128 results about "Parylene" patented technology

The present invention belongs to the field of plating technology and specifically relates to an ALD-Parylene composite film layer, a deposition device, and a deposition method thereof. By reserving a vacuum gap between a heating plate and the outer wall of a cavity, a barrier is formed to isolate the heating plate from heat conduction to the outside of the cavity as the vacuum degree in the cavity increases during the reaction process, thereby avoiding heat loss caused by direct contact and damage to seals, thereby improving the coating effect. The ALD reaction and the Parylene reaction are combined in the same reaction chamber, and different pipeline designs and time-sharing control are used to form a composite film layer structure of alternating ALD film layers and Parylene film layers on the surface of the substrate. The density of the ALD film layer is conducive to enhancing the water resistance of the film layer and sealing the defects of the original Parylene film layer. The softness of the original coating is maintained, and it will not break when subjected to impact and thermal shock, which is conducive to improving the stability of the film layer.

The invention discloses a manufacturing method of a redistribution layer of a packaging substrate and the packaging substrate, and the method comprises the steps: providing a glass core plate, manufacturing conductive through holes, and manufacturing an inner layer circuit which is electrically connected with the glass core plate through the conductive through holes on the glass core plate; depositing a first dielectric layer on the inner layer circuit by adopting a chemical vapor deposition process, wherein the first dielectric layer adopts a parylene material; forming a hole in the first dielectric layer to expose an inner-layer bonding pad of the inner-layer circuit; forming a first seed layer on the first dielectric layer and an inner layer bonding pad of the inner layer circuit; a transition medium layer is formed on the first seed layer, and a first layer wiring pattern is manufactured on the transition medium layer; electroplating a first metal conductive layer on the first layer of wiring pattern; and removing the transition dielectric layer, and removing the exposed first seed layer to form a first redistribution layer electrically connected with the inner layer circuit. Therefore, the problems of uniformity of the dielectric layer of the large-size glass substrate and warping, interlayer separation and the like in layer adding can be solved.

A sensor device including a conductive graphene film covered on at least one side by a graphene support layer of parylene, a detection element configured to sense an environmental change, and an electrode. The parylene repairs some defects of the conductive graphene film without damaging, polluting, or degrading the conductivity of conductive graphene film.

An electronic chip including a semiconductor substrate in and on which an integrated circuit is formed at least one connection metallization of the integrated circuit formed on the side of a front face of the semiconductor substrate and a first passivation layer covering the front face of the semiconductor substrate, the first passivation layer including openings in line with the connection metallization of the integrated circuit The chip having a second passivation layer covering the side flanks of the semiconductor substrate, the second passivation layer being made of a parylene, and the first passivation layer and the second passivation layer being in contact with each other on the side of the front face of the semiconductor substrate. Methods of making a device are also provided.

The present invention provides a method for matching the film formation rate of C-type polyparaxylene dimer, comprising the following steps: S100, constructing a sublimation rate calculation formula, a cracking rate calculation formula, and a film formation rate calculation formula; S200, using the sublimation rate calculation formula, the cracking rate calculation formula, and the film formation rate calculation formula to respectively calculate the sublimation rate, the cracking rate, and the film formation rate, and by adjusting the corresponding sublimation temperature, the cracking temperature, and the film formation temperature, achieving equality of the sublimation rate, the cracking rate, and the film formation rate, thereby achieving speed matching in the film formation process of C-type polyparaxylene dimer. Utilizing the present invention, the film formation efficiency of C-type polyparaxylene dimer can be significantly improved, the product processing time can be shortened by more than 40%, the raw material utilization rate of C-type polyparaxylene dimer can be improved, and the film formation quality of C-type polyparaxylene dimer can be improved, and the C residual substances in the film formation process can be significantly reduced.

The invention provides an organic electrochemical transistor and stimulating electrode array based on PEDOT: PSS and a preparation method thereof. The electrode array comprises an OECT based on PEDOT: PSS and a stimulating electrode with a PEDOT: PSS coating, a PEDOT: PSS channel and the PEDOT: PSS coating which are made of the same modified PEDOT: PSS material are different in thickness, and the material is obtained through the following steps that ionic liquid is taken and diluted with deionized water, the diluted ionic liquid is doped into PEDOT: PSS dispersion liquid, then a cross-linking agent is added, and full stirring is conducted. A pit with submicron depth is etched in a stimulating electrode area on a poly-p-xylylene substrate, only one-time spin coating of a PEDOT: PSS solution is needed, or the poly-p-xylylene substrate is not etched, multiple times of spin coating are carried out through a photoresist mask, and OECT channels and stimulating electrode modified coatings with different thicknesses in an electrode array can be obtained at the same time. And the advantages of high signal-to-noise ratio of the OECT and strong charge injection capability of the modified stimulating electrode can be fully exerted, so that co-optimization of the collection performance of the OECT and the electrical stimulation performance of the stimulating electrode is realized.

