensation and inconvenience in maintenance in the prior art. The linear evaporation source comprises a body provided with a cavity and a nozzle, and is characterized in that a slit which does not penetrate to the cavity is formed in the body, a heating source is arranged in the slit, and the heating source heats the body wall where the cavity is located. According to the design, efficient and uniform direct heating is achieved, heat is conducted through the body wall to effectively heat the nozzle to prevent condensation, and the modular structure is convenient to maintain. The slits are arranged at the bottom and the top or on the two side walls so as to optimize the thermal field and inhibit thermal radiation. In addition, a trunk-branch type heating network and an intra-cavity rectifying plate can be arranged or a plurality of units are integrated to form a co-evaporation source. The device is particularly suitable for evaporation of high-melting-point materials such as metal, and has the advantages of being high in heating efficiency, accurate in temperature control, good in film thickness uniformity and convenient and fast to maintain.

The utility model relates to a liquid cooling device for a vacuum coating target material, which comprises a first plate body and a second plate body which are overlapped up and down, the upper plate surface of the first plate body forms a working surface for heat dissipation of the target material, and a cooling chamber for accommodating cooling liquid is arranged at the junction of the first plate body and the second plate body. The lower plate face of the second plate body is provided with a liquid inlet pipe and a liquid outlet pipe which are used for allowing cooling liquid in the cooling cavity to flow in and out, and the first plate body, the second plate body, the liquid inlet pipe and the liquid outlet pipe are connected in a sealed assembling mode in a welded mode. According to the scheme provided by the utility model, the sealing assembly connection among the components forming the liquid cooling device is realized by adopting a welding mode, so that the problem of cooling liquid leakage caused by aging of a sealing ring in a traditional cooling device is solved, and the reliability of vacuum coating is improved.

The invention relates to a vacuum coating chamber laser cleaning method and device based on a movable robot. The method comprises the following steps that a structured light camera, a laser and a dust removal device are arranged at the tail end of an operation arm of the robot; establishing a first mapping relation between a vacuum chamber coordinate system and a robot base coordinate system by taking a dry crucible in a vacuum coating chamber as a calibration object; fitting the inner wall of the vacuum chamber into a plurality of cylindrical surface models with different radiuses, and planning an acquisition line of the structured light camera; controlling the structured light camera to shoot along the acquisition line, identifying a to-be-cleaned surface of the inner wall of the vacuum chamber and updating the to-be-cleaned surface to the cylindrical surface model; planning the cleaning path and pose of the laser, and keeping the unit energy of the laser reaching the to-be-cleaned surface unchanged; and enabling the robot to move along the converted cleaning path, and driving the operation arm to control the laser to carry out operation according to the converted pose. Remote automatic operation of vacuum coating chamber laser cleaning can be achieved, and the vacuum coating chamber laser cleaning device can be rapidly matched with different coating machines.

The invention relates to a vacuum coating automatic loading and unloading system which comprises a movable workbench, a mechanical arm is installed on the movable workbench, an empty frame stacking area and a stand-by frame stacking area are further arranged on the movable workbench, and the empty frame stacking area and the stand-by frame stacking area are used for storing turnover frames. The top surface of the turnover frame is provided with a plurality of placing holes used for containing the clamp assembly, the clamp assembly can be embedded into or taken out of a slotted hole of an umbrella tray of the coating machine, the clamp assembly comprises a tray and a cover plate, the tray is internally provided with a plurality of coating grooves used for containing lens substrates to be coated, the bottoms of the coating grooves are through, and the cover plate is arranged on the tray. And the cover plate is detachably connected with the tray. The tray and the cover plate of the clamp assembly are matched to ensure that the lens substrate is located in the clamp assembly, only the surface, needing to be coated, of the lens substrate is exposed downwards, dust-free protection on the exposed surface of the lens substrate before and after coating is achieved through the stacking turnover frame, and the risk that the lens substrate is affected by the environment in the transfer process is reduced.

