29 results about "Polymer optical waveguide" patented technology

According to the flexible waveguide coupling structure for the high-density optical engine and the miniaturized packaging method of the flexible waveguide coupling structure, the polymer optical waveguide is adopted, the waveguide core layer is made of the high-refractive-index material, and the refractive index of the core layer is higher than that of the upper cladding and the lower cladding, so that light beams can reflect light rays on the surface or in the core layer; the light beam is limited in the core layer to be transmitted along the set path; the flexible waveguide is used in high-density optical engine packaging, a traditional ribbon optical fiber array is directly replaced, and the contradiction between space limitation and bending radius is solved; comprising a flexible waveguide, an MT / MPO connector and a microlens array, polymers such as PMMA, BCB, SU-8, FPPE, PSQ, PDMS / M-PDMS and the like are selected as flexible waveguide materials, the thickness is smaller than or equal to 0.2 mm, the bendable radius is smaller than or equal to 2 mm, the core / cladding refractive index difference delta n is larger than or equal to 0.01, the multimode numerical aperture NA is approximately equal to 0.3, the transmission loss in a 850 nm window is smaller than or equal to 0.25 dB / cm, the angle of a coupling end face is 40-50 degrees, and the requirements for low loss and high bandwidth of short-distance parallel optical interconnection are met.

The invention discloses a photobleached all-polymer optical waveguide grating sensor and a preparation method thereof, and belongs to the technical field of polymer optical waveguide grating sensors. The preparation method comprises the following steps: carrying out hot stamping on a substrate sheet to obtain a substrate sheet with a groove; spin-coating photoresist on the substrate sheet to form a photoresist core layer; photoetching the photoresist core layer through double-beam interference to obtain the photoresist core layer with interference fringes; spin-coating a thermosensitive polymer cladding material on the photoresist core layer, covering the flexible substrate and then carrying out low-temperature thermocuring so as to bond the photoresist core layer and the flexible substrate; stripping the substrate sheet, exposing the photoresist core layer, covering the protective cladding, and curing to obtain a multi-layer composite device; and performing non-uniform post-baking on the multi-layer composite device to obtain the multi-layer composite device. According to the invention, the grating period can be changed under the condition that the grating mask is not replaced, and the cost of spectrum adjustment is greatly reduced.

The application discloses a modulation-insensitive dual-mode waveguide optical switch and a preparation method thereof, and belongs to the technical field of planar optical waveguide devices. The switch is composed of a silicon wafer substrate, a polymer lower cladding layer, a polymer optical waveguide core layer and a polymer upper cladding layer from bottom to top, the polymer optical waveguide core layer is covered in the polymer upper cladding layer, and the refractive index of the polymer optical waveguide core layer is higher than that of the polymer upper cladding layer and the polymer lower cladding layer. The application utilizes the advantages of simple asymmetric directional coupling structure and asymmetric Y branch structure and the large thermal-optical coefficient of organic polymer materials, and realizes the modulation-insensitive switch of two signal optical modes through mode conversion by using the asymmetric Y branch when the heating electrode is modulated. The preparation process of the application is simple, only needs spin coating, photoetching and wet etching, effectively reduces the production cost, improves the production efficiency of the device, is favorable for large-scale batch production, and enables the mode signal optical switch to be applied to actual use.

The invention discloses a hyperbranched high-refractive-index light extraction material and a preparation method and application thereof.According to the hyperbranched high-refractive-index light extraction material, a sulfydryl-alkyne click chemical synthesis strategy implemented at the room temperature or a photopolymerization strategy initiated by ultraviolet light is adopted, and a monomer with an alkynyl structure and a monomer with a double-sulfydryl structure are synthesized into a monomer with an alkynyl structure and a monomer with a double-sulfydryl structure; the hyperbranched organic polymer light extraction material is obtained through sulfydryl-alkyne click polymerization reaction or photopolymerization reaction, and the prepared material not only has high refractive index, but also realizes the characteristic of high light transmittance. The fully organic hyperbranched high-refractive-index light extraction material can be applied to a series of high-tech and frontier application fields such as organic light emitting diodes, micro-lens assemblies of double charge-coupled devices, high-performance complementary image sensors, full-polymer optoelectronic devices, polymer optical waveguide systems, photovoltaic devices, storage elements and the like. And huge application potential and important value are shown.

