36 results about "Planar optical waveguide" patented technology

The application discloses a modulation-insensitive dual-mode waveguide optical switch and a preparation method thereof, and belongs to the technical field of planar optical waveguide devices. The switch is composed of a silicon wafer substrate, a polymer lower cladding layer, a polymer optical waveguide core layer and a polymer upper cladding layer from bottom to top, the polymer optical waveguide core layer is covered in the polymer upper cladding layer, and the refractive index of the polymer optical waveguide core layer is higher than that of the polymer upper cladding layer and the polymer lower cladding layer. The application utilizes the advantages of simple asymmetric directional coupling structure and asymmetric Y branch structure and the large thermal-optical coefficient of organic polymer materials, and realizes the modulation-insensitive switch of two signal optical modes through mode conversion by using the asymmetric Y branch when the heating electrode is modulated. The preparation process of the application is simple, only needs spin coating, photoetching and wet etching, effectively reduces the production cost, improves the production efficiency of the device, is favorable for large-scale batch production, and enables the mode signal optical switch to be applied to actual use.

The invention provides a tunable external cavity laser chip and a preparation method thereof, and relates to the technical field of lasers, the chip comprises a planar optical waveguide loop and a gain chip; a narrow-band transmission peak of a micro-ring resonator and an interference passband of a multi-channel interference module are preliminarily aligned through a phase shifter array and a first micro-ring phase shifter in a planar optical waveguide loop, and selection of a lasing working point is completed; and the common phase shifter and the second micro-ring phase shifter are used for cooperative driving, laser frequency sweeping is carried out on the basis of preliminary alignment, and accurate alignment of a narrow-band transmission peak and an external cavity longitudinal mode is maintained in the whole frequency sweeping process. Through cooperative driving of the common phase shifter and the micro-ring phase shifter, the sweep frequency bandwidth of the laser is increased, and frequent mode hopping of output laser in the tuning process is avoided; meanwhile, the periodic alignment reflection phenomenon in a reflection spectrum is avoided, the utilization rate of the gain interval of the semiconductor gain chip is greatly improved, and a larger tuning range is obtained under the condition that the quality of light beams is kept unchanged.

The application discloses a flexible planar light waveguide device and a preparation method thereof, and relates to the technical field of optoelectronic materials and devices. Technical points are as follows: the device provided by the application comprises a flexible substrate, a core layer and an upper cladding layer, and the core layer is a CuI film; a waveguide topological structure for optical signal transmission is formed on the substrate; the CuI film has a cubic zinc blende crystal structure; the average absorption rate of the CuI film in a 0.4-30 mu m wide spectral range is less than 10%; and the refractive index of the CuI film is 2.2-2.5. The transmittance attenuation of the CuI film is less than 2% after the CuI film is bent at a bending radius of 5 mm and is bent 5000 times, and the CuI film exhibits excellent flexibility and optical performance. The method is simple in process, low in cost and suitable for large-scale production. The application solves the problems of narrow light transmission range and poor flexibility of traditional optical waveguide materials, is suitable for flexible optoelectronic device applications in the visible light to mid-infrared waveband, and has a wide market prospect.

The invention belongs to the technical field of oil reservoir microorganisms, and particularly relates to a zoococcus strain and application thereof. The bacterial strain is a Planococcus sp. Bacterial strain WL-9, and is a new strain of the Planococcus sp. The strain is separated from an oil reservoir source, can reduce interfacial tension between crude oil and water, plays a role in emulsifying the crude oil, is good in oil reservoir adaptability, and can convert the crude oil into methane in an extreme environment of the oil reservoir and in the presence of CO2. The invention provides a new high-quality strain resource for microbial oil recovery, and has great significance for improving the oil recovery rate, reducing carbon emission by CCUS microbial carbon conversion and treating and repairing petroleum pollution.

