47 results about "Parylene" patented technology

An electronic chip including a semiconductor substrate in and on which an integrated circuit is formed at least one connection metallization of the integrated circuit formed on the side of a front face of the semiconductor substrate and a first passivation layer covering the front face of the semiconductor substrate, the first passivation layer including openings in line with the connection metallization of the integrated circuit The chip having a second passivation layer covering the side flanks of the semiconductor substrate, the second passivation layer being made of a parylene, and the first passivation layer and the second passivation layer being in contact with each other on the side of the front face of the semiconductor substrate. Methods of making a device are also provided.

The invention discloses a film coating system and a film coating method, and belongs to the technical field of film coating. The coating system comprises a reaction cavity and a gas inlet device, the gas inlet device is provided with two branch distribution pipes, a plurality of cavity gas inlet pipes correspondingly distributed in the height direction of the cavity are arranged on the two branch distribution pipes respectively, and the flow directions of gas in the two branch distribution pipes are opposite. The pipe diameter of the cavity gas inlet pipe on each branch distribution pipe is gradually increased along the gas flow direction, and the pipe diameter sequences on the two pipes are reversed. According to the ALD and parylene integrated coating device, through the structure of the double branch pipes with the opposite flow directions and the reversed-order increasing pipe diameters, the problem that gas distribution in the vertical direction in large-size ALD and parylene integrated coating equipment is not uniform is effectively solved, the excellent uniformity of ALD coating thickness on a base material is achieved, the coating quality and batch consistency are remarkably improved, precursor raw materials are saved, and the production cost is reduced. And complete conformal deposition of the parylene layer is ensured, so that the coating performance of the system and the overall process efficiency are synergistically enhanced.

The invention belongs to the technical field of MEMS loudspeakers, and particularly relates to a preparation method of a PZT loudspeaker based on a back guide structure. Comprising the steps that a bottom electrode metal film and a PZT piezoelectric film are sequentially sputtered on the front face of a device at high temperature through a magnetron sputtering PVD technology; performing a bottom electrode layer structure photoetching process; performing a top electrode layer photoetching process; performing an upper and lower electrode isolation layer photoetching process, performing a front surface back guide hole structure photoetching process, and etching a top silicon layer of the SOI substrate material sheet through ICP (Inductively Coupled Plasma) to form a device back guide hole structure; depositing a Parylene protection material on the front side by a vacuum vapor deposition process; and performing a back photoetching process, and etching the back of the SOI substrate material sheet through ICP (Inductively Coupled Plasma) to form a device diaphragm cavity structure. According to the invention, the air circulation resistance of the rear cavity can be accurately controlled, the quality-spring property of the diaphragm can be matched, the rigidity and damping of the diaphragm can be balanced, the resonance peak can be effectively reduced, the low-frequency response bandwidth can be expanded, and the SPL can be improved.

The invention provides a magnetic response muscle bionic anti-icing substrate and a preparation method thereof, and belongs to the technical field of anti-icing materials. According to the anti-icing base plate, human muscles are simulated, an elastomer driving material is used for simulating muscles, a high-hardness parylene restraint layer is used for simulating human epidermis, and contraction and relaxation of the elastomer material are controllably triggered through magnetic response of magnetic particles arranged in an elastomer, so that macroscopic lines are generated on the surface, and the anti-icing effect is achieved. And the contact area between ice-solid interfaces is changed, so that the adhesion strength between ice and the surface of the substrate is reduced, and the ice layer falls off.

The invention relates to a protective coating and a preparation method and application thereof.The preparation method of the protective coating comprises the following steps that 1, a disilane coupling agent, a monosilane coupling agent containing carbon-carbon double bonds, ethyl alcohol, water and an optional pH regulator are mixed, the volume ratio of the disilane coupling agent to the monosilane coupling agent containing the carbon-carbon double bonds is (3-10): 1, and the mixture is stirred to be uniform; a composite silane solution is obtained; (2) mixing a monosilane coupling agent containing carbon-carbon double bonds, ethanol, water and an optional pH regulator to obtain a monosilane solution; and (3) dip-coating the base material subjected to alkali treatment with the composite silane solution prepared in the step (1), drying for the first time, dip-coating the base material with the monosilane solution prepared in the step (2), drying for the second time, and depositing a poly-p-xylylene layer to form the protective coating, the binding force between the protective coating and the base material is high, the adhesion effect on the base material is good, and the stability between batches is good.

