Apparatus and method for forming 3D nanostructure electrode for electrochemical battery and capacitor

a technology of electrochemical batteries and capacitors, applied in the field of apparatus and methods for forming electrochemical batteries or capacitors having electrodes with 3d nanostructure, can solve the problem of small amount of electrical energy, achieve the effects of improving process performance, reducing production costs, and improving li
US20100126849A1Inactive Publication Date: 2010-05-27APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
US · United States
Current Assignee / Owner
APPLIED MATERIALS INC
Publication Date
2010-05-27
Estimated Expiration
Not applicable · inactive patent

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Abstract

Embodiments described herein generally relate to an electrode structure for an electrochemical battery or capacitor, particularly, apparatus and methods of creating a reliable and cost efficient 3D electrode nano structure for an electrochemical battery or capacitor that has an improved lifetime, lower production costs, and improved process performance.
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Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims benefit of U.S. provisional patent application Ser. No. 61 / 117,535 (Attorney Docket No. 12922L), filed Nov. 24, 2008, which is herein incorporated by reference.BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] Embodiments of the present invention generally relate to apparatus and methods of forming an electrochemical battery or capacitor. Particularly, embodiments of the present invention relates to apparatus and methods for forming electrochemical batteries or capacitors having electrodes with 3D nanostructure.

[0004] 2. Description of the Related Art

[0005] Electrical energy can generally be stored in two fundamentally different ways: 1) indirectly in batteries as potential energy available as chemical energy that requires oxidation and reduction of active species, or 2) directly, using electrostatic charge formed on the plates of a capacitor. Typically, ordinary capacitors store a small amount of charg...

Claims

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