The invention relates to the technical field of waterproof plates, and provides a tear-resistant waterproof plate and a preparation method thereof. The tear-resistant waterproof board is prepared from the following raw materials in parts by weight: 30 to 35 parts of ethylene-vinyl acetate copolymer, 60 to 80 parts of tear-resistant master batch, 0.5 to 1.5 parts of first antioxidant and 3 to 4 parts of compatilizer, the tear-resistant master batch comprises the following raw material components in parts by weight: 20-30 parts of high-density polyethylene, 40-50 parts of linear low-density polyethylene, 1-3 parts of a processing aid and 0.5-1 part of a second antioxidant, and the processing aid comprises fluoro-dimer p-xylene and poly-alpha-methylstyrene. By means of the technical scheme, the problem that in the prior art, waterproof plates are insufficient in tear resistance is solved.

The invention belongs to the technical field of biosensing, and particularly relates to a mutual inductance type brain deformation array sensor and a preparation method and application thereof. According to the invention, a metal material or a conductive polymer is used as a conductive material, an elastomer or parylene is used as an insulating material, an insulating layer-conductive coil-insulating layer sandwich film unit is prepared by micro-nano processing and the like, and a plurality of coil units are connected into a sensing coil array through the insulating layers. The change of tiny deformation of the brain tissue can be effectively detected, so that the method can be used for continuous real-time detection and imaging of the deformation of the brain tissue; the sensor is based on the mutual inductance principle, realizes the time resolution of less than 100 microseconds and the resolution of less than 5 microns according to the corresponding relation between the output voltage and the distance, and has very strong anti-interference capability on the change of cerebrospinal fluid components; according to the sensor, by changing the size and arrangement of the coil units, the detection requirements of to-be-detected objects of different body types and different scenes can be met.

The invention discloses a film coating system and a film coating method, and belongs to the technical field of film coating. The coating system comprises a reaction cavity and a gas inlet device, the gas inlet device is provided with two branch distribution pipes, a plurality of cavity gas inlet pipes correspondingly distributed in the height direction of the cavity are arranged on the two branch distribution pipes respectively, and the flow directions of gas in the two branch distribution pipes are opposite. The pipe diameter of the cavity gas inlet pipe on each branch distribution pipe is gradually increased along the gas flow direction, and the pipe diameter sequences on the two pipes are reversed. According to the ALD and parylene integrated coating device, through the structure of the double branch pipes with the opposite flow directions and the reversed-order increasing pipe diameters, the problem that gas distribution in the vertical direction in large-size ALD and parylene integrated coating equipment is not uniform is effectively solved, the excellent uniformity of ALD coating thickness on a base material is achieved, the coating quality and batch consistency are remarkably improved, precursor raw materials are saved, and the production cost is reduced. And complete conformal deposition of the parylene layer is ensured, so that the coating performance of the system and the overall process efficiency are synergistically enhanced.

The invention relates to a parylene copolymer material and a method for improving the adhesive force of a parylene film. According to the invention, a conventional parylene monomer and a parylene H monomer are subjected to chemical vapor deposition copolymerization to prepare the parylene copolymerization material. The invention further provides a method for improving the adhesive force of the parylene film, and the method comprises the following steps: putting a pre-cleaned base material into a deposition chamber for later use; the method comprises the following steps: mixing a conventional parylene monomer to be plated with a parylene H monomer, and putting the mixture into an evaporation chamber; under the condition that the vacuum degree is-10 Pa to-0.5 Pa, a conventional parylene monomer and a parylene H monomer in the evaporation chamber are evaporated, after pyrolysis is conducted through the cracking furnace, deposition is conducted on a base material in the deposition chamber, and the parylene film is formed. According to the method, the adhesive force of the parylene material is greatly improved, and meanwhile, the uniformity and the surface smoothness of the film are kept.