Disclosed are biocompatible multi-electrode devices capable of being implanted in sensitive tissue, such as the brain, and methods for fabricating such arrays. The disclosed arrays can be implanted in living biological tissue with a single needle insertion. The devices can include linear arrays with contacts along an edge, linear arrays with multiple electrodes per opening in a parylene support layer, multi-thread electrode arrays, tree-like electrode arrays, and combinations thereof. In an embodiment, a compliant electrode apparatus can comprise a biocompatible and bio-implantable compliant dielectric having a top edge defined by a top and a side along a length of the dielectric, insulated electrical traces oriented along the length of the dielectric, and electrode contacts coupled to the traces and situated on the side along the length of the dielectric, wherein an exposed portion of a respective electrode contact protrudes beyond the top edge of the dielectric.

Disclosed herein is an implantable or wearable, flexible, miniaturized microimaging suited for localized brain fluorescent imaging. The microimaging device is implemented on a Parylene photonics platform, which is biocompatible and fabricated using scalable planar microfabrication techniques, enabling customizable design, size, and number of channels (pixels). Operating across the entire visible spectrum. The microimaging device functions effectively both for coherent and scattered light. The microimaging device can be implanted into the brain of freely moving animals, where one or more waveguides could be dedicated to light delivery and the rest of the waveguides for collecting and relaying the fluorescent image to image the tissue structure and function.

Disclosed in the present invention are a [2.2]paracyclophane derivative for preparing a parylene film, a preparation method therefor and the use thereof. The present invention specifically relates to 4,16-bis(trifluoromethyl)-[2.2]paracyclophane. The preparation method therefor comprises the following steps: S1, reacting 4-methyl-2-(trifluoromethyl) benzoic acid with a reducing reagent in the presence of a solvent to obtain an intermediate 1; S2, reacting the intermediate 1 with a chlorinating agent in the presence of a solvent to obtain an intermediate 2; S3, reacting the intermediate 2 with an organic amine in the presence of a solvent to obtain an intermediate 3; and S4, reacting the intermediate 3 with a basic reagent in the presence of a polymerization inhibitor and a solvent to obtain 4,16-bis(trifluoromethyl)-[2.2]paracyclophane. A parylene film prepared by using the compound as a monomer exhibits high hydrophobicity, which is superior to that of waterproof Parylene AF4, the best among those commercially available. In addition, the derivative involves low preparation cost and has good application prospects in terms of protective materials.

According to the present disclosure, a conductive polymer composite and a strain gauge are provided. The conductive polymer composite includes poly(3,4-ethylenedioxythiophene):polystyrene sulfonate and waterborne polyurethane, and the conductive polymer composite is homogeneous. The strain gauge includes a substrate and a strain sensitive layer. The substrate has a surface, and the strain sensitive layer is connected to the surface of the substrate. The strain sensitive layer is made of the aforementioned conductive polymer composite, and the strain sensitive layer has at least four separations arranged in a staggered way and forms bow-like structures, which makes the strain sensitive layer deform more in a first direction than a second direction perpendicular to the first direction.

This invention discloses a method for enhancing the sensitivity and reusability of sensor chips by covering them with parylene. Experiments were conducted using NaCl solution, with tests performed twice, before and after parylene growth. Comparing the data from the two tests reveals the impact of parylene growth on the sensor chip. Furthermore, on VCSEL sensor chips after parylene growth, comparing data before and after parylene removal indicates whether parylene has been completely removed. Similarly, when testing other biological reagents on parylene-grown sensor chips, removal of parylene also enables reuse. This method is simple to operate, low in cost, and has significant application potential.

