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205 results about "Conformal coating" patented technology

Conformal coating material is a thin polymeric film which conforms to the contours of a printed circuit board to protect the board's components. Typically applied at 25-250 μm(micrometers) thickness, it is applied to electronic circuitry to protect against moisture, dust, chemicals, and temperature extremes.

UV moisture dual-curing conformal coating and preparation method thereof

The invention relates to the technical field of three-proofing paints, in particular to a UV moisture dual-curing three-proofing paint and a preparation method thereof. The conformal coating is prepared from the following raw materials in parts by weight: 10-80 parts of acrylate resin; 20 to 60 parts of a UV reactive diluent; 3-15 parts of a polyurethane latent curing agent; 1 to 10 parts of a photoinitiator; 1-5 parts of a dewatering agent; the acrylic resin comprises at least one of urethane acrylate and isocyanate modified acrylate. According to the invention, when the specific curing agent is selected, especially the oxazolidine latent curing agent or imine latent curing agent containing at least two oxazolidinyl groups is adopted, the curing time of the conformal coating in a dark environment can be greatly shortened, and meanwhile, the problems of bubbles, pinholes and the like caused by moisture in the curing process of the conformal coating can be effectively solved; good market application values are realized.
Owner:NINGBO JULI NEW MATERIAL TECH CO LTD

Conformal coating detection method and device, electronic equipment, storage medium and product

The invention discloses a conformal coating detection method and device, electronic equipment, a storage medium and a product, and relates to the technical field of nondestructive detection.The conformal coating detection method comprises the steps that a terahertz reflection signal of a chip to be detected is obtained, and a time-domain spectrum of the terahertz reflection signal is generated; the time-domain spectrum is converted into a frequency-domain spectrum, an initial transfer function is constructed based on the frequency-domain spectrum and a preset reference frequency-domain spectrum, and the initial transfer function is the ratio of the frequency-domain spectrum to the reference frequency-domain spectrum; performing frequency domain reconstruction operation on the transfer function through a preset autoregression model to obtain an optimized transfer function; and calculating the characteristics of the conformal coating of the to-be-tested chip according to the optimized transfer function. According to the invention, high-precision measurement of the conformal coating can be guaranteed.
Owner:SHENZHEN UNIV

Waterborne polyurethane dispersion as well as preparation method and application thereof

The invention belongs to the technical field of polymer materials, and provides a waterborne polyurethane dispersoid as well as a preparation method and application thereof, the waterborne polyurethane dispersoid is prepared from the following raw materials: polyisocyanate, polybutadiene polyol, a hydrophilic chain extender, an optional micromolecule chain extender and a neutralizer; polybutadiene polyol with a specific structure and molecular weight is adopted as a soft segment, and through component design and mutual compounding, the waterborne polyurethane dispersion has lower polarity and surface energy, has good adaptability with a low-surface-energy substance / low-surface-energy filler, can form excellent dispersion and coating effects on the low-surface-energy substance, and can be used for preparing the waterborne polyurethane dispersion. The slurry performance is improved; meanwhile, the waterborne polyurethane dispersion has excellent solvent resistance, low temperature resistance, hydrolysis resistance and mechanical properties, and has wide application prospects in the fields of battery slurry dispersants, photovoltaic backboard adhesives, conformal coating and the like.
Owner:WANHUA CHEM GRP CO LTD

Fine atomization resonant cavity structure and gluing method

The invention relates to the technical field of photoresist coating of wafer level packaging, in particular to a fine atomization resonant cavity structure and a gluing method.The fine atomization resonant cavity structure comprises a resonant cavity, a spherical resonant cavity is arranged in the resonant cavity, and the diameter of the spherical resonant cavity is integer multiples of the half-wavelength of ultrasonic excitation; the top end of the resonant cavity is provided with an opening for ultrasonic excitation input, and the bottom end of the resonant cavity is provided with an acoustic resonance resonant cavity; and the liquid supply needle is inserted into the acoustic resonance cavity from the resonance cavity. According to the structure and the method, the uniformity of photoresist spraying and the quality of a film layer can be improved, accurate sound field regulation and control are utilized, a micro-channel is not needed to provide fluid flow, and the potential problem of spray hole blockage is avoided; the acoustic wave is focused in the resonant cavity, and liquid drops can be broken in an extremely short time, so that the atomization particle size is small, the concentration ratio is high, and the film thickness of the photoresist is uniform and controllable; and the film layer uniformity is high, the film layer defects are few, the conformal coating of the complex three-dimensional microstructure can be realized without being limited by the surface morphology of the wafer.
Owner:CHENYANG QINGLAI MICROELECTRONICS TECHNOLOGY CO LTD

