109results about How to "Short processing time" patented technology

The utility model discloses an MVR (mechanical vapor recompression) concentrated solution treatment device, which belongs to the field of wastewater treatment and comprises a first coagulating sedimentation device, a second persulfate advanced oxidation device, a second persulfate adding device for adding persulfate into the second persulfate adding device, a third biochemical treatment device, a fourth membrane treatment component and a fifth clear water tank. Wherein the MVR concentrated solution to be treated can be fed into the first coagulating sedimentation device. The first coagulating agent adding device is connected with the first coagulating sedimentation device, and the first coagulating agent adding device is used for adding a coagulating agent into the first coagulating sedimentation device, so that the MVR concentrated solution is flocculated and settled, and first coagulated sludge and first coagulated supernate are respectively obtained. The method can be suitable for MVR concentrated solution treatment scenes with different scales and treatment requirements, the wastewater treatment efficiency is improved, the treatment cost is reduced, efficient and stable treatment of wastewater can be achieved, and the method has high application value and wide popularization and application value.

The invention discloses data line welding injection molding processing equipment which comprises a first machine body, a second machine body, a first feeding mechanism, a conveying mechanism, a peeling mechanism, a second feeding mechanism, a welding mechanism, an injection molding mechanism and a rotating disc mechanism. The second machine body is arranged on the right side of the first machine body, the rotating disc mechanism comprises a rotating disc and a rotating device, the second jig is detachably arranged on the rotating disc, the injection molding mechanism comprises a first seat body, an injection molding machine and a first grabbing and transferring module, and the first grabbing and transferring module transfers the second jig to the first seat body and the rotating disc in a reciprocating mode; the first machine body is provided with a second grabbing and transferring module; thus, through the design of all the mechanisms, the wires are fed, peeled and welded on the first machine body and are matched with the second grabbing and transferring mechanism and the rotating disc to be transferred to the injection molding mechanism to be subjected to injection molding operation, automatic machining of the wires, connectors and shells is achieved, the production efficiency of data lines is improved, the machining time is short, and the production efficiency is improved. The use requirements of users are met, and the application range is wide.

The invention relates to a compound microorganism deodorization fungicide as well as a preparation method and application thereof, and belongs to the technical field of microorganism application. The invention provides a compound microorganism deodorization bacterium agent. The compound microorganism deodorization bacterium agent is prepared from bacillus cereus GXMU-Q5.3, streptomyces beihaiensis GXMU-J15 and lactobacillus paracasei GXMU-G1, the viable count ratio of the bacillus cereus GXMU-Q5.3 to the streptomyces beihaiensis GXMU-J15 to the lactobacillus paracasei GXMU-G1 is (1 to 2): (1 to 2): (1 to 2). The strain of the composite microbial deodorant agent is screened from soil and water at the stacking place of the marine product processing waste, the decomposition and deodorization effects on the marine product processing waste are obvious, the bacteria have a synergistic effect, and the deodorization effect of the composite microbial agent is improved by 40% or above compared with that of a single strain; the cost is low, the efficiency is high, the application range is wide, the deodorization period is short, and the safety is high.

The invention relates to a method for eliminating residual stress in additive manufacturing of nickel-based superalloy, and relates to the technical field of additive manufacturing materials. According to the main technical scheme, stress relief treatment is carried out in the mode that continuous pulse current treatment is applied to the additive manufacturing nickel-based superalloy, so that at least part of residual stress in the additive manufacturing nickel-based superalloy is eliminated, and the additive manufacturing nickel-based superalloy subjected to stress relief treatment is obtained. According to the method, the residual stress in the additive manufacturing nickel-based superalloy can be effectively reduced. According to the method, the internal structure state of the original alloy is not changed, meanwhile, the method is low in treatment temperature, short in treatment time, more efficient and more energy-saving, and the requirement for green and sustainable development of the current industry is met.

The invention belongs to the technical field of silicon nitride tape-casting blank waste recycling, and particularly relates to a silicon nitride tape-casting blank waste recycling method, a tape-casting blank and application, the silicon nitride tape-casting blank waste and a liquid medium are mixed according to the mass ratio of 10: (3-4), wet ball milling is conducted for 5-36 h, and slurry is obtained; wherein the particle size of a ball milling medium for wet ball milling is 8-12mm; the slurry is filtered and then subjected to tape casting, and a tape casting blank is obtained; according to the method, recycling of the waste materials can be achieved only by adopting a wet ball milling method, the cost is effectively reduced, the waste material recovery rate can reach 90% or above, the silicon nitride ceramic substrate prepared from the casting blank can meet the use requirement, the utilization efficiency of the silicon nitride casting blank waste materials is effectively improved, and the silicon nitride ceramic substrate has the advantages of being environmentally friendly and free of pollution. And the production cost is reduced.

