PURPOSE: To provide a
biochip and a manufacturing method for the same.SOLUTION: A detection unit of a
biochip includes a substrate, a first insulating layer, a
semiconductor layer, a second insulating layer, a first
metal layer, a second
metal layer, and a
protection layer. The
semiconductor layer includes a reaction region. The second insulating layer is disposed on the
semiconductor layer, and includes a first part, a second part, and a first opening part for exposing the reaction region. The first
metal layer is disposed on the second part and includes a source, a drain, a gate, and a first wall structure. The second metal layer includes a second wall structure disposed on the first wall structure. The
protection layer is disposed on the first metal layer and the second metal layer. The
protection layer includes a second opening part, a third opening part, and a fourth opening part, and includes a flat part that defines the second opening part by surrounding it, a first projection part that defines the third opening part by surrounding it, and a second projection part that defines the fourth opening by surrounding it. In a normal direction of the substrate, the first opening part, the second opening part, the third opening part, and the fourth opening part overlap with each other.SELECTED DRAWING: Figure 4