The present invention provides an oxidation-resistant coating and a surface-modified metal material. The oxidation-resistant coating comprises a chloro-substituted parylene, a fluoro-substituted parylene, and an alkyl-substituted parylene, and the weight ratio of chloro:fluoro:alkyl in the oxidation-resistant coating is 1-10:6-27:2-15. The oxidation-resistant coating can be used to coat the surface of an oxidation-prone metal material to form a surface-modified metal material.

The invention relates to the technical field of solar cells, in particular to a perovskite solar cell containing a protective layer and a preparation method of the perovskite solar cell. The solar cell sequentially comprises a conductive substrate, a charge transport layer 1, a perovskite light absorption layer, a charge transport layer 2, a thin film electrode and a protective layer from bottom to top, and the protective layer is one or more of a poly-p-xylylene film, a polyimide film, a polyamide film, a polystyrene film, a polypropylene film and a silicon dioxide film. According to the method disclosed by the invention, a protective layer is constructed on the surface of the battery through a chemical vapor deposition process, and the prepared film has excellent mechanical property, thermal stability, chemical stability, chemical corrosion resistance, high water vapor barrier property, high oxidation resistance and good hydrophobic property. According to the method, the perovskite solar cell packaging technology is promoted to be evolved towards the ultrathin, intelligent and low-cost directions, and the application range of the perovskite solar cell packaging technology is further widened.

An oxidation resistant coating includes a chloro-substituted parylene, a fluorine-substituted parylene, and an alkyl-substituted parylene. A weight ratio of chlorine to fluorine to an alkyl group in the oxidation resistant coating is 1-10:6-27:2-15. The oxidation resistant coating is utilized to coat the surfaces of a metallic body made of a readily oxidizable material for forming a surface-modified metal material.

The application relates to the technical field of semiconductor wafer materials, and discloses a multilayer composite oxidation-resistant copper foil and a manufacturing process thereof, which comprises, from inside to outside, a base layer, a buffer layer, an oxidation-resistant layer and a protective layer; the base layer is high-purity electrolytic copper with a purity of not less than 99.99% and a thickness of 10-50 microns; the buffer layer is a nickel-phosphorus alloy coated with a nitrogen-doped graphene@carbon nanotube core-shell structure and has a thickness of 0.5-2 microns; the oxidation-resistant layer is a nanoscale copper oxide@zeolite imidazolate framework material-8 core-shell structure, and the nanoscale copper oxide particles have an average particle size of 5-50 nm; and the protective layer is a poly-p-xylylene film with a thickness of 0.1-0.5 microns. The functional layers are closely combined and cooperated with each other, the buffer layer relieves thermal stress and provides stable support for the oxidation-resistant layer and the protective layer, the multilayer composite structure realizes performance superposition and optimization, and the high-performance and long-service-life requirement of copper foils in the field of electronic devices and the like is met.

The invention discloses a structure and a method for blocking micropores based on silica gel-parylene. The structure comprises a chip base; the pressure sensitive layer is arranged above the pressure inner cavity of the chip base, the pressure sensitive layer is provided with a plurality of rows of release micropores at equal intervals, and the release micropores are communicated with the pressure inner cavity; the upper end of the chip base is covered with the blocking layer, all the release micropores in the pressure sensitive layer are blocked, and the blocking layer is made of silica gel; the sealing layer is arranged at the upper end of the plugging layer in a covering mode, and the sealing layer is made of parylene. The release micropores are blocked through the blocking layer and the sealing layer composed of the silica gel and parylene, the problem that residual stress of polycrystalline silicon is not matched with heat in the prior art is effectively solved based on the characteristics of the silica gel, the process complexity is effectively reduced, the method does not depend on complex processing equipment and technologies, the production efficiency of products is improved, and the production cost is reduced. And meanwhile, the production cost is reduced.