The invention relates to a high-entropy alloy with excellent creep property and a preparation method thereof. The alloy is expressed as FeaCobCrcNidTapAlqMn by atomic mole percentage, and 10 < = a < = 20, 20 < = b < = 25, 10 < = c < = 20, 25 < = d < = 35, 5 < = p < = 10, 0 < = q < = 8, and 0 < = n < = 5. The preparation method comprises the steps that all the raw materials are taken according to the designed components, then smelting is conducted under the protective atmosphere, and after solid solution water quenching treatment, hot rolling treatment and secondary solid solution treatment are conducted, heat preservation is conducted at the temperature of 750-950 DEG C, and then quenching is conducted. The product is obtained by reasonably regulating and controlling components and performing thermal deformation and thermal treatment processes. Under the high-temperature creep condition of 750 DEG C / 350 MPa, the service life of the obtained product reaches up to 1245 h and is far longer than that of similar products, the room-temperature tensile strength is larger than 1.5 GPa, the bottleneck that a Laves type eutectic high-entropy alloy does not have room-temperature tensile plasticity is broken through, and wide engineering application prospects are achieved.

The invention provides a method for comprehensively recovering lithium and cobalt from a waste lithium cobalt oxide battery positive electrode material, which comprises the following steps: (1) pretreating the waste lithium cobalt oxide battery positive electrode material to obtain a lithium cobalt oxide positive electrode active material; uniformly mixing the lithium cobalt oxide positive active material with a sulfenyl compound and a carbon source to obtain a mixture; the mixture is subjected to inert atmosphere roasting, grinding, leaching and filtering in sequence, and a lithium-containing solution and sulfur-containing filter residues are obtained; (2) carrying out acid leaching impurity removal on the sulfur-containing filter residues, and filtering to obtain cobalt sulfide residues; (3) roasting the cobalt sulfide slag in an oxygen atmosphere to obtain a roasted product; and (4) the roasted product is leached and filtered, and a cobalt sulfate solution and cobaltosic oxide are obtained. According to the method, soluble sulfate and high-purity cobalt oxide can be obtained, and the method is short in process, low in cost and high in lithium selectivity.

The invention relates to the technical field of ferrous metallurgy casting, in particular to a drainage sand removing and recycling method and device. Comprising a mechanical arm, a lifting rotation controller, a controller arm, a sand suction cylinder, a sand conveying pipeline, a sand collecting tank and an injection pump. The lifting and rotating controller is fixedly mounted on the mechanical arm; the controller arm is connected with the lifting and rotating controller, and the lifting and rotating of the controller arm are controlled by the lifting and rotating controller; the sand suction cylinder is connected with the controller arm, the sand suction cylinder is of a U-shaped structure, and one end of the sand suction cylinder is a horn mouth used for sucking drainage sand; one end of the sand conveying pipeline is positioned above the tundish cover sprue gate, and the end part of the sand conveying pipeline is bent downwards to be connected with the other end of the sand suction cylinder; the other end of the sand conveying pipeline is connected with the sand collecting tank; the sand collecting tank is connected with an injection pump pipeline, and the injection pump provides suction power. The ladle filler sand, harmful gas in gaps of the ladle filler sand and a long nozzle and a small part of molten steel in contact with the ladle filler sand in a steel ladle can be discharged out of tundish molten steel and recycled.

The invention discloses a preparation method and application of a red fluorescent copper nano-cluster. According to the preparation method, a red fluorescent copper nano-cluster aqueous solution is prepared at room temperature by using polyvinylpyrrolidone as a protective agent, 3-mercaptophenylboronic acid as a stabilizer and a reducing agent and water-soluble copper salt as a copper source. The preparation method has the advantages of being simple in preparation process, low in instrument requirement, short in treatment time, low in cost and the like, the fluorescence quantum yield of the prepared red fluorescent copper nano-cluster is 4.9%, and the prepared red fluorescent copper nano-cluster has the advantages of being good in water solubility, good in stability, high in photobleaching resistance, high in salt resistance, long in fluorescence service life and the like, has high sensitivity and selectivity to Congo red, and is suitable for industrial production. The method can be applied to detection of fluorescence quenching type Congo red.

