51 results about "Magnetic alloy" patented technology

This invention proposes a metal soft magnetic powder core with excellent low-frequency magnetic properties and its preparation method, belonging to the field of magnetic materials. Using at least nano-boron powder and iron-silicon soft magnetic alloy powder as raw materials, high-temperature diffusion and high-temperature nitriding treatments are employed. Part of the nano-boron powder forms a high-resistivity iron-silicon-boron permeation layer on the surface of the iron-silicon soft magnetic alloy powder, while some nano-boron powder forms a boron nitride insulating layer with both high resistivity and high thermal stability between the iron-silicon soft magnetic alloy powders, effectively controlling eddy currents. Hot pressing further increases the density of the metal soft magnetic powder core, reduces the demagnetizing field, thereby improving permeability and reducing hysteresis loss. Thus, excellent low-frequency magnetic properties of high density, high permeability, and low loss are simultaneously obtained in the metal soft magnetic powder core.

This application relates to the field of heating device technology, specifically to a preheating tunnel furnace for armature spraying, comprising a feeding section, a gradient heating section, a heat preservation section, and a discharge section, as well as a conveying system and an intelligent control system running through each section; the gradient heating section is equipped with a composite heating system, including multiple sets of variable frequency electromagnetic induction coil heating modules and tunable mid-wave infrared heating modules arranged symmetrically in the upper and lower parts; the intelligent control system is used to adjust the electromagnetic induction working frequency of 10kHz-100kHz to control the skin depth of 0.1mm-0.5mm, and simultaneously adjust the mid-wave infrared emission wavelength of 2.0μm-4.0μm to control the penetration depth of 0.05mm-0.3mm, forming a controllable surface gradient temperature field in the thickness direction of the thin sheet-like soft magnetic alloy armature, so that the temperature of the coating bonding layer of 0.1mm-0.3mm on the armature surface reaches 220℃-260℃, and the internal substrate temperature below 0.3mm does not exceed 100℃. This invention achieves gradient preheating with high surface temperature and low internal temperature by combining heating and intelligent control of energy injection depth, thus ensuring coating adhesion while avoiding overheating of the substrate.

This application discloses a method (100) for preparing low-cobalt soft magnetic alloy strip, comprising: weighing raw materials (S102), which, by weight percentage, include: 3wt%-12wt% Co, 0.2wt%-0.8wt% Cr, 0.6wt%-2.5wt% Si, 0.03wt%-0.06wt% Nb, 0.2wt%-0.8wt% Mn, 0.01wt%-0.05wt% C, with the balance being Fe and unavoidable impurities; melting and casting the raw materials into an ingot to form a billet (S104); removing the oxide scale from the billet (S106); and further processing the raw materials. The billet after removing the oxide scale is heated (S108); the heated billet is rolled into a strip (S110); the strip is water-quenched and solution-treated to form a finished strip (S112); the finished strip is cold-rolled at least once until a set first thickness is reached (S114), wherein the total deformation is controlled at 50-65%; softening annealing is performed (S116); the finished strip of the first thickness is cold-rolled at least once again (S118) until a set second thickness is reached; the finished strip of the second thickness is heat-treated and annealed (S120) to obtain a set hardness value.

This utility model discloses an anti-slip double-row tapered roller bearing, comprising an outer ring and an inner ring. The outer ring has an internal groove, and a hard alloy layer is laid on the inner surface of the internal groove. A transition layer is laid on the outer surface of the hard alloy layer, and a soft magnetic alloy layer is laid on the outward side of the internal groove. A permanent magnet array is laid on the outer surface of the inner ring, and a cage is laid on the permanent magnet array. A cage pocket is formed on the outer surface of the cage, and a groove is formed inside the cage pocket. This device uses magnetic attraction technology to reinforce the rollers, ensuring that the rollers are tightly fitted with the raceway during high-speed operation, effectively preventing slippage and improving the stability and service life of the bearing.

