The invention discloses a
vernier effect-based high-sensitivity
polymer micro-ring temperature and
humidity optical
waveguide sensor, and belongs to the technical field of
planar optical waveguide integrated devices. The
polymer electrolyte consists of a substrate layer, a
polymer lower cladding, a polymer grooving layer, a polymer
electrolyte core layer and a polymer upper cladding. The polymer
electrolyte core layer is of a
runway type MRR cascaded optical
waveguide structure and is composed of a reference ring, a
temperature sensing ring and a
humidity sensing ring, a polymer electrolyte core layer material can adsorb water molecules in air, the free
ion concentration can change along with the change of
humidity and temperature, and then the
refractive index of the material changes; the temperature and humidity dual-mode sensing device overcomes the defects of integration level, sensitivity and
interference resistance of an existing temperature and humidity sensing device, ultra-compact and ultra-high-sensitivity temperature and humidity dual-mode sensing is achieved, the optical
waveguide device is made of polymer materials, and the temperature and humidity dual-mode sensing device has the remarkable advantages of being good in flexibility, simple in process, low in cost, high in efficiency and the like. The method is suitable for various scenes requiring precise environment control or real-time monitoring of tiny changes.