The invention relates to a 2.5 D optical waveguide chip and a preparation method and an application device thereof, and belongs to the technical field of integrated photoelectron and optical fiber communication. Aiming at the technical problems that an existing 3D optical waveguide based on a laser direct writing process cannot be manufactured at a wafer level, the production efficiency is low and the cost is high, the invention provides a 2.5 D optical waveguide chip which comprises a substrate and at least two layers of planar optical waveguides which are isolated by a cladding material and each layer is limited to extend in a plane of the planar optical waveguide; the waveguide distribution of the light inlet end face of the chip is matched with the fiber core distribution of the target multi-core optical fiber for coupling alignment, the waveguides of the light outlet end face of the chip are distributed in a step shape, and the waveguides located on different layers have different heights so as to be coupled and aligned with the corresponding optical fiber array distributed in the step shape. The chip is suitable for wafer-level batch manufacturing and is mainly used for forming core optical devices such as a multi-core optical fiber fan-in and fan-out assembly, a multi-core optical fiber optical receiver and a multi-core optical fiber optical transmitter.

The invention discloses a high-speed electro-optical modulator based on a heterogeneous integrated waveguide and a preparation method thereof, and belongs to the technical field of planar optical waveguide optical modulators and preparation thereof. The sensor is composed of a silicon substrate, a silicon dioxide oxide layer, a lead zirconate titanate flat plate layer, a polymer flat plate layer, a first grounding electrode, a signal electrode, a second grounding electrode and a polymer strip-shaped layer from bottom to top in sequence. The polymer strip-shaped layer and the polymer flat plate layer are made of the same material, and the refractive index of the polymer strip-shaped layer is lower than that of the lead zirconate titanate flat plate layer. The polymer flat plate layer prevents direct contact between lead zirconate titanate and the electrode, so that the loss of the modulator is greatly reduced. When an electric field is externally applied, the electric field is uniformly distributed between the signal electrode and the grounding electrode, and the thickness of the polymer flat plate layer and the size of the polymer strip-shaped layer are designed, so that more light fields are controlled in the lead zirconate titanate flat plate layer, and the electro-optical modulation efficiency is further improved. The manufacturing process is simplified, and the method has the advantages of low production cost, high efficiency and the like.

The application provides a device for two-dimensional spectrum spreading based on a planar optical waveguide. The device comprises: a light to be measured, a collimating system, an in-coupling grating, an out-coupling grating, a vertical grating, a waveguide and a detector, wherein the in-coupling grating and the out-coupling grating are symmetrically arranged inside the waveguide; the collimating system converts the light to be measured into parallel light; the parallel light enters the waveguide under the diffraction of the in-coupling grating and is transmitted inside the waveguide; the light is emitted from the waveguide under the action of an out-coupling grating with the same dispersion; a vertical grating in another direction is used to spread the light emitted from the waveguide in the vertical direction; the focused light reaches a light detector array to obtain a two-dimensional spectrum. The device combines the planar waveguide with the diffraction grating, maximally realizes the miniaturization of the spectrum, and can obtain high-resolution spectrum detection or a large spectrum detection range.

The invention discloses a multi-channel optical engine with a customizable optical spacing. The multi-channel optical engine comprises collimated light used for emitting collimated parallel light beams; the Z-BLOCK multiplexer / demultiplexer is located at the downstream of a light path of the collimated light and is used for processing the incident collimated parallel light and outputting four collimated light beams with different wavelengths; the converging lens or the lens array is located at the downstream of the light path of the Z-BLOCK multiplexer / demultiplexer and is used for converging and shaping the beam diameters of the four collimated lights; the planar optical waveguide chip is located at the downstream of an optical path of the converging lens or the lens array and is used for receiving the shaped four light beams and accurately controlling the distance between the input light beams through an optical waveguide by virtue of a waveguide structure of the planar optical waveguide chip; and the output light array is output from the planar optical waveguide chip to form a four-channel parallel light array with target spacing. The invention further discloses application of the multi-channel optical engine capable of being customized according to the optical distance to an optical module. According to the invention, the defect that the space micro-optics optical engine output light beam spacing is fixed and cannot be customized and adjusted in the prior art is overcome.

