The invention discloses a high-temperature stable
molybdenum alloy film and a preparation method thereof, the high-temperature stable
molybdenum alloy film comprises the following components in percentage by
mass: 70.0%-80.0% of Mo, 20.0%-30.0% of Ta, 1.0%-5.0% of Re and the balance of unavoidable impurities, and the sum of the
mass percentages of the components is 100%. The
refractory metal elements Ta and Re are added into the Mo film, so that the high-temperature stability of the film is improved. Ta has the characteristics of being high in
melting point, large in density, not prone to oxidation, good in
toughness and the like, the
Ta element is added into the Mo film, the ductile / brittle
transition temperature of Mo can be remarkably reduced, the room-temperature
plasticity and the high-temperature strength can be improved, and the
oxidation resistance can be improved. Re serving as the largest atom in the components has the lowest
diffusion rate and is enriched in the
amorphous matrix, and growth of Mo nanocrystals can be effectively hindered through the large atom pinning effect. The content of Ta and Re elements in the film is regulated and controlled by adjusting the
deposition rate and deposition time of the Ta target and the Re target, and the
molybdenum alloy film with excellent high-temperature stability is prepared.