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Apparatus and method for forming 3D nanostructure electrode for electrochemical battery and capacitor

a technology of electrochemical batteries and capacitors, applied in the field of apparatus and methods for forming electrochemical batteries or capacitors having electrodes with 3d nanostructure, can solve the problem of small amount of electrical energy, achieve the effects of improving process performance, reducing production costs, and improving li

Inactive Publication Date: 2010-05-27
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0020]Embodiments described herein generally relate to an electrochemical battery and capacitor electrode structure, particularly, apparatus and methods of creating a reliable and cost efficient electrochemical battery and capacitor electrode structure that has an improved lifetime, lower production costs, and improved process performance.

Problems solved by technology

Typically, ordinary capacitors store a small amount of charge due to their size and thus only store a small amount of electrical energy.

Method used

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  • Apparatus and method for forming 3D nanostructure electrode for electrochemical battery and capacitor
  • Apparatus and method for forming 3D nanostructure electrode for electrochemical battery and capacitor
  • Apparatus and method for forming 3D nanostructure electrode for electrochemical battery and capacitor

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Embodiment Construction

[0040]Embodiments described herein generally relate to an electrode structure, particularly for an electrochemical battery or capacitor, apparatus and methods of creating a reliable and cost efficient electrochemical battery or capacitor electrode structure that has an improved lifetime, lower production costs, and improved process performance. One embodiment provides a substrate plating system comprising a first plating chamber configure to form a columnar structure on a seed layer of a substrate, and a second plating chamber configured to form a porous layer on the columnar structure. One embodiment provides a plating chamber configured to plate one or more large area substrate. In one embodiment, the plating chamber comprises a feed roll, a bottom roll and a take up roll configured to position large area substrates formed in a continuous flexible base in a processing volume, and to transfer the large area substrates in and out the processing volume. In another embodiment, the pla...

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Abstract

Embodiments described herein generally relate to an electrode structure for an electrochemical battery or capacitor, particularly, apparatus and methods of creating a reliable and cost efficient 3D electrode nano structure for an electrochemical battery or capacitor that has an improved lifetime, lower production costs, and improved process performance.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application claims benefit of U.S. provisional patent application Ser. No. 61 / 117,535 (Attorney Docket No. 12922L), filed Nov. 24, 2008, which is herein incorporated by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]Embodiments of the present invention generally relate to apparatus and methods of forming an electrochemical battery or capacitor. Particularly, embodiments of the present invention relates to apparatus and methods for forming electrochemical batteries or capacitors having electrodes with 3D nanostructure.[0004]2. Description of the Related Art[0005]Electrical energy can generally be stored in two fundamentally different ways: 1) indirectly in batteries as potential energy available as chemical energy that requires oxidation and reduction of active species, or 2) directly, using electrostatic charge formed on the plates of a capacitor. Typically, ordinary capacitors store a small amount of charg...

Claims

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Application Information

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IPC IPC(8): C25D5/02C25D5/08
CPCH01M4/0438C25D5/022C25D5/08C25D7/00C25D17/10C25D1/003C25D17/00Y02E60/10Y02P70/50C25D5/623C25D5/605Y02E60/13H01M10/052C25D17/06C25D17/005H01M4/0452C25D7/0628C25D7/0678C25D7/0685C25D7/0621C25D21/08H01M4/139H01G13/00H01G11/86
Inventor LOPATIN, SERGEY D.BACHRACH, ROBERT Z.
Owner APPLIED MATERIALS INC
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