20 results about "Microfabrication" patented technology

This application discloses a gas sensor and electronic device. The gas sensor includes a substrate, a micro-hot plate, and a microphone. At least one of the micro-hot plate and the microphone is disposed on the substrate. The micro-hot plate includes a heating element, and a thermoacoustic cavity is formed around the heating element. The microphone has a sensing cavity, with the sensing surface of the microphone facing the sensing cavity, and the sensing cavity communicating with the thermoacoustic cavity. The micro-hot plate also includes a first substrate and a heat insulation layer stacked together. The first substrate has a first through-hole, and the heating element is located within the heat insulation layer. Thus, the gas sensor of this embodiment, through the coordinated operation of the micro-hot plate and the microphone, can accurately detect the composition and concentration of gas using the thermoacoustic effect. Furthermore, it is fabricated using microfabrication technology, making it easy to integrate into various micro-devices and possessing broad application prospects.

A method of microfabrication includes forming a sacrificial layer over a film. A resist layer is formed over the sacrificial layer. The resist layer includes an extreme ultraviolet (EUV) resist. A pattern is formed in the resist layer by an EUV exposure and a wet etch followed by rinsing and drying, resulting in uncovered portions of the sacrificial layer. The uncovered portions of the sacrificial layer are treated. The pattern is transferred from the resist layer to the film by performing an etch process.

A microfabrication method comprises the steps of: providing a substrate having an existing pattern of features formed within a first layer; depositing a selective adhesive on the substrate (wherein the selective adhesive is attached to the features and includes a solubility-converting agent); depositing a first resist on the substrate; activating the solubility-converting agent so that a portion of the first resist on the features is dissolved in a first developer; developing the first resist using a first developer to form a relief pattern having an opening that exposes the features of the existing layer; growing a selective growth material on the features and within the opening of the relief pattern to provide a self-aligned selective growth feature; removing the first resist; depositing a fill layer on the substrate; and repeating the steps a predetermined number of times to provide a stacked device having a predetermined number of levels.

Disclosed herein is an implantable or wearable, flexible, miniaturized microimaging suited for localized brain fluorescent imaging. The microimaging device is implemented on a Parylene photonics platform, which is biocompatible and fabricated using scalable planar microfabrication techniques, enabling customizable design, size, and number of channels (pixels). Operating across the entire visible spectrum. The microimaging device functions effectively both for coherent and scattered light. The microimaging device can be implanted into the brain of freely moving animals, where one or more waveguides could be dedicated to light delivery and the rest of the waveguides for collecting and relaying the fluorescent image to image the tissue structure and function.

This invention discloses a thin film with a multi-level microstructure surface, its preparation method, and its applications, belonging to the field of thin film microstructure construction technology. This invention is the first to apply the dynamic behavior of fluids during stretching motion to the construction of multi-level microstructures on a thin film surface. Compared to traditional microfabrication techniques, the stretch flow curing method's most significant advantage lies in its extremely simplified process flow and high flexibility. The entire preparation process includes only two key stages—stretch flow molding and curing—significantly reducing equipment complexity and operational difficulty. The stretch flow curing method not only provides a novel, efficient, and low-cost solution for surface microstructure fabrication but also demonstrates broad application potential in functional thin films, flexible electronics, optical coatings, biointerfaces, and microfluidic devices.

The application provides a monolithic integrated multifunctional composite sensor and a preparation method thereof, and adopts single-silicon single-surface silicon microfabrication technology to predefine and cover a first micro groove of a gas flow sensing unit, to form a pressure reference cavity and a pressure sensitive diaphragm first, to predefine a single-crystal silicon thermocouple arm and a heating resistor pattern through the first micro groove and a side wall protection, to protect the pressure sensing unit through a heat insulation medium layer, to form a heat insulation cavity and a temperature sensing unit, to finally realize integration of the gas flow sensing unit, the pressure sensing unit and the temperature sensing unit on the same monolithic wafer, and to realize the structure of the heat insulation cavity and the pressure reference cavity in the same single-crystal silicon substrate. The method replaces traditional double-sided processing technology, solves the problem that a traditional composite chip is difficult to realize small size, avoids a complex process caused by a traditional silicon-silicon or silicon-glass bonding structure, greatly reduces process difficulty and cost, improves the yield of the composite chip, and improves the reliability of the sensor.