The application discloses an ultra-wideband interlayer waveguide optical beam splitter and a preparation method thereof, and belongs to the technical field of interlayer waveguide optical beam splitters and preparation thereof.The beam splitter is composed of a silicon substrate, a polymer optical waveguide lower cladding layer, a strip-shaped polymer optical waveguide lower core layer, a polymer optical waveguide intermediate cladding layer, a strip-shaped polymer optical waveguide upper core layer and a polymer optical waveguide upper cladding layer from bottom to top.The silicon wafer is used as the substrate, the organic polymer material is used as the lower cladding layer, the intermediate cladding layer and the upper cladding layer of the waveguide, and the organic polymer material with a relatively large refractive index is used as the lower core layer and the upper core layer of the waveguide, so that the advantages of the organic polymer material, such as a variety of types and strong processability, are fully utilized.Meanwhile, the preparation process is simple, compatible with a semiconductor process, easy to integrate and suitable for large-scale production, the application of the polymer-based integrated optoelectronic device in a three-dimensional photonic integrated chip is effectively expanded, and therefore, the application has important practical application value.

According to the present invention, a polymer optical waveguide can be highly accurately positioned with respect to an optical circuit board in a simple configuration and with simple assembly work by engaging protrusions formed on a cladding with guide grooves formed in the optical circuit board.　This polymer optical waveguide comprises a core (11) and a cladding (12, 13) disposed around the core (11) and having a lower refractive index than the core (11). The cladding (12, 13) is provided with a protrusion (17) that extends along the periphery of the core (11) and engages with a guide groove (22) formed in an optical circuit board (20). A plurality of protrusions (17) are formed alongside each other in the width direction of the cladding (12, 13), and a single core (11) is disposed in a central part of each of the protrusions (17) in the width direction.

A polymer optical waveguide includes a core having an end surface, and a cladding provided around the core and having a first surface, wherein a recess is formed in the first surface. The end surface is exposed inside the recess, and the end surface is located at a position deeper than the first surface.

This invention discloses a method for optical interconnection of silicon photonic chips based on meniscus-guided additive manufacturing, belonging to the field of silicon photonic chips. The method includes: in a controlled gas environment, using a printing material system containing polymers and organic solvents, stretching a liquid bridge between the optical interfaces of two silicon photonic chips using microneedles, and guiding the movement of the meniscus to form a polymer filament connecting the two ends. Subsequently, the solvent evaporates and solidifies, ultimately forming a free-space polymer optical waveguide spanning the chips. This method does not rely on high-energy lasers or adhesive application and washing processes, and is simple, low-cost, and highly efficient. The fabricated waveguides can achieve controllable spans from hundreds of nanometers to hundreds of micrometers in diameter and tens of micrometers to millimeters in length. The end faces can be optimized into controllable transition structures, effectively improving mode matching and coupling efficiency. It features low insertion loss, high alignment tolerance, and good mechanical stability, making it suitable for high-density silicon photonic packaging and heterogeneous integration.

The application discloses a mode-insensitive optical switch based on an organic polymer waveguide and belongs to the technical field of mode-insensitive optical switches.The mode-insensitive optical switch is composed of a substrate, a polymer waveguide lower cladding layer, a rectangular polymer optical waveguide core layer, a polymer waveguide upper cladding layer, a first graphene capacitor and a second graphene capacitor.The polymer waveguide lower cladding layer is prepared on the substrate, the polymer waveguide upper cladding layer is prepared on the polymer waveguide lower cladding layer, and the rectangular polymer optical waveguide core layer is covered in the polymer waveguide lower cladding layer and the polymer waveguide upper cladding layer.The optical switch adopts a polymer material to design a waveguide structure, graphene is used as a modulation electrode and is buried in the waveguide, through designing a graphene capacitor electrode structure and optimizing a buried position, simultaneous modulation and switching of TE 11 , TE 21 , TE 12 and TE 22 modes can be realized, and the preparation process is compatible with a traditional CMOS process and is easy to integrate.