This invention provides a plasma-modified glass fiber reinforced polyetheretherketone (PEEK) composite material and its preparation method, belonging to the field of glass fiber reinforced materials. The composite material is prepared by treating a PEEK film and glass fiber cloth with glow discharge plasma, followed by hot pressing, resulting in a composite material with good compatibility between PEEK and glass fiber. This method can significantly improve the interfacial bonding strength between glass fiber and PEEK resin, thereby improving the mechanical properties of the composite laminate. The interlaminar shear strength of the composite material is increased by 43% compared to the untreated composite material. Furthermore, this method also has the advantages of energy saving, environmental protection, short processing time, and high efficiency.

The present application provides a machining tool path control method, including: obtaining a 3D model; extracting a curve of the final profile in the 3D model as a driving curve; obtaining the feed direction of the tool as a guide curve; determining the initial path curve of the tool according to the driving curve, the guide curve, and the initial profile; generating a universal direction with the driving curve as a generatrix point; obtaining a unique direction set and a feed amount selected in the universal direction; determining the machining end curve of the tool; using the machining end curve as a new initial path curve, repeating the steps of determining the machining end curve of the tool according to the initial path curve, the unique direction set, and the feed amount until the driving curve coincides with the machining end curve; combining all initial path curves into a continuous tool path curve, and controlling the tool to move according to the tool path curve. The present application can improve the surface finish of the special-shaped surface after machining.

The present invention relates to the field of food processing technology, specifically to a high-concentration CO2 cyclic processing device, comprising a CO2 storage tank, a first processing system, a second processing system and a recovery system; the CO2 storage tank is connected to the first processing system and the second processing system respectively, and the first processing system and the second processing system both include a processing kettle, a heating device and a cooling device; the recovery system includes a plurality of delivery pipes arranged in parallel, and the two ends of each delivery pipe are respectively connected to the processing kettles in the first processing system and the second processing system, and the delivery pipes include a normal pressure delivery pipe, a boosted delivery pipe and a delivery pipe provided with a vacuum generating device. The present invention can recycle more than 99% of CO2, save energy and reduce emissions, and has a short processing time, so as to realize fast and efficient processing of food materials. The present invention also relates to the application of the device in food processing, and also relates to a processing method of parboiled rice, which can significantly improve the processing efficiency and processing quality of parboiled rice.

The invention belongs to the technical field of photoresist, and particularly relates to photoresist stripping liquid as well as a preparation method and application thereof. The photoresist stripping liquid contains a first amine compound, a second amine compound and an organic solvent I, wherein the first amine compound has a structure as shown in a formula (1) or a formula (2); the second amine compound has a structure as shown in a formula (3). The key point of the invention lies in that the specific first amine compound and second amine compound are adopted as key components of the photoresist stripping liquid, and the obtained photoresist stripping liquid has strong photoresist removal capability and effect, can achieve basically no residue on a base material, and has the advantages of short treatment time, high efficiency, small corrosion to the base material, and low cost. And the substrate at the lower layer is hardly damaged. # imgabs0 #

The invention discloses a wafer IPA drying method for improving wafer edge particle aggregation, and belongs to the technical field of semiconductor manufacturing. The method comprises the following steps: after a wafer is cleaned, lifting the wafer from pure water to the 4 / 5 position of the wafer to be separated from the water surface by using a bottom supporting table, and then clamping the 2 / 3 edge position of the wafer by using a top clamp to continuously lift until the wafer is completely separated from the water surface; in the lifting process, the surface of the wafer is purged through mixed gas of N2 and IPA, and the completely-dried wafer is obtained. According to the invention, the wafer is dried by replacing a wafer lifting mode and cooperating with an IPA drying mode, so that the wafer can be completely dried, and the watermark problem caused by local dryness due to contact between the wafer and the supporting table in the medium replacement process can be avoided. The method is wide in practicability, simple in technological process, short in treatment time, low in cost and good in application prospect.