The application discloses a preparation method and application of a flexible fiber integrated circuit, belongs to the technical field of integrated circuits, and solves the problems of low skin signal precision, unstable structure, weak environmental resistance and the like of existing products, and is suitable for smart electrocardiogram monitoring textiles.The preparation method comprises the following steps: S1, after a PLA fiber is subjected to oxygen plasma treatment, APTES ethanol solution is prepared; S2, graphene oxide, hydroxyl-containing modified nano materials and the like are used to prepare conductive ink and print a basic comb-shaped electrode; S3, a PEDOT:PSS aqueous solution is used to coat an active region of the basic comb-shaped electrode, and the first composite structure is obtained through drying, acrylate group modification of MPEG grafting and ultraviolet irradiation, and then PCL chloroform solution is spin-coated; S4, a comb-shaped collection electrode, a fiber transistor and an RC low-pass filter are laid out, conductive ink is used to print interconnection lines, and the second composite structure is obtained after solidification and coating of poly-p-xylene; and S5, the second composite structure is immersed in a PTFE modified PDMS system, and the finished product is obtained through solidification, silane treatment and drying.

The invention relates to an attached photoelectric health monitoring device and method based on a photoelectric detector, and the device comprises an ultrathin flexible substrate which is made of Parylene-C; the S-shaped interconnection electrode is formed on the ultrathin flexible substrate; the perovskite photoelectric detection layer with the two-dimensional Ruddlesden-Popper structure is regionally deposited on the snakelike interconnected electrode, and the general formula of the perovskite photoelectric detection layer is (PEA) 2 (MA) < n > < 1 > Pb < n > I < 3 > < n > < 1 >; the LED light source is arranged on the ultrathin flexible substrate, and the LED light source and the two-dimensional Ruddlesden-Popper structure perovskite photoelectric detection layer are located on the same plane to form a reflective detection mode; and the packaging layer covers the two-dimensional Ruddlesden-Popper structure perovskite photoelectric detection layer and the LED light source, the material of the packaging layer is Parylene-C, and the packaging layer and the ultrathin flexible substrate jointly form a symmetrical double-layer packaging structure. Compared with the prior art, the invention has the advantages of high fitness and comfort, high sensitivity, quick response, high environmental stability and mechanical durability, low power consumption, high signal-to-noise ratio, high signal quality and detection precision and the like.

The application relates to the technical field of para-aramid material, in particular to a mandrel coating method and application thereof. The coating method comprises the following steps: S1, sand blasting: using sand blasting materials to perform sand blasting treatment on the mandrel; S2, cleaning: first performing surface cleaning by using diluted acid liquid, and then performing rinsing by using deionized water; S3, pretreatment: soaking by using a silane coupling agent; and S4, coating: depositing poly-p-xylylene on the surface of the mandrel, and the mandrel coating method can simultaneously realize lubricating performance of the mandrel and meet the biological compatibility performance; the lubricating friction coefficient is less than 0.25; when the mandrel is used as a mold, the film layer does not fall off and the film does not break after the sleeve is repeatedly taken off for 20-70 times after heat shrinkage.

The application relates to the technical field of waterproof materials, in particular to a modification method of poly-p-xylylene, a poly-p-xylylene modified material and a waterproof coating. The modification method of poly-p-xylylene comprises the following steps: mixing raw materials in the presence of oxygen; the raw materials comprise a free radical precursor, poly-p-xylylene particles and a modifying substance; the modifying substance comprises a first modifier. The modification method provided by the application can efficiently introduce hydroxyl groups or isocyanate groups on the skeleton of poly-p-xylylene molecules, effectively improve the proportion of the introduced hydroxyl groups or isocyanate groups on the skeleton of the poly-p-xylylene molecules, further improve the waterproof performance of the modified poly-p-xylylene and enable the modified poly-p-xylylene to be used as a waterproof material, and the application is beneficial to fully recycling the poly-p-xylylene peeled from a deposition chamber.

An ion implantation apparatus includes a source head including an ion source configured to generate ions, a source flange fixing a position of the source head, a source chamber spaced apart from the source head and including a source liner of ground potential, a source bushing disposed between the source flange and the source chamber, and a first insulating film covering at least a portion of an inner surface of the source bushing, the first insulating film being adjacent to the ion source, and the first insulating film including parylene.