This invention relates to a highly symmetric, wide-bandwidth flexible arrayed waveguide grating chip for FBG demodulation systems, belonging to the field of planar optical waveguide device technology. It comprises a polymer flexible substrate, a polymer lower cladding, a polymer waveguide core, and a polymer upper cladding. The refractive indices of the polymer upper and lower cladding materials are lower than those of the polymer waveguide core material. The polymer waveguide core is an optical waveguide structure integrated from two AWG and two MMI units. This invention solves the defects of existing arrayed waveguide gratings in FBG demodulation systems, such as demodulation blind zones and unidirectional transmission. It achieves demodulation with a wide dynamic range and high resolution for reflected wavelengths and supports bidirectional signal input and output at both ports, improving system flexibility. Furthermore, the use of polymer materials to fabricate optical waveguide devices offers significant advantages over inorganic material systems, including better flexibility, simpler processing, lower cost, and higher efficiency, making it suitable for dynamic deformation environments or bio-integrated scenarios.

The application belongs to the technical field of optical nanochannel, and particularly relates to a preparation device and method of optical waveguide nanobelt based on controllable thermal melting, which comprises a temperature sensor, a CCD camera, a heating plate, an electrically-controlled heating table, a heating table controller and a computer, the temperature sensor is connected with the electrically-controlled heating table, the lens of the CCD camera is directly opposite to the heating plate, the CCD camera is electrically connected with the computer through a cable, the electric heating plate is arranged on the electrically-controlled heating table, and the electrically-controlled heating table is electrically connected with the heating table controller through a control cable. The application does not need large equipment such as a high-temperature furnace and a photoetching machine, and auxiliary materials such as inert gas and photoresist, has the characteristics of controllable size, low cost, wide application range, short preparation time, high repetition rate and the like, and is beneficial to the industrialization popularization of polymer optical waveguide nanobelt in the field of integrated optical communication.

A polymer optical waveguide includes a plurality of cores arranged on an imaginary plane, a cladding disposed around the plurality of the cores, and a groove formed in the cladding and positioned between two cores adjacent each other among the plurality of cores, wherein the groove has a first wall surface extending along the two cores, and the first wall surface is inclined with respect to a normal direction of the imaginary plane.

A multi-channel optical power divider based on an MMI structure and its fabrication method are disclosed, belonging to the field of planar optical waveguide devices and their fabrication technology. From bottom to top, it consists of a silicon substrate, a polymer lower cladding, a strip-shaped polymer waveguide core layer, and a polymer upper cladding. The strip-shaped polymer waveguide core layer is based on an MMI structure and is encased within the polymer upper cladding. This waveguide-type power divider combines the advantages of large process tolerance and small size of MMI optical waveguide structures with the advantage of a wide variety of organic polymer materials, achieving the goal of equal power distribution across multiple different input ports. Furthermore, the fabrication process using polymer materials is relatively simple, requiring only conventional processes such as spin coating and photolithography, without the need for more complex processes. Moreover, it boasts low production costs, high efficiency, and the ability to be mass-produced, making it a practically applicable power divider.

To provide a polymer optical waveguide that can obtain high coupling efficiency with an optical fiber, an optical waveguide component, and a method for manufacturing a polymer optical waveguide.SOLUTION: A polymer optical waveguide has a core having an end face, and a cladding provided around the core and having a first surface. The first surface is formed with a recess from which the end face is exposed. The end face is at a position set back from the first surface.SELECTED DRAWING: Figure 1

A semiconductor structure (100) may include a silicon chip(104), a polymer optical waveguide (POW)(106) communicatively attached to a central portion of a bottom side of the silicon chip(104), and an organic substrate(102) attached to a peripheral portion of the bottom side at least partially surrounding the central portion. The organic substrate (102) may include a first via located at an inner via line and configured to convey a signal from the silicon chip(104) to the organic substrate(102) and a via stress support (116) extending beyond the inner via line toward the central portion.