A microfluidic detection test paper chip, comprising a substrate, a microfluidic channel, and a dot array arranged reagent block, the microfluidic channel and the dot array arranged reagent block are arranged on the substrate, and are used for detecting enzymes, chemicals, proteins, polypeptides, amino acids, nucleic acids, and exosome components in a liquid sample; a syringe is used to inject a sample or a reagent into the microfluidic channel and infiltrate the reagent block; a color reaction is completed in the reagent block; color reaction data of the dot array arranged reagent block is scanned by an optical sensor to obtain a detection result, wherein the microfluidic channel and the reagent block are manufactured by using a microfabrication process, the reagent block is printed into a dot array arranged groove formed by the substrate and the microfluidic channel, and thus a micro-specimen multi-index analysis and detection effect is achieved.

This invention discloses a fully electrostatically focused planar integrable microstrip slow-wave traveling wave tube. This invention uses an electric field generated by electrodes produced by microfabrication technology to replace the magnetic focusing commonly used in vacuum devices. Under the action of the electrodes, the electron beam is subjected to attraction or repulsion forces from electrodes of different polarities. Due to the periodic changes in electrode potential, the particles alternately focus and defocus in the x and y directions, but the fluctuations in the z-direction of propagation remain within a certain range. By matching the electrode period with the period of the microstrip slow-wave structure, a periodic electrostatic potential well is formed in the longitudinal direction, thereby achieving stable constraint and dynamic control of the electron beam, completing the fully electrostatic focusing of the electron beam in the traveling wave tube.

This invention discloses a six-port equal-power-dividing coupling network based on a DGS rectangular microcoaxial cable, comprising a microcoaxial outer conductor, a defective ground coupling line, an inner conductor transmission line, output ports, a serpentine inner conductor coupling line, and a defective ground crossover. This invention achieves four-port output with equal output amplitudes based on a traditional branch-line directional coupler. When the two input ports are excited separately, the four output ports have phase differences of +90° and -90° respectively, realizing left-hand and right-hand circular polarization of a four-element antenna array. By integrating defective ground technology on the microcoaxial outer conductor, the coupling degrees of freedom of the microcoaxial inner conductor are increased, improving the coupling strength of adjacent inner conductors at specific locations while meeting the requirements of microcoaxial microfabrication technology. This six-port feeding network exhibits low insertion loss and stable amplitude and phase characteristics over a wide bandwidth, making it particularly suitable for broadband circularly polarized wireless terminals with switchable high-frequency polarization in microwave and millimeter-wave applications.

The present disclosure relates to a capacitively coupled resonator for a high frequency current isolator. An isolator for high frequency signals transmitted between two circuits configured to operate at different voltage domains is provided. The isolator can include a resonator capable of operating at high frequency with high bandwidth, high transmission efficiency, high isolation rating, and small substrate footprint. In some embodiments, the isolator can operate at frequencies not less than 30 GHz, not less than 60 GHz, or between 20 GHz and 200 GHz, including any value or range of values within this range. The isolator can include isolator components that are electrically isolated from each other and capacitively coupled. The dimensions and shapes of the isolator components can be configured to control the values of the equivalent inductance and capacitance of the isolator to facilitate resonance in operation. The isolator is compatible with different manufacturing processes, including, for example, microfabrication and PCB manufacturing processes.

This invention belongs to the technical field of semiconductor microfabrication, specifically a processing technology for embedded metal-polymer flexible composite meshless screen printing for photovoltaic cells. The process involves fabricating a micro-electroformed metal film with patterned through-holes, forming a framework, using a non-silicon semiconductor electrochemical additive micro-nano mechanical manufacturing process. A non-curing organic polymer liquid material of the same material is injected into specific through-holes of the metal film using a precision CNC injection process, and after semi-curing, anchor pillars are formed that are interconnected vertically. The flow or semi-flow characteristics of the non-curing organic polymer and vacuum negative pressure are used to perform a micropore filling and coating process to connect the anchor pillars and the metal film, forming an embedded metal-polymer structure. The anchor pillars and metal film are then fully cured and fused together, significantly improving the product yield while ensuring the overall strength and elastic modulus of the composite film. This also results in a more stable service life for batch printing screens.

The application provides a bionic anti-icing surface and a laser double-beam coupling micro-processing method thereof, and the metal sample polished by sandpaper, ultrasonic cleaned by ethanol and deionized water is fixed on a processing platform with adjustable inclination, the surface of the metal sample placed at an inclination is ablated by a three-dimensional galvanometer, a periodic and size-controllable bionic closed inclined groove micro-nano structure is obtained, and then the surface of the metal sample is chemically treated by a hydrophobizing agent to obtain a bionic anti-icing surface. The application combines the laser double-beam coupling micro-processing method with the surface modification technology, designs and prepares a bionic micro-nano structure surface with superior dynamic anti-icing performance, the energy proportion of the double laser beams with different polarization states is changed, the parameters of the bionic closed inclined groove structure of the ablated material surface by the double laser beams are optimized, the periodic size and the microstructure shape size of the closed inclined groove structure are modulated, and the requirement of enhancing the dynamic anti-icing performance of the surface is better met.