Conformal coating detection method, device, electronic device, storage medium and product

ActiveCN119354069BUsing optical meansTime domainThz time domain spectroscopy
This application discloses a conformal coating detection method, apparatus, electronic device, storage medium, and product, relating to the field of nondestructive testing technology. The disclosed conformal coating detection method includes: obtaining a terahertz reflection signal from a chip under test and generating a time-domain spectrum of the terahertz reflection signal; converting the time-domain spectrum into a frequency-domain spectrum, and constructing an initial transfer function based on the frequency-domain spectrum and a preset reference frequency-domain spectrum, wherein the initial transfer function is the ratio of the frequency-domain spectrum to the reference frequency-domain spectrum; performing a frequency-domain reconstruction operation on the transfer function using a preset autoregressive model to obtain an optimized transfer function; and calculating the characteristics of the conformal coating of the chip under test based on the optimized transfer function. This application can ensure high-precision measurement of conformal coatings.
Owner:SHENZHEN UNIV

Preparation method of polyurethane conformal coating

The invention relates to the technical field of coating preparation, and provides a polyurethane conformal coating preparation method which comprises the following steps: S1, inputting requirements of a conformal coating product and used environmental conditions into a weighing module by an operator, and triggering the weighing module to automatically adjust the ratio of raw materials; s2, sequentially adding the weighed polyurethane resin, curing agent, diluent and assistant into a mixing module, mixing to form a mixed raw material, and collecting state data in the mixing process; s3, obtaining the state data through an evaluation module, and carrying out the evaluation to form an evaluation result; s4, if the mixing qualified threshold value is met, heating the mixed raw material through a heating module; s5, transferring the heated mixed raw material into a reaction kettle to form a reaction raw material; s6, rapidly cooling the reaction raw materials to room temperature, and removing impurities to obtain a conformal coating mother solution; and S7, adding the pretreated nano filler into the mother liquor of the conformal coating, and adding a multi-interface reinforcing agent to form a conformal coating product.
Owner:SHENZHEN AIBANG NEW MATERIAL TECHNOLOGY CO LTD

Isolation and protection of computing components from liquid immersion cooling fluids

Components in an integrated circuit component assembly located in a liquid immersion cooling environment are physically isolated from the immersion fluid. This physical isolation can be provided by seals between, for example, a heat sink attached to the integrated circuit components and an enclosure in which the integrated circuit components are located, a printed circuit board to which the integrated circuit components are attached and an integrated circuit component enclosure, a bolster plate and a heat sink, a ring that encompasses the integrated circuit components and a heat sink, and a ring and an integrated heat spreader that is part of an integrated circuit component. Alternatively, a conformal coating compatible with an immersion fluid can be applied to assembly components to act as a chemical reaction and physical barrier between the immersion fluid and integrated circuit component.
Owner:INTEL CORP

UV-LED (ultraviolet-light emitting diode) and moisture dual-curing conformal coating as well as preparation method and application thereof

The invention belongs to the technical field of paint, and discloses UV-LED and moisture dual-curing three-proofing paint as well as a preparation method and application thereof. The UV-LED and moisture dual-curing three-proofing paint is prepared from a polyurethane acrylate prepolymer, an acrylate modified isocyanate prepolymer, a photoinitiator and an auxiliary agent, and the polyurethane acrylate prepolymer contains a carbamate group and an acrylate double bond. According to the UV-LED and moisture dual-curing conformal coating formed by matching the specific polyurethane acrylate prepolymer and the acrylate modified isocyanate prepolymer with other components, the problem of curing oxygen inhibition of a UV-LED ultraviolet lamp can be solved; secondly, a polyurethane chain segment is introduced, the adhesive force and the impact resistance are improved, a UV and moisture dual-curing mode is adopted, the adhesive can be cured in a shadow area, a cured adhesive film has the characteristics of flexibility and toughness, the excellent protection capacity is kept in a high-low-temperature impact environment or a high-temperature and high-humidity environment, and the good popularization prospect is achieved.
Owner:DONGGUAN U-BOND MATERIAL TECH CO LTD