The invention discloses a multimode optical fiber PON (Passive Optical Network) system and a multimode PON optical module. The multimode optical fiber PON system consists of a multimode OLT (Optical Line Terminal) optical module, a multimode main optical fiber, a multimode optical splitter, a multimode branch optical fiber and a multimode ONU (Optical Network Unit) optical module, according to the multimode OLT optical module and the multimode ONU optical module, a laser, a laser driver, a detector, a transimpedance amplifier, a limiting amplifier and the like are directly mounted on a printed circuit board by adopting a planar optical waveguide assembly and a COB (Chip On Board) mode, so that photoelectric hybrid integrated packaging is realized, and the miniaturization design of the optical module is realized; the planar optical waveguide assembly realizes multiplexing transmission of two wavelength multimode laser beams through a 45-degree reflecting surface and a 45-degree placed multimode light splitting sheet structure; the welding type pin row connector ensures reliable fixation of the optical mode electrical interface, and the clamping jaw structure and the optical fiber contact pin of the multimode optical fiber assembly realize the anti-vibration pluggable optical interface design. The multimode optical fiber PON system provided by the invention meets the requirement of the system for point-to-multipoint optical fiber transmission in a short-distance range with low power consumption, low cost and high reliability.

The invention relates to a three-dimensional four-core fan-out optical waveguide structure and a manufacturing method thereof, and belongs to the technical field of integrated optics. Comprising a glass substrate, a first gradient three-dimensional optical waveguide, a second gradient three-dimensional optical waveguide, a first planar optical waveguide and a second planar optical waveguide, the left end of the first gradual change three-dimensional optical waveguide and the left end of the second gradual change three-dimensional optical waveguide are located under the left end of the first planar optical waveguide and the left end of the second planar optical waveguide respectively. The right end of the first gradual change three-dimensional optical waveguide and the right end of the second gradual change three-dimensional optical waveguide are located on the two sides of the same layer of the right end of the first planar optical waveguide and the right end of the second planar optical waveguide respectively. The vertical directions of the first gradual change three-dimensional optical waveguide and the second gradual change three-dimensional optical waveguide are gradually changed from the lower layer to the upper layer from left to right, and the horizontal distance is gradually increased; the first planar optical waveguide and the second planar optical waveguide are located on the upper layer, and the horizontal distance between the two is gradually increased from left to right.

Composite IC die structures comprising a first IC die that has a first region directly bonded to a second IC die across a hybrid-bond interface and a topographic feature extending from a second region of the first IC die. In some examples, a hybrid bond interface is fabricated prior to forming a topographic IC die feature. In other examples, a hybrid bond interface is fabricated after forming a topographic IC die feature. A PIC die comprising a planar optical waveguide further includes an optical coupler protruding from a region of the die. In another region of the PIC die metallization features are embedded with a dielectric material suitable for forming a hybrid bond with a surface of an EIC die. Scaling of the directly bonded interconnections between the PIC and EIC die may facilitate further disintegration of the optical and electrical domains within a heterogenous chip / chiplet assembly.

To achieve a light beam deflecting device that does not need to perform individual optical alignment for each of a plurality of observation visual fields.SOLUTION: A light beam deflecting device comprises: a planar optical waveguide circuit 3 that branches light emitted from a light source 1 into a first number of light beams, the first number being the same as the number of divided areas in a first direction in a target space, and emits the branched light beams from a predetermined emission position in the first direction so that the light beams are simultaneously radiated to the position of one pixel in a corresponding area; a first optical system 4 that converts the first number of light beams emitted from the planar optical waveguide circuit 3 into parallel light beams and emits the light beams at an emission angle corresponding to the predetermined emission position; and a second optical system 5 that reflects the first number of light beams emitted from the first optical system and radiates the reflected light beams to the target space.SELECTED DRAWING: Figure 1

