Method of manufacturing vacuum composite film coating on surface of neodymium iron boron magnet
A composite coating and vacuum coating technology, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve problems such as coating embrittlement, achieve strong anti-corrosion ability, improve coercive force, binding force and The effect of high density
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Embodiment 1
[0028] Embodiment 1: a preparation method of vacuum composite coating on the surface of an NdFeB magnet, comprising the following steps:
[0029] A. Pretreatment, use a mixture of cleaning solution and pure water at a ratio of 1:1000 in an ultrasonic cleaning machine to remove oil and clean the surface of the magnet with a release agent;
[0030] B. Ion cleaning and activation, the pretreated NdFeB magnet is dried at a temperature of 80°C-100°C for 5-10 minutes, and then bombarded and activated by glow plasma in a vacuum environment to increase the surface activation energy; The steps of the glow plasma cleaning are: pre-evacuation, when the vacuum degree of the chamber is 8×10 -4 -3×10 -3 After Pa, the vacuum chamber body is filled with nitrogen through the flow control instrument to maintain the chamber body pressure at 4-5Pa; for the glow plasma, a voltage of 500-3000V is applied between the bombardment plate in the vacuum chamber body and the chamber body , the current i...
Embodiment 2
[0033] Embodiment 2: a preparation method of vacuum composite coating on the surface of an NdFeB magnet, comprising the following steps:
[0034] A. Pretreatment, use a mixture of cleaning solution and pure water at a ratio of 1:1000 in an ultrasonic cleaning machine to remove oil and clean the surface of the magnet with a release agent;
[0035] B. Ion cleaning and activation, the pretreated NdFeB magnet is dried at a temperature of 80°C-100°C for 5-10 minutes, and then bombarded and activated by glow plasma in a vacuum environment to increase the surface activation energy; The steps of the glow plasma cleaning are: pre-evacuation, when the vacuum degree of the chamber is 8×10 -4 -3×10 -3 After Pa, the vacuum chamber body is filled with argon gas through a flow control instrument to maintain the chamber body pressure at 4-5Pa; for the glow plasma, add 500-3000V between the bombardment plate and the chamber body in the vacuum chamber body Voltage, current 0.5-3A, produces pl...
Embodiment 3
[0038] Embodiment 3: a kind of preparation method of vacuum composite coating film on the surface of NdFeB magnet, comprises the following steps:
[0039] A. Pretreatment, use a mixture of cleaning solution and pure water at a ratio of 1:1000 in an ultrasonic cleaning machine to remove oil and clean the surface of the magnet with a release agent;
[0040] B. Ion cleaning and activation, the pretreated NdFeB magnet is dried at a temperature of 80°C-100°C for 5-10 minutes, and then bombarded and activated by glow plasma in a vacuum environment to increase the surface activation energy; The steps of the glow plasma cleaning are: pre-evacuation, when the vacuum degree of the chamber is 8×10 -4 -3×10 -3 After Pa, the vacuum chamber body is filled with nitrogen through the flow control instrument, and the chamber body pressure is maintained at 4-5Pa; for the glow plasma, a voltage of 500-3000V is applied between the high voltage rod in the vacuum chamber body and the chamber body, ...
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