93 results about "Parylene" patented technology

The present invention belongs to the field of plating technology and specifically relates to an ALD-Parylene composite film layer, a deposition device, and a deposition method thereof. By reserving a vacuum gap between a heating plate and the outer wall of a cavity, a barrier is formed to isolate the heating plate from heat conduction to the outside of the cavity as the vacuum degree in the cavity increases during the reaction process, thereby avoiding heat loss caused by direct contact and damage to seals, thereby improving the coating effect. The ALD reaction and the Parylene reaction are combined in the same reaction chamber, and different pipeline designs and time-sharing control are used to form a composite film layer structure of alternating ALD film layers and Parylene film layers on the surface of the substrate. The density of the ALD film layer is conducive to enhancing the water resistance of the film layer and sealing the defects of the original Parylene film layer. The softness of the original coating is maintained, and it will not break when subjected to impact and thermal shock, which is conducive to improving the stability of the film layer.

The invention discloses a manufacturing method of a redistribution layer of a packaging substrate and the packaging substrate, and the method comprises the steps: providing a glass core plate, manufacturing conductive through holes, and manufacturing an inner layer circuit which is electrically connected with the glass core plate through the conductive through holes on the glass core plate; depositing a first dielectric layer on the inner layer circuit by adopting a chemical vapor deposition process, wherein the first dielectric layer adopts a parylene material; forming a hole in the first dielectric layer to expose an inner-layer bonding pad of the inner-layer circuit; forming a first seed layer on the first dielectric layer and an inner layer bonding pad of the inner layer circuit; a transition medium layer is formed on the first seed layer, and a first layer wiring pattern is manufactured on the transition medium layer; electroplating a first metal conductive layer on the first layer of wiring pattern; and removing the transition dielectric layer, and removing the exposed first seed layer to form a first redistribution layer electrically connected with the inner layer circuit. Therefore, the problems of uniformity of the dielectric layer of the large-size glass substrate and warping, interlayer separation and the like in layer adding can be solved.

A sensor device including a conductive graphene film covered on at least one side by a graphene support layer of parylene, a detection element configured to sense an environmental change, and an electrode. The parylene repairs some defects of the conductive graphene film without damaging, polluting, or degrading the conductivity of conductive graphene film.

An electronic chip including a semiconductor substrate in and on which an integrated circuit is formed at least one connection metallization of the integrated circuit formed on the side of a front face of the semiconductor substrate and a first passivation layer covering the front face of the semiconductor substrate, the first passivation layer including openings in line with the connection metallization of the integrated circuit The chip having a second passivation layer covering the side flanks of the semiconductor substrate, the second passivation layer being made of a parylene, and the first passivation layer and the second passivation layer being in contact with each other on the side of the front face of the semiconductor substrate. Methods of making a device are also provided.

The present invention provides a method for matching the film formation rate of C-type polyparaxylene dimer, comprising the following steps: S100, constructing a sublimation rate calculation formula, a cracking rate calculation formula, and a film formation rate calculation formula; S200, using the sublimation rate calculation formula, the cracking rate calculation formula, and the film formation rate calculation formula to respectively calculate the sublimation rate, the cracking rate, and the film formation rate, and by adjusting the corresponding sublimation temperature, the cracking temperature, and the film formation temperature, achieving equality of the sublimation rate, the cracking rate, and the film formation rate, thereby achieving speed matching in the film formation process of C-type polyparaxylene dimer. Utilizing the present invention, the film formation efficiency of C-type polyparaxylene dimer can be significantly improved, the product processing time can be shortened by more than 40%, the raw material utilization rate of C-type polyparaxylene dimer can be improved, and the film formation quality of C-type polyparaxylene dimer can be improved, and the C residual substances in the film formation process can be significantly reduced.

The invention relates to the technical field of waterproof plates, and provides a tear-resistant waterproof plate and a preparation method thereof. The tear-resistant waterproof board is prepared from the following raw materials in parts by weight: 30 to 35 parts of ethylene-vinyl acetate copolymer, 60 to 80 parts of tear-resistant master batch, 0.5 to 1.5 parts of first antioxidant and 3 to 4 parts of compatilizer, the tear-resistant master batch comprises the following raw material components in parts by weight: 20-30 parts of high-density polyethylene, 40-50 parts of linear low-density polyethylene, 1-3 parts of a processing aid and 0.5-1 part of a second antioxidant, and the processing aid comprises fluoro-dimer p-xylene and poly-alpha-methylstyrene. By means of the technical scheme, the problem that in the prior art, waterproof plates are insufficient in tear resistance is solved.