Specific embodiments of the present invention provide a coating and a preparation method therefor. The coating comprises a coating I, wherein the coating I is a polymerized coating obtained by depositing, on the surface of a base material, by means of a chemical reaction, an organic monomer simultaneously having a carbon-carbon double bond structural unit, a carbon-carbon triple bond structural unit or an epoxy structural unit, and an epoxy structural unit or an aromatic ring structural unit, and / or an organic monomer having at least two carbon-carbon unsaturated bonds and a parylene active monomer that has been subjected to high-temperature pyrolysis. The coating overcomes the problems of the relatively single range of surface energy and greatly limited application scenarios of existing parylene protective coatings.

The invention belongs to the technical field of MEMS loudspeakers, and particularly relates to a preparation method of a PZT loudspeaker based on a back guide structure. Comprising the steps that a bottom electrode metal film and a PZT piezoelectric film are sequentially sputtered on the front face of a device at high temperature through a magnetron sputtering PVD technology; performing a bottom electrode layer structure photoetching process; performing a top electrode layer photoetching process; performing an upper and lower electrode isolation layer photoetching process, performing a front surface back guide hole structure photoetching process, and etching a top silicon layer of the SOI substrate material sheet through ICP (Inductively Coupled Plasma) to form a device back guide hole structure; depositing a Parylene protection material on the front side by a vacuum vapor deposition process; and performing a back photoetching process, and etching the back of the SOI substrate material sheet through ICP (Inductively Coupled Plasma) to form a device diaphragm cavity structure. According to the invention, the air circulation resistance of the rear cavity can be accurately controlled, the quality-spring property of the diaphragm can be matched, the rigidity and damping of the diaphragm can be balanced, the resonance peak can be effectively reduced, the low-frequency response bandwidth can be expanded, and the SPL can be improved.

The invention provides a magnetic response muscle bionic anti-icing substrate and a preparation method thereof, and belongs to the technical field of anti-icing materials. According to the anti-icing base plate, human muscles are simulated, an elastomer driving material is used for simulating muscles, a high-hardness parylene restraint layer is used for simulating human epidermis, and contraction and relaxation of the elastomer material are controllably triggered through magnetic response of magnetic particles arranged in an elastomer, so that macroscopic lines are generated on the surface, and the anti-icing effect is achieved. And the contact area between ice-solid interfaces is changed, so that the adhesion strength between ice and the surface of the substrate is reduced, and the ice layer falls off.

The invention relates to a protective coating and a preparation method and application thereof.The preparation method of the protective coating comprises the following steps that 1, a disilane coupling agent, a monosilane coupling agent containing carbon-carbon double bonds, ethyl alcohol, water and an optional pH regulator are mixed, the volume ratio of the disilane coupling agent to the monosilane coupling agent containing the carbon-carbon double bonds is (3-10): 1, and the mixture is stirred to be uniform; a composite silane solution is obtained; (2) mixing a monosilane coupling agent containing carbon-carbon double bonds, ethanol, water and an optional pH regulator to obtain a monosilane solution; and (3) dip-coating the base material subjected to alkali treatment with the composite silane solution prepared in the step (1), drying for the first time, dip-coating the base material with the monosilane solution prepared in the step (2), drying for the second time, and depositing a poly-p-xylylene layer to form the protective coating, the binding force between the protective coating and the base material is high, the adhesion effect on the base material is good, and the stability between batches is good.

The application discloses a super-flexible friction sensor and a preparation method and application thereof, and belongs to the technical field of flexible electronics. The super-flexible friction sensor comprises a sensing layer; the sensing layer comprises a substrate, a first conductive layer, a photoresist layer, an insulating polymer layer and a second conductive layer which are sequentially stacked; the material of the substrate comprises poly-p-xylylene, and the thickness of the substrate is 0.1-3 microns; and the thickness of the super-flexible friction sensor is 20-40 microns. Compared with a conventional friction sensor, the super-flexible friction sensor has smaller thickness, and is more flexible and sensitive. The application further provides a preparation method and application of the super-flexible friction sensor.

A guidewire driven brain-computer interface system for minimally invasive implantation is provided that includes a flexible electrode array and a plurality of flexible guidewires attached to the flexible electrode array. The flexible electrode array comprises a plurality of insulated poly-p-xylylene-C layers, metal interconnection lines and electrodes. The plurality of flexible guidewires are configured to be guided by an external mechanical force such that the flexible electrode array passes through a craniotomy field and is deployed by tracking the plurality of flexible guidewires. The flexible guidewires each include a manipulation tip and a pull wire.