The invention provides a flexible photoelectric dual-mode nerve probe and a preparation method thereof, the flexible photoelectric dual-mode nerve probe is a photoelectric integrated dual-mode probe obtained by combining polymer optical waveguide preparation and flexible nerve electrode preparation based on an MEMS (Micro Electro Mechanical System) process, and the flexible photoelectric dual-mode nerve probe comprises a flexible circuit, a flexible waveguide and the like. The flexible waveguide is utilized to introduce optical signals, specific types of neurons in an implantation area can be stimulated, then electrophysiological signals are detected through the flexible circuit, specific optical stimulation and electrophysiological recording with high time-space precision are achieved, and a novel nerve closed-loop regulation tool is provided and can be used for understanding and controlling a nervous system. The flexible photoelectric dual-mode nerve probe has the advantages of small size and high flexibility, and can be compatible with a nervous tissue system for a long time, so that long-term nerve closed-loop regulation is realized. Meanwhile, customization and batch production can be achieved, and the method has the advantages of being high in flexibility and low in cost.

The disclosure relates to a non-dispersive infrared (NDIR) gas sensor which detects the concentration of gas with a simple structure and method by manufacturing an optical waveguide with a gas-permeable polymer material instead of a conventional cavity or chamber type. An optical signal travels through the optical waveguide of gas-permeable polymer by total internal reflection, and the gas naturally penetrates the optical waveguide without the use of separate inlet and outlet openings, so that the optical signal and gas particles come into contact with each other within the optical waveguide. Since the optical signal detected by a photodetector at the other end of the optical waveguide after traveling while contacting the gas particles has properties changed according to the concentration of the gas which they have contacted in the optical waveguide, it is possible to measure the concentration of a specific gas from the detected optical signal.

A mode-insensitive 3×6 optical power divider based on an MMI structure and its fabrication method are disclosed, belonging to the field of optical power divider and fabrication technology. From bottom to top, it consists of a silicon substrate, a polymer lower cladding, a polymer waveguide core layer, and a polymer upper cladding. The polymer waveguide core layer is completely encapsulated within the polymer upper cladding, and its refractive index is greater than that of the polymer upper and cladding layers. Based on a four-cascaded MMI waveguide structure, the polymer waveguide core layer enables equal power distribution of both modes of optical power input from the three input ports across the six output ports, achieving mode insensitivity and allowing simultaneous power allocation for the fundamental mode and higher-order modes. This breaks away from traditional power dividers that can only input one port, as the three input ports further increase communication capacity. The device can be applied in mode-division multiplexing systems, enabling practical applications and large-scale mass production.

The flexible optical waveguide optical module comprises a transmitting end, a receiving end and a controller which are used in cooperation. A plurality of transmitting ends and a plurality of receiving ends are combined to form three groups of transmitting and receiving integrated modules, and the three groups of transmitting and receiving integrated modules are communicated with the optical waveguide; based on an intrinsic mode analysis method, establishing a waveguide bandwidth characteristic theoretical model, and realizing accurate calculation and simulation of waveguide bandwidth; designing an ultra-high bandwidth polymer optical waveguide insensitive to excitation conditions; the design of a waveguide assembly for replacing FA to perform 12-channel optical path coupling in the optical module is realized; large-size multi-channel waveguide photoetching based on light-induced in-situ refractive index regulation and control inhibits waveguide defects such as surface roughness and side wall roughness, reduces waveguide transmission loss and improves waveguide bandwidth; on the basis of a high-precision laser processing technology, optical waveguide end face processing and cutting with low surface roughness and low scattering loss are carried out.

A device includes a photonics chip and a flexible waveguide having a first end connected to the photonics chip and a second end opposite the first end, in which the second end of the flexible waveguide includes a first portion connected to a ferrule module and a second portion connected to the ferrule module. The second portion is stacked vertically over the first portion in the ferrule module.