This invention relates to a FeCoNiAlSi high-entropy alloy possessing both high strength and soft magnetic properties, its preparation method, and its applications. The chemical formula of this high-entropy alloy is (FeCoNiAlSi). 1 / 3 Co 1 / 3 Ni 1 / 3 ) 100‑x (Al y Si 1‑y ) x Where x is the atomic percentage, ranging from 4x25; and y ranges from 0.4y0.8. Compared with existing technologies, this invention utilizes heterogeneous phase interfaces and nano-precipitates to synergistically hinder dislocation movement and provide significant strengthening. Simultaneously, it leverages high-density phase boundaries and lattice distortion to increase alloy resistivity and substantially reduce high-frequency eddy current losses. Thus, without sacrificing ductility, it successfully overcomes the contradiction between high yield strength and low high-frequency total loss in traditional soft magnetic alloy systems.

The application relates to the technical field of amorphous soft magnetic material preparation, and discloses a cobalt-based amorphous soft magnetic alloy material, a preparation method thereof and application. a Fe b Mo c Si d B e C f M g In the formula, a, b, c, d, e, f and g respectively represent the atomic percentage content of corresponding components; wherein 50<=a<=70, 2<=b<=8, 0.5<=c<=5, 10<=d<=20, 10<=e<=20, 0.01<=f<=0.5, 0.1<=g<=5, and a+b+c+d+e+f+g=100; and M represents at least one of elements V, Cr, Mn and Nb. The cobalt-based amorphous soft magnetic alloy material provided by the application has low saturation magnetic induction intensity, low coercive force, high rectangular ratio and other superior soft magnetic properties, is good in corrosion resistance and easy to prepare; and a magnetic probe prepared from the alloy material has high precision in sensor testing, and has important significance for promoting the development of small high-precision magnetic flux gate current sensors.

A soft magnetic alloy ribbon is made of a Fe-based soft magnetic alloy and includes a first laser peening trace row and a second laser peening trace row each of which includes a plurality of laser peening traces in a row in a first direction and which are arranged adjacent to each other in a second direction intersecting the first direction, and a domain wall extending in a third direction, in which D0<D1 where a straight line at an equal separation distance from the first laser peening trace row and the second laser peening trace row is defined as a central line, a straight line which has a first distance where a distance from the first laser peening trace row is shorter than the separation distance is defined as a first reference line, a width of the domain wall at a position intersecting the central line is defined as D0, and a width of the domain wall at a position intersecting the first reference line is defined as D1.

This invention provides a machining fixture and method for small sealing cavities in corrosion-resistant soft magnetic alloy products. The method involves fabricating the machining fixture; selecting cutting tools based on the threaded holes of the product to be machined; rough machining the threaded holes using drilling and boring; rough machining the grooves; machining the threaded holes in layers; completing the finishing machining of the threaded holes and removing the first burrs; machining the sealing surface, leaving a margin on the sealing surface; and machining the sealing cavity (i.e., the sealing teeth) using a sealing tooth cutter at a speed of 2000 to 2200 r / min with a roughing feed rate of 0.02 to 0.0. 3mm / r, leaving a finishing allowance of 0.06 to 0.08mm; retract the tool quickly by 0.3 to 0.5mm midway, with a finishing feed rate of 0.01 to 0.02mm / r, and advance the tool to the theoretical depth of the sealing cavity; use a boring tool to move along the inner ring of the sealing teeth towards the minimum diameter Φ0.5 to Φ1, and use an inner grooving tool to move along the outer ring of the sealing teeth towards the groove diameter Φ5.3 to Φ6.3, to remove the final allowance and burrs on the sealing teeth, and use the boring tool and inner grooving tool to finish the threaded hole and groove dimensions.