PCBA board conformal coating automatic spraying machine

The utility model discloses a PCBA board conformal coating automatic spraying machine, relates to conformal coating spraying technical field, including stepping conveyor and install the automatic spraying machine on the upper surface of stepping conveyor, the upper surface of stepping conveyor is located the left side of automatic spraying machine and is equipped with the fixed mount, the fixed mount outside is provided with the positioning mechanism. Compared with an existing common PCBA board three-proofing paint automatic spraying machine, the PCBA board three-proofing paint automatic spraying machine has the advantages that an operator only needs to roughly place the PCBA board on the stepping conveyor, the PCBA board is conveyed to the designated position of the automatic spraying machine through the stepping conveyor to be sprayed, if the size of the PCBA board changes, the PCBA board can be unscrewed, the limiting sliding rod can be adjusted in a sliding mode, and the PCBA board can be automatically sprayed. The positioning plate can be attached to a PCBA board for attachment positioning, during positioning, the rubber rolling wheels can reduce friction during attachment positioning of the positioning plate, and the rubber rolling wheels can be conveniently detached and replaced through the design of the rolling wheel grooves and the screw rods.
Owner:NANJING GAOXI ELECTRONICS TECH CO LTD

Atomic layer deposition derived protective coatings for calcium fluoride optical components

A coated optical component includes an optical component and a conformal coating. The optical component is crystalline calcium fluoride and the conformal coating is an atomic layer deposition (ALD) coating in contact with a surface of the optical component. The ALD coating includes a metal fluoride ALD coating having a metal different from calcium. The ALD coating can include other metal oxide or metalloid oxide ALD coating layers. The method for making the coated optical component includes depositing an atomic layer deposition (ALD) coating on a surface of the optical component, where the ALD coating can be a metalloid oxide, a metal oxide, a metal fluoride having a metal that is different from calcium, or combinations of these. Sulfur hexafluoride is used as a fluorine source in the ALD process.
Owner:CORNING INC

Thermal barrier with encapsulated isolation material layer and method

A thermal barrier, and associated methods for making the same are disclosed. In one aspect, a thermal barrier includes a porous material. One aspect of a thermal barrier includes an aerogel material. Aspects of thermal barriers are shown that include a conformal coating over an outer porous surface of an isolation material layer, wherein the conformal coating penetrates the outer porous surface of the isolation material layer to a penetration depth.
Owner:ASPEN AEROGELS INC

Preparation method of UV-moisture multi-cured polyurethane modified acrylate conformal coating

The invention relates to the technical field of polyurethane, and discloses a preparation method of UV-moisture multi-cured polyurethane modified acrylate conformal coating, which comprises the following steps: mixing 100 parts by weight of polyurethane modified acrylate, 12-18 parts by weight of tertiary amine diacrylate diluent, 0.5-1 part by weight of thickener, 3.3-3.8 parts by weight of photoinitiator and the like; the UV-moisture multiple curing polyurethane modified acrylate conformal coating is obtained. Active chlorine atoms are introduced into the end position of polyurethane modified acrylate and can be subjected to quaternization reaction with tertiary amine groups of a tertiary amine diacrylate diluent, so that antibacterial quaternary ammonium salt groups are introduced, and the polyurethane paint is endowed with excellent antibacterial and bactericidal properties. Polyurethane modified acrylate has multiple crosslinking effects such as moisture curing, light curing crosslinking and hydrogen bond crosslinking at the same time, so that the polyurethane adhesive film shows higher tensile strength and elongation at break. And the paint has good water resistance and salt spray resistance.
Owner:GUANGDONG SHINAISI IND CO LTD

PCB warping degree detection method and system

The invention relates to the technical field of quality detection of printed circuit boards, in particular to a PCB warping degree detection method and system, and the method comprises the following steps: applying first transient thermal excitation to a printed circuit board before the shape-preserving coating of the printed circuit board, and collecting a first thermal response process of the surface of the printed circuit board as first thermal characteristic data; after conformal coating and curing of the printed circuit board are completed, second transient thermal excitation identical to the first transient thermal excitation is applied to the printed circuit board, and a second thermal response process on the surface of the printed circuit board is collected to serve as second thermal characteristic data; the internal stress is represented by comparing the thermal response difference before and after coating, and the method has the advantages that the internal stress of the printed circuit board after conformal coating can be effectively represented, and the problem that an existing optical measurement method is interfered by a transparent coating is solved.
Owner:PI SEMICON (NANTONG) CO LTD

