The invention discloses a high-speed electro-
optical modulator based on a heterogeneous integrated
waveguide and a preparation method thereof, and belongs to the technical field of
planar optical waveguide optical modulators and preparation thereof. The sensor is composed of a
silicon substrate, a
silicon dioxide
oxide layer, a
lead zirconate titanate flat plate layer, a
polymer flat plate layer, a first grounding
electrode, a
signal electrode, a second grounding
electrode and a
polymer strip-shaped layer from bottom to top in sequence. The
polymer strip-shaped layer and the polymer flat plate layer are made of the same material, and the
refractive index of the polymer strip-shaped layer is lower than that of the
lead zirconate titanate flat plate layer. The polymer flat plate layer prevents direct contact between
lead zirconate titanate and the electrode, so that the loss of the modulator is greatly reduced. When an
electric field is externally applied, the
electric field is uniformly distributed between the
signal electrode and the grounding electrode, and the thickness of the polymer flat plate layer and the size of the polymer strip-shaped layer are designed, so that more light fields are controlled in the lead
zirconate titanate flat plate layer, and the electro-optical
modulation efficiency is further improved. The manufacturing process is simplified, and the method has the advantages of low production cost, high efficiency and the like.