The application relates to a preparation method and wave-absorbing performance of a rare earth MOF composite FeSi-based soft magnetic alloy; flaky FeSi-based soft magnetic alloy powder is used as a matrix to grow blocky Ce-MOF, the composite material improves interface polarization and magnetic loss performance, enhances multi-level structure interface scattering and reflection, reduces the conductivity of the material, and optimizes the impedance matching of the composite material; when the content of the prepared material is 10wt% and the coating thickness is 1.5mm, the reflectivity is optimized from -9.51dB to -45.60dB; the preparation method is simple, the surface of the flaky FeSi-based soft magnetic alloy wave-absorbing powder is slightly oxidized, the erosion of the FeSi-based soft magnetic alloy matrix can be avoided in the Ce-MOF compounding process, the existence of the oxidation layer improves the stability and corrosion resistance of the material; the introduced rare earth Ce can not only adjust the electromagnetic performance of the material, but also participate in adjusting the crystal structure of the MOF, increases the lattice distortion and defects.

The application relates to a low-cost high-saturation-flux-density iron-based amorphous nanocrystalline soft magnetic alloy and preparation and application thereof, and aims to solve the technical problems of high cost, difficult consideration of high saturation magnetic induction and low coercivity, and narrow heat treatment process window of existing iron-based nanocrystalline soft magnetic alloys. 82 Si a B b P c Mo 0.5 Cu x , wherein 2.79<=a<=2.87, 12.07<=b<=12.44, 1.39<=c<=1.44, 0.75<=x<=1.25, and a+b+c=17.5-x. The alloy can optimize the soft magnetic performance by adjusting the Cu content and the annealing process. Under the optimal test condition, the saturation magnetic flux density of the typical component alloy can reach 1.82 T, and the coercivity is as low as 1.4 A / m, thereby forming an excellent combination of high magnetic energy storage and low magnetic hysteresis loss, and being suitable for the scene of high magnetic flux and low loss of a soft magnetic device.

The application relates to a multi-element magnetic alloy applied for a long time at high temperature and preparation and application thereof, which is prepared from raw materials with the following mass fractions: iron nitrate 40-60 wt%; cobalt nitrate 30-40 wt%; nickel nitrate 2-10 wt%; and aluminum nitrate 0-10 wt%. The multi-element magnetic alloy applied for a long time at high temperature is prepared through doping of Al atoms and a simple process, has the characteristics of hollow structure, strong oxidation resistance, stable magnetic performance at high temperature, excellent microwave absorption performance, and solves the problems of poor oxidation resistance of the magnetic alloy in the prior art and unstable magnetism at high temperature.

A chiral tunnel magnetic junction memory cell includes a chiral reference layer and a free magnetic layer formed from a magnetic alloy. The free magnetic layer has magnetization substantially perpendicular to the free magnetic layer. A tunnel barrier is located between the chiral reference layer and the free magnetic layer. An array of such cells, methods for manufacturing such cells / arrays, and a design structure encoding such cells / array are also provided.

The application discloses a chemical mechanical polishing liquid and a polishing method for soft magnetic alloy. The polishing liquid is composed of the following raw material components in percentage by weight: 1.3wt%-1.8wt% of a chelating agent, 10wt%-13wt% of abrasive, 7wt%-9wt% of a pH buffer, 3wt%-3.5wt% of a corrosion inhibitor, 11wt%-13wt% of an oxidizing agent and the balance of deionized water. The abrasive is acidic silica sol, the oxidizing agent is hydrogen peroxide, the corrosion inhibitor is at least one of glycine, polyaspartic acid, glutamic acid and chitosan, the pH of the polishing liquid is 3-5, and the pH buffer is a citric acid-sodium citrate buffer. The polishing method comprises the following steps: grinding the soft magnetic alloy; performing chemical mechanical polishing rough polishing on the ground soft magnetic alloy by using a rough polishing slurry; performing chemical mechanical polishing fine polishing on the rough polished soft magnetic alloy by using the polishing liquid, so that the soft magnetic alloy with a smooth and flat surface is obtained. The polishing liquid is green, environment-friendly and pollution-free, and the surface of the soft magnetic alloy after polishing is smooth and flat.