The embodiment of the invention discloses a test system for a planar optical waveguide circuit chip and an optical receiving component, the chip comprises a first beam splitter, a modulation unit, a second beam splitter and a beam combining unit, the first beam splitter is connected with the input end of the modulation unit and the input end of the second beam splitter, and the first beam splitter is connected with the input end of the modulation unit and the input end of the second beam splitter. The input end of the first beam splitter is used as the input end of the planar optical waveguide circuit chip; the output end of the modulation unit and the output end of the second beam splitter are connected with the input end of the beam combining unit, and the output end of the beam combining unit serves as the output end of the planar optical waveguide circuit chip. According to the embodiment of the invention, the first beam splitter, the modulation unit, the second beam splitter and the beam combining unit are integrated on the same planar optical waveguide circuit chip, so that the system structure is greatly simplified, the occupied area of equipment is reduced, the test stability and the comparability between channels are further remarkably improved, and finally, the test efficiency and the accuracy of a test result can be effectively improved.

The utility model provides a high-power laser assembly. The high-power laser assembly comprises a substrate, an aspheric lens, an optical chip and an optical fiber assembly. The aspheric lens, the optical chip and the optical fiber assembly are sequentially arranged on the same side surface of the substrate; the optical chip is provided with at least N planar optical wavelength export channels, and N is greater than or equal to 4; the optical fiber assembly is provided with a capillary hole through which at least one optical fiber can penetrate, the at least one optical fiber penetrates through the capillary hole and corresponds to the laser incident end of the optical chip, and the laser emergent end of the optical chip corresponds to the incident end of the aspheric lens; compared with a multi-channel coupler adopted at present, the optical chip is adopted to replace the multi-channel coupler, and different calibration positions are modulated, so that the cost of the high-power laser assembly is greatly reduced, mass production is facilitated, the manufacturing cost is reduced, and the laser transmission efficiency and stability of the high-power laser assembly are improved.

A lighting device for vehicles contains a flat optical waveguide, which has opposing flat sides and narrow sides connecting them, with numerous microstructure elements on a flat side of the optical waveguide. A number of light sources are positioned on one of the narrow sides of the optical waveguide, and a number of optical films are positioned on the light emission side of the optical waveguide. The optical films have an optical structure for deflecting light on the light emission side. At least one optical film on the side where the light enters has a structure for counteracting capillary effects.

This invention relates to a highly symmetric, wide-bandwidth flexible arrayed waveguide grating chip for FBG demodulation systems, belonging to the field of planar optical waveguide device technology. It comprises a polymer flexible substrate, a polymer lower cladding, a polymer waveguide core, and a polymer upper cladding. The refractive indices of the polymer upper and lower cladding materials are lower than those of the polymer waveguide core material. The polymer waveguide core is an optical waveguide structure integrated from two AWG and two MMI units. This invention solves the defects of existing arrayed waveguide gratings in FBG demodulation systems, such as demodulation blind zones and unidirectional transmission. It achieves demodulation with a wide dynamic range and high resolution for reflected wavelengths and supports bidirectional signal input and output at both ports, improving system flexibility. Furthermore, the use of polymer materials to fabricate optical waveguide devices offers significant advantages over inorganic material systems, including better flexibility, simpler processing, lower cost, and higher efficiency, making it suitable for dynamic deformation environments or bio-integrated scenarios.

This light beam deflection device (100) comprises: a planar optical waveguide circuit (3) that causes light emitted from a light source (1) to branch into a first number of light that is the same as the number of divided areas in a first direction of a target space, and causes the branched light to be emitted from a predetermined emission position in the first direction such that the light is simultaneously emitted to the position of one pixel in the corresponding area; a first optical system (4) that converts the first number of light emitted from the planar optical waveguide circuit (3) into parallel light and emits the parallel light at an emission angle corresponding to a predetermined emission position; and a second optical system (5) that reflects the first number of light emitted from the first optical system (4) and irradiates the target space with the respective reflected light. The present invention makes it possible to provide a light beam deflection device which does not need to perform individual optical alignment for each of a plurality of observation visual fields.