The invention discloses a hybrid plasma electro-optical modulator based on a lead zirconate titanate film and a preparation method thereof, and belongs to the technical field of planar optical waveguide devices. The modulator consists of a Si substrate, a SiO2 oxide layer, a lead zirconate titanate thin film layer, a polymer optical waveguide layer, a first grounding electrode, a signal electrode and a second grounding electrode in sequence from bottom to top, wherein the polymer optical waveguide layer is prepared on the lead zirconate titanate thin film layer through spin coating, photoetching and wet etching. Silicon attached with a silicon dioxide buffer layer serves as a waveguide substrate, a lead zirconate titanate thin film layer serves as a waveguide core layer, and a polymer with the refractive index smaller than that of lead zirconate titanate serves as an optical waveguide layer. The selected polymers are various, the refractive index is small, and the refractive index difference between the selected polymers and a lead zirconate titanate film is large. The manufacturing technology is simple and compatible with the semiconductor technology, large-scale integration and production can be achieved, the mode optical switch can be applied to practice, and therefore the mode optical switch has important practical application value.

The invention belongs to the technical field of organic photoelectric materials, and particularly relates to a hyperbranched high-refractive-index light extraction material and a preparation method and application thereof. According to the material, a monomer with alkynyl and a monomer with disulfydryl are subjected to free radical polymerization to prepare a hyperbranched high-refractive-index polymer containing a high-molar-polarizability component, and the hyperbranched high-refractive-index polymer has the characteristics of excellent transparency and high refractive index. The innovation of the invention lies in that a method of combining normal-temperature sulfydryl-alkyne click polymerization and ultraviolet light-initiated photopolymerization is adopted, and efficient polymerization of alkynyl monomers and disulfydryl monomers is realized, so that the light extraction material with high refractive index and high transparency is obtained. The material has wide application prospects in the fields of organic light emitting diodes (OLEDs), double charge coupled device (CCD) micro lens elements, high-performance complementary metal oxide semiconductor (CMOS) image sensors, all-polymer optoelectronic devices, polymer optical waveguides, photovoltaic devices, storage devices and the like.

According to the present invention, a polymer optical waveguide can be highly accurately positioned with respect to an optical circuit board in a simple configuration and with simple assembly work by engaging protrusions formed on a cladding with guide grooves formed in the optical circuit board.　This polymer optical waveguide comprises a core (11) and a cladding (12, 13) disposed around the core (11) and having a lower refractive index than the core (11). The cladding (12, 13) is provided with protrusions (17) that each extend along the periphery of the core (11) and engage with a guide groove (22) formed in an optical circuit board (20). A plurality of cores (11) are respectively disposed alongside each other in the protrusions (17).

The invention discloses an erbium-ytterbium co-doped polymer optical waveguide amplifier based on a silicon nitride platform and a preparation method thereof, and belongs to the technical field of optical waveguide amplifiers. The erbium-ytterbium co-doped polymer gain-enhanced silicon nitride waveguide consists of a silicon substrate, a silicon dioxide lower cladding, a silicon nitride waveguide core layer, an erbium-ytterbium co-doped polymer gain layer and a polymethyl methacrylate upper cladding from bottom to top in sequence, in the signal light input direction, the silicon nitride waveguide core layer is composed of an input end strip-shaped transmission waveguide, an input end conical waveguide, a strip-shaped transmission waveguide, an output end conical waveguide and an output end strip-shaped transmission waveguide which are sequentially connected and share a central axis structure. And the input end conical waveguide, the strip-shaped transmission waveguide and the output end conical waveguide are jointly coated in the erbium-ytterbium co-doped polymer gain layer to form an amplification region. The polymer optical waveguide amplifier can effectively realize on-chip amplification of signal light on a silicon nitride platform, has the characteristics of simple process, low cost and high integration degree with a silicon-based optical device, and is expected to play a greater role in photon integration on the silicon nitride platform.

The application belongs to the technical field of optical fiber communication, and specifically discloses a polymer optical waveguide amplifier applicable to a near-infrared full communication waveband, which comprises a substrate, a cladding structure and a polymer core layer; the cladding structure comprises at least one cladding layer, and the at least one cladding layer is a gain layer; the gain layer is composed of a transparent polymer material doped with a rare earth β-diketone complex, wherein the rare earth β-diketone complex is a gain medium, and the transparent polymer material is a host material of the gain medium; the cladding structure is selected from any one of the following configurations: the lower cladding layer is the gain layer, and the upper cladding layer is air; the upper cladding layer is the gain layer, and the lower cladding layer is a non-gain layer; the lower cladding layer and the upper cladding layer are both the gain layers; and the polymer core layer is located between the substrate and the upper cladding layer or between the lower cladding layer and the upper cladding layer. Through the synergistic effect of the polymer doped gain medium, the polymer core layer and the innovative pumping scheme, the final goal of the near-infrared full communication waveband, low cost and easy integration is achieved.