Lining high-vacuum regulating valve

The invention discloses a lining high-vacuum regulating valve, which comprises a valve body and a valve rod arranged in the valve body, and further comprises a valve core connected with the valve rod and a valve cover provided with a stuffing box, and is characterized in that the inner surface of the valve body is coated with a first lining layer, and the first lining layer and the valve body form a conformal coating structure through a thermal forming process; the outer surface of the valve element is coated with a second lining layer, and the second lining layer and the valve element form a common coating structure through the thermal forming technology. Through the means of combining a high-temperature mold pressing injection molding process and a dovetail groove rivet composite structure, the industrial problems of stripping deformation of a lining material and a metal valve body and medium leakage under the high-vacuum working condition are solved, and the structural stability of the lining layer under the extreme negative pressure and the zero leakage effect of gas-liquid media are obtained; and the equipment reliability and environmental safety of vacuum distillation, negative pressure reaction and other processes in the fields of chemical industry, pharmacy and the like are remarkably improved.
Owner:HANGZHOU LIANGSHENG ELECTRIC CO LTD

Compositions and methods for treating diabetes

Aspects of the disclosure include an implantable composition / medical device encapsulating insulin-producing cells for use in the treatment and management of diabetes, generally comprising a multilayer lattice structure fabricated from a continuously bioprinted cell-laden core / shell fiber, the lattice structure having a defined infill density and at least coating applied to the lattice post-printing, and preferably at least one conformal coating. In this way, multilayer lattice structures are provided with improved stability, retrievability, and functionality.
Owner:ASPECT BIOSYST

All-solid battery and method of preparing the same

The all-solid battery includes: a cathode layer including a cathode active material layer, an anode layer, and a solid electrolyte layer that is disposed between the cathode layer and the anode layer and includes a solid electrolyte, wherein the anode layer includes a porous anode current collector; a first anode active material layer including a first metal and a carbonaceous anode active material disposed on the porous anode current collector; a conformal coating layer including a second metal disposed on the first anode active material layer, wherein the conformal coating layer of the anode layer is between the first anode active material layer and the solid electrolyte layer, and a surface roughness of the solid electrolyte layer, proximate to the conformal coating layer, is about 2 micrometers or less.
Owner:SAMSUNG ELECTRONICS CO LTD

A method for evaluating the anti-sulfidation corrosion performance of conformal coating materials

The present invention discloses a method for evaluating the anti-sulfidation corrosion performance of conformal coating materials, which belongs to the field of test and evaluation technology. The evaluation method includes the following steps: covering the first metal foil and the second metal foil on the same side surface of the test substrate under the same conditions, the first metal foil and the second metal foil are equal and spaced apart from each other; coating the surface of the first metal foil with conformal coating, and not coating the surface of the second metal foil with conformal coating; then, performing a sulfidation corrosion test on the sample substrate according to the preset sulfidation corrosion test method and test conditions; after the test is completed, evaluating the anti-sulfidation corrosion performance of the conformal coating material based on the blackened area of ​​the first metal foil and the second metal foil; the evaluation standard is: if the blackened area of ​​the first metal foil is smaller than the blackened area of ​​the second metal foil, it indicates that the conformal coating has an anti-sulfidation corrosion effect. This method can effectively qualitatively and quantitatively evaluate the anti-sulfidation corrosion performance of the conformal coating.
Owner:CHINA ELECTRONICS RELIABILITY AND ENVIRONMENTAL TESTING INSTITUTE ((THE FIFTH INSTITUTE OF ELECTRONICS MINISTRY OF INDUSTRY AND INFORMATION TECHNOLOGY) (CHINA SAIBAO LABORATORY)

Performance of technical ceramics

Disclosed herein is a ceramic particle comprising a core substrate chosen from yttria-stabilized zirconia, partially stabilized zirconia, zirconium oxide, aluminum nitride, silicon nitride, silicon carbide, and cerium oxide, and a conformal coating of a sintering aid film having a thickness of less than three nanometers and covering the core substrate, and methods for producing the ceramic particle.
Owner:THE REGENTS OF THE UNIVERSITY OF COLORADO