A multi-channel optical power divider based on an MMI structure and its fabrication method are disclosed, belonging to the field of planar optical waveguide devices and their fabrication technology. From bottom to top, it consists of a silicon substrate, a polymer lower cladding, a strip-shaped polymer waveguide core layer, and a polymer upper cladding. The strip-shaped polymer waveguide core layer is based on an MMI structure and is encased within the polymer upper cladding. This waveguide-type power divider combines the advantages of large process tolerance and small size of MMI optical waveguide structures with the advantage of a wide variety of organic polymer materials, achieving the goal of equal power distribution across multiple different input ports. Furthermore, the fabrication process using polymer materials is relatively simple, requiring only conventional processes such as spin coating and photolithography, without the need for more complex processes. Moreover, it boasts low production costs, high efficiency, and the ability to be mass-produced, making it a practically applicable power divider.

Provided is a compact optical amplifier in which the polarization dependent gain of an SOA can be eliminated and the number of optical components is small. Specifically, provided is an SOA-integrated optical amplifier circuit (200) comprising a planar lightwave circuit (201) and a plurality of semiconductor amplifiers (SOAs) (203, 205) integrated on the same substrate, the SOA-integrated optical amplification circuit (200) characterized by comprising a plurality of SOAs (203, 205) that amplify light, a polarization separation unit (207) that separates incident light into independent first light in a first mode and second light in a second mode, a first polarization rotation unit (203a) that converts the first mode of first light separated by the polarization separation unit (207) to the second mode, a second polarization rotation unit (203b) that converts the second mode of the first light amplified by the first SOA (203) to the first mode, and a polarization multiplexing unit (209) that multiplexes the amplified light.

An equivalent negative refractive index flat lens and a manufacturing method thereof, the method comprising the steps of: (1) forming reflective layers (20) on both opposing sides of a transparent substrate layer (10); (2) forming a protective layer (30) on each reflective layer (20); (3) forming a first bonding metal layer (40) on one of the protective layers (30) and a second bonding metal layer (50) on the other; and (4) stacking at least two flat optical waveguides along a first direction, and the first bonding metal layer (40) of each flat optical waveguide being bonded to an adjacent flat optical waveguide. The method includes a step (4) of contacting the second bonding metal layer (50) of the plate optical waveguide with heat and energization; a step (5) of taking two sets of multilayer planar optical waveguides, cutting one of the multilayer planar optical waveguides into a plurality of first striped planar optical waveguides and cutting the other into a plurality of second striped planar optical waveguides; and a step (6) of overlapping the first optical waveguide array (102) and the second optical waveguide array (103) along a first direction, and then adding protective window sheets (101, 104) on both sides.

The embodiment of the application discloses a kind of plane optical waveguide circuit chip and optical receiving assembly test system, chip includes first beam splitter, modulation unit, second beam splitter and beam combination unit, wherein the first beam splitter is respectively connected with the input end of modulation unit and the input end of second beam splitter, the input end of first beam splitter is as the input end of the plane optical waveguide circuit chip;The output end of modulation unit and the output end of second beam splitter are respectively connected with the input end of beam combination unit, and the output end of beam combination unit is as the output end of the plane optical waveguide circuit chip.The embodiment of the application is integrated in the same plane optical waveguide circuit chip by first beam splitter, modulation unit, second beam splitter and beam combination unit, substantially simplify system structure, reduce equipment floor area, and then significantly test the stability and the comparability between channel, finally can effectively improve test efficiency and the accuracy of test result.

The present application belongs to the technical field of guided-wave optics, and specifically relates to an angle-tunable non-polarized narrow-band optical band-pass filter. The optical filter can pass transverse electric waves and transverse magnetic waves at the same time, the passband center wavelengths of the transverse electric waves and the transverse magnetic waves monotonously and continuously change with the incident angle, and the two center wavelengths remain coincident during the tuning process; the passband full width at half maximum of the two kinds of waves has a polarization-independent narrow-band optical band-pass filtering effect; and the specific implementation comprises the following steps: a composite transparent body of a column and a planar optical waveguide; the column is cut along the longitudinal axis at a certain angle, and the planar optical waveguide is prepared on a cutting surface according to the transmission waveband; the planar optical waveguide is composed of thin films with different refractive indexes and thicknesses, and the two cutting bodies are pasted and sealed along the cutting surface to form a composite body; and wide-band antireflection films are coated on the two end surfaces of the composite body. The transmittance of the band-pass filter exceeds 99% in the tuning range, and the band-pass filter has important application value in optical communication, laser technology, precise spectroscopy and the like.