The utility model provides a vibrating diaphragm and a thermoacoustic film loudspeaker, and belongs to the technical field of loudspeakers. The vibrating diaphragm comprises a poly-p-xylylene substrate, a polylysine bonding layer and an MXene surface layer which are sequentially stacked. Compared with a vibrating diaphragm in the prior art, the vibrating diaphragm provided by the utility model is better in sound performance.

Provided are a method for manufacturing a liquid ejection head chip, a liquid ejection head chip, a liquid ejection head, and a liquid ejection recording apparatus. The man-hour for removing a protective film such as a parylene film of an unnecessary portion is reduced. A method for manufacturing a head chip according to one aspect of the present disclosure includes: a substrate preparation step of preparing an actuator plate substrate having an ejection passage communicating with a nozzle hole for ejecting ink and a non-ejection passage that does not eject ink; and a protective film formation step of forming, after the substrate preparation step, a protective film that protects a common electrode formed on an inner surface of the ejection passage from the influence of ink in a state where the ejection passage is exposed and the non-ejection passage is covered.

The present invention provides a flexible sensor for deep brain detection in humans and non-human primates, comprising a flexible electrode and a flexible printed circuit board (flexible PCB); wherein the flexible electrode includes an implantation end and a pad area, the length of the implantation end is 50–70 millimeters, detection sites are distributed thereon, pads are distributed in the pad area, the detection sites are used for detecting nerve signals, the pads are used for welding with the flexible PCB, and the detection sites and the pads are connected by wires; the hierarchical structure of the flexible electrode includes a base layer, a conductive layer and an insulating layer, wherein the base layer and the insulating layer are parylene flexible films, and the conductive layer is composed of a chromium layer and a gold layer. The present invention also discloses a welding method for the flexible sensor, which uses a method of spot hot melting of solder to weld the flexible electrode and the flexible PCB. This welding method can achieve precise alignment and tight connection of the solder joints, the conduction rate of the sensor is good, and it can avoid the rupture and deformation of the flexible sensor. The flexible sensor prepared by the present invention has strong flexibility, high transparency, and small implantation damage, and can detect the brain nerve signals of humans and non-human primates for a long time.

A bearing shell (2) for a ball joint (1) includes a shell component (11) made from a first material, such that the shell component (11) has a ball segment shaped receiving space (6) into which a joint ball (4) is fitted and can swivel. An inner side (12) of the shell component (11) is coated with a second material to form a low-friction layer (13). To improve the sliding friction properties between the joint ball (4) and the bearing shell (2) and to reduce the friction between them, the bearing shell (2) is characterized in that the second material is parylene.

The invention relates to a bearing sleeve (2) for a ball joint (1), comprising a sleeve shell part (11) made of a first material, said sleeve shell part (11) forming a receiving space (6) in the shape of a truncated sphere for the articulated mounting of a joint ball (4), the inner side (12) of the housing part (11) has a coating made of a second material to form a sliding layer (13). In order to improve the sliding behavior between the joint ball (4) and the bearing sleeve (2) or to reduce friction, the bearing sleeve (2) is characterized in that the second material is parylene.

Disclosed are biocompatible multi-electrode devices capable of being implanted in sensitive tissue, such as the brain, and methods for fabricating such arrays. The disclosed arrays can be implanted in living biological tissue with a single needle insertion. The devices can include linear arrays with contacts along an edge, linear arrays with multiple electrodes per opening in a parylene support layer, multi-thread electrode arrays, tree-like electrode arrays, and combinations thereof. In an embodiment, a compliant electrode apparatus can comprise a biocompatible and bio-implantable compliant dielectric having a top edge defined by a top and a side along a length of the dielectric, insulated electrical traces oriented along the length of the dielectric, and electrode contacts coupled to the traces and situated on the side along the length of the dielectric, wherein an exposed portion of a respective electrode contact protrudes beyond the top edge of the dielectric.

The present invention relates to a paper drone with a waterproof coating applied thereto, wherein the drone is manufactured by covering a frame made of a lightweight material with thin paper to reduce manufacturing and operation costs and radar detection rates, the surface and inner structure of the paper are parylene-coated to prevent damage due to moisture and enable operation in rainy weather, and the drone is easy to be disassembled and stored and assembled on site.