The invention discloses an application of ultrasound and teuvincenone H diterpenoid treatment in reduction of tenebrio molitor protein allergy, the tenebrio molitor protein is treated by ultrasound and teuvincenone H diterpenoid, so that the binding capacity of the tenebrio molitor protein and immunoglobulin E (IgE) can be reduced, and the allergy of the tenebrio molitor protein is further reduced. The invention discloses other effects of teuvincenone H diterpene except for anti-tumor and anti-inflammatory effects for the first time, and the method has the advantages of simple process steps, short treatment time, low temperature, high efficiency, rapidness and environmental friendliness, is beneficial to wide application of related technologies in the field of food industry, and provides a brand new scheme for developing safe and high-quality insect protein food.

Provided is an information processing method, the method comprising: a first access point acquiring channel state information of a plurality of user equipments, the plurality of user equipments comprising reflective user equipments and transmissive user equipments, the reflective user equipments being devices that communicate by using reflective functions of a plurality of omnidirectional metasurfaces, and the transmissive user equipments being devices that communicate by using reflective functions of a plurality of omnidirectional metasurfaces; the transmission user equipment is equipment for performing communication by utilizing the transmission functions of the plurality of omnidirectional metasurfaces; optimizing the first precoding vectors of the plurality of pieces of user equipment to obtain second precoding vectors; and sending the channel state information and the second precoding vector to the network equipment. The invention further provides communication equipment and a computer readable storage medium. The technical problem of how to design the precoding vector, the transflective phase and the transflective amplitude in the scene of omnidirectional metasurface-assisted non-cell network communication is at least solved.

The invention discloses a method for improving the leaching rate of uranium ore, which can perform controllable shock wave operation in a well or a small number of wells to unblock and increase gaps in a mining area, and shock waves impact off fine particulate matters such as sand, rock powder and the like and precipitated blockages such as chemical precipitates such as calcium, magnesium, aluminum and the like attached in rock stratum gaps of the uranium ore, so that the leaching rate of the uranium ore is improved. Fine particles attached to the filter screen are vibrated off and peeled off; the in-situ leaching liquid is injected after being heated to a certain temperature, and the heated in-situ leaching liquid flows into the uranium mine rock stratum gap. The method improves the leaching rate of uranium ore, can operate at any time for a long time, achieves a continuous effect, improves the uranium well oil extraction efficiency by 10% or above, has a wide application prospect, and has great significance for improving uranium ore strategic material storage in the nuclear industry in China.

The invention relates to a controllable low-oxygen silicon preparation method capable of reducing oxidation of silicon wafer cutting waste, and belongs to the technical field of silicon wafer cutting waste recovery and utilization. The method comprises the following steps: crushing and shaping silicon wafer cutting waste blocks to obtain silicon wafer cutting waste particles; then the silicon wafer cutting waste particles are evenly laid in a microwave heating furnace in a layered mode, the silicon wafer cutting waste particles on the adjacent horizontal layers are isolated through cloth in the vertical direction, and gaps are reserved between the adjacent silicon wafer cutting waste particles on the same horizontal layer; according to the initial water content, the initial oxygen content, the expected oxygen content, the device vacuum degree, the set temperature and the particle size, the preset time of microwave heating controllable dewatering and drying of the silicon wafer cutting waste particles is determined; under the vacuum condition, microwave heating can controllably dehydrate and dry to reduce the actual moisture content of the silicon wafer cutting waste and the actual oxygen content of the product, so that the controllable preparation of the low-oxygen silicon product is realized by reducing the oxidation of the silicon wafer cutting waste.

The invention discloses a Cu-Fe alloy material with high strength, high conductivity and high heat resistance and a preparation method thereof.The Cu-Fe alloy material is prepared from, by mass, 0.8-3% of Fe, 0.05-0.2% of Mg, 0-0.1% of Si, 0-0.2% of Nb, 0-0.1% of V, 0-0.1% of P and the balance Cu, and meanwhile the total mass percentage of Si, V, P and Nb is smaller than 0.2%. According to the preparation method of the Cu-Fe alloy material, the rapid treatment effect of electric pulses is utilized, a water quenching process is combined, and the high-strength, high-conductivity and high-heat-resistance Cu-Fe alloy material is obtained. And the work-hardened structure state is rapidly fixed, so that the dislocation density and the structure distortion state are reserved, and the Cu-Fe alloy material with high strength, high conductivity and high heat resistance is obtained.