This invention discloses a wide-range, high-sensitivity magnetic field sensor based on a polymer optical waveguide. The sensor comprises a Fabry-Perot interference microcavity constructed from a single-mode fiber-polymer optical waveguide-single-mode fiber structure. Fe3O4 nanoparticles are doped into the cladding of the polymer optical waveguide to enhance the magnetic response. This invention utilizes a broadband light source as the probe light incident on the sensing structure, and a spectrometer receives the Fabry-Perot interference spectrum formed after reflection from the gold-plated end face. When an external magnetic field acts on the sensing unit, the Fe3O4 nanoparticles in the cladding are subjected to magnetic force, causing a change in the length of the polymer optical waveguide microcavity, which in turn leads to a resonant wavelength drift through interference. Accurate measurement of the magnetic field strength can be achieved by detecting the wavelength drift. This invention has advantages such as compact structure, simple fabrication, high sensitivity, wide measurement range, and resistance to electromagnetic interference, and is suitable for industrial monitoring, biomagnetic signal detection, and spatial magnetic field distribution mapping.

The application belongs to the technical field of photocured polymer optical waveguide, and provides a fluorine-containing acrylate polymer and a preparation method thereof, a fluorinated polymer photoresist material and application thereof.The fluorine-containing acrylate polymer is obtained by radical polymerization reaction of monomers; the monomers include fluorine-containing acrylate monomers and epoxy monomers; the fluorine-containing acrylate monomers are represented by structures G1 and / or G2; in G1, x is an integer of 0-10, and n is an integer of 1-15; in G2, y is an integer of 0-10, and m is an integer of 1-15.The fluorine-containing polyacrylate structure with an alkyl chain as a main structure is introduced, hydrogen atoms are replaced by fluorine atoms, the C-H bond absorption in the frequency band of optical communication is reduced, and the transmission light loss is reduced; and when the fluorine atoms are used in the fluorinated polymer photoresist material, the surface energy of the photoresist material is reduced, and the film-forming property is better than that of SU8.

The invention discloses a liquid crystal modulation variable optical attenuator based on a multimode interference coupling structure, and belongs to the technical field of planar optical waveguide devices. The device is composed of a silicon dioxide substrate, a polymer optical waveguide core layer, a polymer cladding, a graphene lower electrode, a liquid crystal groove, a liquid crystal material, an ITO upper electrode and a glass substrate. The polymer optical waveguide core layer and the polymer cladding layer have the same thickness and are located on the silicon dioxide substrate together, the polymer optical waveguide core layer is wrapped in the polymer cladding layer, the graphene lower electrode is located on the polymer optical waveguide core layer and the polymer cladding layer, the liquid crystal groove is located on the graphene lower electrode, and the liquid crystal groove is located on the silicon dioxide substrate. The liquid crystal material is filled in the liquid crystal groove, and the glass substrate covers the liquid crystal material and the liquid crystal groove; and the ITO upper electrode is prepared on the glass substrate and is arranged in the liquid crystal material towards the graphene lower electrode. The variable optical attenuator combines the characteristics of large MMI process tolerance, small size and easy integration, and has practical application significance.

Embodiments of the disclosed invention may include in one aspect, a semiconductor structure. The semiconductor structure may include a silicon chip, a polymer optical waveguide (POW) communicatively attached to a central portion of a bottom side of the silicon chip, and an organic substrate attached to a peripheral portion of the bottom side at least partially surrounding the central portion. The organic substrate may include a first via located at an inner via line and configured to convey a signal from the silicon chip to the organic substrate and a via stress support extending beyond the inner via line toward the central portion.