A circularly polarized superluminescent diode (SLD), its preparation method, and its application relate to the field of circularly polarized SLD technology, solving the problems of low output efficiency, poor spectral compatibility, and system complexity of traditional technologies. The diode has a convex cross-section, with the lower half being a distributed Bragg reflector (DBR), and the upper half comprising, from bottom to top, an ITO cathode, a refractive index control layer, an electron transport layer, a chiral active layer, an electron blocking layer, a hole transport layer, a polyimide insulating layer, and an Ag anode; the rear cavity surface is provided with an Ag high-reflection layer; the DBR consists of alternating layers of high and low refractive index; the refractive index control layer comprises a parylene-C insulating layer and an Al2O3 / ZrO2 nanolayer; and the chiral active layer uses chiral organic small molecules, chiral organometallic complexes, or chiral conjugated polymers. The present invention can be used for optical coherence tomography, providing a new solution for multi-scenario integrated photonic devices.

Disclosed herein is an implantable or wearable, flexible, miniaturized microimaging suited for localized brain fluorescent imaging. The microimaging device is implemented on a Parylene photonics platform, which is biocompatible and fabricated using scalable planar microfabrication techniques, enabling customizable design, size, and number of channels (pixels). Operating across the entire visible spectrum. The microimaging device functions effectively both for coherent and scattered light. The microimaging device can be implanted into the brain of freely moving animals, where one or more waveguides could be dedicated to light delivery and the rest of the waveguides for collecting and relaying the fluorescent image to image the tissue structure and function.

Disclosed are a micro light emitting diode display panel, a method of manufacturing the same, and a display device. The micro light emitting diode display panel includes a driving circuit substrate, a plurality of micro light emitting diodes, and a protective layer. The plurality of micro light emitting diodes are disposed on a first surface of the driving circuit substrate. The protective layer is disposed at least on the first surface of the driving circuit substrate and covers the micro light emitting diodes. A material of the protective layer is selected from a Parylene system or an acrylic acid system.

To propose a rotor capable of being magnetically levitated for a rotary machine, and to propose a rotary machine with such a rotor.SOLUTION: A rotor is proposed for a rotary machine with a magnetically-levitated rotor. The rotor can be magnetically levitated, and the rotor has a magnetically-effective core (2) and a sheath material (3) made of a thermoplastically processible fluoropolymer. The sheath material (3) completely encloses the magnetically-effective core (2). The magnetically-effective core (2) comprises at least one permanent magnet (21), and each permanent magnet (21) has a metallic coating (6) for protection against acidic or chemically-corrosive substances. A plastic coating (7) is provided between the metallic coating (6) and the sheath material (3), and the plastic coating (7) consists of a polymer belonging to the family of parylenes. Further, a rotary machine (100) having such a rotor is proposed.SELECTED DRAWING: Figure 2

Disclosed in the present invention are a [2.2]paracyclophane derivative for preparing a parylene film, a preparation method therefor and the use thereof. The present invention specifically relates to 4,16-bis(trifluoromethyl)-[2.2]paracyclophane. The preparation method therefor comprises the following steps: S1, reacting 4-methyl-2-(trifluoromethyl) benzoic acid with a reducing reagent in the presence of a solvent to obtain an intermediate 1; S2, reacting the intermediate 1 with a chlorinating agent in the presence of a solvent to obtain an intermediate 2; S3, reacting the intermediate 2 with an organic amine in the presence of a solvent to obtain an intermediate 3; and S4, reacting the intermediate 3 with a basic reagent in the presence of a polymerization inhibitor and a solvent to obtain 4,16-bis(trifluoromethyl)-[2.2]paracyclophane. A parylene film prepared by using the compound as a monomer exhibits high hydrophobicity, which is superior to that of waterproof Parylene AF4, the best among those commercially available. In addition, the derivative involves low preparation cost and has good application prospects in terms of protective materials.

According to the present disclosure, a conductive polymer composite and a strain gauge are provided. The conductive polymer composite includes poly(3,4-ethylenedioxythiophene):polystyrene sulfonate and waterborne polyurethane, and the conductive polymer composite is homogeneous. The strain gauge includes a substrate and a strain sensitive layer. The substrate has a surface, and the strain sensitive layer is connected to the surface of the substrate. The strain sensitive layer is made of the aforementioned conductive polymer composite, and the strain sensitive layer has at least four separations arranged in a staggered way and forms bow-like structures, which makes the strain sensitive layer deform more in a first direction than a second direction perpendicular to the first direction.

A sensor device including a conductive graphene film covered on at least one side by a graphene support layer of parylene, a detection element configured to sense an environmental change, and an electrode. The parylene repairs some defects of the conductive graphene film without damaging, polluting, or degrading the conductivity of conductive graphene film.