The invention discloses a film coating system and a film coating method, and belongs to the technical field of film coating. The coating system comprises a reaction cavity and a gas inlet device, the gas inlet device is provided with two branch distribution pipes, a plurality of cavity gas inlet pipes correspondingly distributed in the height direction of the cavity are arranged on the two branch distribution pipes respectively, and the flow directions of gas in the two branch distribution pipes are opposite. The pipe diameter of the cavity gas inlet pipe on each branch distribution pipe is gradually increased along the gas flow direction, and the pipe diameter sequences on the two pipes are reversed. According to the ALD and parylene integrated coating device, through the structure of the double branch pipes with the opposite flow directions and the reversed-order increasing pipe diameters, the problem that gas distribution in the vertical direction in large-size ALD and parylene integrated coating equipment is not uniform is effectively solved, the excellent uniformity of ALD coating thickness on a base material is achieved, the coating quality and batch consistency are remarkably improved, precursor raw materials are saved, and the production cost is reduced. And complete conformal deposition of the parylene layer is ensured, so that the coating performance of the system and the overall process efficiency are synergistically enhanced.

The invention belongs to the technical field of MEMS loudspeakers, and particularly relates to a preparation method of a PZT loudspeaker based on a back guide structure. Comprising the steps that a bottom electrode metal film and a PZT piezoelectric film are sequentially sputtered on the front face of a device at high temperature through a magnetron sputtering PVD technology; performing a bottom electrode layer structure photoetching process; performing a top electrode layer photoetching process; performing an upper and lower electrode isolation layer photoetching process, performing a front surface back guide hole structure photoetching process, and etching a top silicon layer of the SOI substrate material sheet through ICP (Inductively Coupled Plasma) to form a device back guide hole structure; depositing a Parylene protection material on the front side by a vacuum vapor deposition process; and performing a back photoetching process, and etching the back of the SOI substrate material sheet through ICP (Inductively Coupled Plasma) to form a device diaphragm cavity structure. According to the invention, the air circulation resistance of the rear cavity can be accurately controlled, the quality-spring property of the diaphragm can be matched, the rigidity and damping of the diaphragm can be balanced, the resonance peak can be effectively reduced, the low-frequency response bandwidth can be expanded, and the SPL can be improved.

The invention provides a magnetic response muscle bionic anti-icing substrate and a preparation method thereof, and belongs to the technical field of anti-icing materials. According to the anti-icing base plate, human muscles are simulated, an elastomer driving material is used for simulating muscles, a high-hardness parylene restraint layer is used for simulating human epidermis, and contraction and relaxation of the elastomer material are controllably triggered through magnetic response of magnetic particles arranged in an elastomer, so that macroscopic lines are generated on the surface, and the anti-icing effect is achieved. And the contact area between ice-solid interfaces is changed, so that the adhesion strength between ice and the surface of the substrate is reduced, and the ice layer falls off.

The invention relates to a protective coating and a preparation method and application thereof.The preparation method of the protective coating comprises the following steps that 1, a disilane coupling agent, a monosilane coupling agent containing carbon-carbon double bonds, ethyl alcohol, water and an optional pH regulator are mixed, the volume ratio of the disilane coupling agent to the monosilane coupling agent containing the carbon-carbon double bonds is (3-10): 1, and the mixture is stirred to be uniform; a composite silane solution is obtained; (2) mixing a monosilane coupling agent containing carbon-carbon double bonds, ethanol, water and an optional pH regulator to obtain a monosilane solution; and (3) dip-coating the base material subjected to alkali treatment with the composite silane solution prepared in the step (1), drying for the first time, dip-coating the base material with the monosilane solution prepared in the step (2), drying for the second time, and depositing a poly-p-xylylene layer to form the protective coating, the binding force between the protective coating and the base material is high, the adhesion effect on the base material is good, and the stability between batches is good.

The application discloses a super-flexible friction sensor and a preparation method and application thereof, and belongs to the technical field of flexible electronics. The super-flexible friction sensor comprises a sensing layer; the sensing layer comprises a substrate, a first conductive layer, a photoresist layer, an insulating polymer layer and a second conductive layer which are sequentially stacked; the material of the substrate comprises poly-p-xylylene, and the thickness of the substrate is 0.1-3 microns; and the thickness of the super-flexible friction sensor is 20-40 microns. Compared with a conventional friction sensor, the super-flexible friction sensor has smaller thickness, and is more flexible and sensitive. The application further provides a preparation method and application of the super-flexible friction sensor.