The invention relates to a catalyst for treating nitrogen-containing VOCs and application thereof in treatment of nitrogen-containing VOCs, the main preparation steps are as follows: a carrier component containing Si, Al and optional Mg, a cross-linking agent, a rare earth oxide and water are put in a ball mill for ball milling to prepare coating slurry, the coating slurry is coated in cordierite honeycomb ceramic channels by a vacuum coating method, and the catalyst is prepared. And then the coated honeycomb ceramic is quickly dried. Preparing a metal nitrate solution as an impregnation liquid, impregnating the nitrate on the dried honeycomb ceramic, aging, quickly drying the impregnated honeycomb ceramic, and roasting the dried honeycomb ceramic for a certain time to obtain the catalyst. According to the preparation method disclosed by the invention, the catalyst for treating the nitrogenous VOCs, which is formed in a honeycomb manner, low in preparation cost, relatively high in N2 selectivity, good in catalytic oxidation effect and high in stability, can be produced, so that the problems of long technological process, short service life of the catalyst, secondary pollution of NOx and the like in the conventional process for treating the nitrogenous VOCs are solved.

The invention discloses a vacuum coating system and a coating method thereof.The coating method comprises the following steps that S1, a target material is dried, naturally cooled and then placed in a crucible, and then a lower shell is sealed; s2, a single crystal germanium sheet and an optical glass sheet are used as substrates to be placed on the flange at the bottom end of the placing cylinder, and the upper shell is sealed; s3, the lower shell and the upper shell are vacuumized; and S4, an electron gun corresponding to the crucible is started, the electron gun generates a high-energy electron beam to heat the target material to the evaporation temperature, and the target material moves upwards in the form of particles after being evaporated and is deposited on the surface of the substrate. According to the invention, the plurality of crucibles are distributed along the vertical direction and share the same axis, so that the evaporation direction of the target material in each crucible is ensured to be consistent. The target material in the crucible moves upwards in the vertical direction of the substrate after being heated to the evaporation temperature, so that frequent adjustment of the position of the substrate is avoided, the operation of the coating process is simplified, the uniformity and efficiency of coating are improved, and the requirements of multi-layer and complex coating are met.

The utility model discloses a code disc for a reflective encoder, which relates to the technical field of encoder equipment and comprises a glass code disc, a low-reflection film is fixedly connected to the surface of the glass code disc, and a high-reflection film is fixedly connected to one side, far away from the glass code disc, of the low-reflection film. The low-reflection film is formed by plating acid-resistant alkali metal and metal oxide through a vacuum coating machine, the acid-resistant alkali metal comprises niobium, molybdenum, tantalum and hafnium, one of the niobium, the molybdenum, the tantalum and the hafnium is short for H, the metal oxide comprises sio2, sio, al2o3 and zro2, one of the sio, the al2o3 and the zro2 is short for L, and the plating sequence of the acid-resistant alkali metal and the metal oxide is LHLHLHLHLHL, and after the thickness of each layer of the acid-resistant alkali metal and the metal oxide is optimized, the thickness range is 10-150nm, so that the problems that the performance of a traditional material cannot reach an ideal level and the overall effect and the accuracy of equipment are reduced when the traditional glass code disc is in a working environment under high-intensity light or in a scene requiring high reflectivity are solved.

The utility model belongs to the technical field of photovoltaic glass manufacturing, and discloses a roller way self-cleaning device and vacuum coating equipment. The roller way self-cleaning device comprises a brush plate, the brush plate is adjacent to a conveying roller, at least two O-shaped rings are arranged on the conveying roller in the axis direction of the conveying roller, a bristle area is correspondingly arranged on the side, facing the conveying roller, of the brush plate, bristles are arranged in the bristle area and can abut against the O-shaped rings for cleaning, and the brush plate can move in the axis direction of the conveying roller. Therefore, the O-shaped ring abuts against the bristles located at different positions of the bristle area. By means of the roller way self-cleaning device, sputtering objects on the O-shaped ring can be automatically removed, the surface of glass is prevented from being scratched, the brush plate can be moved, the O-shaped ring makes contact with bristles located at different positions of the bristle area, the defect that the cleaning effect is reduced after local bristles are abraded is overcome, the continuous cleaning capacity is guaranteed, and the service life of the roller way is prolonged. And the overhauling frequency and the overhauling cost of the roller way self-cleaning device and the whole vacuum coating equipment are reduced.