The present invention discloses an application of a human CYP2C9 recombinase in the denitration of nitrocellulose. The present invention applies the human CYP2C9 recombinase to the denitration of nitrocellulose, which can convert the nitrate ester group into nitrate and nitrite. After reacting with nitrocellulose for 7 days, the nitrogen content of the nitrocellulose with an original nitrogen content of 12.7% is reduced to 11.585%, and the denitration treatment time is significantly shortened compared with the traditional biological method. The present invention has low production cost, simple process, mild reaction conditions, and is environmentally friendly, and can achieve efficient denitration of nitrocellulose.

The invention relates to a service protocol data calibration method and device. The method comprises the following steps: acquiring protocol data of a service protocol, and displaying current-party actual to-be-received resource data in the protocol data under the condition that the service protocol is of a first protocol type; receiving an adjustment operation on the actual to-be-received resource data of the current party to obtain the adjusted actual to-be-received resource data of the current party; and under the condition that the adjusted current-party actual to-be-received resource data meets the first adjustment interval, displaying protocol data, confirming the protocol data, and uploading the protocol data to an auditing terminal. By adopting the method, the tail difference problem can be efficiently and accurately solved, the business protocol calibration process is simplified, and the foreground operation risk is avoided.

This invention relates to a fat mimic based on micro / nano-sized starch, its preparation method, and its application. The preparation method of the fat mimic includes: S1: providing a potato starch solution with a concentration of 15-20%; S2: adding 35-50 u / g of α-amylase (with an enzyme activity of 10000 u / g) based on the mass of potato starch, and enzymatically hydrolyzing at 85-90℃ for 5-15 min to obtain a potato starch enzymatically hydrolyzed fat mimic with a DE value of 2-3; S3: adjusting the potato starch enzymatically hydrolyzed fat mimic to a concentration of 1-5%, and using dynamic ultra-high pressure microfluidic technology at a pressure of 180-200 MPa for 6-12 cycles of micro-nano-sized potato starch fat mimic to obtain a particle size between 500-700 nm. Compared with enzymatically hydrolyzed fat mimics, the micro-nano-scale potato starch fat mimics prepared in this invention have significantly improved oil retention, emulsification, emulsification stability, sedimentation, and apparent viscosity. This is beneficial for increasing their fat substitution rate in food and developing low-fat or fat-free foods with a more delicate texture and better sensory experience and textural expectations for consumers.

The present invention discloses a valve self-centering fixture and operation method. The valve has a through hole. The fixture includes a mounting seat, at least one self-centering mechanism, a first driving mechanism and a second driving mechanism. The mounting seat includes a main body and a driving mechanism with a transmission shaft. The self-centering mechanism is connected to the transmission shaft. The self-centering mechanism includes two torque limiters, two end face threaded disks and multiple tightening mechanisms. Under the drive of the first driving mechanism, the mounting seat enters the through hole of the valve to be processed and moves linearly until it reaches a preset position. Under the drive of the second driving mechanism, the transmission shaft rotates to drive the torque limiter to rotate. The rotation of the torque limiter drives the two end face threaded disks to rotate in the same direction, thereby driving the multiple tightening mechanisms to move toward the inner wall of the valve through hole until they touch the inner wall, and the axis of the transmission shaft coincides with the valve through hole datum. The valve self-centering fixture provided by the present invention realizes a large clamping stroke, reliable clamping torque and self-locking ability.

The invention provides a regenerated alkali metal poisoning NH3-SCR (selective catalytic reduction) catalyst as well as a preparation method and application thereof. The preparation method comprises the following steps: mixing an alkali metal poisoned NH3-SCR catalyst with an ammonium salt solution, and carrying out post-treatment to obtain the regenerated NH3-SCR catalyst. The invention provides a preparation method of a regenerated alkali metal poisoning NH3-SCR catalyst, so that the NH3-SCR catalytic activity and hydrothermal stability of the regenerated alkali metal poisoning NH3-SCR catalyst at high temperature and low temperature are improved.

