29722 results about "Spray nozzle" patented technology

A gas chamber contains upper and lower chamber bodies forming a cavity, a heating chuck for a wafer, a remote gas source, and an exhaust unit. Gas is injected into the cavity through channels in an injector. Each channel has sections that are bent with respect to each other at a sufficient angle to substantially eliminate entering light rays entering the channel from exiting the channel without reflection. The channels have funnel-shaped nozzles at end points proximate to the chuck. The injector also has thermal expansion relief slots and small gaps between the injector and mating surfaces of the chamber and gas source. The temperature of the injector is controlled by a cooling liquid in cooling channels and electrical heaters in receptacles of the injector. The upper chamber body is funnel-shaped and curves downward at an end of the upper chamber body proximate to the chuck.

Sustor2 provides deep cooling of a gas flow, practically total condensation of a vapor, and fast and effective removal of the condensed liquid with a significantly reduced pressure losses compared with the prior art. Sustor2 performs the said operations by developing a strong swirling flow starting from its entrance, followed by spiral flow convergence in the inlet disc-like part, and then in a converging-diverging nozzle, by centrifugal removal of droplets, and removal of the liquid film through slits, then by spiral flow divergence and leaving the vortex chamber through tangential outlet.A gas enters from a pipeline (see the arrow in the A-A cross-section shown in FIG. 7) connected to Sustor2 by a flange and the inlet transition pipe ITP in FIG. 7, spirally converged in the disc-like part, marked by A-A in FIG. 6, enters the converging-diverging nozzle (FIG. 6). The flow is high-speed and swirling even at the near-entrance region of the vortex chamber. This swirl results in the centrifugal force that presses the through-flow to the sidewall. The flow accelerates near the nozzle throat up to a supersonic velocity with subsonic axial and supersonic swirl velocity components. This acceleration results in the gas temperature drop down to 200K and even less values. The reduced temperature causes rapid condensation of vapor into droplets. The centrifugal force pushes the droplets to the sidewall where they are removed through slits. Next the dried gas spirally diverges and leaves the vortex chamber through the tangential outlet. This results in the pressure recovery and transformation of the swirl kinetic energy into the longitudinal kinetic energy of the gas. Both the effects decrease pressure losses which is the Sustor2 advantage compared with the prior art.

The invention provides a variety of surgical instruments for forming a liquid jet, which are useful for performing a wide variety of surgical procedures. In some embodiments, the invention provides surgical liquid jet instruments having a pressure lumen and an evacuation lumen, where the pressure lumen includes at least one nozzle for forming a liquid jet and where the evacuation lumen includes a jet-receiving opening for receiving the liquid jet when the instrument is in operation. In some embodiments, the pressure lumen and the evacuation lumen of the surgical liquid jet instruments are constructed and positionable relative to each other so that the liquid comprising the liquid jet, and any tissue or material entrained by the liquid jet can be evacuated through the evacuation lumen without the need for an external source of suction. The invention also provides a variety of surgical liquid jet instruments that are constructed and configured specifically for use in a surrounding liquid environment or a surrounding gaseous environment. The invention also provides a variety of surgical liquid jet instruments that are rotatably deployable from an undeployed position, for insertion into the body of a patient, to a deployed position, in which there is a separation distance between the liquid jet nozzle and the jet-receiving opening that defines a liquid jet path length. The invention also provides surgical methods utilizing the inventive surgical liquid jet instruments, and methods for forming components of the surgical liquid jet instruments.

A treatment apparatus for treating a substrate on a surface of which a treatment film has been formed and subjected to exposure processing and developing treatment. The treatment apparatus includes a nozzle for supplying a solvent gas of the treatment film to the surface of the treatment film on the substrate, and a moving mechanism for moving the nozzle which is supplying the solvent gas, relative to the substrate. The nozzle has an elongated discharge portion at least longer than a diameter of the substrate and partition plates at a front and a rear in the moving direction of the nozzle.

An apparatus and process for monitoring fluid flow through a nozzle is disclosed. A vibration sensor, such as an accelerometer, is mounted to a nozzle. The vibration output received from the sensor is then analyzed to determine whether or not the nozzle is operating properly. Through the present invention, information can be obtained regarding variations in flow rate, and / or variations in spray pattern and droplet size spectra. If the nozzle flow pulsates, the vibration sensor may also provide information regarding whether the nozzle is pulsating according to a desired frequency duty cycle or waveform.