A spraying method and spraying device for circuit board triple-proof paint

The present invention belongs to the technical field of circuit board spraying, and in particular to a spraying device for circuit board conformal coating, comprising a workbench and two symmetrically arranged bases, the workbench being fixedly mounted on the top ends of the two bases, the outer walls on both sides of the top of the workbench being fixedly connected to symmetrically arranged support rods, the outer walls of the four support rods being slidably connected to guide blocks, the outer walls on one side of the four guide blocks being fixedly connected to the same mounting plate, the outer wall on one side of the bottom of the mounting plate being fixedly connected to a first fixing bracket, the bottom end of the first fixing bracket being fixedly connected to a first positioning block, and two second fixing brackets being fixedly mounted on the side of the bottom of the mounting plate away from the first fixing bracket; the present invention can position circuit boards of two different lengths, facilitates the spraying of conformal coating on circuit boards of two different lengths, has good applicability, and can reuse spilled conformal coating, thereby reducing the waste of resources.
Owner:GALAXY CIRCUITS (FUJIAN) CO LTD

High-performance conformal coating

Various embodiments and examples of conformal coatings formed by various formulations and curing methods are disclosed herein. In one embodiment, a resin capable of thiol-ene polymerization is used. In another embodiment, a reactive acrylic liquid elastomer is used. In yet another embodiment, an epoxy resin is used in combination with other chemicals to produce physical properties useful for conformal coatings.
Owner:EPOXY TECHNOLOGY INC

A circuit board conformal coating material for high frequency fields and a preparation method thereof

The present application provides a circuit board conformal coating material for high-frequency fields. The raw materials of the material include: by weight, 60-100 parts of polymer, 18-25 parts of filler, 0.1-3 parts of antioxidant, and 1-5 parts of flame retardant. By optimizing the polymer system and further specifying the group content and physical properties of the resin, the overall polarity and dielectric loss of the conformal material are reduced. The dielectric constant of the material is 2.2-2.5, and the loss factor is about 0.0007, which far exceeds the use requirement level of high-frequency materials and is more suitable for circuit materials under high frequency.
Owner:YIK SHING TAT (SHENZHEN) NEW MATERIAL CO LTD

Coating machine

The utility model discloses a coating machine, and belongs to the technical field of circuit board processing. The device comprises a rack, a circuit board bracket, a spray head, a truss manipulator and a collecting tank. The circuit board support is used for fixing a circuit board in the rack, the truss mechanical arm can drive the spray head to move so that the spray head can spray conformal coating to different positions of the circuit board, and in the process that one circuit board is replaced with the next circuit board after being sprayed, the truss mechanical arm can drive the spray head to move to the position above the collecting groove. And the collecting tank can collect the conformal coating dripping from the spray head, so that the possibility that the conformal coating in the spray head drips into the rack is reduced.
Owner:SHANGHAI YUMO ELECTRONIC TECH CO LTD

Battery positive electrode material, preparation method thereof and battery composed of battery positive electrode material

The invention belongs to the field of battery materials, and relates to a battery positive electrode material, a preparation method thereof and a battery composed of the battery positive electrode material, the battery positive electrode material comprises a manganese dioxide nanowire and a conductive polymer, and the surface of the manganese dioxide nanowire is coated with the conductive polymer. The preparation method comprises the following steps: adding the manganese dioxide nanowire into a dispersing solvent, adjusting the pH value, and adding a polymer monomer for polymerization reaction to obtain the manganese dioxide nanowire coated with the positive electrode material polymer. Manganese dioxide is used as an oxidizing agent to initiate a conducting polymer polymerization reaction, the binding force between a conformal coating layer formed on the surface of the manganese dioxide nanowire and the manganese dioxide nanowire is higher, manganese dioxide is used as the oxidizing agent to perform self-initiation, no additional oxidizing agent needs to be added, the reaction condition is mild, and the yield is high. The initial nanowire morphology of the manganese dioxide nanowire is ensured, and the coated conductive polymer layer can effectively stabilize the structure of the manganese dioxide nanowire, so that the conductivity of the manganese dioxide nanowire on the inner layer is ensured.
Owner:HEFEI GUOXUAN HIGH TECH POWER ENERGY

Optical communication device using conformal coating as optical waveguide

An optical communication device according to embodiments disclosed herein includes a first optical element, a second optical element capable of performing optical communication with the first optical element, a printed circuit board (PCB) in which the first optical element and the second optical element are arranged, and a first conformal coating of a polymeric material, a first conformal coating is applied to at least a portion of a surface of the PCB, wherein optical communications are performed using the first conformal coating as an optical waveguide.
Owner:LG ENERGY SOLUTION LTD

Articles having microporous substrates with conformal coatings and methods of making and using same

A composite material includes a polymer substrate having a microporous structure and a conformal coating disposed on a surface of the polymer substrate, wherein the conformal coating is formed from sintered metal nanoparticles.
Owner:WL GORE & ASSOC INC

Conformal coating with low volatile organic compound content.