This invention discloses an iron-cobalt-based nanocrystalline alloy material and its preparation method, relating to the technical field of soft magnetic alloy materials. The material composition is: (Fe... a Co b ) 73.5‑x Cu c Nb d Si e B f Y x The specific contents of a, b, c, d, e, f, and x are as follows: 0 ≤ x ≤ 5, 0.7 ≤ a ≤ 0.9, 0.1 ≤ b ≤ 0.3, a + b = 1, 0.9 ≤ c ≤ 1.1, 2.8 ≤ d ≤ 3.2, 12.0 ≤ e ≤ 16.0, 8 ≤ f ≤ 10, c + d + e + f = 26.5. This invention provides an iron-cobalt-based nanocrystalline alloy material with higher permeability, higher saturation magnetic induction, and lower coercivity. Furthermore, this material exhibits a higher specific magnetic susceptibility, meeting the requirements of high-power-density devices for material miniaturization and lightweighting.

The application relates to the technical field of soft magnetic alloy, in particular to a soft magnetic alloy and a preparation method thereof. The preparation method comprises the following steps: providing a soft magnetic alloy blank; performing plastic deformation treatment on the soft magnetic alloy blank to obtain a plastic deformation piece; and performing post-treatment on the plastic deformation piece, wherein the post-treatment comprises at least one electric pulse treatment and at least one annealing heat treatment, so as to obtain the soft magnetic alloy. According to the method, plastic deformation is performed on the soft magnetic alloy blank, electric pulse treatment and annealing heat treatment are performed on the plastic deformation piece, and the synergy of the two energy fields can significantly improve the yield strength and elongation of the obtained soft magnetic alloy, effectively reduce the coercive force of the soft magnetic alloy, and make the soft magnetic alloy have excellent strength, excellent toughness and excellent magnetism.

This invention discloses a high-strength non-magnetic drill collar for deep wells at depths of 10,000 meters and its manufacturing method, belonging to the technical field of oil drilling tools. The drill collar includes a hollow, thick-walled cylindrical body made of a non-magnetic alloy material with a relative magnetic permeability μ≤1.01. The inner wall is provided with a single-headed helical reinforcing rib with a helix angle of 15°–30° and a lead of 300–500 mm. The connecting ends are integrally formed at both ends of the body, including a double-shoulder thread and a stress-relieving groove located at the transition between the thread root and the shoulder. A sealing cavity is provided between the main shoulder and the secondary shoulder of the double-shoulder thread, and a sealing component is embedded in the sealing cavity. The manufacturing method includes blank preparation, helical rib machining, stress-relieving groove machining and strengthening, sealing component installation, and non-destructive testing. This invention improves the flow field distribution and reduces erosion through helical reinforcing ribs, achieves zero leakage through double-shoulder sealing, and enhances fatigue life through stress-relieving grooves and surface strengthening, making it suitable for drilling operations in deep wells at depths of 10,000 meters.

The utility model discloses a kind of high-strength photoelectric encoder shell, belong to photoelectric encoder technical field, its technical scheme main points include photoelectric encoder shell structure, the photoelectric encoder shell structure includes alloy shell layer, the inside of alloy shell layer is provided with reinforcing layer, and the inside of reinforcing layer is provided with electromagnetic shield layer, buffer layer is arranged between the alloy shell layer and reinforcing layer, viscous elastic damping layer is arranged between reinforcing layer and electromagnetic shield layer, provide basic strength by alloy shell layer, honeycomb buffer layer is absorbed impact energy by cell collapse, reinforcing layer improves overall rigidity, three synergies resist external mechanical load, avoid internal code disc eccentricity caused by shell deformation, and form composite shielding structure by nanocrystalline soft magnetic alloy and graphene coating, block high-frequency electromagnetic interference, viscous elastic damping layer consumes vibration energy, reduce signal fluctuation caused by vibration.

