This invention discloses a resonant tunable MEMS ultrasonic
transducer, comprising a substrate, a fifth groove recessed downwards in the center of the top side of the substrate, a bias
electrode flatly laid at the bottom of the fifth groove, a sealing cavity provided on the top side of the bias
electrode, the top surface of the sealing cavity being sealed by an insulating layer, the bottom surface of the sealing cavity being sealed by the bias
electrode, and the periphery of the sealing cavity being sealed by a structural layer; an insulating layer, a first electrode layer, a piezoelectric layer, a second electrode layer, and a structural layer are sequentially laid on the top side of the substrate; four release holes are symmetrically recessed in the center of the top side of the structural layer; the
array element is a resonant structure composed of the sealing cavity, and a portion perpendicular to the sealing cavity and coinciding with the
orthographic projection of the sealing cavity, the insulating layer, the first electrode layer, the piezoelectric layer, the second electrode layer, and the structural layer; a first
lead electrode is connected to the first electrode layer and separate from the second electrode layer; a second
lead electrode is connected to the bias electrode; and a third
lead electrode is connected to the second electrode layer.