UndeterminedTN2024000316A1Conformal coatingPrinted circuit board
A coating composition comprising at least one film forming component including a water-based carrier, a resin and at least one additive where the coating composition does not contain a high volatile organic compound (VOC) content and the resin is present in an amount sufficient and configured to form a conformal film when applied to a substrate at room temperature is disclosed. A conformal coating, a method of making the coating composition, a method of using the coating composition to protect substrates such as electronic devices including printed circuit board assemblies (PCBAs), from unwanted contaminants. Substrates coated with such conformal coatings are also disclosed.
Owner:ACTNANO INC

A coating equipment for drone parts that combines vacuum adsorption function

ActiveCN224271940Ufast adsorption fixationAdsorption fixed matchingLiquid surface applicatorsCoatingsManufacturing technologyConformal coating
This utility model discloses a coating equipment for drone parts that incorporates vacuum adsorption, relating to the field of drone manufacturing technology. It aims to solve the technical problem that current conformal coating machines are inconvenient for vacuum adsorption and fixation of drone body shells of different sizes. The equipment includes a coating machine body. This utility model uses springs to equidistantly arrange several sets of adsorption and fixing tubes on a rectangular platform frame. A fastening base is arranged at the bottom of each adsorption and fixing tube. A fastening frame is slidably arranged at the bottom of the rectangular platform frame. Therefore, when the coating machine body is coating the drone body shell, the operator can directly place the drone body shell onto the adsorption and fixing tubes on the rectangular platform. The operator can then press down on the drone body shell, which will simultaneously press down the adsorption and fixing tubes in contact with its bottom edge. The fastening frame and fastening base then secure the pressed adsorption and fixing tubes.
Owner:SUZHOU LITE NEW METAL PROD CO LTD

A resonant cavity structure for fine atomization and a gluing method

The present invention relates to the technical field of photoresist coating for wafer-level packaging, specifically a resonant cavity structure and coating method for fine atomization, comprising a resonant cavity, a spherical resonant cavity disposed within the resonant cavity, the diameter of the spherical resonant cavity being an integral multiple of half the wavelength of ultrasonic excitation, an opening for ultrasonic excitation input disposed at the top of the resonant cavity, and an acoustic resonance cavity disposed at the bottom of the resonant cavity; a liquid supply needle is inserted into the acoustic resonance cavity from the resonant cavity. This structure and method can improve the uniformity of photoresist spraying and the quality of the film layer. By utilizing precise acoustic field control, no microchannel is required to provide fluid flow, thus avoiding the potential problem of nozzle blockage. By focusing the acoustic wave in the resonant cavity, the droplets will break up in a very short time, resulting in a small atomized particle size and high concentration, thereby achieving uniform and controllable photoresist film thickness. The film layer has high uniformity and few film defects, is not restricted by the wafer surface morphology, and can achieve conformal coating of complex three-dimensional microstructures.
Owner:CHENYANG QINGLAI MICROELECTRONICS TECHNOLOGY CO LTD

Optical communication device using conformal coating layer as optical waveguide

An optical communication device according to an embodiment disclosed herein includes a first optical element, a second optical element capable of performing optical communication with the first optical element, a printed circuit board (PCB) where the first optical element and the second optical element are arranged, and a first conformal coating layer of a polymer material, coated onto at least a part of a surface of the PCB, in which the optical communication is performed using the first conformal coating layer as an optical waveguide.
Owner:LG ENERGY SOLUTION LTD

Area selective deposition of hardmasks for vacuum gap formation

A method for vacuum gap formation on a dielectric substrate uses area selective deposition (ASD), such as atomic layer deposition (ALD) or chemical vapor deposition (CVD), of a hardmask material on a substrate patterned with a self-assembled monolayer (SAM) and metal features. Due to the presence of the SAM, the hardmask material reaches, but does not touch the metal features leaving areas that will form gaps on the resultant hardmask when the SAM is removed from the substrate. Etching of the dielectric substrate forms trenches in the areas of the gaps. When a non-conformal coating is deposited on the dielectric substrate, vacuum gaps form in the trenches as the non-conformal coating enters into the trenches, but closes off at the surface of the substrate prior to the complete filling of the trench.
Owner:INTERNATIONAL BUSINESS MACHINE CORPORATION