The application provides an iron-based amorphous soft magnetic alloy strip, a preparation method and application thereof, and relates to the technical field of soft magnetic materials. The iron-based amorphous soft magnetic alloy strip realizes the balance of high saturation magnetic induction intensity, low coercivity, high amorphous forming ability and excellent processing performance through the synergy of accurate regulation of component proportion, element function, complete amorphous structure and heat treatment process. B s The torque output and power density of the motor are ensured, the low iron loss and high efficiency of the motor in high-frequency operation are ensured, and the excellent toughness meets the needs of precise machining of the iron core and long-term operation reliability. H c The torque output and power density of the motor are ensured, the low iron loss and high efficiency of the motor in high-frequency operation are ensured, and the excellent toughness meets the needs of precise machining of the iron core and long-term operation reliability. The preparation method of the iron-based amorphous soft magnetic alloy strip is designed through the process of vacuum induction melting + melt quenching + longitudinal magnetic field heat treatment, accurately matches the performance requirements of the component system, has the industrialization advantages of process stability, high efficiency and controllable cost, and provides a reliable technical path for the large-scale production and high-end application of the iron-based amorphous soft magnetic alloy strip.

This invention discloses an iron-based amorphous soft magnetic alloy powder, which is composed of Fe... a Si b B c P d Cu e C f Ni g M m The alloy raw material, wherein a+b+c+d+e+f+g+m=100, is smelted to obtain a master alloy, which is then processed by gas atomization to prepare the alloy. M is at least one of the transition metal elements Sc, Ti, V, Cr, Mn, Co, Zr, and Nb, with the atomic percentages of each element being: 74≤a≤81, 0.5≤b≤7, 8.5≤c≤10.5, 5≤d≤7, 0.5≤e≤0.8, 0≤f≤2, 1≤g≤1.5, and 0≤m≤4. This invention also discloses nanocrystalline soft magnetic alloy powder and nanocrystalline magnetic powder cores prepared from the aforementioned iron-based amorphous soft magnetic alloy powder. This invention obtains iron-based amorphous soft magnetic alloy powder with good amorphous forming ability under certain high iron content conditions. The iron-based nanocrystalline soft magnetic alloy powder obtained after crystallization annealing has high saturation magnetic induction intensity, high magnetic permeability, and low loss. Moreover, the production process of this invention is simple, low-cost, and mature, making it suitable for large-scale production.

The application relates to a magnetic multilayer film and a preparation method and application thereof. The magnetic multilayer film comprises a substrate and a heavy metal layer, a ferromagnetic layer, a rare earth magnetic alloy layer, a rare earth metal layer, a light metal layer and a protective cover layer which are sequentially arranged on the substrate; the heavy metal layer is configured to generate spin current under the action of current and acts on the ferromagnetic layer in the form of spin-orbit torque; the light metal layer is configured to generate orbital current under the action of current; the rare earth metal layer and the rare earth magnetic alloy layer are configured to convert the orbital current into orbital torque and act on the rare earth magnetic alloy layer; the orbital torque and the spin-orbit torque synergistically act to reduce the critical current of magnetization reversal of the magnetic multilayer film. The magnetic multilayer film of the application realizes orbital torque synergistic driving, significantly reduces the critical current of magnetization reversal of the device, and is beneficial to the preparation of high-efficiency and low-power-consumption spintronic devices.

The application provides a data-driven magnetic alloy multi-objective optimization design method, which comprises the following steps: establishing a composition-performance historical data set; establishing an initial feature pool; performing feature selection on the initial feature pool to form an optimization feature pool; training a machine learning model to perform regression prediction on a target performance; setting a search space; performing preliminary screening on the search space; calculating the expected improvement value of the target performance; calculating the Pareto optimal solution; if the generated Pareto optimal solution result does not converge, performing calculation on the Pareto optimal solution based on the density functional theory to obtain the theoretical values of a plurality of property parameters as supplementary material characteristics and incorporate them into the feature pool; performing calculation on all compositions in the composition-performance historical data set to obtain supplementary material characteristics and incorporate them into the feature pool; and repeating the above steps until the generated Pareto optimal solution result converges to obtain alloy composition recommendation results.