A variety of applications can include parylene capping layer for embedded liquid packaging. A capping structure for liquid packaging can include a conformal parylene capping layer on and contacting a liquid in a recessed cavity of a substrate such that the parylene prevents the liquid from leaking out of the cavity, embedding the liquid in the cavity of the substrate. The selections of substrate, liquid, or type of parylene can be based on the application for which the liquid packaging is implemented.

This invention discloses a planar interdigitated capacitive humidity sensor with a dual-layer composite membrane structure and its fabrication method. The sensor body includes a substrate, an insulating layer, planar interdigitated electrode pairs, an electrode passivation layer, a humidity-sensitive polymer membrane layer, and a protective membrane layer. The protective membrane layer uses dense Parylene material to construct a nanoscale protective layer, allowing gas molecules to pass freely while effectively blocking dust, aerosols, and salt spray pollutants from direct contact with the core humidity-sensitive membrane, greatly enhancing the sensor's environmental tolerance and long-term stability. Parylene material is hydrophobic with low surface energy. In high-humidity environments, this ultra-thin hydrophobic membrane significantly reduces the adhesion probability and size of microdroplets on the humidity-sensitive membrane surface and possesses a certain self-cleaning ability. This effectively suppresses condensation on the humidity sensor surface and maintains surface cleanliness, enabling the sensor to maintain a good capacitance-humidity linear response relationship in high-humidity environments. This improves the sensor's full-range measurement accuracy, especially in the high-humidity range, and its long-term operational stability in high-humidity environments.

Provided is an inkjet head having a service life that is prolonged by improving the heat resistance of a protective film.　The inkjet head comprises a base material and a protective film that protects the base material. The protective film has, from the base material side, at least a first layer and a second layer. The first layer contains: polyparaxylylene having a structure represented by general formula (1); or a derivative thereof. The second layer contains a derivative of polyparaxylylene having a structure represented by general formula (2).

The application discloses a coating system and a coating method, and belongs to the technical field of coating. The coating system comprises a reaction cavity and a gas inlet device. The gas inlet device is provided with two branch distribution pipes. A plurality of cavity gas inlet pipes are arranged on the two pipes and correspondingly distributed along the height direction of the cavity. The gas flow directions in the two pipes are opposite. The pipe diameters of the cavity gas inlet pipes on each branch distribution pipe gradually increase along the gas flow direction. The pipe diameter sequences of the two pipes are inverse sequences. The application effectively overcomes the problem of uneven gas distribution in the vertical direction in a large-size ALD+Parylene integrated coating equipment through the double-branch pipe structure with opposite flow directions and inverse sequence increasing pipe diameters. Excellent uniformity of the ALD coating thickness on the substrate is achieved. The coating quality and batch consistency are significantly improved. The precursor raw material is saved. The complete conformal deposition of the Parylene layer is ensured. Therefore, the coating performance and overall process efficiency of the system are synergistically enhanced.

Provided are a protective film having a uniform thickness and having improved heat resistance, and the like.　The protective film has a first organic layer, an inorganic layer, and a second organic layer in the stated order. The first organic layer and the second organic layer contain a polyparaxylene having a structure represented by general formula (1) or a derivative thereof, or a polyparaxylene derivative having a structure represented by general formula (2). At least one of the first organic layer and the second organic layer contains a polyparaxylene derivative having a structure represented by general formula (2).

The invention relates to a silicon dioxide-containing protective coating and a preparation method and application thereof, and the preparation method comprises the following steps: treating a base material subjected to alkali treatment by using a surfactant, then carrying out a first reaction with an amido-containing disilane coupling agent, forming a mesoporous silicon dioxide layer on the base material, and then carrying out a second reaction with an amido-containing disilane coupling agent to obtain the silicon dioxide-containing protective coating. The average thickness of the mesoporous silica layer is 100-300 nm, carrying out second reaction on the mesoporous silica layer and a monosilane coupling agent containing carbon-carbon double bonds, and depositing Parylene to obtain the protective coating containing silica on the base material. The silicon dioxide-containing protective coating provided by the invention is high in binding force with a base material, good in adhesion effect on the base material and good in stability among batches.

