The invention relates to a thin film
lithium niobate-based heterogeneous integrated optical
waveguide amplifier chip and a preparation method thereof, the thin film
lithium niobate-based heterogeneous integrated optical
waveguide amplifier chip comprises a
silicon substrate layer, a lower cladding layer, a thin film
lithium niobate
waveguide layer, an interval cladding layer and a
rare earth ion doped
gain thin film layer which are sequentially stacked from bottom to top, and the interval cladding layer extends to the lower cladding layer; and the thin-film
lithium niobate waveguide layer is coated by the interval cladding. The heterogeneous integrated optical
waveguide amplifier chip comprises a thin film
lithium niobate (TFLN) waveguide layer and a
rare earth ion doped
gain thin film layer on the top of the TFLN waveguide layer, and an interval wrapping layer is arranged between the TFLN waveguide layer and the
rare earth ion doped
gain thin film layer for separation. Wherein the rare earth ion doped gain thin film layer provides optical gain, the TFLN waveguide layer can realize mode constraint, most optical
modes can be switched between the rare earth ion doped gain thin film layer and the TFLN waveguide layer only by changing the width of a TFLN strip-shaped waveguide, and high-performance
broadband amplification is realized. The
photonic integrated circuit has the advantages of wide
gain bandwidth, high gain efficiency and good compatibility with the existing
photonic integrated circuit.