This invention provides a method for maintaining the magnetic properties of a cut magnetic core stably over a long period, even when a surface oxide film is formed on the contact surface of a magnetic core that is difficult to cut through heat treatment at a crystallization heat treatment temperature. The cut magnetic core of this invention comprises two or more laminates in which a soft magnetic alloy strip is stacked along the thickness direction. Each of the laminates has at least one contact surface that is in contact with each other. The soft magnetic alloy strip is composed of Fe... 100‑x‑y‑z‑a‑b Si x B y Cu z Cr a M b The composition is indicated by M (where M represents at least one element selected from Nb and Mo, and x, y, z, a, and b represent the atomic percentages of Si, B, Cu, Cr, and M, respectively, satisfying 11.0≤x≤17.0, 5.0≤y≤10.0, 0.5≤z≤2.0, 0.5≤a≤4.0, 1.0≤b≤5.0, and 65≤100-x-y-z-a-b≤75).

The application provides an amorphous nanocrystalline soft magnetic alloy powder and a preparation method and a magnetic powder core thereof, and relates to the technical field of soft magnetic materials. The preparation method of the amorphous nanocrystalline soft magnetic alloy powder adopts high-energy electric pulse technology to realize instantaneous rapid heating and explosion of the amorphous alloy material, and realizes accurate control of the powder particle size by accurately controlling energy input parameters and interval parameters, thereby preparing high-sphericity soft magnetic powder with a median particle size of 0.5-5 mu m, significantly improving the uniformity and dispersity of the powder, and solving the problem of low particle size control accuracy in the prior art. Moreover, the preparation method has a simple process flow and low energy consumption, avoids impurities and defects introduced in the traditional multi-step process, and improves the purity and performance of the material. The prepared amorphous nanocrystalline soft magnetic alloy powder has the characteristics of small particle size, high sphericity, high saturation magnetization, low coercivity and high yield, and is particularly suitable for the field of high-frequency magnetic elements and precision electronic devices.

This invention discloses a high-strength and high-toughness multi-principal-element soft magnetic alloy with a phase transformation-induced plasticity mechanism, its preparation and application, belonging to the field of multi-element alloy technology. The chemical formula of the high-strength and high-toughness multi-principal-element soft magnetic alloy is Fe. a Co b Ni c Al d Ta e Among them, 35% ≤ a ≤ 45%, 22% ≤ b ≤ 30%, 23% ≤ c ≤ 27%, 3% ≤ d ≤ 10%, 1% ≤ e ≤ 4%, and a + b + c + d + e = 100%, 4%

A method for preparing a Sm magnetic alloy with high preferential orientation, comprising the following steps: S1: adding granular raw materials of Sm, Fe and Ti into an arc melting furnace; S2: after purging the arc melting furnace, inert gas is filled; S3: under the protection of inert gas, the raw materials are melted into an ingot, and then sucked into a rod-shaped master alloy; S4: the rod-shaped master alloy is taken out of the arc melting furnace and placed in a directional solidification furnace; S5: the furnace body of the directional solidification furnace is vacuumized, purged and filled with inert gas; S6: the master alloy is heated to 1500 DEG C in the directional solidification furnace, so that the alloy is melted; S7: after the master alloy is melted, homogenization is carried out, the alloy melt is homogenized, then seeding is started, the melt is separated from the induction heating area, and the one-way heat conduction of the copper water-cooled sample table is matched, so that the alloy melt is directionally solidified, and finally a Sm permanent magnetic alloy with high preferential orientation is obtained. The Sm magnetic alloy prepared by the method has high consistency in preferential orientation, high proportion of main magnetic phase SmFe11Ti, small segregation, short process and high efficiency.