A guidewire driven brain-computer interface system for minimally invasive implantation is provided that includes a flexible electrode array and a plurality of flexible guidewires attached to the flexible electrode array. The flexible electrode array comprises a plurality of insulated poly-p-xylylene-C layers, metal interconnection lines and electrodes. The plurality of flexible guidewires are configured to be guided by an external mechanical force such that the flexible electrode array passes through a craniotomy field and is deployed by tracking the plurality of flexible guidewires. The flexible guidewires each include a manipulation tip and a pull wire.

The utility model provides a vibrating diaphragm and a thermoacoustic film loudspeaker, and belongs to the technical field of loudspeakers. The vibrating diaphragm comprises a poly-p-xylylene substrate, a polylysine bonding layer and an MXene surface layer which are sequentially stacked. Compared with a vibrating diaphragm in the prior art, the vibrating diaphragm provided by the utility model is better in sound performance.

A bearing shell (2) for a ball joint (1) includes a shell component (11) made from a first material, such that the shell component (11) has a ball segment shaped receiving space (6) into which a joint ball (4) is fitted and can swivel. An inner side (12) of the shell component (11) is coated with a second material to form a low-friction layer (13). To improve the sliding friction properties between the joint ball (4) and the bearing shell (2) and to reduce the friction between them, the bearing shell (2) is characterized in that the second material is parylene.

The invention relates to a bearing sleeve (2) for a ball joint (1), comprising a sleeve shell part (11) made of a first material, said sleeve shell part (11) forming a receiving space (6) in the shape of a truncated sphere for the articulated mounting of a joint ball (4), the inner side (12) of the housing part (11) has a coating made of a second material to form a sliding layer (13). In order to improve the sliding behavior between the joint ball (4) and the bearing sleeve (2) or to reduce friction, the bearing sleeve (2) is characterized in that the second material is parylene.

Disclosed are biocompatible multi-electrode devices capable of being implanted in sensitive tissue, such as the brain, and methods for fabricating such arrays. The disclosed arrays can be implanted in living biological tissue with a single needle insertion. The devices can include linear arrays with contacts along an edge, linear arrays with multiple electrodes per opening in a parylene support layer, multi-thread electrode arrays, tree-like electrode arrays, and combinations thereof. In an embodiment, a compliant electrode apparatus can comprise a biocompatible and bio-implantable compliant dielectric having a top edge defined by a top and a side along a length of the dielectric, insulated electrical traces oriented along the length of the dielectric, and electrode contacts coupled to the traces and situated on the side along the length of the dielectric, wherein an exposed portion of a respective electrode contact protrudes beyond the top edge of the dielectric.

A circularly polarized superluminescent diode (SLD), its preparation method, and its application relate to the field of circularly polarized SLD technology, solving the problems of low output efficiency, poor spectral compatibility, and system complexity of traditional technologies. The diode has a convex cross-section, with the lower half being a distributed Bragg reflector (DBR), and the upper half comprising, from bottom to top, an ITO cathode, a refractive index control layer, an electron transport layer, a chiral active layer, an electron blocking layer, a hole transport layer, a polyimide insulating layer, and an Ag anode; the rear cavity surface is provided with an Ag high-reflection layer; the DBR consists of alternating layers of high and low refractive index; the refractive index control layer comprises a parylene-C insulating layer and an Al2O3 / ZrO2 nanolayer; and the chiral active layer uses chiral organic small molecules, chiral organometallic complexes, or chiral conjugated polymers. The present invention can be used for optical coherence tomography, providing a new solution for multi-scenario integrated photonic devices.

Disclosed herein is an implantable or wearable, flexible, miniaturized microimaging suited for localized brain fluorescent imaging. The microimaging device is implemented on a Parylene photonics platform, which is biocompatible and fabricated using scalable planar microfabrication techniques, enabling customizable design, size, and number of channels (pixels). Operating across the entire visible spectrum. The microimaging device functions effectively both for coherent and scattered light. The microimaging device can be implanted into the brain of freely moving animals, where one or more waveguides could be dedicated to light delivery and the rest of the waveguides for collecting and relaying the fluorescent image to image the tissue structure and function.

