Process for fabricating a monolayer or multilayer metal structure in LIGA technology, and structure obtained

A structure and metal technology, which is applied in the field of new single-layer or multi-layer metal structures, can solve the problem of no forming components, and achieve the effect of good thickness control and quality improvement.
CN101038440AActive Publication Date: 2007-09-19ROLEX SA
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
ROLEX SA
Publication Date
2007-09-19

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Abstract

The invention relates to a process for fabricating a monolayer or multilayer metal structure in LIGA technology, in which a photoresist layer is deposited on a flat metal substrate, a photoresist mold is created by irradiation or electron or ion bombardment, a metal or alloy is electroplated in this mold, the electroformed metal structure is detached from the substrate and the photoresist is separated from this metal structure, wherein the metal substrate is used as an agent involved in the forming of at least one surface of the metal structure other than that formed by the plane surface of the substrate.
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Description

technical field

[0001] The present invention relates to a method for manufacturing single-layer or multilayer structures by the LIGA process, and to new single-layer or multilayer metal structures obtainable by this method. Background technique

[0002] DGC Mitteilungen No.104, 2005 mentions that the high-precision metal parts used to manufacture chronographs, such as anchors or escape wheels, are called LIGA (Lithographie GalvanikAbformung [Lithography, Electroforming, Molding], produced by Karlsruhe, Germany. The method designed by W.Ehrfeld of the Center for Nuclear Research in Erwin) the use of the process. This method has the disadvantage of requiring expensive equipment, a synchrotron, to produce X-ray irradiation. Therefore it cannot be widely used in watchmaking.

[0003] A.B. Frazier et al., Journal of Microelectromechanical Systems, 2, 2, June 1993 describe the fabrication of metal structures by electrodeposition of metals in molds made of polyimide-based photore...

Claims

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