The invention is based on a polymer, a process of manufacturing a polymer, as well as a polymer obtained by a process of manufacturing a polymer according to this invention. The invention also pertains to a surface-crosslinked polymer. Finally, the use of a polymer or a surface-crosslinked polymer according to this invention for coatings of electronics, medical instruments, implants, protection coatings for materials, coatings for glass, in the pharmaceutical industry, battery technology, construction chemistry, and aerospace applications, is also provided.

The invention provides a p-xylene cyclic dimer derivative for preparing a parylene film, and a preparation method and use thereof. The method includes: reacting 4-methyl-2-(trifluoromethyl)benzoic acid with a reducing agent in the presence of a solvent, to obtain an intermediate 1; reacting the intermediate 1 with a chlorinating agent in the presence of a solvent, to obtain an intermediate 2; reacting the intermediate 2 with an organic amine in the presence of a solvent, to obtain an intermediate 3; and reacting the intermediate 3 with a base in the presence of a polymerization inhibitor and a solvent, to obtain 4,16-bis(trifluoromethyl)-[2,2]-p-xylene cyclic dimer. A parylene film prepared with the compound as a monomer shows a high hydrophobicity that is superior to the optimal waterproof parylene AF4 commercially available at present. The preparation cost is low, so the present invention has good application prospects in protective materials.

The invention is a divisional application of which the application number is 2025106608377. The invention provides a waterproof processing method for an unmanned aerial vehicle, which is used for processing a parylene waterproof layer on the unmanned aerial vehicle. The unmanned aerial vehicle comprises an unmanned aerial vehicle shell, an unmanned aerial vehicle supporting structure used for supporting the whole unmanned aerial vehicle, an unmanned aerial vehicle flying structure used for flying of the unmanned aerial vehicle, a main control module used for controlling flying of the unmanned aerial vehicle and a parylene waterproof layer used for preventing water, and the unmanned aerial vehicle shell is connected to the unmanned aerial vehicle supporting structure. The unmanned aerial vehicle flight structure is connected to the outer side of the unmanned aerial vehicle supporting structure relative to the unmanned aerial vehicle shell for driving, and the parylene waterproof layer is at least arranged on the main control module and the unmanned aerial vehicle flight structure for waterproofing. A master control module of the unmanned aerial vehicle, a flight structure of the unmanned aerial vehicle and other components of the unmanned aerial vehicle are coated with a parylene waterproof layer of nanometer to micrometer by adopting a parylene vacuum coating technology, so that the applicability to different types of unmanned aerial vehicles is enhanced, the overall waterproof performance of the unmanned aerial vehicle is improved, and the service life of the unmanned aerial vehicle is prolonged.

Manufacturing techniques for fabricating a polymer or other substrate optimized for growing cells is described, which takes the form of a micro-thin bag with gas permeable sides. Sides of the bag can be held at a fixed distance from one another with a multitude of tiny micropillars or other spacers extending between them, keeping the bag at a predetermined thickness and preventing the bag from collapsing and the sides from sticking together. In other embodiments, the sides may be held apart by gas pressure alone. A 0.01 μm to 1000 μm parylene or other biocompatible coating over the bag outsides controls the permeability of the bag material and provides a bio-safe area for cell growth. An alternate configuration uses open-cell foam with skins coated with a biocompatible coating. Tubes going into multiple bags can be connected to a manifold that delivers gaseous oxygen or removes carbon dioxide and other waste gases. Multiple bags can be stacked together tightly, with o-ring spacers in between, and housed within a vessel to form a high-surface area, ultra-compact cell growing system. For cells growing on the bags, liquid nutrients can be fed by way of the tube spacers, and oxygen and waste gases permeated through the bag sides and transported within the bags.