To propose a rotor capable of being magnetically levitated for a rotary machine, and to propose a rotary machine with such a rotor.SOLUTION: A rotor is proposed for a rotary machine with a magnetically-levitated rotor. The rotor can be magnetically levitated, and the rotor has a magnetically-effective core (2) and a sheath material (3) made of a thermoplastically processible fluoropolymer. The sheath material (3) completely encloses the magnetically-effective core (2). The magnetically-effective core (2) comprises at least one permanent magnet (21), and each permanent magnet (21) has a metallic coating (6) for protection against acidic or chemically-corrosive substances. A plastic coating (7) is provided between the metallic coating (6) and the sheath material (3), and the plastic coating (7) consists of a polymer belonging to the family of parylenes. Further, a rotary machine (100) having such a rotor is proposed.SELECTED DRAWING: Figure 2

Disclosed in the present invention are a [2.2]paracyclophane derivative for preparing a parylene film, a preparation method therefor and the use thereof. The present invention specifically relates to 4,16-bis(trifluoromethyl)-[2.2]paracyclophane. The preparation method therefor comprises the following steps: S1, reacting 4-methyl-2-(trifluoromethyl) benzoic acid with a reducing reagent in the presence of a solvent to obtain an intermediate 1; S2, reacting the intermediate 1 with a chlorinating agent in the presence of a solvent to obtain an intermediate 2; S3, reacting the intermediate 2 with an organic amine in the presence of a solvent to obtain an intermediate 3; and S4, reacting the intermediate 3 with a basic reagent in the presence of a polymerization inhibitor and a solvent to obtain 4,16-bis(trifluoromethyl)-[2.2]paracyclophane. A parylene film prepared by using the compound as a monomer exhibits high hydrophobicity, which is superior to that of waterproof Parylene AF4, the best among those commercially available. In addition, the derivative involves low preparation cost and has good application prospects in terms of protective materials.

According to the present disclosure, a conductive polymer composite and a strain gauge are provided. The conductive polymer composite includes poly(3,4-ethylenedioxythiophene):polystyrene sulfonate and waterborne polyurethane, and the conductive polymer composite is homogeneous. The strain gauge includes a substrate and a strain sensitive layer. The substrate has a surface, and the strain sensitive layer is connected to the surface of the substrate. The strain sensitive layer is made of the aforementioned conductive polymer composite, and the strain sensitive layer has at least four separations arranged in a staggered way and forms bow-like structures, which makes the strain sensitive layer deform more in a first direction than a second direction perpendicular to the first direction.

A sensor device including a conductive graphene film covered on at least one side by a graphene support layer of parylene, a detection element configured to sense an environmental change, and an electrode. The parylene repairs some defects of the conductive graphene film without damaging, polluting, or degrading the conductivity of conductive graphene film.

This invention discloses a method for enhancing the sensitivity and reusability of sensor chips by covering them with parylene. Experiments were conducted using NaCl solution, with tests performed twice, before and after parylene growth. Comparing the data from the two tests reveals the impact of parylene growth on the sensor chip. Furthermore, on VCSEL sensor chips after parylene growth, comparing data before and after parylene removal indicates whether parylene has been completely removed. Similarly, when testing other biological reagents on parylene-grown sensor chips, removal of parylene also enables reuse. This method is simple to operate, low in cost, and has significant application potential.

The present invention provides an oxidation-resistant coating and a surface-modified metal material. The oxidation-resistant coating comprises a chloro-substituted parylene, a fluoro-substituted parylene, and an alkyl-substituted parylene, and the weight ratio of chloro:fluoro:alkyl in the oxidation-resistant coating is 1-10:6-27:2-15. The oxidation-resistant coating can be used to coat the surface of an oxidation-prone metal material to form a surface-modified metal material.

The invention relates to the technical field of solar cells, in particular to a perovskite solar cell containing a protective layer and a preparation method of the perovskite solar cell. The solar cell sequentially comprises a conductive substrate, a charge transport layer 1, a perovskite light absorption layer, a charge transport layer 2, a thin film electrode and a protective layer from bottom to top, and the protective layer is one or more of a poly-p-xylylene film, a polyimide film, a polyamide film, a polystyrene film, a polypropylene film and a silicon dioxide film. According to the method disclosed by the invention, a protective layer is constructed on the surface of the battery through a chemical vapor deposition process, and the prepared film has excellent mechanical property, thermal stability, chemical stability, chemical corrosion resistance, high water vapor barrier property, high oxidation resistance and good hydrophobic property. According to the method, the perovskite solar cell packaging technology is promoted to be evolved towards the ultrathin, intelligent and low-cost directions, and the application range of the perovskite solar cell packaging technology is further widened.