The utility model discloses vacuum coated glass which comprises a glass body, the upper end of the glass body is provided with a silver coating, the outer surface of the glass body is provided with a limiting frame, the upper end of the glass body is provided with a transparent protection plate, the transparent protection plate is made of a polycarbonate plate or an acrylic plate, and the side face of the limiting frame is provided with an inlet hole. A hidden groove is formed in the inner wall of the limiting frame, the hidden groove corresponds to the position of the entering hole, a push rod is arranged in the hidden groove, matching grooves are symmetrically formed in the inner wall of the limiting frame, and the matching grooves communicate with the hidden groove; a second spring is installed on the inner wall of the matching groove and fixedly connected with the push rod. The transparent protection plate is installed at the upper end of the glass body, the glass body is protected through the transparent protection plate, so that the silver coating on the surface of the glass body is prevented from being damaged by external force, and meanwhile, the transparent protection plate is convenient to replace, convenient and fast.

The application discloses a bidirectional composite gradual-change vacuum magnetron sputtering coating system and belongs to the technical field of vacuum coating. The system comprises a coating chamber, a cathode device, a workpiece carrier for bearing a workpiece to be coated, and a driving device for driving the workpiece carrier to move. The cathode device is installed in the coating chamber. The driving device comprises a translation driving assembly and a deflection control assembly. The translation driving assembly is used for driving the workpiece carrier to reciprocate linearly to pass through the cathode device for coating. The deflection control assembly is used for adjusting and controlling the relative angle of the workpiece carrier relative to the cathode device. The application has the advantages of compact structure, high motion precision, good vacuum compatibility and flexible satisfaction of the diversified process requirements of complex gradual-change color coating of mobile phone back covers, wearable devices and the like.

The application discloses a preparation method of a multi-layer composite film system, a conductive thin film and a semiconductor device. The preparation method of the multi-layer composite film system comprises the following steps: preparing a first layer of metal film on a substrate by a vacuum coating method; performing surface roughening treatment on the first layer of metal film; and preparing a second layer of metal film on the first layer of metal film after the surface roughening treatment by the vacuum coating method. The preparation method of the multi-layer composite film system can enhance the adhesion between the film layers by performing the surface roughening treatment on the first layer of metal film, so that the mechanical combination mode is adopted between the film layers, the adhesion between the film layers is improved, some film layers which cannot be combined under vacuum can be effectively connected in the mechanical combination mode, the equipment investment cost is reduced, the multi-layer film system of various types is prepared by a single device, the substrate rework is effectively reduced or prevented, and the production cost is greatly reduced.

The application relates to the technical field of coating equipment, and discloses a high-temperature optical cable continuous vacuum coating device which comprises a vacuum coating device body, a fixing frame, a winding assembly, an adjusting assembly, a separating assembly, a monitoring assembly and a warning assembly. In the aspect of improving optical fiber winding, the adjusting assembly is used to realize uniform winding of the optical fiber, effectively avoid accumulation and knotting, guarantee tight and neat winding, and prevent the internal structure of the optical fiber from being damaged due to knotting and affecting signal transmission performance. In the aspect of realizing automatic operation, the monitoring assembly is used to realize real-time monitoring of the winding thickness, trigger the separating assembly when reaching a preset value, realize automatic clamping of the optical fiber by the clamp plate, and guarantee that the optical fiber cannot be moved out of the guide wheel. The cutter is used to realize automatic cutting, greatly reduce manual operation, improve production efficiency to meet large-scale production requirements, and when winding to a specified thickness, the monitoring assembly drives the gong to be below the adjusting roller, the hammering rod knocks the gong to alarm, timely remind the operator to replace the winding roller, and reduce equipment downtime and potential production loss.