A microfabrication method comprises the steps of forming a first relief pattern on a target layer of a substrate, coating the first relief pattern with a first solubility converter, stacking a first polymer filler on the first relief pattern, and diffusing the first solubility converter into the first polymer filler to provide a solubility-converted region of the first polymer filler. Subsequently, the method comprises the steps of forming a second relief pattern on the first relief pattern, coating the second relief pattern with a second solubility converter, stacking a second polymer filler on the second relief pattern, and diffusing the second solubility converter into the second polymer filler to provide a solubility-converted region of the second polymer filler. Finally, the solubility-converted regions of the first polymer filler and the second polymer filler are developed so that the target layer is etched.

A method for manufacturing a multifunctional electromagnetic waveguide from a tapered optical fiber is provided. The method involves mounting the optical fiber on a roto-translational handling apparatus, forming a first mask on a tapered section of the optical fiber to define a shape of an optical window, forming a first metal layer around the tapered section leaving a lateral edge of the first mask uncovered, removing the first mask by chemical etching to uncover the optical window, depositing a first transparent layer around the tapered section, depositing a second metal layer around the first transparent layer, forming a second mask that defines a shape of a conductive track, removing the second metal layer by chemical etching, and removing the second mask by chemical etching to uncover the conductive track.

The application relates to the field of microfabrication technology and discloses a gradient material wear-resistant micro drill bit and a preparation method thereof. A plurality of tungsten foil laminates are stacked, and a plurality of micro drill bit blanks are processed by electric spark wire cutting; the blank is placed in a cavity formed by a high-carbon steel plate, high-carbon steel powder is filled around the blank, then another high-carbon steel plate with a smooth surface is pressed on the blank to form a sandwich structure; the structure is subjected to pressure and high-temperature diffusion treatment in a protective atmosphere, so that carbon atoms are diffused from the high-carbon steel to the surface of the tungsten foil to form a metallurgical bonding gradient tungsten carbide wear-resistant layer; finally, the residual is removed through pickling to obtain a finished product. The tungsten carbide gradient layer with high hardness and high bonding force is formed on the surface of the tungsten foil through the heat diffusion method, and the technical problems of low yield and short service life of the micro drill bit, especially the drill bit with a diameter less than 80 microns, caused by the easy breakage of the grinding processing and the easy peeling of the surface coating are fundamentally solved.

This invention discloses a highly sensitive and linear flexible strain sensor and its fabrication method, belonging to the field of flexible electronics technology. The sensor employs a gold spiral crack array topology inspired by scorpion crack receptors and nautilus shell structures. The fabrication method includes: preparing a sacrificial template with a gold spiral array trajectory using microfabrication technology; transferring the trajectory to the surface of a flexible substrate through two molding processes to form a microgroove array; constructing a conductive network by magnetron sputtering a nano-conductive thin film on the flexible substrate surface; and finally, attaching electrodes to complete the encapsulation. This invention utilizes the continuously changing curvature gradient characteristics of the gold spiral to effectively disperse stress concentration under stress and homogenize the strain field, thus solving the trade-off between sensitivity and linearity from a physical mechanism perspective. The resulting sensor exhibits ultra-high sensitivity, high linearity, fast response, and excellent long-term cycle durability, showing broad application prospects in the fields of human biomechanical monitoring and intelligent mechanical fault diagnosis.

The present application relates to a kind of focal length dynamic regulation and control device and regulation and control method based on heat drive and pressure control, mainly solve the technical problems such as the existing single drive mode being difficult to consider wide range and high stability for electrowetting drive.This application adopts the technical scheme: the focal length dynamic regulation and control device, it includes microlens array, heat drive module, pressure control module and collaborative control unit;The microlens array is to set several microlens units on transparent substrate, the microlens unit is filled with optical liquid;The heat drive module is a thin film heater array formed by several thin film heaters, the thin film heater is integrated below the microlens array by microfabrication technology, each thin film heater is connected with external drive circuit by independent lead, realizes independent addressing control;The pressure control module includes micro pressure pump, sealed cavity, fluid pipeline, thermal expansion compensation cavity and micro fluid control valve array.

Information handling systems are transported to a selected of plural micro manufacturing centers for harvesting of component modules to reuse in remanufactured information handling systems through an automated process that uses a robotic arm to harvest the component modules and rebuild the information handling systems. Component module health lifecycle information is applied to select components for harvesting. Carbon footprint, energy consumption, costs, any manual labor involved and time criticality are factored to select a geographical location to harvest the component modules and to send the system to subsequent end user locations.