The invention relates to the technical field of photoelectric detectors, in particular to a bigrid dielectric photoelectric detector and a preparation method thereof.The bigrid dielectric photoelectric detector comprises a substrate, a metal grid arranged on the upper surface of the substrate, a double-layer dielectric arranged on the upper surface of the metal grid, and an organic semiconductor layer arranged on the upper surface of the double-layer dielectric; a metal source electrode and a metal drain electrode are arranged on the upper surface of the organic semiconductor layer, the metal epitaxial grid electrode is arranged on the upper surface of the substrate and connected with the metal grid electrode, an organic optical voltage divider is integrally arranged on the metal epitaxial grid electrode, and the OFET based on P3HT and the organic optical voltage divider structure are efficiently integrated through grid electrode epitaxy. The detection wavelength is expanded from visible light to ultraviolet light, meanwhile, a double-layer dielectric structure of PVA and Parylene not only avoids the problem of solvent corrosion, but also solves the problems that a traditional single-layer dielectric is high in hysteresis, low in switching speed, large in leakage current and the like, and the photoelectric response speed of the device is remarkably improved.

An oxidation resistant coating includes a chloro-substituted parylene, a fluorine-substituted parylene, and an alkyl-substituted parylene. A weight ratio of chlorine to fluorine to an alkyl group in the oxidation resistant coating is 1-10:6-27:2-15. The oxidation resistant coating is utilized to coat the surfaces of a metallic body made of a readily oxidizable material for forming a surface-modified metal material.

The invention provides a roll-to-roll continuous parylene vacuum coating device and a method thereof, the roll-to-roll continuous parylene vacuum coating device focuses on improvement of a coating vacuum cavity, an air inlet is formed in the top of the coating vacuum cavity, and a hexagonal splitter plate is arranged in the coating vacuum cavity and right opposite to the air inlet. In the actual application process, a parylene active monomer from a gasification-cracking heating system enters the coating vacuum cavity from the air inlet and impacts on the hexagonal splitter plate to achieve uniform diffusion in all directions, and the film thickness uniformity of roll-to-roll continuous parylene vacuum coating is improved.

The application relates to the technical field of semiconductor wafer materials, and discloses a multilayer composite oxidation-resistant copper foil and a manufacturing process thereof, which comprises, from inside to outside, a base layer, a buffer layer, an oxidation-resistant layer and a protective layer; the base layer is high-purity electrolytic copper with a purity of not less than 99.99% and a thickness of 10-50 microns; the buffer layer is a nickel-phosphorus alloy coated with a nitrogen-doped graphene@carbon nanotube core-shell structure and has a thickness of 0.5-2 microns; the oxidation-resistant layer is a nanoscale copper oxide@zeolite imidazolate framework material-8 core-shell structure, and the nanoscale copper oxide particles have an average particle size of 5-50 nm; and the protective layer is a poly-p-xylylene film with a thickness of 0.1-0.5 microns. The functional layers are closely combined and cooperated with each other, the buffer layer relieves thermal stress and provides stable support for the oxidation-resistant layer and the protective layer, the multilayer composite structure realizes performance superposition and optimization, and the high-performance and long-service-life requirement of copper foils in the field of electronic devices and the like is met.

The invention discloses a structure and a method for blocking micropores based on silica gel-parylene. The structure comprises a chip base; the pressure sensitive layer is arranged above the pressure inner cavity of the chip base, the pressure sensitive layer is provided with a plurality of rows of release micropores at equal intervals, and the release micropores are communicated with the pressure inner cavity; the upper end of the chip base is covered with the blocking layer, all the release micropores in the pressure sensitive layer are blocked, and the blocking layer is made of silica gel; the sealing layer is arranged at the upper end of the plugging layer in a covering mode, and the sealing layer is made of parylene. The release micropores are blocked through the blocking layer and the sealing layer composed of the silica gel and parylene, the problem that residual stress of polycrystalline silicon is not matched with heat in the prior art is effectively solved based on the characteristics of the silica gel, the process complexity is effectively reduced, the method does not depend on complex processing equipment and technologies, the production efficiency of products is improved, and the production cost is reduced. And meanwhile, the production cost is reduced.