The invention discloses a
micro gap measurement method and device based on nano additive manufacturing, and belongs to the field of micro-nano
scale measurement. According to the method, a gap reverse mold is formed in a
micro gap on a substrate material through electrochemical additive manufacturing; non-destructive demolding is realized through thermal circulation by utilizing the difference of
thermal expansion coefficients of a reverse mold material and a substrate material; performing sequence
slicing on the demolded reverse mold by using a
focused ion beam, and imaging the exposed surface to obtain a series of two-dimensional images; and finally, based on the two-dimensional
image sequence, performing three-dimensional reconstruction on the geometrical morphology of the gap. According to the invention, high-resolution, three-dimensional quantitative and low-damage measurement can be carried out on buried tiny gaps with complex three-dimensional shapes or high depth-to-width ratios, and the method is suitable for various substrate material systems. The non-contact
reverse mode duplication strategy is especially suitable for a gap structure which is difficult to apply by a traditional measurement method or a sample is easy to damage, and has scientific research universality and industrialization popularization value; the method can be widely applied to
structural analysis scenes such as semiconductors, micro electro mechanical systems, material science, packaging, nano
electronics,
flexible electronics, biochips, energy devices,
microfluidics,
biological tissue interfaces and
aerospace composite materials, and has remarkable interdisciplinary adaptability.