Production method of chromium-aluminium alloy target material

A chrome-aluminum alloy and production method technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of low density and low degree of alloying of chrome-aluminum alloy targets

Active Publication Date: 2013-07-03
北京九州新科科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] This patented method ensures that the sintered alloy target reaches a higher relative density by applying pressure and heat simultaneously during the sintering process, but f

Method used

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  • Production method of chromium-aluminium alloy target material
  • Production method of chromium-aluminium alloy target material
  • Production method of chromium-aluminium alloy target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] In this embodiment, a method for manufacturing a chromium-aluminum alloy target includes the following steps in sequence:

[0028] (1) Select chromium powder with a purity greater than 99.5wt% and aluminum powder with a purity greater than 99.99wt% as raw materials. The particle size distribution range of the chromium powder and aluminum powder is -100 mesh + 200 mesh. According to the required ratio (mass of chromium and aluminum The ratio is 7:3) into the V-shaped blender, and then vacuum the blender to 10 -1 Pa level, feed argon, then vacuumize, repeat 3 times, then set the speed of 30 rpm to mix for 8 hours;

[0029] (2) Put the mixed powder in a cold isostatic pressure bag, vacuumize it and seal it, press it under a pressure of 200MPa for 10 minutes, and then put the pressed green body in a vacuum self-propagating high-temperature synthesis furnace , to carry out self-propagating reaction (the protective atmosphere is argon, and the reaction vacuum is ab...

Embodiment 2

[0034] In this embodiment, a method for manufacturing a chromium-aluminum alloy target includes the following steps in sequence:

[0035] (1) Select chromium powder with a purity greater than 99.5wt% and aluminum powder with a purity greater than 99.99wt% as raw materials. The particle size distribution range of the chromium powder and aluminum powder is -100 mesh + 200 mesh. According to the required ratio (mass of chromium and aluminum The ratio is 1:1) into the V-shaped blender, then vacuum the blender to 10 -1 Pa level, feed argon, then vacuumize, repeat 3 times, then set the speed of 10 rpm to mix for 10 hours;

[0036] (2) Put the mixed powder in a cold isostatic pressure bag, vacuumize it and seal it, press it under a pressure of 100MPa for 20 minutes, and then put the pressed green body in a vacuum self-propagating high-temperature synthesis furnace , carry out self-propagating reaction (the protective atmosphere is argon, the reaction vacuum is about 20Pa),...

Embodiment 3

[0041] In this embodiment, a method for manufacturing a chromium-aluminum alloy target includes the following steps in sequence:

[0042] (1) Select chromium powder with a purity greater than 99.5wt% and aluminum powder with a purity greater than 99.99wt% as raw materials. The particle size distribution range of the chromium powder and aluminum powder is -100 mesh + 200 mesh. According to the required ratio (mass of chromium and aluminum The ratio is 3:7) into the V-shaped blender, and then vacuum the blender to 10 -1 Pa level, feed argon, then vacuumize, repeat 3 times, then set the speed of 20 rpm to mix for 8 hours;

[0043] (2) Put the mixed powder in a cold isostatic pressure bag, vacuumize it and seal it, press it under a pressure of 300MPa for 10 minutes, and then put the pressed green body in a vacuum self-propagating high-temperature synthesis furnace , carry out self-propagating reaction (the protective atmosphere is argon, the reaction vacuum is about 20P...

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Abstract

The invention relates to a production method of a chromium-aluminum alloy target material, which includes the following steps: (1) placing chromium powder and aluminum powder into a V-shaped mixer for mixing; (2) placing the powder into a cold isostatic pressing sheath, vacuumizing, sealing, suppressing for 10 to 20 minutes, then placing in a vacuum self-propagating high-temperature synthetic furnace, and performing self-propagating reaction to acquire foamed chromium-aluminium alloy; (3) smashing the chromium-aluminium alloy into alloy powder with size of -200 mesh, placing the alloy powder in the cold isostatic pressing sheath for suppressing, so as to obtain a chromium-aluminium alloy blank; (4) placing the alloy blank in a steel sheath for vacuum degassing, then, performing hot isostatic pressing sintering treatment to obtain a chromium-aluminium alloy ingot; and (5) machining the chromium-aluminium alloy ingot to obtain a finished chromium-aluminium alloy target material. According to the invention, after the two raw materials are fully mixed and before the hot isostatic pressing sintering treatment is carried out, the alloying treatment in the step (2) is particularly adopted, so the prepared chromium-aluminum alloy target material has high density, uniform crystallite size distribution and excellent vacuum coating property.

Description

technical field [0001] The invention belongs to the technical field of new materials, and in particular relates to a production method of a chromium-aluminum alloy target. Background technique [0002] Metal and alloy targets are the key materials for vacuum coating applications. With the different types of coating layers required on the surface of the material, the types of targets used are also different. A film modified on the surface of metal knives, molds, and tools The layer is a CrAlN film, which is plated on the surface of the material by vacuum sputtering with a chromium-aluminum alloy target. The film layer can reach a hardness of more than 2000HV, a friction coefficient of 0.3, and a service temperature of 700 ° C. It has a silver appearance. Very broad. However, since the properties of the two alloys of chromium and aluminum are very different (the melting point of chromium is 1863°C, the melting point of aluminum is only 655°C, the difference between the two is...

Claims

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Application Information

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IPC IPC(8): B22F3/14C22C1/04C23C14/14C23C14/34
Inventor 赵珍珍方庆谢玉
Owner 北京九州新科科技有限公司
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