The invention discloses a copper-silicon catalyst for plasma treatment as well as a preparation method and application of the copper-silicon catalyst. According to the method, a copper-silicon catalyst precursor prepared by a traditional ammonia distillation method is subjected to dielectric barrier discharge plasma treatment in the atmosphere of H2 / Ar and the like, and traditional high-temperature roasting and reduction processes are replaced. According to the method, efficient reduction and high dispersion of copper can be achieved at the room temperature, the Cu < + > / Cu0 proportion is regulated and controlled, and the strong interaction between metal and a carrier is enhanced. The catalyst is used in a reaction for preparing ethylene glycol through hydrogenation of dimethyl oxalate, the activity, selectivity and stability of the catalyst are higher than those of a traditional heat treatment catalyst, the dimethyl oxalate conversion rate reaches up to 100%, the ethylene glycol selectivity is larger than 97%, and the stability reaches 1000 h or above. The method is simple in process, low in energy consumption and environment-friendly, and has a wide industrial application prospect.

The invention relates to a method for filtering tannery wastewater, said method comprising the steps of: microfiltering a wastewater input of said wastewater in at least one microfilter (MF), thereby separating said wastewater input into a first trapped stream (FRS) comprising organic compounds and a first permeate stream (FPS); establishing a reverse osmosis input stream (ROIS) based on the first permeate stream (FPS) or a derivative thereof; reverse osmosis filtration is performed through a reverse osmosis filter (ROF) based on the reverse osmosis input stream (ROIS) to establish a reverse osmosis trapped stream (RORS) and a reverse osmosis permeate stream (ROPS) wherein the wastewater comprises one or more side streams of the tanning process.

Provided is a connected body of a metal material in which a cross-section (A) of a flat metal material (A) and a cross-section (B) of a flat metal material (B) are brought into contact with each other, and at least a portion of the opposing portion is covered with a film containing a layer mainly composed of a thermoplastic resin. The metal material A and the metal material B are connected to form a metal material connecting body, the facing portion is a region spanning both an end edge portion A of the metal material A and an end edge portion B of the metal material B, and the film is a film melted and solidified at the facing portion.

The invention relates to a green and efficient production method of nodular cast iron or spheroidal graphite cast steel profiles, which adopts a process route of a hydrogen-rich blast furnace, an electric arc furnace, a converter, a vacuum refining furnace, a ladle refining furnace and a continuous casting machine to produce nodular cast iron / spheroidal graphite cast steel new steel material profiles. In the production process, a large amount of clean low-carbon hydrogen energy is used for replacing an original carbonaceous material to serve as a reducing agent, on one hand, the ton iron carbon emission of the product is reduced, on the other hand, oxygen, sulfur, phosphorus and other impurity elements in the material are deeply removed, and meanwhile liquid solidification of the nodular cast iron / spheroidal graphite cast steel material is achieved in a continuous casting mode; the production efficiency is improved; and the energy consumption and carbon emission of the product are further reduced.

The invention relates to a method for regulating and controlling segregation of interdendritic elements in a high-temperature alloy and a product. The method comprises the following steps: heating a nickel-based high-temperature alloy raw material to a molten state and keeping the temperature for a period of time; inserting an electrode into the alloy melt, and keeping for a period of time; according to the initial melting state of the nickel-based superalloy raw materials with different weights, the temperature interval of first pulse current treatment and initial pulse parameters are set; setting a temperature interval of second pulse current treatment and corresponding pulse parameters according to the change of a current value along with the temperature interval during pulse current treatment in the nickel-based superalloy solidification process; and the obtained alloy melt is cooled and solidified, pulse current treatment continues to be applied, and element segregation in the treated nickel-based superalloy is inhibited. The pulse current is applied to the nickel-based superalloy in the molten state, uniform distribution of solute elements in the nickel-based superalloy is efficiently promoted, and therefore the service performance of the material is improved.

The invention discloses a preparation method of a halftone photomask, which comprises the following steps: S1, a binary mask substrate is subjected to laser photoetching, and a pattern opening on the substrate comprises a binary mask area and a halftone mask area; s2, developing and etching the substrate, removing the photoresist, and cleaning the substrate; s3, coating an ultraviolet light curing adhesive; s4, carrying out ultraviolet laser photoetching on a binary mask region; s5, developing and removing the uncured protection area; and S6, depositing a halftone layer. According to the preparation method disclosed by the invention, the damage to the binary mask chromium layer in the halftone film layer deposition process is reduced, the process yield is improved, the halftone mask region is photoetched, and the binary mask region and the mask region are photoetched at the same time, so that the process flow is simplified, and the process does not need to be returned to a factory for secondary photolithography after being sent out for coating, thereby shortening the process and improving the production efficiency. The nesting precision and the line precision of the halftone mask plate product are improved, the product quality is improved, and the production efficiency is improved.