This invention discloses a coherent nanophase-reinforced FeCo-based high-temperature soft magnetic alloy and its preparation method, belonging to the technical field of high-temperature soft magnetic materials. The alloy composition is Fe. x Co y -(V) z )-Cu t (30≤x,y≤60,0≤z≤5,0<t<20), this alloy underwent casting, homogenization, hot forging, hot rolling, quenching, cold rolling, solution treatment, and aging treatment. The solution treatment was conducted at 1100–1400℃ for 4–12 h, and the aging treatment was conducted at 400–600℃ for 2–50 h. The final product was an alloy strip with a thickness of 0.1–0.3 mm. Coherent nanophases with a size of 25–45 nm precipitated in the matrix. During plastic deformation, the nanophases hindered dislocation movement, significantly improving the alloy's yield strength and tensile strength. The maximum yield strength was 600–800 MPa, and the tensile strength was 900–1100 MPa. Simultaneously, the alloy maintained excellent soft magnetic properties, with a saturation magnetization of 210–230 emu / g and a coercivity of 0.5–20 Oe. The alloy prepared by this invention meets the application requirements of high-performance soft magnetic materials in aerospace and other fields.

This application discloses a composite soft magnetic material, comprising a soft magnetic material and a metal, wherein the metal includes copper and silver, and the metal is coated on the surface of the soft magnetic material; the soft magnetic material includes soft magnetic metals and soft magnetic alloys. This application further discloses a method for preparing the above-mentioned composite soft magnetic magnetic or filamentous material. Furthermore, an inductor coil is prepared using the above-mentioned composite soft magnetic magnetic or filamentous material. The inductor coil exhibits a very excellent quality factor under high-frequency operating conditions and a very low inductance under low-frequency operating conditions. Therefore, the inductor coil prepared using the composite soft magnetic magnetic or filamentous material described in this application has very low energy loss, making it particularly suitable for large-scale applications.

This application provides a half-cavity directly coupled magnetic alloy high-frequency cavity, relating to the field of ion accelerator technology. The magnetic alloy high-frequency cavity is connected to a radio frequency power source. The magnetic alloy high-frequency cavity includes: a cavity body comprising two symmetrically arranged half-cavities; a vacuum pipe disposed inside the cavity body and connecting the two half-cavities; multiple magnetic alloy rings disposed in a single half-cavity and coaxially arranged with the vacuum pipe, the multiple magnetic alloy rings being parallel to each other; a coupling device for electromagnetically coupling the multiple magnetic alloy rings located in a single half-cavity to form an overall load unit; and an impedance transformation unit disposed on one side of each half-cavity and electrically connected to the overall load unit, used to transform the impedance of the overall load unit to an impedance matching the characteristic impedance of an external feed line, so as to connect to the radio frequency power source through the external feed line. This application, through a half-cavity fully coupled design, eliminates inter-path coupling, ensuring that the port impedance test value is consistent with the actual value, and is easy to adjust.

The application provides a thin-film inductor structure and a preparation method thereof. The thin-film inductor structure comprises a first substrate layer, a first coil layer, an insulating layer, a second coil layer and a second substrate layer. The material of the first filling part and the second filling part independently comprises a soft magnetic alloy, a thermosetting resin and a thermoplastic resin. In the thin-film inductor structure, the filling parts arranged in the first coil layer and the second coil layer compensate for the height difference between the thick electrode coil and the substrate layer in the prior art. At the same time, the soft magnetic alloy, the thermosetting resin and the thermoplastic resin are used as the filling part material, and the surface of the filling part is flush with the surface of the electrode coil, which greatly improves the interlayer combination of the substrate magnetic sheet and the coil layer during subsequent compression treatment, and promotes the combination of the substrate magnetic sheet and the coil layer. Under the above two factors, the cracking and even serious delamination of the thin-film inductor during subsequent cutting are avoided.