The invention relates to the technical field of magnetic grid materials, and particularly discloses an
angular displacement sensor magnetic grid material for a
humanoid robot actuator and a preparation method and application of the
angular displacement sensor magnetic grid material, and the magnetic grid material comprises a substrate, a first
AlNiCo layer, a Zr layer, a second
AlNiCo layer and a Ti layer which are sequentially stacked. According to the invention, the
Zr element with strong
oxygen absorption characteristic is introduced as an intercalation layer, and in the high-temperature annealing process, on one hand, Zr is oxidized to form ZrO2, floating and oxidation of Al atoms are inhibited, grains are refined, and a
magnetic phase is isolated; on the other hand, a soft magnetic Zr6Co23
intermetallic compound is formed through reaction with Co, and the magnetic performance is cooperatively regulated and controlled. According to the material, when the thickness of a Zr layer is 20 nm, the coercive force reaches 666 Oe and is improved by 111% compared with that of a sample without Zr introduction, meanwhile, the residual
magnetism is kept at the high level of 6568 Gs, and the excellent balance of the high coercive force and the high residual
magnetism is achieved. The material disclosed by the invention is simple in preparation process, excellent in performance and particularly suitable for a high-precision and miniaturized flexible sensing and driving integrated
actuator of a
humanoid robot.