The utility model relates to the technical field of optical communication, in particular to a dense wavelength division device for improving planar optical waveguide edge channel isolation, which comprises an AWG device and a band-pass filtering film plated at the output end of the AWG device. The band-pass filtering film is made of a high-refractive-index material and a low-refractive-index material; the band-pass filtering film is used for reducing the transmittance of an optical signal of an edge channel at the output end of the AWG device and improving the isolation degree of the edge channel. The surface of the output end of the AWG device is plated with the band-pass filtering film, and a specific filtering spectrum is designed for the band-pass filtering film, so that signal light of a middle channel of the AWG device is not affected, signal light and light isolation of edge channels are enhanced, signal crosstalk of the edge channels is reduced, and the performance of a communication system is improved.

The application discloses a kind of full-automatic planar waveguide coupling equipment based on nanoscale sensing contact, including chip placement assembly, input component, output component;Input component and output component are respectively transmission connection with stepper motor;Stepper motor is electrically connected with driver;Coupling software controls driver to control stepper motor to drive input component and output component to carry out displacement in different directions respectively, realize that FA fiber core and chip waveguide carry out mode field matching, so as to realize optical waveguide preliminary alignment, coupling software automatically switches displacement step, again through input component, output component realizes accurate alignment;Coupling software controls driver to realize multi-channel equalization by controlling angle stepper motor step and movement;The application adopts high-precision stepper motor with high-precision sensing contact sensor, completely realizes that planar optical waveguide is fully automatic high progress coupling to light, improves the precision of planar waveguide coupling to light, and completely realizes high-precision automatic angle adjustment function.

The utility model relates to the technical field of photoelectronics, in particular to a planar optical waveguide chip suitable for high-power coupling, which solves the problems of low heat dissipation efficiency and low chip integration level in the prior art, and comprises a substrate and an upper cladding, a core layer is arranged between the substrate and the upper cladding, an optical waveguide is arranged on the core layer, and a deep groove structure is arranged on the upper cladding. The side wall, close to one side of the optical waveguide, of the deep groove structure is provided with heat dissipation protrusions. The beneficial effects of the utility model are that the deep groove structure is integrated on the optical waveguide chip, and the deep groove structure is used as a heat dissipation channel, thereby improving the integration level of the whole system; the deep groove structure and the heat dissipation protrusions in the deep groove structure can increase the surface area of the optical waveguide chip, the heat dissipation efficiency is effectively improved, accumulation of heat generated by high power is reduced, and the situation that the optical waveguide chip is locally overheated is avoided.

The high-sensitivity polymer micro-ring temperature and humidity optical waveguide sensor based on the vernier effect belongs to the technical field of planar optical waveguide integrated devices. The high-sensitivity polymer micro-ring temperature and humidity optical waveguide sensor is composed of a substrate layer, a polymer lower cladding layer, a polymer groove layer, a polymer electrolyte core layer and a polymer upper cladding layer. The polymer electrolyte core layer is a light waveguide structure of a runway type MRR cascade, which is composed of a reference ring, a temperature sensing ring and a humidity sensing ring. The polymer electrolyte core layer material can absorb water molecules in the air, the free ion concentration in the material can change with the change of humidity and temperature, and then the refractive index of the material changes. The high-sensitivity polymer micro-ring temperature and humidity optical waveguide sensor solves the problems of the existing temperature and humidity sensor devices, such as the insufficient integration, sensitivity and anti-interference, realizes the ultra-compact and ultra-high sensitivity temperature and humidity dual-mode sensing, and has the advantages of good flexibility, simple process, low cost, high efficiency and the like. The high-sensitivity polymer micro-ring temperature and humidity optical waveguide sensor is suitable for various scenes which need to precisely control the environment or monitor the real-time change.

