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Organic-inorganic composite erbium doping flat optical waveguide amplifier and preparing method thereof

A planar optical waveguide and composite technology, which is applied in the field of organic-inorganic composite optical waveguide amplifiers and its preparation, to achieve the effects of optimized design, good gain performance, and easy control

Inactive Publication Date: 2009-02-11
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are still blank reports on erbium-doped organic-inorganic composite EDWA at home and abroad, and most of the research focuses on the material preparation stage.

Method used

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  • Organic-inorganic composite erbium doping flat optical waveguide amplifier and preparing method thereof
  • Organic-inorganic composite erbium doping flat optical waveguide amplifier and preparing method thereof
  • Organic-inorganic composite erbium doping flat optical waveguide amplifier and preparing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] Embodiment 1: the preparation of cladding material

[0057] Add 200ml of methyl methacrylate into a 500ml single-necked bottle, add 2% hydroquinone, and under the condition of 80°C water bath, after vacuum distillation, collect the methyl methacrylate for use.

[0058] Install a stirrer, reflux condenser, thermometer and N on the 500ml four-necked bottle 2 Protective device, add 50g (0.5mol) of methyl methacrylate, 7g (0.05mol) of glycidyl methacrylate, 0.1g of azobisisobutyronitrile, 150ml of butyl acetate, heat on a water bath, at 70~ React under the condition of 75 ℃ for 4 hours to obtain the copolymer solution, filter after dilution, distill part of the solvent, and finally add imidazole as the curing agent to obtain the copolymer solution of PMMA-GMA with a solid content of 19%. Its molecular structure is as general formula ( I) shown.

[0059] Then 30wt% of the refractive index adjuster glycidyl methacrylate was added therein. After testing, the refractive index...

Embodiment 2

[0060] Example 2: LaF 3 : Preparation of Er, Yb Nanoparticle-doped Organic-Inorganic Hybrid Materials

[0061] Weigh 1.519g organic-inorganic hybrid material in a small flask, weigh 0.7595g oleic acid modified LaF 3 : Er, Yb nanoparticles, put them into a small flask containing the hybrid material. Weigh through MgSO 4 1.13925 g of dry toluene solution was poured into a small flask filled with hybrid materials and nanoparticles, and a cap was added to prevent volatilization. Stir magnetically for 5 hours, and then stir ultrasonically for 20 minutes until the nanoparticles are uniformly dissolved in the organic-inorganic hybrid material and the refractive index is 1.512. Oleic acid modified LaF 3 : The doping concentration of Er, Yb nanoparticles in the organic-inorganic hybrid material is 50wt%.

Embodiment 3

[0062] Embodiment 3: a kind of mode of spin coating

[0063] The cladding material prepared in Example 1 is coated on the treated monocrystalline silicon substrate 1, rotated at a speed of 3000 rpm for 30 seconds, and then dried to obtain a lower cladding 2 with a thickness of 7 microns; the aluminum film 4 of one deck 50nm is vapor-deposited after drying, then spin-coats photoresist BP212, carries out photoetching, developing with EDWA mask plate 6 after photoresist 5 front bakes, and the film on mask plate 6 The EDWA pattern is transferred to the photoresist 5, and the EDWA pattern is further transferred to the aluminum film 4 by developing. The mask plate is a strip-shaped mask plate. The height of the waveguide strip is 5.0 μm, and the width is 4 μm, 6 μm, 8μm, 10μm and 12μm, the distance between waveguide strips is 127μm.

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Abstract

The invention relates to a strip-shaped optical waveguide amplifier by adopting a novel organic polymer material as an optical waveguide envelope, and adopting an organic-inorganic hybrid material doped with LaF3: Er, Yb nano-particles which are modified by an oleic acid surface as a sandwich layer, as well as the preparation method thereof. The optical waveguide amplifier is composed of a silicon substrate, a lower envelope, the sandwich layer and an upper envelope, wherein the lower envelope and the upper envelope adopt the novel organic polymer material; the sandwich layer adopts the organic-inorganic hybrid material doped with the LaF3:Er, Yb nano-particles which are modified by the oleic acid surface; the refractive index of the sandwich layer is larger than the refractive index of the lower envelope and the upper envelope; a plurality of strip-shaped waveguide grooves are formed on the lower envelope; the strip-shaped waveguide grooves are filled with the organic-inorganic composite materials of the sandwich layer, so as to form a buried structure. The method for making the optical waveguide amplifier is simple; the refractive index difference between the polymer sandwich layer and the envelope material is easy to control; and the thickness of each layer of material is easy to control. The optical waveguide amplifier has the advantages of low cost, good gain performance and high yield, and is suitable for mass production.

Description

technical field [0001] The invention relates to an organic-inorganic composite optical waveguide amplifier and a preparation method thereof, in particular to a LaF2 which uses a new type of organic polymer material as the optical waveguide cladding and uses oleic acid surface modification. 3 : Er, Yb nanoparticle-doped organic-inorganic hybrid material as the core layer composite embedded erbium-doped planar strip optical waveguide amplifier and its preparation method. Background technique [0002] Erbium-doped planar optical waveguide amplifier (EDWA) is an important photonics component, which is an important part of optical communication dense wavelength division multiplexing (DWDM) transmission system, and can be used with modulators, optical switches, arrayed waveguide gratings, isolation Any lossy devices such as optical devices can be integrated together to compensate for various losses in the optical transmission process. The solution of this key technology will make ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/067H04B10/17G03F7/00G03F1/00
Inventor 张丹张大明陈聪孙小强甄珍薄淑辉
Owner JILIN UNIV
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