The application discloses a polymer cholesteric liquid crystal laser and a preparation method and optical equipment thereof. The polymer cholesteric liquid crystal laser comprises a laser main body, the laser main body comprises a light-transmitting conductive substrate, a polymer cholesteric liquid crystal layer, a noble metal reflection layer and a resonant cavity unit; the light-transmitting conductive substrate is provided with a parallel orientation layer; the polymer cholesteric liquid crystal layer is arranged on the surface of the parallel orientation layer; the noble metal reflection layer is arranged opposite to the polymer cholesteric liquid crystal layer; the resonant cavity unit is arranged between the noble metal reflection layer and the polymer cholesteric liquid crystal layer; the resonant cavity unit is filled with a planar light waveguide; the planar light waveguide comprises a perovskite quantum dot layer and a transparent separation layer; the transparent separation layer is arranged on the perovskite quantum dot layer and faces two surfaces of the polymer cholesteric liquid crystal layer and the noble metal reflection layer. Through the above structural design, the polymer cholesteric liquid crystal laser has low laser threshold, high radiation intensity and good repeatability.

Disclosed are a device and a method for transmitting a polarized signal for a quantum key distribution (QKD) system. A transmission device according to embodiments of the present disclosure can stably generate and transmit a plurality of polarization states only by controlling the operation of a laser light source by using an optical integrated structure composed of a planar lightwave circuit and a passive element. In particular, a transmission device according to another embodiment of the present disclosure is designed to be suitable for reference frame independent quantum key distribution (RFI-QKD), and thus generates light of different polarization states (vertical, horizontal, diagonal, anti-diagonal, right circular, left circular) through a transmission unit optical integrated module including a plurality of polarization-maintaining optical fibers, a junction unit, and an optical coupler, combines the light into a single output, and transmits the single output at a single photon level. According to the present disclosure, a transmission unit for QKD can be miniaturized and integrated without active element control, and stable polarization signal generation and highly reliable quantum key distribution can be simultaneously implemented.

The invention discloses a hybrid plasma electro-optical modulator based on a lead zirconate titanate film and a preparation method thereof, and belongs to the technical field of planar optical waveguide devices. The modulator consists of a Si substrate, a SiO2 oxide layer, a lead zirconate titanate thin film layer, a polymer optical waveguide layer, a first grounding electrode, a signal electrode and a second grounding electrode in sequence from bottom to top, wherein the polymer optical waveguide layer is prepared on the lead zirconate titanate thin film layer through spin coating, photoetching and wet etching. Silicon attached with a silicon dioxide buffer layer serves as a waveguide substrate, a lead zirconate titanate thin film layer serves as a waveguide core layer, and a polymer with the refractive index smaller than that of lead zirconate titanate serves as an optical waveguide layer. The selected polymers are various, the refractive index is small, and the refractive index difference between the selected polymers and a lead zirconate titanate film is large. The manufacturing technology is simple and compatible with the semiconductor technology, large-scale integration and production can be achieved, the mode optical switch can be applied to practice, and therefore the mode optical switch has important practical application value.

The application discloses an MZI type electro-optic modulator based on an electro-optic polymer / lithium niobate thin film hetero-integrated waveguide and a preparation method thereof, and belongs to the technical field of planar optical waveguide light modulators and preparation thereof.The MZI type electro-optic modulator comprises, from bottom to top, a silicon substrate, a silicon dioxide oxide layer, a lithium niobate flat plate layer, a ridge structure lithium niobate core layer and an electro-optic polymer upper cladding layer; the ridge structure lithium niobate core layer is composed of an input straight waveguide, an input tapered waveguide, a first curved waveguide and a second curved waveguide, a first modulation arm straight waveguide and a second modulation arm straight waveguide, a third curved waveguide and a fourth curved waveguide, an output tapered waveguide and an output straight waveguide; and a ground electrode and a signal electrode are respectively prepared on the lithium niobate flat plate layer outside and inside the first modulation arm straight waveguide and the second modulation arm straight waveguide.The application effectively reduces the modulation efficiency of the modulator, reduces the size of the device, is compatible with a semiconductor process, can realize large-scale integration and production, and has important practical application value.